CN103398805B - Three-dimensional nanometer measurement head elastically supported by spiral leaf spring - Google Patents
Three-dimensional nanometer measurement head elastically supported by spiral leaf spring Download PDFInfo
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- CN103398805B CN103398805B CN201310306571.3A CN201310306571A CN103398805B CN 103398805 B CN103398805 B CN 103398805B CN 201310306571 A CN201310306571 A CN 201310306571A CN 103398805 B CN103398805 B CN 103398805B
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Abstract
The invention discloses a three-dimensional nanometer measurement head elastically supported by a spiral leaf spring and belongs to the technical field of a measurement apparatus. The spiral leaf spring elastic supported type three-dimensional nanometer measurement head comprises a shell, focusing measurement heads, a measurement arm and a spiral leaf spring elastic support and is characterized in that the focusing measurement heads are mounted at the upper end part of the shell; three plane reflectors are arranged on the measurement arm; each two of the plane reflectors form an included angle of 180 degrees; the three plane reflectors correspond to the focusing measurement heads one by one; the spiral leaf spring elastic support is fixed on the shell; a measurement ball at the foremost end of each measurement head is fixedly mounted on a measurement rod; and the measurement rod is connected with the lower part of a connection piece through a thread. The three-dimensional nanometer measurement head provided by the invention is high in measurement sensitivity and has nanometer-level measurement sensitivity. The three-dimensional nanometer measurement head provided by the invention uses the spiral leaf spring as elastic support, so that difficulty of generating plastic transformation and good long-term using stability can be realized. The original measurement force of the measurement head is easily adjusted, so that the property stability of the measurement head can be easily ensured.
Description
Technical field
The present invention relates to surveying instrument technical field, specifically the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring.
Background technology
Guide rail support is the indispensable significant components of precision optical machinery and fine measuring instrument, and different with precision and also different to the requirement of guide rail support with the performance of surveying instrument.Wherein to the guide rail support transmitting motion, not only require that moving displacement is comparatively large, holding capacity and displacement accuracy are also had higher requirements.And the fine measuring instrument guideway support to supporting micrometric displacement, generally all higher to its accuracy requirement.For modern precision surveying instrument, general measure precision is micron order, and high measurement accuracy then reaches nanoscale.Because high precision measuring instrument often needs to load certain contact measurement power to measurement component, to ensure that measurand can contact well with the measuring sensor of surveying instrument, but must ensure that this contact force size is suitable, coincidence measurement requirement.For the surveying instrument of nano-precision, require contact force or ergometry less, to ensure instrument overall measurement accuracy.
Three dimensional probe, 3-D probe is one of parts of coordinate measuring machine key.Coordinate measuring machine measuring accuracy directly depends on the precision of gauge head, and the elastic bearing indispensable significant components that is gauge head.The elastic bearing effect of fine measuring instrument micrometering head generally has two aspects, namely the dynamometry source of the supporting of micrometric displacement element and contact measuring head is had concurrently, common are: the supporting of biplate spring guide rail support, volute spring, suspension elastic bearing and cross-leaf spring supporting etc., the dynamometry of these flexibly mounted micromotion scopes and generation thereof, different with the physical dimension difference of elastic supporting element, minimum dynamometry can reach 0.1mN, maximum dynamometry then can to tens newton, but its micromotion scope is all less, minimum only several microns.As can be seen from the above analysis, the three dimensional probe, 3-D probe possessing multi-form resiliency supported possesses different performance characteristics, the gauge head of different performance and precision is also different to the requirement of guide rail support, therefore adopts multi-form measurement component supporting member to become one of gordian technique of three dimensional probe, 3-D probe structural research.The resiliency supported present situation adopted for current China high-precision three-dimensional gauge head and the shortcoming of existence thereof, we design and have invented the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring.
The common elastic bearing gauge head of prior art has following several: volute spring supporting gauge head, sheet spring guide rail support gauge head, cross suspension elastic bearing gauge head, rood beam elastic bearing gauge head, cross-leaf spring supporting gauge head.
Wherein, volute spring supporting gauge head, three of helical reset spring compression gauge head contact armed levers, when gauge head does three-dimensional fine motion, overcome the micro-pressure of spring, the V-type sheet that armed lever is disengaged and measuring-signal occurs, otherwise armed lever resets.But only can realize measurement and the triggering of micron accuracies, ergometry is comparatively large, is generally 15N.
Sheet spring guide rail support gauge head is mainly used in electric profile apparatus and atomic force microscope, micro-cantilever supporting contact pilotage, and with measured piece surface contact, now contact pilotage 2 does fine motion vertically, drives iron core fine motion and produce measuring-signal in telefault.Shortcoming is the gauge head supporting that only can be used for very little micro-nano magnitude fine motion scope.If fine motion scope is comparatively large, then by generation because gauge head vertical axis to tilt the measuring error caused with upper and lower fine motion and axis.
The tinsel that cross suspension elastic bearing gauge head selects rigidity larger forms cross supporting, drives the micro-swing of gage beam and produce measuring-signal during gauge head fine motion.Shortcoming is that suspension easily produces plastic yield, causes the long-time stability of gauge head performance poor, needs the tensile force of often adjustment suspension, and to keep original performance of gauge head, but this adjustment is difficult to realize.
Rood beam elastic bearing gauge head by surveying ball 1, measuring staff 2, outside framework 3, center connector 4, rood beam 5 form.Its elastic support structure adopts rood beam structure, supports measuring staff survey end, with tested surface surface contact by rood beam as suspension.Dynamometry, through surveying ball, measuring staff and rood beam, is delivered to sensitive element and voltage dependent resistor (VDR), realizes the measurement of three-dimensional strength measurement.There is retinoic acid syndrome, radial effects and calibration matrix is the shortcomings such as approximate solution.
The isotropy of the gauge head performance of cross-leaf spring elastic bearing nano measuring head is poor, has larger anisotropy difference, affects nanometer measurement precision.In addition, when bearing the effect of circumference dynamometry, all there is the distortion error of pretravel in above-mentioned several gauge head in circumference all directions.
Summary of the invention
The object of the invention is to the defect existed for prior art, provide a kind of flight spring flexibly mounted three-dimensional manometer gauge head.
Object of the present invention can be achieved through the following technical solutions:
The flexibly mounted three-dimensional manometer gauge head of a kind of flight spring, comprise shell, focus on gauge head, gage beam and flight spring elastic bearing, it is characterized in that, described focusing gauge head is arranged on the upper end of shell, described gage beam is provided with three plane mirrors, and between plane mirror, installation interval is 180 degree.Described flight spring elastic bearing is fixed on shell, and be in gauge head survey ball foremost and be fixedly mounted on measuring staff, measuring staff is connected with the bottom of web member by screw thread.
Described focusing gauge head is arranged on the upper end of shell by set bolt, quantity is three, and with plane mirror one_to_one corresponding, installation interval is 180 degree.
Described flight spring elastic bearing is fixed on shell by web member.
Described flight spring elastic bearing and hold-down nut link into an integrated entity, and hold-down nut is connected with web member.
Described gage beam is fixed three plane mirrors, hold-down nut is fixed on web member.
The top cover of described web member has adjustment spring.
Centre position below described focusing gauge head is provided with upper end cover, described upper end cover is provided with adjustment screw, the bottom of described adjustment screw contacts with regulating spring, above adjustment spring, cushion block is installed, realizes the adjustment to flight spring elastic bearing pretightning force by set screw, cushion block and regulating spring.
Beneficial effect of the present invention:
1, the present invention adopts flight spring as three-dimensional manometer gauge head resiliency supported, during by responsive to axial force, the displacement deformation of core can ensure perpendicular to the gauge head axis on this surface substantially vertical with surface, and when gauge head bears lateral stressed perpendicular to axis E, its horizontal force size and gauge head transversal displacement measurer have circumferentially isotropy.
2, three-dimensional manometer gauge head measurement sensistivity of the present invention is high, has nano level measurement sensistivity.
3, three-dimensional manometer gauge head of the present invention adopts flight spring as resiliency supported, is not easy to produce plastic yield, Long-Time Service good stability.The initial dynamometry of gauge head easily adjusts, and is easy to the stability ensureing gauge head.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is vertical view of the present invention.
Fig. 3 is cut-open view of the present invention.
Fig. 4 is flight spring elastic support structure figure.
In figure: 1, shell, 2, set bolt, 3, focus on gauge head, 4, gage beam, 5, cushion block, 6, adjustment screw, 7, upper end cover, 8, regulating spring, 9, hold-down nut I, 10, plane mirror, 11, web member I, 12, hold-down nut II, 13, web member II, 14, flight spring elastic bearing, 15, measuring staff, 16, survey ball.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in further detail.
As shown in Figure 1, Figure 2 and Figure 3, the flexibly mounted three-dimensional manometer gauge head of a kind of flight spring, comprising: shell 1, set bolt 2, focusing gauge head 3, gage beam 4, cushion block 5, adjustment screw 6, upper end cover 7, adjustment spring 8, hold-down nut I 9, plane mirror 10, web member I 11, hold-down nut II 12, web member II 13, flight spring resiliency supported 14, measuring staff 15, survey ball 16.Three focus on the upper end that gauge head 3 is arranged on shell 1, three plane mirror 10 one_to_one corresponding be provided with gage beam 4, installation interval is 180 degree, flight spring elastic bearing 14 is fixed on shell 1, being in gauge head survey ball 16 is foremost fixedly mounted on measuring staff 15, and measuring staff 15 is connected by the bottom of screw thread with web member II 13.Focus on gauge head 3 is arranged on shell 1 upper end by set bolt 2.Flight spring elastic bearing 14 is fixed on shell 1 by web member I 11.Flight spring elastic bearing 14 and hold-down nut II 12 link into an integrated entity, and hold-down nut II 12 is connected with web member II 13.Hold-down nut I 9 is fixed on web member II 13.The top cover of web member II 13 has adjustment spring 8.The centre position focused on below gauge head 3 is provided with upper end cover 7, described upper end cover 7 is provided with adjustment screw 6, the bottom of described adjustment screw 6 contacts with regulating spring 8, above adjustment spring 8, cushion block 5 is installed, realizes the adjustment to flight spring elastic bearing pretightning force by set screw 6, cushion block 5 and regulating spring 8.
Flight spring resiliency supported 14 makes by delineating archimedean spiral groove thereon, the rectangle of flight spring elastic bearing 14 to be xsects be b × h, its small end radius of curvature R 1, large end radius of curvature R 2, little broken end place is the angle theta between starting point to any point, number of effective coils n, shear modulus G.According to flight spring flexibly mounted three-dimensional manometer gauge head general structure size, calculate the flight spring elastic bearing original outer diameter D of permission and the axial force P suffered by flight spring elastic bearing 14 and axial displacement S, through calculating, regulation & test, finally determine satisfactory best flight spring elastic support structure parameter.Pass between structural parameters and axial force P and axial displacement S is:
Claims (7)
1. the flexibly mounted three-dimensional manometer gauge head of flight spring, comprise shell (1), focus on gauge head (3), gage beam (4) and flight spring elastic bearing (14), it is characterized in that, described focusing gauge head (3) is arranged on the upper end of shell (1), described gage beam (4) is provided with three plane mirrors (10), be separated by between each plane mirror (10) 180 degree, described flight spring elastic bearing (14) is fixed on shell (1), being in gauge head survey ball (16) is foremost fixedly mounted on measuring staff (15), measuring staff (15) is connected by the bottom of screw thread with web member II (13), described flight spring elastic bearing (14) is made by delineating archimedean spiral groove thereon, the rectangle of flight spring elastic bearing (14) to be xsect be b × h, its small end radius of curvature R 1, large end radius of curvature R 2, little broken end place is the angle theta between starting point to any point, number of effective coils n, shear modulus G, according to flight spring flexibly mounted three-dimensional manometer gauge head general structure size, calculate the flight spring elastic bearing original outer diameter D of permission and the axial force P suffered by flight spring elastic bearing (14) and axial displacement S, through calculating, regulation & test, finally determine satisfactory best flight spring structure parameter, pass between structural parameters and axial force P and axial displacement S is:
2. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, described focusing gauge head (3) is arranged on the upper end of shell (1) by set bolt (2), quantity is three, with plane mirror (10) one_to_one corresponding.
3. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, described flight spring elastic bearing (14) is fixed on shell (1) by web member I (11).
4. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, described flight spring elastic bearing (14) and hold-down nut II (12) link into an integrated entity, and hold-down nut II (12) is connected with web member II (13).
5. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, described gage beam (4) is fixed three plane mirrors (10), hold-down nut I (9) is fixed on web member II (13).
6. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, is characterized in that, the top cover of described web member II (13) has adjustment spring (8).
7. the flexibly mounted three-dimensional manometer gauge head of flight spring according to claim 1, it is characterized in that, the centre position of described focusing gauge head (3) below is provided with upper end cover (7), described upper end cover (7) is provided with adjustment screw (6), the bottom of described adjustment screw (6) contacts with regulating spring (8), above adjustment spring (8), cushion block (5) is installed, realizes the adjustment to flight spring elastic bearing pretightning force by set screw (6), cushion block (5) and regulating spring (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310306571.3A CN103398805B (en) | 2013-07-19 | 2013-07-19 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310306571.3A CN103398805B (en) | 2013-07-19 | 2013-07-19 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
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| CN103398805A CN103398805A (en) | 2013-11-20 |
| CN103398805B true CN103398805B (en) | 2015-06-10 |
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| CN201310306571.3A Expired - Fee Related CN103398805B (en) | 2013-07-19 | 2013-07-19 | Three-dimensional nanometer measurement head elastically supported by spiral leaf spring |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444695B (en) * | 2015-12-22 | 2019-03-22 | 四川大学 | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method |
| CN107471085B (en) * | 2017-09-17 | 2023-04-21 | 长春工业大学 | Six-dimensional force measuring device and method based on grinding and polishing of viscoelastic material |
| CN107830793B (en) * | 2017-10-30 | 2020-04-07 | 安徽理工大学 | Variable-rigidity contact type micro-nano coordinate measuring machine measuring head |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86105617A (en) * | 1986-06-19 | 1988-03-16 | 雷尼肖公司 | contact sensing probe |
| CN2182388Y (en) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | High-precision contacting three-dimensional gauge head |
| KR20020037934A (en) * | 2000-11-16 | 2002-05-23 | 유인균 | measure for Jack support |
| CN202048904U (en) * | 2010-09-26 | 2011-11-23 | 中机生产力促进中心 | Measuring head with constant measuring force and rotary measuring ball and without measuring range limitation |
| CN103207035A (en) * | 2013-05-14 | 2013-07-17 | 曹毅 | Force spectrometer for measuring intermolecular forces |
-
2013
- 2013-07-19 CN CN201310306571.3A patent/CN103398805B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86105617A (en) * | 1986-06-19 | 1988-03-16 | 雷尼肖公司 | contact sensing probe |
| CN2182388Y (en) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | High-precision contacting three-dimensional gauge head |
| KR20020037934A (en) * | 2000-11-16 | 2002-05-23 | 유인균 | measure for Jack support |
| CN202048904U (en) * | 2010-09-26 | 2011-11-23 | 中机生产力促进中心 | Measuring head with constant measuring force and rotary measuring ball and without measuring range limitation |
| CN103207035A (en) * | 2013-05-14 | 2013-07-17 | 曹毅 | Force spectrometer for measuring intermolecular forces |
Non-Patent Citations (1)
| Title |
|---|
| 杨洪涛等.基于微力测量的微纳米测头系统设计及优化.《安徽理工大学学报(自然科学版)》.2012,第32卷(第2期),第13-17页. * |
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Inventor after: Fei Yetai Inventor after: Yang Hongtao Inventor after: Sun Shuai Inventor after: Zhang Xin Inventor after: Cha Xiaona Inventor before: Yang Hongtao Inventor before: Zhang Dongsu Inventor before: Zhang Wei Inventor before: Sun Shuai Inventor before: Fang Chuanzhi Inventor before: Zhang Jing |
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Free format text: CORRECT: INVENTOR; FROM: YANG HONGTAO ZHANG DONGSU ZHANG WEI SUN SHUAI FANG CHUANZHI ZHANG JING TO: FEI YETAI YANG HONGTAO SUN SHUAI ZHANG XIN CHA XIAONA |
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