CN105973455A - Combined piezoelectric strain vibration measurement device - Google Patents

Combined piezoelectric strain vibration measurement device Download PDF

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Publication number
CN105973455A
CN105973455A CN201610479578.9A CN201610479578A CN105973455A CN 105973455 A CN105973455 A CN 105973455A CN 201610479578 A CN201610479578 A CN 201610479578A CN 105973455 A CN105973455 A CN 105973455A
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foil gauge
piezoelectric
combination type
head end
column
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CN105973455B (en
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王光远
郝刚刚
吴蓓蓓
管帅
赵煜
金涛
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Beijing Institute of Spacecraft System Engineering
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Beijing Institute of Spacecraft System Engineering
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention relates to a combined piezoelectric strain vibration measurement device and relates to the force sensor field for wideband measurement. The measurement device comprises a chassis, four combined piezoelectric strain force sensors and a table top, wherein the chasis and the table top are connected through the combined piezoelectric strain force sensors, the combined piezoelectric strain force sensors respectively comprise a foundation, a compaction screw, a casing, a piezoelectric sheet protection sheet, a piezoelectric sheet set, a column, a stress concentration hole and a piezoelectric sheet, the casing is fixed on the foundation, the cross section is a hollow quadrangle, each inner wall is disposed with one piezoelectric sheet protection sheet, an inner side of the piezoelectric sheet protection sheet is disposed with the piezoelectric sheet set, each piezoelectric sheet set comprises multiple stretching-compression type piezoelectric sheets and multiple cutting type piezoelectric sheets, a strain sheet is attached to a circular cross section portion of the column, the strain sheet is symmetric about an axis of the column, and six-dimensional force of the table top can be inducted through the strain sheet and the piezoelectric sheets. The measurement device is advantaged in that a vibration force and a vibration torque of a micro disturbance source can be accurately measured, a measurement scope is wide, and measurement reliability is high.

Description

A kind of piezoelectric strain combination type microvibration measuring device
Technical field
The present invention relates to a kind of force transducer field measured for wideband, particularly a kind of piezoelectric strain combination Decline vibration measurement device.
Background technology
Six-dimension force sensor is the mechanical meaurement equipment that a class is conventional, is used for measuring linkage interface or movable part Counteracting force and moment to supporting construction.The perturbed force that on spacecraft, movable part motion causes generally also is adopted Measure with six-dimension force sensor.
The movable part used on spacecraft is of a great variety, and disturbance characteristic is different, to measure equipment it is also proposed that Different demand.For flexible accessory drive mechanisms such as solar wing drive mechanism, pedestals, its In perturbed force, not only comprise the wideband disturbance driving motor self to produce, also comprise flexible accessory vibration and cause Low-frequency excitation.The measurement of sort of activity parts disturbance characteristic proposes higher requirement to sensor, not only The frequency band of 5~1000Hz need to be covered, also require also to have higher certainty of measurement in 0~5Hz.Traditional Six-dimension force sensor typically uses piezoelectric type principle or strain-type principle.Piezoelectric transducer measures bandwidth, Rigidity is high, but its low frequency characteristic is not good enough, and typically at below 5Hz, its certainty of measurement significantly reduces.Strain-type Sensor is by good low frequency characteristic, but strained barbola work of its high frequency response and sensor local The impact of characteristic, signal quality is the highest.
Current spacecraft broadly falls into large-scale flexible expansion mechanism mostly, and with substantial amounts of optical element, They all propose the highest requirement to pointing accuracy and degree of stability.It addition, at modern spacecraft gesture stability In system, reaction wheel, single frame moment gyro and solar wing drive mechanism etc. are the weights in its control system Wanting element, they are while providing necessary control power, and some nuisance vibrations also can be caused (to rise for simple See, below above-mentioned three germlines are completely referred to as disturbing source).These disturbances mainly, bearing uneven by flywheel is disturbed Dynamic, motor disturbance, motor drive error etc. to cause, and wherein flywheel imbalance is to cause single frame moment top The main reason of spiral shell vibration, these perturbed forces and disturbing moment can reduce the performance of elaboration instrument in space Index, therefore measures and analyzes the dynamic characteristic of spacecraft payload disturbance, for analyzing and eliminating disturbance Thus the safe design of the attitude control accuracy and reinforcement spacecraft improving spacecraft has very important engineering Meaning.
Owing to the disturbance of spacecraft disturbing source is the least, indivedual payload such as momenttum wheel is in direction, three, space only The faint disturbance of more than tens milli-newton of milli-newton can be produced, want to make an uproar having relatively strong jamming pattern The ground experiment room of sound is measured this type of disturbance the most difficult, and the required precision of its respective sensor is the highest. The present invention can accurately measure vibration force and the oscillatory torque in small sample perturbations source, and the frequency range of measurement is accurate, surveys Amount reliability is high.
At present, there is not yet the reported in literature about this type of intrasonic microvibration measurement system both at home and abroad.
Summary of the invention
It is an object of the invention to overcome the above-mentioned deficiency of prior art, it is provided that a kind of piezoelectric strain combination declines Vibration measurement device, all can obtain higher certainty of measurement in low-frequency range and high band.Spacecraft fortune can be measured During row, the perturbed force that disturbing source produces at space six-freedom degree, overcome piezoelectric force transducer and exist The deficiency that low frequency region degree of accuracy is relatively low, for improving the attitude control accuracy of spacecraft and strengthening the peace of spacecraft Full design provides tests data reliably.
The above-mentioned purpose of the present invention is achieved by following technical solution:
A kind of piezoelectric strain combination type microvibration measuring device, including chassis, piezoelectric strain combination type power sensing Device and table top;Wherein chassis is positioned at bottom;Piezoelectric strain combination type force transducer is fixedly mounted on the upper of chassis Surface;Table top is fixedly mounted on the upper surface of piezoelectric strain combination type force transducer;Described table top top is divided into Plate-like shape, the bottom of plate-like shape is cross square column, the symmetrical bottom of table top is empty of described cross square column Between be divided into four equal area;4 piezoelectric strain combination type power sensings are fixedly mounted between table top and chassis Device;4 piezoelectric strain combination type force transducers are symmetrically distributed in described four equal area.
At above-mentioned piezoelectric strain combination type microvibration measuring device, it is characterised in that: described piezoelectric strain group Box-like force transducer includes pedestal, housing, piezoelectric patches screening glass, piezoelectric patches group and column;Wherein, pedestal It is positioned at bottom;Housing is fixedly mounted on the upper surface of pedestal, and housing is hollow cuboid, in every limit, four limits The side vertical of wall is installed with piezoelectric patches screening glass;The inner surface of each piezoelectric patches screening glass is vertically solid Dingan County's dress piezoelectric patches group;Column is vertically fixedly mounted on the upper surface of pedestal, and is positioned at the center of housing; Described pedestal is fixedly mounted on the upper surface on chassis;Described column upper surface contacts with the lower surface of table top.
At above-mentioned piezoelectric strain combination type microvibration measuring device, piezoelectric patches group all comprises n drawing and pressing type pressure Electricity sheet and m shearing piezoelectric patches;Wherein n is positive integer;M is positive integer;And housing every limit inwall In the piezoelectric patches group that side is installed, drawing and pressing type piezoelectric patches number is identical, and shearing piezoelectric patches number is identical.
At above-mentioned piezoelectric strain combination type microvibration measuring device, described column is divided into upper and lower two parts, its Middle and upper part is divided into cylindrical structure, bottom to be divided into cube structure.
At above-mentioned piezoelectric strain combination type microvibration measuring device, 4 piezoelectric patches groups are enclosed in column bottom Divide around cube structure, and four outer walls of abutting contact column lower part cube structure.
At above-mentioned piezoelectric strain combination type microvibration measuring device, the cylindrical structure of described column upper part On be provided with stress collection mesopore and foil gauge;Column in axial direction divides upper, middle and lower-ranking to arrange, every layer All pasting 4 foil gauges in cylindrical structure peripheral outer wall, every ply strain sheet is positioned at column same plane, Paste 12 foil gauges altogether;A stress collection mesopore is all had by each foil gauge.
At above-mentioned piezoelectric strain combination type microvibration measuring device, described stress integrates mesopore as slot, And the position of foil gauge is provided with wedge angle.
In above-mentioned piezoelectric strain combination type microvibration measuring device, the foil gauge distributing position phase of described every layer With, and be evenly distributed in the same plane of cylindrical structure peripheral outer wall;The foil gauge group of the upper and lower Become two full-bridge circuits;In the foil gauge in middle level, often relative to two foil gauges, one half-bridge circuit of composition, Totally two half-bridge circuits.
At above-mentioned piezoelectric strain combination type microvibration measuring device, described full-bridge circuit includes 4 strains Sheet, respectively foil gauge R1, foil gauge R2, foil gauge R3, foil gauge R4;Wherein foil gauge R1 Adjacently positioned with foil gauge R2, foil gauge R2 is adjacently positioned with foil gauge R3, foil gauge R3 and strain Sheet R4 is adjacently positioned, and foil gauge R4 is adjacently positioned with foil gauge R1;Foil gauge R1 end and foil gauge R2 head end connects, and foil gauge R2 end is connected with foil gauge R4 head end, foil gauge R4 end and strain Sheet R3 head end connects, and foil gauge R3 end is connected with foil gauge R1 head end;Head end and R4 at R1 Head end connect positive pole and the negative pole of power supply respectively, connect output signal at the head end of R2 and the head end of R3 Positive pole and negative pole.
At above-mentioned piezoelectric strain combination type microvibration measuring device, described half-bridge circuit includes 2 strains Sheet and 2 outer meeting resistances;Two panels foil gauge is respectively foil gauge R1, foil gauge R2;Two panels outer meeting resistance It is designated as resistance R3, resistance R4;Wherein foil gauge R1 end is connected with foil gauge R2 head end, foil gauge R2 end is connected with resistance R4 head end, and resistance R4 end is connected with resistance R3 head end, resistance R3 end End is connected with foil gauge R1 head end;The head end of foil gauge R1 and the head end of resistance R4 connect power supply respectively Positive pole and negative pole, the head end of foil gauge R2 and the head end of R3 connect positive pole and the negative pole of output signal.
The present invention compared with prior art has the advantage that
(1) present invention uses strain sensor and piezoelectric sensing element to measure simultaneously, is respectively provided with at full frequency band Higher sensitivity, solves single type sensor and measures the frequency range incomplete problem of covering.In medium-high frequency Section, the data of two kinds of measuring cells complement one another, verify mutually, improve the reliability of measurement result;
(2) measurement apparatus in the present invention separates with measured test specimen, it is not necessary to install on measured test specimen Optional equipment and sensor, do not affect the dynamic characteristic of test specimen, does not damage test specimen structure, test After test specimen can also normally use;
(3) present configuration size can change in allowed limits, it is not necessary to for every kind of measured piece list Solely design piezoelectric strain combination type microvibration measuring system, it is only necessary to design and installation fixture;
(4) in the present invention, stress integrates mesopore as slot, and the position of foil gauge is provided with wedge angle, Achieve on the premise of ensureing measurement apparatus integral rigidity, improve the sensitivity of foil gauge, can realize micro- The measurement of microvariations power;
(5) present invention in axial direction divides upper, middle and lower-ranking to arrange at the cylindrical structure of column upper part, All paste 4 foil gauges in cylinder circumference for every layer, foil gauge two full-bridge circuits of composition of the upper and lower; In the foil gauge in middle level, often relative to two foil gauges composition one half-bridge circuit, totally two half-bridge circuits; Achieve and in compact structure, realize the perturbed force to space 6DOF and moment is measured, integrated level simultaneously High, metrical information is enriched.
Accompanying drawing explanation
Fig. 1 is piezoelectric strain combination type microvibration measuring apparatus structure schematic diagram of the present invention;
Fig. 2 is that piezoelectric strain combination type microvibration measuring device of the present invention forms schematic diagram;
Fig. 3 is that piezoelectric strain combination type force transducer of the present invention forms schematic diagram;
Fig. 4 is that piezoelectric strain combination type force transducer piezoelectric patches of the present invention arranges schematic diagram;
Fig. 5 a is embodiment of the present invention full-bridge circuit mode of connection schematic diagram;
Fig. 5 b is embodiment of the present invention half-bridge circuit mode of connection schematic diagram.
Detailed description of the invention
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings:
The invention solves the problems that its technical problem be the technical scheme is that, the combination of a kind of piezoelectric strain declines and shake Dynamic measurement apparatus, it measures frequency can cover 0~1000Hz.
It is illustrated in figure 1 piezoelectric strain combination type microvibration measuring apparatus structure schematic diagram, as seen from the figure, one Plant piezoelectric strain combination type microvibration measuring device, including chassis 1, piezoelectric strain combination type force transducer 2 With table top 3;Wherein chassis 1 is positioned at bottom;Piezoelectric strain combination type force transducer 2 is fixedly mounted on chassis The upper surface of 1;Table top 3 is fixedly mounted on the upper surface of piezoelectric strain combination type force transducer 2;
It is illustrated in figure 2 piezoelectric strain combination type microvibration measuring device composition schematic diagram, as seen from the figure, institute State table top 3 top and be divided into plate-like shape, can be cuboid or other plate-like shape, the bottom of plate-like shape For cross square column, the lower space by table top 3 of described cross square column symmetry is divided into four equal area;? 4 piezoelectric strain combination type force transducers 2 are fixedly mounted between table top 3 and chassis 1;4 piezoelectric strains Combination type force transducer is symmetrically distributed in described four equal area.
It is illustrated in figure 3 piezoelectric strain combination type force transducer composition schematic diagram, as seen from the figure, piezoelectric strain Combination type force transducer 2 include pedestal 2-1, housing screw 2-2, housing 2-3, piezoelectric patches screening glass 2-4, Piezoelectric patches group 2-5 and column 2-6;Wherein, pedestal 2-1 is positioned at bottom;Housing 2-3 is fixedly mounted on pedestal The upper surface of 2-1, housing 2-3 is hollow cuboid, the side vertical fixed installation of every limit, four limits inwall There is piezoelectric patches screening glass 2-4;Housing screw 2-2 is screwed in from housing 2-3 by screwed hole, protects with piezoelectric patches Bluff piece 2-4 contacts, by tightening housing screw 2-2, by piezoelectric patches screening glass 2-4 and piezoelectric patches group 2-5 It is pressed on column 2-6;Stress collection mesopore 2-7 it is provided with on the cylindrical structure of described column 2-6 upper part With foil gauge 2-8;Column 2-6 in axial direction divides upper, middle and lower-ranking to arrange, every layer all at cylinder Structure peripheral outer wall is pasted 4 foil gauge 2-8, every ply strain sheet 2-8 and is positioned at column 2-6 same plane, Paste 12 foil gauge 2-8 altogether;A stress collection mesopore 2-7 is all had by each foil gauge 2-8;Described Stress integrates mesopore 2-7 as slot, and the position of foil gauge 2-8 is provided with wedge angle.
It is illustrated in figure 4 piezoelectric strain combination type force transducer piezoelectric patches and arranges schematic diagram, as seen from the figure, often The inner surface of individual piezoelectric patches screening glass 2-4 vertically fixedly mounts piezoelectric patches group 2-5;Column 2-6 vertically fixes It is arranged on the upper surface of pedestal 2-1, and is positioned at the center of housing 2-3;The fixing peace of described pedestal 2-1 It is contained in the upper surface on chassis 1;Described column 2-6 upper surface contacts with the lower surface of table top 3;
Wherein, piezoelectric patches group 2-5 all comprises n drawing and pressing type piezoelectric patches and m shearing piezoelectric patches;Wherein N is positive integer;M is positive integer;And in piezoelectric patches group 2-5 of the side installation of housing 2-3 every limit inwall, Drawing and pressing type piezoelectric patches number is identical, and shearing piezoelectric patches number is identical.
Column 2-6 is divided into upper and lower two parts, and wherein top is divided into cylindrical structure, bottom to be divided into square to tie Structure;4 piezoelectric patches groups 2-5 are enclosed in around column 2-6 lower part cube structure, and abutting contact Four outer walls of column 2-6 lower part cube structure.
Foil gauge (2-8) distributing position of every layer is identical, and is evenly distributed on cylindrical structure peripheral outer wall In same plane;Foil gauge two full-bridge circuits of composition of the upper and lower;In the foil gauge in middle level, every phase To two foil gauges composition one half-bridge circuit, totally two half-bridge circuits.
It is embodiment full-bridge circuit mode of connection schematic diagram as shown in Figure 5 a, has figure to understand, described full-bridge Circuit includes 4 foil gauges, respectively foil gauge R1, foil gauge R2, foil gauge R3, foil gauge R4; Wherein foil gauge R1 is adjacently positioned with foil gauge R2, and foil gauge R2 is adjacently positioned with foil gauge R3, should Becoming sheet R3 adjacently positioned with foil gauge R4, foil gauge R4 is adjacently positioned with foil gauge R1;Foil gauge R1 End is connected with foil gauge R2 head end, and foil gauge R2 end is connected with foil gauge R4 head end, foil gauge R4 end is connected with foil gauge R3 head end, and foil gauge R3 end is connected with foil gauge R1 head end;At R1 Head end and the head end of R4 connect positive pole and the negative pole of power supply respectively, the head end of R2 and R3 head end even Connect positive pole and the negative pole of output signal.
The resistance of four foil gauges accessing full-bridge circuit is R, and the input voltage accessing full-bridge circuit is U, The output voltage of full-bridge circuit is Δ U;Wherein U is provided by dynamic strain indicator, and Δ U is owing to foil gauge deforms Produce, and access dynamic strain indicator;8 foil gauges of the upper and lower in the present invention, can form 2 Full-bridge circuit;When disturbing source produces vibration, cause owing to strain force sensor deforms being pasted onto Foil gauge thereon deforms, thus 2 full-bridge circuits all produce output voltage Δ U;Dynamic strain indicator is adopted Collection to 2 Δ U and is transferred to Data collection and precessing system by holding wire.
It is embodiment half-bridge circuit mode of connection schematic diagram, as seen from the figure, described half-bridge as shown in Figure 5 b Circuit includes 2 foil gauges and 2 outer meeting resistances;Two panels foil gauge is respectively foil gauge R1, foil gauge R2;Two panels outer meeting resistance is designated as resistance R3, resistance R4;Wherein foil gauge R1 end and foil gauge R2 Head end connects, and foil gauge R2 end is connected with resistance R4 head end, resistance R4 end and resistance R3 head end Connecting, resistance R3 end is connected with foil gauge R1 head end;The head end of foil gauge R1 and the head of resistance R4 End connects positive pole and the negative pole of power supply respectively, and the head end of foil gauge R2 and the head end of R3 connect output signal Positive pole and negative pole.
The resistance and two fixed resistances that access two foil gauges of half-bridge circuit are R, access half-bridge circuit Input voltage be U, the output voltage of half-bridge circuit is Δ U;Wherein U is provided by dynamic strain indicator, and Δ U is Owing to foil gauge deformation produces, and access dynamic strain indicator;4 foil gauges in the middle level in the present invention and 4 Individual fixed resistance can form 2 half-bridge circuits;When disturbing source produces vibration, owing to strain-type power senses Device deforms and causes being pasted onto foil gauge thereon and deform, thus 2 half-bridge circuits all produce defeated Go out voltage Δ U;Dynamic strain indicator collects 2 Δ U and is transferred to data acquisition and processing (DAP) system by holding wire System.
When there is active force between column 2-6 and pedestal 2-1, if active force be X to or Y-direction, 4 groups In piezoelectric patches group, there are two groups of tension and compression piezoelectric patches surfaces to produce induced voltage, shear piezoelectric patches surface for other two groups Producing induced voltage, if active force is Z-direction, the shearing piezoelectric patches surface in 4 groups of piezoelectric patches groups produces sensing Voltage.By shearing induced voltage and the sensing of tension and compression piezoelectric patches of piezoelectric patches in measuring 4 groups of piezoelectric patches respectively Voltage, can obtain the active force in tri-directions of X, Y, Z between column 2-6 and pedestal 2-1.
For strain measurement part, when there is active force between column 2-6 and pedestal 2-1, different directions Active force cause the resistance variations of each foil gauge all to differ, by apply on column X to, Y-direction, The canonical action power of Z-direction, can obtain 12 foil gauge change in resistance amounts corresponding with a direction amount of force Relation, and then obtain the calibration matrix of sensor, it is achieved X, Y, Z tri-between column 2-6 and pedestal 2-1 The measurement of the active force in individual direction.
Chassis 1 is fixed, when strong or moment loading is on table top 3,4 piezoelectric strain combination type power Sensor 2 produces measures signal, by measuring the active force in tri-directions of 4 strong points X, Y, Z, and can To resolve the six-dimensional force component obtained suffered by table top 3.
Piezoelectric strain combination type microvibration measuring system is arranged on ground, small sample perturbations source test specimen is installed On the playing surface 1, check that the signal of foil gauge and piezoelectric patches is the most normal, run small sample perturbations source afterwards, make It produces vibration, so that the foil gauge composition pasted on piezoelectric strain combination type force transducer 2 is complete, partly Bridge circuit and piezoelectric patches produce voltage signal, and this voltage signal is converted into three by Data collection and precessing system Individual microvibration force signal and three microvibration torque signals, can accurately analyze small based on this The vibration characteristics of disturbing source.
In a word, the present invention measures system can accurately measure the vibration force in small sample perturbations source, the frequency model of measurement Enclose and can be as accurate as 0Hz, and the reliability measured is high.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.

Claims (10)

1. a piezoelectric strain combination type microvibration measuring device, it is characterised in that: include chassis (1), Piezoelectric strain combination type force transducer (2) and table top (3);Wherein chassis (1) is positioned at bottom;Piezoelectricity should Become combination type force transducer (2) and be fixedly mounted on the upper surface of chassis (1);Table top (3) fixedly mounts Upper surface at piezoelectric strain combination type force transducer (2);Described table top (3) top is divided into plate-like shape, The bottom of plate-like shape is cross square column, and the lower space by table top (3) of described cross square column symmetry is divided into Four equal area;4 piezoelectric strain combination type power are fixedly mounted between table top (3) and chassis (1) Sensor (2);4 piezoelectric strain combination type force transducers are symmetrically distributed in described four equal area.
Piezoelectric strain combination type microvibration measuring device the most according to claim 1, it is characterised in that: Described piezoelectric strain combination type force transducer (2) includes that pedestal (2-1), housing (2-3), piezoelectric patches are protected Sheet (2-4), piezoelectric patches group (2-5) and column (2-6);Wherein, pedestal (2-1) is positioned at bottom;Shell Body (2-3) is fixedly mounted on the upper surface of pedestal (2-1), and housing (2-3) is hollow cuboid, four The side vertical of every limit, limit inwall is installed with piezoelectric patches screening glass (2-4);Each piezoelectric patches screening glass (2-4) inner surface vertically fixedly mounts piezoelectric patches group (2-5);Column (2-6) vertically fixedly mounts At the upper surface of pedestal (2-1), and it is positioned at the center of housing (2-3);Described pedestal (2-1) is solid Dingan County is contained in the upper surface of chassis (1);Described column (2-6) upper surface connects with the lower surface of table top (3) Touch.
Piezoelectric strain combination type microvibration measuring device the most according to claim 2, it is characterised in that: Piezoelectric patches group (2-5) all comprises n drawing and pressing type piezoelectric patches and m shearing piezoelectric patches;Wherein n is just Integer;M is positive integer;And in the piezoelectric patches group (2-5) of the side installation of housing (2-3) every limit inwall, Drawing and pressing type piezoelectric patches number is identical, and shearing piezoelectric patches number is identical.
Piezoelectric strain combination type microvibration measuring device the most according to claim 2, it is characterised in that: Described column (2-6) is divided into upper and lower two parts, and wherein top is divided into cylindrical structure, bottom to be divided into square Structure.
Piezoelectric strain combination type microvibration measuring device the most according to claim 4, it is characterised in that: 4 piezoelectric patches groups (2-5) are enclosed in around column (2-6) lower part cube structure, and are close to connect Touch four outer walls of column (2-6) lower part cube structure.
Piezoelectric strain combination type microvibration measuring device the most according to claim 4, it is characterised in that: Stress collection mesopore (2-7) and foil gauge (2-8) it is provided with on the cylindrical structure of described column (2-6) upper part; Column (2-6) in axial direction divides upper, middle and lower-ranking to arrange, every layer all in cylindrical structure peripheral outer wall Pasting 4 foil gauges (2-8), every ply strain sheet (2-8) is positioned at column (2-6) same plane, altogether Paste 12 foil gauges (2-8);Each foil gauge (2-8) is other all has stress collection mesopore (2-7).
Piezoelectric strain combination type microvibration measuring device the most according to claim 6, it is characterised in that: Described stress integrates mesopore (2-7) as slot, and the position of foil gauge (2-8) is provided with wedge angle.
Piezoelectric strain combination type microvibration measuring device the most according to claim 6, it is characterised in that: Foil gauge (2-8) distributing position of described every layer is identical, and is evenly distributed on cylindrical structure peripheral outer wall In same plane;Foil gauge two full-bridge circuits of composition of the upper and lower;In the foil gauge in middle level, every phase To two foil gauges composition one half-bridge circuit, totally two half-bridge circuits.
Piezoelectric strain combination type microvibration measuring device the most according to claim 8, it is characterised in that: Described full-bridge circuit includes 4 foil gauges, respectively foil gauge R1, foil gauge R2, foil gauge R3, Foil gauge R4;Wherein foil gauge R1 is adjacently positioned with foil gauge R2, foil gauge R2 and foil gauge R3 Adjacently positioned, foil gauge R3 is adjacently positioned with foil gauge R4, foil gauge R4 cloth adjacent with foil gauge R1 Put;Foil gauge R1 end is connected with foil gauge R2 head end, foil gauge R2 end and foil gauge R4 head end Connecting, foil gauge R4 end is connected with foil gauge R3 head end, and foil gauge R3 end is first with foil gauge R1 End connects;Positive pole and the negative pole of power supply is connected respectively, at the head end of R2 at the head end of R1 and the head end of R4 With positive pole and the negative pole that the head end of R3 connects output signal.
Piezoelectric strain combination type microvibration measuring device the most according to claim 8, it is characterised in that: Described half-bridge circuit includes 2 foil gauges and 2 outer meeting resistances;Two panels foil gauge be respectively foil gauge R1, Foil gauge R2;Two panels outer meeting resistance is designated as resistance R3, resistance R4;Wherein foil gauge R1 end and strain Sheet R2 head end connects, and foil gauge R2 end is connected with resistance R4 head end, resistance R4 end and resistance R3 Head end connects, and resistance R3 end is connected with foil gauge R1 head end;The head end of foil gauge R1 and resistance R4 Head end connect positive pole and the negative pole of power supply respectively, the head end of foil gauge R2 and the head end of R3 connect output letter Number positive pole and negative pole.
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CN106768288A (en) * 2016-12-05 2017-05-31 北京航空航天大学 A kind of high precision high rigidity heavy load piezoelectric type decouples microvibration measuring system
CN106768501A (en) * 2017-03-15 2017-05-31 上海好耐电子科技有限公司 The embedded device for measuring force of strain sensor
CN107036574A (en) * 2017-05-22 2017-08-11 大连大学 Flywheel strain gauge means and method in the experiment of core main pump flywheel
CN107462634A (en) * 2017-09-04 2017-12-12 中国计量大学 Soil shear strength in-situ measuring method and system based on piezo-electric effect
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism

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CN103323097A (en) * 2013-06-19 2013-09-25 北京航空航天大学 Ultra-low frequency high-accuracy micro-vibration measuring system
CN203519152U (en) * 2013-09-26 2014-04-02 北京空间飞行器总体设计部 Ultra-low frequency six-component micro-vibration measurement system

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CN106768288A (en) * 2016-12-05 2017-05-31 北京航空航天大学 A kind of high precision high rigidity heavy load piezoelectric type decouples microvibration measuring system
CN106768288B (en) * 2016-12-05 2019-05-03 北京航空航天大学 A kind of high precision high rigidity heavy load piezoelectric type decoupling microvibration measuring system
CN106768501A (en) * 2017-03-15 2017-05-31 上海好耐电子科技有限公司 The embedded device for measuring force of strain sensor
CN106768501B (en) * 2017-03-15 2019-06-18 上海好耐电子科技有限公司 The embedded device for measuring force of strain sensor
CN107036574A (en) * 2017-05-22 2017-08-11 大连大学 Flywheel strain gauge means and method in the experiment of core main pump flywheel
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CN107462634B (en) * 2017-09-04 2023-09-29 中国计量大学 Soil shear strength in-situ measurement method and system based on piezoelectric effect
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism

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