CN2411464Y - Micro-displacement measuring device - Google Patents

Micro-displacement measuring device Download PDF

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Publication number
CN2411464Y
CN2411464Y CN 00231407 CN00231407U CN2411464Y CN 2411464 Y CN2411464 Y CN 2411464Y CN 00231407 CN00231407 CN 00231407 CN 00231407 U CN00231407 U CN 00231407U CN 2411464 Y CN2411464 Y CN 2411464Y
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China
Prior art keywords
grid
detecting head
measurement mechanism
fixed
mechanism according
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Expired - Lifetime
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CN 00231407
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Chinese (zh)
Inventor
高青
陈德铭
郝建国
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TIME GROUP Inc
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TIME GROUP Inc
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Abstract

The utility model relates to a micro-displacement measuring device, which comprises at least one sensor that is composed of a fixed grid and a movable grid. The fixed grid is fixed on a main body, and the movable grid which corresponds to the fixex grid is fixed on a movable slide block in the main body. One end of the movable grid is connected with a detecting head that is supported by a jacket tube in movable fit, and the inner part of the jacket tube is provided with an elastic force-measuring element. The utility model is characterized in that the detecting head and the movable grid are in flexible adhesive-contact type connection, and the elastic force-measuring element comprises at least two elastic elements. The utility model has the advantages of high precision of measuring displacement, and high autokinesis of the detecting head.

Description

The microdisplacement measurement mechanism
The utility model relates to a kind of length-measuring appliance, is a kind of microdisplacement measurement mechanism specifically.
In production practices, length be crucial a kind of measurement index, and the measurement of some physical quantity also is that conversion by length obtains.At present, a kind of linear measure longimetry commonly used utilizes displacement to realize, its principle of work is, utilizes two sensors that can produce relative displacement, converts the length physical quantity of this displacement to electric signal.This electric signal can obtain required measured value through after the different computings.For example, the Shao Er sclerometer that is used to measure material hardness such as rubber, plastics is exactly a kind of comparatively typical application of the sensor.
Shao Er hardness is to detect the outbalance index of rubber-based products performance.Its principle of work of measuring hardness is, the pressing that is connected in the sensor moving grid is pushed down into the surface of sample in the effect of test power, when the pressure foot surface that is connected in the sensor fixed grid and sample table when fitting tightly, pressing is relatively to pressing certain extension elongation on sufficient plane, the big more expression of length Shao Er hardness is low more, otherwise high more, this displacement draws Shao Er hardness after by computing.
In the existing displacement measuring device, include a moving grid and the sensor that fixed grid is formed.One movably is shaft-like detecting head and is fixedly connected on moving grid, constitutes an exploring block, does moving with respect to fixed grid by the mobile drive moving grid of detecting head.More accurate for what measure, the motion of moving grid should be parallel to fixed grid as much as possible, so require between shaft-like detecting head and the moving grid slide block be connected also should be coaxial as much as possible, because between detecting head and moving grid is a kind of syndeton of rigidity, so processing and installation accuracy to parts are all had relatively high expectations, processing and mounting hardness have therefore been increased widely.
In exploring block, shaft-like detecting head is to be supported by a sleeve-shaped body, is provided with the dynamometry flexible member in this sleeve, and this dynamometry flexible member is generally realized by a compression spring.Under the effect of test power, detecting head compression spring and produce displacement produces certain relative shift and promote moving grid with respect to fixed grid.Can learn by such principle of work, the motion sensitivity of detecting head is subjected to the influence of elasticity load-sensing unit bigger, at first, must just can produce displacement under the elastic force situation greater than spring at least in test power, and can not produce displacement when beginning to apply external force, so the sensitivity of its detecting head is lower; In addition, the length-diameter ratio of flexible member is bigger, so less stable of spring, when detecting head is subjected to the external force effect and compresses this spring, spring can produce certain vibration, make spring in motion process, produce certain friction and increase its resistance of motion, also can influence the motion sensitivity of detecting head in internal surface of sleeve pipe.
Order of the present utility model is to provide a kind of microdisplacement sensor, is reducing the precision that is connected that guarantees under the situation of machining precision between detecting head and moving grid, thereby is improving the depth of parallelism of moving grid with respect to the motion between fixed grid, improves the measuring accuracy of displacement with this; In addition, the elasticity dynamometry structure of detecting head is improved, to improve the autokinesis of detecting head.
The purpose of this utility model is achieved in that a kind of micro-level measuring arrangement, includes a fixed grid and the sensor that moving grid constitutes at least, and fixed grid is fixed on the body, and moving grid is with respect on the intrinsic regularly movable sliding block of fixed grid; One end of moving grid is connected with detecting head, and this detecting head is supported movingly by sleeve pipe, is provided with the elasticity load-sensing unit in the sleeve pipe, it is characterized in that, flexiblely between described detecting head and moving grid pastes touch and is connected; Described elasticity load-sensing unit comprises at least by two flexible members and forming.
The purpose of this utility model also can be realized by following measure, it is a kind of magnetic connection that flexibility between described detecting head and the moving grid pastes that touch is connected, promptly be connected with flexible magnetism between the moving grid and be at detecting head or be fixed between the slide block of moving grid and have at least to have a magnet at detecting head, connect by this magnet absorption contact between the two, be synchronized with the movement and can produce.The elasticity load-sensing unit can be compression spring, and this compression spring can be sheathed on the shaft-like detecting head, is provided with an axially spaced-apart on shaft-like detecting head at least, and described flexible member can be sheathed on this spacer region every the dynamometry structure that forms many springs.Can be provided with the nut that screws togather with internal surface of sleeve pipe in the described sleeve pipe and press the top of being located at flexible member, the other end of slide block can be provided with rackwork.Can fixedly connected by coupling arrangement between body and sleeve pipe.Described sensor can adopt grating, magnetic grid, appearance grid.
Compare with prior art, the utility model effect is significant, one, owing in the utility model, utilize magnetic element to form a kind of flexible connecting structure between the slide block of detecting head and moving grid, therefore, right alignment between the two can be adjusted automatically with relative moving, therefore the motion of moving grid can not be subjected to the influence of the movement locus of detecting head basically, and guarantees its depth of parallelism with respect to the relative motion of fixed grid, thereby improves the measuring accuracy of displacement; They are two years old, in the utility model, the dynamometry flexible member of detecting head is made up of two flexible members at least, promptly under original state, detecting head be by two in opposite directions elastic force and keep equilibrium state, under the effect of very little external force, can destroy this equilibrium state and produce displacement immediately, therefore, the displacement sensitivity of detecting head has been improved widely.In addition, because in the utility model, flexible member is separated into two sections, the length-diameter ratio of every section spring has reduced, so the stability of each flexible member has strengthened, can not produce additional resistance when it is compressed and produces when motion, can increase the autokinesis of detecting head yet because of the vibration of spring.
The explanation of accompanying drawing drawing;
Fig. 1 is a structural representation of the present utility model.
It is as follows to describe the utility model in detail below in conjunction with embodiment and accompanying drawing thereof;
Please join shown in Figure 1ly, the utility model includes a fixed grid 1 and a moving grid 2 at least, and this fixed grid 1 is fixed on the body 3.Moving grid 2 is with respect to fixed grid 1 regularly on the movable sliding block 4 in the body 1; Driving moving grids 2 by slide block 4 makes the straight line relative with fixed grid 1 and moves.
One end of moving grid 2 is connected with detecting head 5, and this detecting head 5 is a rhabodoid, and is supported movingly by sleeve pipe 6, is provided with the elasticity load-sensing unit in the sleeve pipe 6, and said structure constitutes probe assembly of the present utility model.And principal character of the present utility model is, what adopt between detecting head 5 and the moving grid 2 is a kind ofly flexiblely to paste touch and is connected, does not promptly adopt the structure that is rigidly connected between the two, and utilizes the flexible connection realization of pasting touch of this kind being synchronized with the movement between the two; In the present embodiment, described flexible subsides touch connection realizes by magnetic connecting structure.As shown in Figure 1, have at least one to be provided with magnet in both junctions of detecting head 5 or moving grid 2, the best is a permanent magnet, with both adhesives to form the connection of pasting touch.In the present embodiment, the slide block 4 of fixedlying connected with moving grid 2 is installed with a magnet 7 with the joint of detecting head 5, and the termination of detecting head 5 links together in slide block 4 by these magnet 7 adhesives.When test, detecting head 5 is ejection slide block 4 under the effect of test power; And after test power cancellation, utilizing detecting head 5 to return to original position, slide block 4 is then set back with detecting head 5 by the adhesive effect of magnet 7, realizes being synchronized with the movement between the two.Because detecting head 5 and 4 of slide blocks are not to adopt the structure that is rigidly connected, when assembling, need not to carry out the adjustment of right alignment, but when detecting head 5 produces the out-of-alignment situation when promoting slide block 4 motions, its end face can move and the automatic function of adjusting of formation voluntarily at the end face of magnet 7, therefore the motion of moving grid 2 can not be subjected to the influence of the movement locus of detecting head 5 basically, can guarantee its depth of parallelism, thereby improve the measuring accuracy of displacement with respect to the relative motion of fixed grid 1;
In the utility model, shaft-like detecting head 5 is to be supported movingly by a sleeve pipe 6.Body 3 can be fixedlyed connected by coupling arrangement with 6 of sleeve pipes, in the present embodiment, is provided with an adapter sleeve 8 at body 3 and 6 of sleeve pipes, and the two ends of this adapter sleeve 8 are spirally connected with body 3 and sleeve pipe 6 respectively.
In the utility model, being provided with an elasticity load-sensing unit in the sleeve pipe 6 is to be made of compression spring.This compression spring is sheathed on the shaft-like detecting head 5.Another feature of the present utility model is that the elasticity load-sensing unit is made up of two elastic elements at least.As shown in Figure 1, be fixed with an axially spaced-apart 51 on the shaft-like detecting head 5 at least, be arranged with two compression springs 91 and 92 respectively in these 51 both sides, interval.This two compression spring 91 and 92 decrement are adjusted by the adjustment nut 11 that is screwed together in sleeve pipe 6 inwalls, two springs 91 that are compressive state and the 92 pairs of intervals of being fixed on the shaft-like detecting head 5 51 produce two elastic forces in opposite directions, make detecting head 5 remain in an equilibrium state by this two in opposite directions elastic force.
In the utility model, the other end of slide block 4 can be provided with rackwork 10 in addition, is adjusted the rational extension elongation of detecting head 5 external parts by this rackwork 10.
Principle of work of the present utility model is, when carrying out linear measure longimetry, the external part of detecting head 5 applied an external force and makes it produce moving of retraction, and promote slide block 4 simultaneously and be synchronized with the movement, and measures Len req by the relative displacement of 1 of moving grid 2 and fixed grid again.Because 5 employings of slide block 4 and detecting head is that a kind of flexible subsides touch is connected in the utility model, so right alignment between the two can be adjusted automatically with relative moving, thereby guaranteed the depth of parallelism of moving grid 2, thereby improved the measuring accuracy of displacement with respect to the relative motion of fixed grid 1;
In addition, the utility model detecting head 5 under original state be by two in opposite directions elastic force and keep equilibrium state, and when the motion of detecting head 5, produce by external force with the acting in conjunction of the equidirectional elastic force of this external force, therefore under the effect of very little external force, can destroy this equilibrium state and make detecting head 5 produce displacement immediately, therefore, the displacement sensitivity of detecting head has improved widely.In addition, because in the utility model, flexible member is separated into two sections, the length-diameter ratio of every section spring has reduced, so the stability of each flexible member has strengthened, when being compressed motion, it can not produce additional resistance because of the vibration of spring, also can increase the autokinesis of detecting head.
The utility model can be applicable to all lengths measurement mechanism, and in other measurement mechanism, as Shao Er sclerometer etc.Therefore, of the present utility model can the employing as the sensor of routines such as grating, magnetic grid, appearance grid according to use occasion.When the utility model during, adopt that to hold the grid effect better as the Shao Er sclerometer.

Claims (9)

1, a kind of microdisplacement measurement mechanism includes a fixed grid and the sensor that moving grid constitutes at least, and fixed grid is fixed on the body, and moving grid is with respect on the intrinsic regularly movable sliding block of fixed grid; One end of moving grid is connected with detecting head, and this detecting head is supported movingly by sleeve pipe, is provided with the elasticity load-sensing unit in the sleeve pipe, it is characterized in that, flexiblely between described detecting head and moving grid pastes touch and is connected; Described elasticity load-sensing unit comprises at least by two flexible members and forming.
2, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that it is a kind of magnetic connection that flexibility between described detecting head and the moving grid pastes that touch is connected.
3, a kind of microdisplacement measurement mechanism according to claim 2, it is characterized in that described detecting head is connected with flexible magnetism between the moving grid is at detecting head or is fixed between the slide block of moving grid and has at least to have a magnet, connect by this magnet absorption contact between the two, be synchronized with the movement and can produce.
4, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that described elasticity load-sensing unit can be compression spring, and this compression spring can be sheathed on the shaft-like detecting head.
5, according to claim 1 or 4 described a kind of microdisplacement measurement mechanisms, it is characterized in that being provided with at least on the described shaft-like detecting head axially spaced-apart, described flexible member can be sheathed on this spacer region every the dynamometry structure that forms many springs.
6, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that can being provided with in the described sleeve pipe nut that screws togather with internal surface of sleeve pipe and presses the top of being located at flexible member.
7, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that the other end of described slide block can be provided with rackwork.
8, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that can being fixedlyed connected by coupling arrangement between described body and sleeve pipe.
9, a kind of microdisplacement measurement mechanism according to claim 1 is characterized in that described sensor, can adopt grating, magnetic grid, appearance grid.
CN 00231407 2000-04-04 2000-04-04 Micro-displacement measuring device Expired - Lifetime CN2411464Y (en)

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Application Number Priority Date Filing Date Title
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102155903A (en) * 2011-03-01 2011-08-17 苏州聚元微电子有限公司 Novel capacitive sensor structure
CN102183275A (en) * 2011-01-21 2011-09-14 苏州聚元微电子有限公司 Low-power consumption float flow sensor
CN102274825A (en) * 2011-04-22 2011-12-14 福建南方路面机械有限公司 Anti-loosening alarm device for screen cloth of vibrating screen
CN102375343A (en) * 2010-08-18 2012-03-14 上海微电子装备有限公司 Workbench position measuring system
CN103090780A (en) * 2013-01-11 2013-05-08 山东科技大学 Mine drilling micro displacement measurement instrument
CN103411526A (en) * 2013-08-01 2013-11-27 国电南京自动化股份有限公司 Circuit breaker on-line detection sensor
CN104567644A (en) * 2014-12-18 2015-04-29 浙江工业职业技术学院 Digital measurement device for infinitesimal displacement
WO2015167406A1 (en) * 2014-05-01 2015-11-05 Kaisornbundit Chaisorn Volumetric apparatus and densimeter in non liquid usage type
CN105444695A (en) * 2015-12-22 2016-03-30 四川大学 Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment
CN105466379A (en) * 2016-01-12 2016-04-06 山东大学 Displacement measurer
CN109029199A (en) * 2018-07-27 2018-12-18 华域视觉科技(上海)有限公司 The device and measurement method of displacement after bulb stress for measuring light-modulating motor
CN110296672A (en) * 2019-08-15 2019-10-01 成都华量传感器有限公司 The fast driving high precision position measuring system of non-rigid connection

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102375343A (en) * 2010-08-18 2012-03-14 上海微电子装备有限公司 Workbench position measuring system
CN102183275A (en) * 2011-01-21 2011-09-14 苏州聚元微电子有限公司 Low-power consumption float flow sensor
CN102155903A (en) * 2011-03-01 2011-08-17 苏州聚元微电子有限公司 Novel capacitive sensor structure
CN102274825A (en) * 2011-04-22 2011-12-14 福建南方路面机械有限公司 Anti-loosening alarm device for screen cloth of vibrating screen
CN103090780A (en) * 2013-01-11 2013-05-08 山东科技大学 Mine drilling micro displacement measurement instrument
CN103411526B (en) * 2013-08-01 2016-06-08 国电南京自动化股份有限公司 Chopper detecting line sensor
CN103411526A (en) * 2013-08-01 2013-11-27 国电南京自动化股份有限公司 Circuit breaker on-line detection sensor
WO2015167406A1 (en) * 2014-05-01 2015-11-05 Kaisornbundit Chaisorn Volumetric apparatus and densimeter in non liquid usage type
US9835534B2 (en) 2014-05-01 2017-12-05 Chaisorn Kaisornbundit Volumetric apparatus and densimeter in non liquid usage type
CN104567644A (en) * 2014-12-18 2015-04-29 浙江工业职业技术学院 Digital measurement device for infinitesimal displacement
CN105444695A (en) * 2015-12-22 2016-03-30 四川大学 Probe contact type measuring head enabling elastic element position limiting method-based dynamic characteristic adjustment
CN105444695B (en) * 2015-12-22 2019-03-22 四川大学 The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method
CN105466379A (en) * 2016-01-12 2016-04-06 山东大学 Displacement measurer
CN109029199A (en) * 2018-07-27 2018-12-18 华域视觉科技(上海)有限公司 The device and measurement method of displacement after bulb stress for measuring light-modulating motor
CN110296672A (en) * 2019-08-15 2019-10-01 成都华量传感器有限公司 The fast driving high precision position measuring system of non-rigid connection

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Granted publication date: 20001220