CN107131986A - A kind of parallel beam type six-dimension force sensor of diplopore - Google Patents

A kind of parallel beam type six-dimension force sensor of diplopore Download PDF

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Publication number
CN107131986A
CN107131986A CN201710339429.7A CN201710339429A CN107131986A CN 107131986 A CN107131986 A CN 107131986A CN 201710339429 A CN201710339429 A CN 201710339429A CN 107131986 A CN107131986 A CN 107131986A
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China
Prior art keywords
end cover
hole
spring beam
shell
groups
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CN201710339429.7A
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孙永军
刘伊威
刘宏
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN201710339429.7A priority Critical patent/CN107131986A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)

Abstract

A kind of parallel beam type six-dimension force sensor of diplopore, is related to sensor technical field.The problem of present invention is to solve that six-dimension force sensor sensitivity in the prior art is low, retinoic acid syndrome is big, nonlinearity is big, precision is low and be sluggish big.One end of four interior spring beams of the invention is each attached on the outside of loading bench, four outer spring beams are separately fixed at the other end of four interior spring beams, four fixed stations are located between two adjacent outer spring beams respectively, the two ends of fixed station are connected by floating beam outer spring beam adjacent thereto respectively, the upper and lower surface of spring beam is equipped with two resistance strain gages in each, four resistance strain gages are equipped with the outside of each outer spring beam, elastomer is located in outer shell cavity, upper end cover is covered at the opening of shell, and the external diameter of upper end cover is less than the internal diameter of shell.The present invention is used to measure sextuple force information.

Description

A kind of parallel beam type six-dimension force sensor of diplopore
Technical field
The invention belongs to sensor technical field, more particularly to a kind of parallel beam type six-dimension force sensor of diplopore.
Background technology
With developing rapidly for robot technology, for proposing higher want with the robot that multisensor is perceived Ask.Power is felt as one very important function of robot, and vital effect is played in robot development.Perceptually Robot Force feels a kind of most important sensor, and six-dimension force sensor is perceived in the wrist power of robot, dexterous robot finger Huge effect is played in terms of sharp power detection, the measurement of humanoid robot foot section power.Therefore, the related skill of six-dimension force sensor Art is the big study hotspot and difficulties of robot field.The sensitivity of six-dimension force sensor, retinoic acid syndrome, the linearity, Precision and sluggishness are to influence several most important indexs of sensor performance.How to improve six-dimension force sensor sensitivity, The linearity and precision, reduction retinoic acid syndrome, reduction sluggishness are the focal issue for enjoying research all the time, but so far not There is a good solution.
It is existing to be used to detect that the elastomeric resilient beam after six-dimension force sensor stress is often solid beam, such as patent CN103940544B、CN103487194B、CN103528746B、CN103528726B、CN104048790A、 CN100535620C, CN105651446A etc., the advantage of the structure are that the rigidity of sensor is big, sluggish small, but are had the disadvantage sensitive The low, retinoic acid syndrome of degree is big, nonlinearity is big, precision is low.In order to improve the reduction retinoic acid syndrome of sensor, patent CN10149102B reduces the width of elastomer beam, so that solid girder construction is become into hardened structure, although the structure can subtract Small retinoic acid syndrome, but the rigidity of sensor can be caused to reduce, it is not suitable for the industrial robot field of requirement higher stiffness.Patent The mode that CN102853958B employs double cantilever spring beams carries out the detection of six-dimension force sensor, but the structure of the sensor Form is not compact enough, is not suitable for requiring the six-dimension force sensor detection of the limited industrial robot wrist in space.Patent CN106225977A employs unidirectional transducer and improves measurement accuracy, and the spring beam of unidirectional transducer is binocular structure, but should The elastomer of patent is the elastomer of combination, therefore there are problems that gap, pretightning force, so as to cause six-dimensional force to sense There is larger hysteresis effect, influence repeatable accuracy etc. in device.U.S. patent Nos US6871552B2 becomes solid elastomeric girder construction For blind hole spring beam, although the structure can effectively improve sensor accuracy class, but thick in view of the blind hole for pasting foil gauge Degree requires very small, so as to cause the spring beam of blind hole structure to be difficult to, manufacturability is poor.
The content of the invention
The present invention be in order to solve that six-dimension force sensor sensitivity in the prior art is low, retinoic acid syndrome is big, nonlinearity is big, The problem of precision is low and sluggish big, now provides a kind of diplopore parallel beam type six-dimension force sensor.
A kind of parallel beam type six-dimension force sensor of diplopore includes:Shell 1, multiple lower end fixing screws 2, upper end cover 3, elasticity Body 4, multiple upper end fixing screws 5 and multiple resistance strain gages 6;
Shell 1 is drum-shaped, and the center of the bottom surface of shell 1 is provided with central through hole, and upper end cover 3 is annular,
Elastomer 4 includes:Four interior spring beam 4-1, four outer spring beam 4-2, eight floating beam 4-4, four fixed stations 4-5 and loading bench 4-6;
Loading bench 4-6 is cylindrical shape, and four interior spring beam 4-1 one end is each attached on the outside of loading bench 4-6, and in four Spring beam 4-1 uniformly arranges on the outside of loading bench 4-6, and four outer spring beam 4-2 are separately fixed at the another of four interior spring beam 4-1 One end, outer spring beam 4-2 is mutually perpendicular to interior spring beam 4-1, and four fixed station 4-5 are located at two adjacent outer spring beams respectively Between 4-2, fixed station 4-5 two ends are connected by outer spring beam 4-2 adjacent thereto floating beam 4-4 respectively, floating beam 4-4's Thickness is less than 1/10th of its length or width,
Spring beam beyond two outer spring beam hole 4-3, two outer spring beam hole 4-3 is provided with each outer spring beam 4-2 4-2 center line is the symmetrically arranged upper lower through-hole of symmetry axis, and the interior spring beam of a circumference is provided with each interior spring beam 4-1 Hole 4-9,
Spring beam 4-1 upper and lower surface is equipped with two resistance strain gages 6 in each, and resistance strain gage 6 with its institute It is corresponding in interior spring beam 4-1 interior spring beam hole 4-9, it is equipped with four resistance strain gages on the outside of each outer spring beam 4-2 6, two resistance strain gages 6 are one group, every group of resistance strain gage 6 with its in outer spring beam 4-2 two outer spring beam holes 4-3 is corresponded,
Elastomer 4 is located at the intracavitary of shell 1, and upper end cover 3 is covered at the opening of shell 1, upper surface and the shell 1 of upper end cover 3 Open end flush, shell 1, upper end cover 3 and elastomer 4 are coaxially disposed, and the external diameter of upper end cover 3 is less than the internal diameter of shell 1, outside Shell 1 is fixedly connected with elastomer 4 by multiple lower end fixing screws 2, and upper end cover 3 fixes spiral shell with elastomer 4 by multiple upper ends Nail 5 is fixedly connected.
It is provided with 8 outer casing screw hole 1-1 and 8 outer casing through hole 1-2, upper end cover 3 and is provided with 8 on the bottom surface of shell 1 End cap screwed hole 3-1 and 8 upper end cover through hole 3-2,
8 outer casing screw hole 1-1 constitute 4 groups of screwed hole groups for one group altogether two-by-two, and 4 groups of screwed hole groups are circumferential uniform along shell 1 90 ° are spaced between arrangement, and adjacent two groups of screwed hole groups, 8 outer casing through hole 1-2 constitute 4 groups of sets of vias, 4 for one group altogether two-by-two Group sets of vias is spaced 90 °, circumference where 4 groups of screwed hole groups along the circumferential uniform arrangement of shell 1, and between adjacent two groups of sets of vias Radius is less than radius of a circle where 4 groups of sets of vias,
8 upper end cover screwed hole 3-1 along the circumferential uniform arrangement of upper end cover 3, and adjacent two upper end cover screwed hole 3-1 it Between be spaced 45 °, 8 upper end cover through hole 3-2 are spaced along the circumferential uniform arrangement of upper end cover 3, and between adjacent upper end cover through hole 3-2 45 °, radius of a circle is more than radius of a circle where 8 upper end cover through hole 3-2 where 8 upper end cover screwed hole 3-1.
Loading bench 4-6 provided with 8 microscope carrier screwed holes 4-7,8 microscope carrier screwed hole 4-7 respectively with 8 upper end cover through hole 3- 2 is just right one by one, and upper end fixing screws 5 are realized with screwed hole 4-7 through upper end cover through hole 3-2 and are threadedly coupled,
Be equipped with each fixed station 4-5 two fixed station screwed holes 4-8,8 fixed station screwed hole 4-8 respectively with 8 Outer casing through hole 1-2 is just right one by one, and lower end fixing screws 2 realize that screw thread connects through outer casing through hole 1-2 and fixed station screwed hole 4-8 Connect.
The parallel beam type six-dimension force sensor of a kind of diplopore that the present invention is provided, uses spring beam for diplopore parallel girder to improve Sensitivity, precision simultaneously reduce retinoic acid syndrome, and the linearity of sensor is improved by changing the rounding size of square-section.
The invention has the advantages that:
First, the spring beam for existing six-dimension force sensor is solid beam, therefore causes the sensitivity of sensor low, and And cause the retinoic acid syndrome of sensor big.Therefore, the present invention with reference to one-dimensional pull pressure sensor pass through frequently with diplopore it is parallel Girder construction is improved to existing elastomer for six-dimensional force sensor.Interior spring beam is processed on the interior elastomer beam of elastomer Hole, processes spring beam hole of going out on outer elastomer beam.Which has sensitivity height, dimension relative to traditional solid elastomeric beam Between couple the advantages of small, linearity is good.
2nd, through holes is in the interior spring beam hole and outer spring beam hole that the present invention is used, and the section of through-hole form is band rounding Rectangle.According to the different usage amount range request of six-dimension force sensor, by change the length and width size of square-section come The sensitivity of sensor is influenceed, the linearity of sensor is influenceed by changing the rounding size of square-section.
Brief description of the drawings
Fig. 1 is a kind of sectional view of the parallel beam type six-dimension force sensor of diplopore described in embodiment one;
Fig. 2 is the front view of elastomer;
Fig. 3 is the rearview of elastomer;
The profile for the elastomer that Fig. 4 is.
Embodiment
Embodiment one:Present embodiment is illustrated referring to figs. 1 to Fig. 4, one kind described in present embodiment is double The parallel beam type six-dimension force sensor in hole includes:Shell 1, multiple lower end fixing screws 2, upper end cover 3, elastomer 4, multiple upper ends are consolidated Determine screw 5 and multiple resistance strain gages 6;
Shell 1 is drum-shaped, and the center of the bottom surface of shell 1 is provided with central through hole, and upper end cover 3 is annular,
Elastomer 4 includes:Four interior spring beam 4-1, four outer spring beam 4-2, eight floating beam 4-4, four fixed stations 4-5 and loading bench 4-6;
Loading bench 4-6 is cylindrical shape, and four interior spring beam 4-1 one end is each attached on the outside of loading bench 4-6, and in four Spring beam 4-1 uniformly arranges on the outside of loading bench 4-6, and four outer spring beam 4-2 are separately fixed at the another of four interior spring beam 4-1 One end, outer spring beam 4-2 is mutually perpendicular to interior spring beam 4-1, and four fixed station 4-5 are located at two adjacent outer spring beams respectively Between 4-2, fixed station 4-5 two ends are connected by outer spring beam 4-2 adjacent thereto floating beam 4-4 respectively, floating beam 4-4's Thickness is less than 1/10th of its length or width,
Spring beam beyond two outer spring beam hole 4-3, two outer spring beam hole 4-3 is provided with each outer spring beam 4-2 4-2 center line is the symmetrically arranged upper lower through-hole of symmetry axis, and the interior spring beam of a circumference is provided with each interior spring beam 4-1 Hole 4-9,
Spring beam 4-1 upper and lower surface is equipped with two resistance strain gages 6 in each, and resistance strain gage 6 with its institute It is corresponding in interior spring beam 4-1 interior spring beam hole 4-9, it is equipped with four resistance strain gages on the outside of each outer spring beam 4-2 6, two resistance strain gages 6 are one group, every group of resistance strain gage 6 with its in outer spring beam 4-2 two outer spring beam holes 4-3 is corresponded,
Elastomer 4 is located at the intracavitary of shell 1, and upper end cover 3 is covered at the opening of shell 1, upper surface and the shell 1 of upper end cover 3 Open end flush, shell 1, upper end cover 3 and elastomer 4 are coaxially disposed, and the external diameter of upper end cover 3 is less than the internal diameter of shell 1, outside Shell 1 is fixedly connected with elastomer 4 by multiple lower end fixing screws 2, and upper end cover 3 fixes spiral shell with elastomer 4 by multiple upper ends Nail 5 is fixedly connected.
In present embodiment, interior spring beam 4-1 and outer spring beam 4-2 are mutually perpendicular to and constitute T-shaped girder construction;Interior elastomer Beam 4-1 and interior spring beam hole 4-9 thereon constitute diplopore parallel girder;Outer spring beam 4-2 and outer spring beam hole 4-3 structures thereon Into diplopore parallel girder.32 sheet resistance foil gauges 6 are pasted in interior spring beam 4-1 and outer spring beam 4-2 proper site, are constituted altogether 8 groups of favour stone full-bridge circuits, the measurement for realizing sextuple force information, 2 groups of favour stones full-bridge circuit therein can be used as backup. Present embodiment has that compact conformation, retinoic acid syndrome are small, sensitivity is big, the linearity good, precision is high, it is sluggish small the features such as.
Embodiment two:Present embodiment is sextuple to the parallel beam type of a kind of diplopore described in embodiment one Force snesor is described further, in present embodiment, and 8 outer casing screw hole 1-1 and 8 shells are provided with the bottom surface of shell 1 8 upper end cover screwed hole 3-1 and 8 upper end cover through hole 3-2 are provided with through hole 1-2, upper end cover 3,
8 outer casing screw hole 1-1 constitute 4 groups of screwed hole groups for one group altogether two-by-two, and 4 groups of screwed hole groups are circumferential uniform along shell 1 90 ° are spaced between arrangement, and adjacent two groups of screwed hole groups, 8 outer casing through hole 1-2 constitute 4 groups of sets of vias, 4 for one group altogether two-by-two Group sets of vias is spaced 90 °, circumference where 4 groups of screwed hole groups along the circumferential uniform arrangement of shell 1, and between adjacent two groups of sets of vias Radius is less than radius of a circle where 4 groups of sets of vias,
8 upper end cover screwed hole 3-1 along the circumferential uniform arrangement of upper end cover 3, and adjacent two upper end cover screwed hole 3-1 it Between be spaced 45 °, 8 upper end cover through hole 3-2 are spaced along the circumferential uniform arrangement of upper end cover 3, and between adjacent upper end cover through hole 3-2 45 °, radius of a circle is more than radius of a circle where 8 upper end cover through hole 3-2 where 8 upper end cover screwed hole 3-1.
The parallel beam type six-dimension force sensor of a kind of diplopore described in present embodiment in practical application, sensor pass through it is outer Shell screwed hole 1-1 and upper end cover screwed hole 3-1 are attached with outside, so that the six-dimensional force infomation detection for actual condition.
Embodiment three:Present embodiment is sextuple to the parallel beam type of a kind of diplopore described in embodiment two Force snesor is described further, in present embodiment, and loading bench 4-6 is provided with 8 microscope carrier screwed hole 4-7,8 microscope carrier screw threads Hole 4-7 is just right one by one with 8 upper end cover through hole 3-2 respectively, and upper end fixing screws 5 pass through upper end cover through hole 3-2 and screwed hole 4-7 Realize threaded connection,
Be equipped with each fixed station 4-5 two fixed station screwed holes 4-8,8 fixed station screwed hole 4-8 respectively with 8 Outer casing through hole 1-2 is just right one by one, and lower end fixing screws 2 realize that screw thread connects through outer casing through hole 1-2 and fixed station screwed hole 4-8 Connect.
Embodiment four:Present embodiment is sextuple to the parallel beam type of a kind of diplopore described in embodiment one Force snesor is described further, in present embodiment, and all resistance strain gages 6 are pasted onto on elastomer 4, interior spring beam 4- Resistance strain gage 6 on 1 and outer spring beam 4-2 is arranged along the length direction of place beam.
As shown in Figures 2 and 3, three-dimensional system of coordinate is set up, the loading bench 4-6 center of circle is regard as origin of coordinates O, loading bench 4- 6 axial direction is Z axis, and resistance strain gage R19, R20, R25 and R26 arragement direction are X-axis, resistance strain gage R23, R24, R29 Arragement direction with R30 is Y-axis,
Resistance strain gage R21, R22, R31, R32 constitute a favour stone full-bridge, for measuring moment M x;
Resistance strain gage R19, R20, R25, R26 constitute a favour stone full-bridge, for measuring moment M y;
Resistance strain gage R1, R2, R11, R12 constitute a favour stone full-bridge, for measuring moment of torsion Mz;
Resistance strain gage R7, R8, R13, R14 constitute a favour stone full-bridge, for measuring moment of torsion Mz;
Resistance strain gage R3, R4, R9, R10 constitute a favour stone full-bridge, for measuring tangential force Fx;
Resistance strain gage R5, R6, R15, R16 constitute a favour stone full-bridge, for measuring tangential force Fy;
Resistance strain gage R17, R18, R27, R28 constitute a favour stone full-bridge, for measuring axial force F z;
Resistance strain gage R23, R24, R29, R30 constitute a favour stone full-bridge, for measuring axial force F z.
The initial resistivity value of all resistance strain gages is equal, constitutes above-mentioned eight groups of measurements favour stone full-bridge, and power is believed in realization Breath changes into voltage signal, and by demarcation, decoupling, sextuple force information can be perceived simultaneously.
Embodiment five:Present embodiment is sextuple to the parallel beam type of a kind of diplopore described in embodiment one Force snesor is described further, in present embodiment, the section of interior spring beam hole 4-9 cross sectional shapes and outer spring beam hole 4-3 Shape is the rectangle with rounding.
During practical application, the size of the length of interior spring beam hole 4-9 section rectangle, width and rounding can be adjusted It is whole, and four roundings are equal in magnitude;The size of the length of outer spring beam hole 4-3 section rectangle, width and rounding To adjust, and four roundings are equal in magnitude.
Embodiment six:Present embodiment is sextuple to the parallel beam type of a kind of diplopore described in embodiment one Force snesor is described further, in present embodiment, and the material of elastomer 4 is duralumin, hard alumin ium alloy, stainless steel or structural alloy steel, Elastomer 4 is disposably machined by integral material.

Claims (6)

1. a kind of parallel beam type six-dimension force sensor of diplopore, it is characterised in that including:Shell (1), multiple lower end fixing screws (2), upper end cover (3), elastomer (4), multiple upper end fixing screws (5) and multiple resistance strain gages (6);
Shell (1) is drum-shaped, and the center of shell (1) bottom surface is provided with central through hole, and upper end cover (3) is annular,
Elastomer (4) includes:Four interior spring beams (4-1), four outer spring beams (4-2), eight floating beams (4-4), four it is solid Determine platform (4-5) and loading bench (4-6);
Loading bench (4-6) is cylindrical shape, and one end of four interior spring beams (4-1) is each attached on the outside of loading bench (4-6), and four The uniform arrangement on the outside of loading bench (4-6) of interior spring beam (4-1), four outer spring beams (4-2) are separately fixed in four elastic The other end of beam (4-1), outer spring beam (4-2) is mutually perpendicular to interior spring beam (4-1), and four fixed stations (4-5) are located at respectively Between two adjacent outer spring beams (4-2), the two ends of fixed station (4-5) pass through adjacent thereto outer of floating beam (4-4) respectively Spring beam (4-2) is connected, and the thickness of floating beam (4-4) is less than 1/10th of its length or width,
Elasticity beyond two outer spring beam holes (4-3), two outer spring beam holes (4-3) is provided with each outer spring beam (4-2) The center line of beam (4-2) is the symmetrically arranged upper lower through-hole of symmetry axis, it is each in the interior of circumference is provided with spring beam (4-1) Spring beam hole (4-9),
The upper and lower surface of spring beam (4-1) is equipped with two resistance strain gages (6) in each, and resistance strain gage (6) and its Interior spring beam (4-1) interior spring beam hole (4-9) it is corresponding, be equipped with four electricity on the outside of each outer spring beam (4-2) Foil gauge (6) is hindered, two resistance strain gages (6) are one group, every group of resistance strain gage (6) is with its institute at outer spring beam (4-2) Two outer spring beam holes (4-3) correspond,
Elastomer (4) is located at shell (1) intracavitary, and upper end cover (3) covered at the opening of shell (1), the upper surface of upper end cover (3) with The open end of shell (1) is flushed, and shell (1), upper end cover (3) and elastomer (4) are coaxially disposed, and the external diameter of upper end cover (3) is small Internal diameter in shell (1), shell (1) is fixedly connected with elastomer (4) by multiple lower end fixing screws (2), upper end cover (3) with Elastomer (4) is fixedly connected by multiple upper end fixing screws (5).
2. a kind of parallel beam type six-dimension force sensor of diplopore according to claim 1, it is characterised in that the bottom of shell (1) It is provided with face on 8 outer casing screw holes (1-1) and 8 outer casing through hole (1-2), upper end cover (3) and is provided with 8 upper end cover screwed holes (3-1) and 8 upper end cover through holes (3-2),
8 outer casing screw holes (1-1) constitute 4 groups of screwed hole groups for one group altogether two-by-two, and 4 groups of screwed hole groups are circumferential uniform along shell (1) 90 ° are spaced between arrangement, and adjacent two groups of screwed hole groups, 8 outer casing through hole (1-2) constitute 4 groups of sets of vias for one group altogether two-by-two, 4 groups of sets of vias are spaced where 90 °, 4 groups of screwed hole groups along the circumferential uniform arrangement of shell (1), and between adjacent two groups of sets of vias Radius of a circle is less than radius of a circle where 4 groups of sets of vias,
8 upper end cover screwed holes (3-1) are uniformly arranged along upper end cover (3) is circumferential, and two adjacent upper end cover screwed holes (3-1) Between be spaced 45 °, 8 upper end cover through holes (3-2) are along the circumferential uniform arrangement of upper end cover (3), and adjacent upper end cover through hole (3-2) Between be spaced 45 °, 8 upper end cover screwed holes (3-1) where radiuss of a circle be more than 8 upper end cover through holes (3-2) where circumference half Footpath.
3. a kind of parallel beam type six-dimension force sensor of diplopore according to claim 2, it is characterised in that loading bench (4-6) Provided with 8 microscope carrier screwed holes (4-7), 8 microscope carrier screwed holes (4-7) are just right one by one with 8 upper end cover through holes (3-2) respectively, Upper end fixing screws (5) are threadedly coupled through upper end cover through hole (3-2) with screwed hole (4-7) realization,
It is equipped with two fixed station screwed holes (4-8) on each fixed station (4-5), 8 fixed station screwed holes (4-8) are respectively with 8 Individual outer casing through hole (1-2) is just right one by one, and lower end fixing screws (2) are real with fixed station screwed hole (4-8) through outer casing through hole (1-2) Now it is threadedly coupled.
4. a kind of parallel beam type six-dimension force sensor of diplopore according to claim 1, it is characterised in that all resistance-strains Piece (6) is pasted onto on elastomer (4), and the resistance strain gage (6) on interior spring beam (4-1) and outer spring beam (4-2) is along institute Arranged in the length direction of beam.
5. a kind of parallel beam type six-dimension force sensor of diplopore according to claim 1, it is characterised in that interior spring beam hole (4-9) cross sectional shape and the cross sectional shape in outer spring beam hole (4-3) are the rectangle with rounding.
6. the parallel beam type six-dimension force sensor of a kind of diplopore according to claim 1, it is characterised in that elastomer (4) Material is duralumin, hard alumin ium alloy, stainless steel or structural alloy steel, and elastomer (4) is disposably machined by integral material.
CN201710339429.7A 2017-05-15 2017-05-15 A kind of parallel beam type six-dimension force sensor of diplopore Pending CN107131986A (en)

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CN109100073A (en) * 2018-07-06 2018-12-28 江西洪都航空工业集团有限责任公司 A kind of six-dimension force sensor and its measurement method based on strain inverting
CN109781330A (en) * 2019-02-25 2019-05-21 重庆大学 Suit beam pressure-volume based on circumferential array perceives six-dimension force sensor
CN110017924A (en) * 2019-02-21 2019-07-16 深圳市力准传感技术有限公司 Six-component sensor
CN112067187A (en) * 2020-08-26 2020-12-11 东北电力大学 Coupling type three-dimensional decoupling wireless passive sensor
CN112924073A (en) * 2021-01-29 2021-06-08 同济大学 Strain type bolt pretightening force gasket sensor based on cantilever structure increase deformation
CN113252227A (en) * 2021-06-21 2021-08-13 深圳市鑫精诚科技有限公司 Six-dimensional force sensor with overload protection structure
CN114018462A (en) * 2021-10-22 2022-02-08 珠海格力电器股份有限公司 Elastomer structure, force sensor and smart machine
CN114279533A (en) * 2021-12-23 2022-04-05 中国航天空气动力技术研究院 High-precision micro-weighing balance device
CN114659696A (en) * 2022-03-22 2022-06-24 广西大学 Capacitive six-dimensional force sensor
CN115326268A (en) * 2022-08-31 2022-11-11 东北电力大学 Coaxial series three-dimensional mechanical self-decoupling force sensor

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CN103528726A (en) * 2013-11-01 2014-01-22 哈尔滨工业大学 Cross-beam-type six-dimensional force sensor with overload protection function
CN103698076A (en) * 2014-01-03 2014-04-02 东南大学 Six-dimensional force-torque sensor for realizing extension of measuring range
CN105651446A (en) * 2016-03-18 2016-06-08 安徽锐聪机器人有限公司 Six-dimensional force sensor
CN106153237A (en) * 2016-06-14 2016-11-23 南京神源生智能科技有限公司 A kind of small-sized six-dimensional force and torque sensor

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CN109100073A (en) * 2018-07-06 2018-12-28 江西洪都航空工业集团有限责任公司 A kind of six-dimension force sensor and its measurement method based on strain inverting
CN110017924A (en) * 2019-02-21 2019-07-16 深圳市力准传感技术有限公司 Six-component sensor
CN109781330A (en) * 2019-02-25 2019-05-21 重庆大学 Suit beam pressure-volume based on circumferential array perceives six-dimension force sensor
CN112067187B (en) * 2020-08-26 2021-10-26 东北电力大学 Coupling type three-dimensional decoupling wireless passive sensor
CN112067187A (en) * 2020-08-26 2020-12-11 东北电力大学 Coupling type three-dimensional decoupling wireless passive sensor
CN112924073B (en) * 2021-01-29 2022-04-05 同济大学 Strain type bolt pretightening force gasket sensor based on cantilever structure increase deformation
CN112924073A (en) * 2021-01-29 2021-06-08 同济大学 Strain type bolt pretightening force gasket sensor based on cantilever structure increase deformation
CN113252227A (en) * 2021-06-21 2021-08-13 深圳市鑫精诚科技有限公司 Six-dimensional force sensor with overload protection structure
CN114018462A (en) * 2021-10-22 2022-02-08 珠海格力电器股份有限公司 Elastomer structure, force sensor and smart machine
CN114279533A (en) * 2021-12-23 2022-04-05 中国航天空气动力技术研究院 High-precision micro-weighing balance device
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CN115326268A (en) * 2022-08-31 2022-11-11 东北电力大学 Coaxial series three-dimensional mechanical self-decoupling force sensor

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