CN107044898B - Six-dimensional force sensor with elastomer structure - Google Patents
Six-dimensional force sensor with elastomer structure Download PDFInfo
- Publication number
- CN107044898B CN107044898B CN201710190373.3A CN201710190373A CN107044898B CN 107044898 B CN107044898 B CN 107044898B CN 201710190373 A CN201710190373 A CN 201710190373A CN 107044898 B CN107044898 B CN 107044898B
- Authority
- CN
- China
- Prior art keywords
- elastic beam
- strain gauge
- branches
- strain
- horizontal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
Abstract
The invention discloses a six-dimensional force sensor with an elastomer structure, which comprises a horizontal elastic beam, a central vertical elastic beam, a loading shaft and an outer ring fixing platform, wherein the horizontal elastic beam is of a cross structure and comprises four branches with equal length, one end of the central vertical elastic beam is fixed at the central position of the cross structure of the horizontal elastic beam and is vertical to the surface of the cross structure, the loading shaft is arranged at the other end of the central vertical elastic beam, the outer ring fixing platform is a circular ring-shaped part sleeved on the outer side of the horizontal elastic beam, the tail ends of the four branches of the horizontal elastic beam are fixed on the inner side surface of the outer ring fixing platform, the tail ends of the four branches of the horizontal elastic beam are of an S-shaped structure, and a strain gauge is also covered on the horizontal elastic beam and/or the central vertical elastic beam. The tail ends of the horizontal elastic beam branches are of S-shaped structures, so that the horizontal elastic beam branches are used as flexible links when acted by acting force in corresponding directions; the design of the central vertical elastic beam reduces the coupling between dimensions, thereby simplifying the decoupling algorithm and improving the measurement precision.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a six-dimensional force sensor with an elastomer structure.
Background
The six-dimensional force sensor is used for measuring three-dimensional orthogonal force (Fx, fy, fz) and three-dimensional orthogonal moment (Mx, my, mz) in a three-dimensional space of a Cartesian coordinate system, and is mainly applied to force and force-position control occasions such as a robot end effector, wheel force detection in the automobile driving process, contour tracking, precise assembly, double-hand coordination and the like due to the characteristics of rich force measurement information, high measurement precision and the like.
The cross beam type structure is the most adopted form of the prior six-dimensional force sensor, and the resistance strain type force measurement principle is the most applied form of the prior six-dimensional force sensor. The patent CN103528746A discloses a cross-beam type six-dimensional force sensor elastomer, which is composed of four inner beams, four outer beams, four overload protection beams, and the like, and can improve the sensitivity and reduce the inter-dimensional coupling, but the structure is relatively complex. Patent CN205333238U discloses a strain type six-dimensional force sensor with a compact structure, which comprises a base elastic body, a cross beam elastic body and the like, wherein the base elastic body is provided with a cavity, and the cross beam elastic body is arranged in the cavity, so that the whole structure is compact.
The international research focus on the multi-dimensional force/torque sensor is mostly on the aspects of detection principle, method innovation, novel elastomer structure design and the like. The specific inter-dimensional coupling of the multi-dimensional force/torque sensor becomes a main problem existing in the multi-dimensional force/torque sensor, and the measurement precision is restricted, so that the subsequent force feedback and force control performance is directly influenced.
Disclosure of Invention
The purpose of the invention is as follows: in order to reduce the measurement error of the six-dimensional force sensor, the invention provides a six-dimensional force sensor with an elastomer structure.
The technical scheme is as follows: the utility model provides a six dimension force transducer with elastomer structure, includes horizontal elastic beam, the perpendicular elastic beam in center, loading axle and outer lane fixed station, horizontal elastic beam is the cruciform structure, and horizontal elastic beam includes four isometric branches, the central point that the perpendicular elastic beam in center' S one end was fixed at horizontal elastic beam cruciform structure puts, and perpendicular with the face at cruciform structure place, the other end at the perpendicular elastic beam in center is installed to the loading axle, the outer lane fixed station is established for the cover and is established the ring form part in the horizontal elastic beam outside, and the outer lane fixed station includes the medial surface, and the end of four branches of horizontal elastic beam is fixed on the medial surface of outer lane fixed station, and the end of four branches of horizontal elastic beam is S type structure, it has the foil gage to still laminate on horizontal elastic beam and/or the perpendicular elastic beam in center.
The working principle is as follows: when the sensor is subjected to Y-direction acting force Fy, the two X-direction elastic beam branches are subjected to bending deformation, the two Y-direction elastic beam branches are subjected to tension-compression deformation and the variation quantity of the two Y-direction elastic beam branches is small and negligible, at the moment, the tail end S-shaped structure of the two Y-direction elastic beam branches can be regarded as a flexible link, and the Fy can be measured through a Wheatstone full-bridge circuit consisting of strain gauges adhered to the left side and the right side of the X-direction elastic beam; when the sensor is subjected to a Z-direction acting moment Mz, the two X-direction elastic beam branches are subjected to bending deformation, the deformations generated at the same positions of the left side surface and the right side surface of the two X-direction elastic beam branches are equal in size and opposite in direction, and the Mz can be measured through a Wheatstone full-bridge circuit formed by strain gauges adhered to the left side surface and the right side surface of the X-direction elastic beam.
When the sensor is subjected to Z-direction acting force Fz, the two Y-direction elastic beam branches are subjected to bending deformation, the deformation generated at the same positions of the upper surface and the lower surface of the two Y-direction elastic beam branches is equal in size and opposite in direction, and the Fz can be measured through a full-bridge circuit formed by strain gauges adhered to the upper surface and the lower surface of the two Y-direction elastic beam branches; when the sensor is subjected to X-direction moment Mx, the two Y-direction elastic beam branches are subjected to bending deformation, the two X-direction elastic beam branches are subjected to torsional deformation, the deformation amount is small and can be ignored, and the Mx can be measured through a full-bridge circuit formed by strain gauges adhered to the upper surfaces and the lower surfaces of the two Y-direction elastic beam branches.
When the sensor is subjected to an acting force Fx in the X direction or a moment My in the Y direction, the central vertical elastic beam is subjected to larger bending deformation, the strains generated at the same positions of the front side surface and the rear side surface of the central vertical elastic beam are equal in magnitude and opposite in direction, and the Fx and the My can be measured through a bridge circuit formed by strain gauges adhered to the front side surface and the rear side surface of the central vertical elastic beam.
Has the advantages that: according to the six-dimensional force sensor with the elastomer structure, the tail ends of the branches of the horizontal elastic beam are designed into the S-shaped structure, so that the horizontal elastic beam can be used as a flexible link when being subjected to acting force in a corresponding direction; compared with the existing cross beam type six-dimensional force sensor, the cross beam type six-dimensional force sensor has the advantages that a central vertical elastic beam is added for sensing acting force Fx in the X direction and torque My in the Y direction; besides the strain gauges are adhered to the four horizontal elastic beam branches, two pairs of strain gauges are adhered to two side faces, facing the Y-direction elastic beam branch, of the central vertical elastic beam, so that the measurement error is reduced; the existing cross beam type six-dimensional force sensor has coupling among three or more directions (such as among Fy, mz and Fx, and among Fz, mx and My), while the six-dimensional force sensor with the elastic body structure only has coupling among two directions (such as among Fy and Mz, among Fz and Mx, and among Fx and My), so that the coupling among dimensions is reduced, the decoupling algorithm is simplified, and the measurement precision is improved.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a six-dimensional force sensor with an elastomer structure according to the present invention.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
As shown in fig. 1, a spatial cartesian coordinate system as shown is established for convenience of describing the orientation.
As shown in fig. 1, six-dimensional force sensor with elastomer structure includes horizontal elastic beam 1, the perpendicular elastic beam 2 in center, loading axle 3 and outer lane fixed station 4, horizontal elastic beam 1 is the cruciform structure, and horizontal elastic beam 1 includes four isometric branches, the central point that the one end of the perpendicular elastic beam 2 in center was fixed at the 1 cruciform structure in horizontal elastic beam puts, and perpendicular with the face at cruciform structure place, the other end at the perpendicular elastic beam 2 in center is installed to loading axle 3, the ring form part in the horizontal elastic beam 1 outside is established for the cover to outer lane fixed station 4, and outer lane fixed station 4 includes medial surface 41, and the end of four branches of horizontal elastic beam 1 is fixed on the medial surface 41 of outer lane fixed station 4, and the end of four branches of horizontal elastic beam 1 is S type structure, it has the foil gage to still paste on horizontal elastic beam and/or the perpendicular elastic beam in center. The thickness of the S-shaped structure is 1mm. The tail ends of the horizontal elastic beam branches are designed into S-shaped structures, so that the horizontal elastic beam branches can be used as flexible links when being subjected to acting force in corresponding directions, namely, the horizontal elastic beam has the function of a floating beam. Compared with the existing cross beam type six-dimensional force sensor, the embodiment has an additional central vertical elastic beam 2 for sensing the acting force Fx in the X direction and the torque My in the Y direction.
The four branches of the central vertical elastic beam 2 and the horizontal elastic beam 1 are quadrangular prisms with square cross sections. The loading shaft 3 is of a cylindrical structure. And 8 upper and lower through holes are formed in the outer ring fixing table 4 and used for fixing the sensor.
The four branches of the horizontal elastic beam 1 comprise two X-direction elastic beam branches 11 and two Y-direction elastic beam branches 12, the two X-direction elastic beam branches 11 are on the same straight line, the two Y-direction elastic beam branches 12 are on the same straight line, the opening directions of the S-shaped structures on the two X-direction elastic beam branches 11 are the same, and the opening directions of the S-shaped structures on the two Y-direction elastic beam branches 12 are the same and are perpendicular to the opening direction of the S-shaped structures on the X-direction elastic beam branches 11. In this embodiment, the opening direction of the S-shaped structure at the end of the X-direction elastic beam branch 11 is the left-right direction; the opening direction of the S-shaped structure at the end of the Y-direction elastic beam branch 12 is the up-down direction.
In addition, the embodiment also designs the pasting position of the strain gauge.
The two X-direction elastic beam branches 11 have the same structure and are adhered with the same strain gauge at symmetrical positions; one X-direction elastic beam branch 11 comprises a left side surface 111 and a right side surface (shielded and not shown in the figure), a first strain gauge 01 and a second strain gauge 02 are attached to the central axis of the left side surface 111, and a third strain gauge and a fourth strain gauge (shielded and not shown in the figure) are respectively attached to the positions, corresponding to the first strain gauge 01 and the second strain gauge 02, on the right side surface; four strain gauges corresponding to the first, second, third and fourth strain gauges 01, 02 and 11' on the other X-direction elastic beam branch are denoted as a thirteenth strain gauge 013, a fourteenth strain gauge 014, a fifteenth strain gauge and a sixteenth strain gauge, respectively.
The two Y-direction elastic beams have the same branch structure and are adhered with the same strain gauge at the symmetrical positions; one of the Y-direction elastic beam branches 12 includes an upper surface 121 and a lower surface (hidden in the drawing, not shown), a fifth strain gauge 05 and a sixth strain gauge 06 are attached to a central axis of the upper surface 121, and a seventh strain gauge and an eighth strain gauge (hidden in the drawing, not shown) are respectively attached to positions on the lower surface corresponding to the fifth strain gauge 05 and the sixth strain gauge 06; four strain gages corresponding to the fifth strain gage 05, the sixth strain gage 06, the seventh strain gage and the eighth strain gage (hidden in the figure and not shown) on the other Y-direction elastic beam branch 12' are marked as a seventeenth strain gage 017, an eighteenth strain gage 018, a nineteenth strain gage and a twentieth strain gage (hidden in the figure and not shown).
The central vertical elastic beam 2 comprises a front side 21, a rear side (hidden in the figure, not shown), a left side 22 and a right side (hidden in the figure, not shown), wherein the front side 21 and the rear side face respectively face the two X-direction elastic beam branches 11, a ninth strain gage 09 and a tenth strain gage 010 are attached to the central axis of the front side 21, and an eleventh strain gage and a twelfth strain gage (hidden in the figure, not shown) are attached to the positions, corresponding to the ninth strain gage 09 and the tenth strain gage 010, on the rear side face respectively.
All strain gages are identical strain gages. Setting the distance from the first strain gauge 01 to the Y-direction elastic beam branch 12 as d1, setting the distance from the fifth strain gauge 05 to the central vertical elastic beam 2 as d2, and setting the distance from the ninth strain gauge 09 to the X-direction elastic beam branch 11 as d3, wherein d1= d2= d3; setting the distance from the second strain gauge 02 to the Y-direction elastic beam branch 12 as d4, setting the distance from the sixth strain gauge 06 to the center vertical elastic beam 2 as d5, and setting the distance from the tenth strain gauge 10 to the X-direction elastic beam branch 11 as d6, wherein d4= d5= d6; and the distance from the first strain gauge 01 to the Y-direction elastic beam branch 12 is not equal to the distance from the second strain gauge 02 to the Y-direction elastic beam branch 12, namely d1 ≠ d4.
The 20 strain gauges constitute six groups of strain gauge groups. Each strain gauge group is electrically connected to form a Wheatstone full-bridge or half-bridge circuit for measuring force or moment of one dimension of space.
The first strain gauge 01, the third strain gauge, the thirteenth strain gauge 013 and the fifteenth strain gauge form a first strain gauge group; the second strain gage 02, the fourth strain gage, the fourteenth strain gage 014 and the sixteenth strain gage constitute a second strain gage group. When the sensor is subjected to an acting force in the Y direction or a moment in the Z direction, the horizontal elastic beam in the X direction is greatly deformed, so that the Wheatstone bridge circuit composed of the first strain gauge group and the second strain gauge group is used for measuring the acting force Fy in the Y direction and the moment Mz in the Z direction respectively.
A third strain gage group is formed by the fifth strain gage 05, the seventh strain gage, the seventeenth strain gage 017 and the nineteenth strain gage; and the sixth strain gage 06, the eighth strain gage, the eighteenth strain gage 018 and the twentieth strain gage form a fourth strain gage group. When the sensor is subjected to Z-direction acting force or X-direction moment, the horizontal elastic beam in the Y direction generates large deformation, so that the Wheatstone bridge circuit consisting of the third and the fourth strain gauge groups is respectively used for measuring Z-direction acting force Fz and X-direction moment Mx.
The ninth strain gage 09 and the eleventh strain gage on the back side form a fifth strain gage group, and the tenth strain gage 10 and the twelfth strain gage on the back side form a sixth strain gage group. When the sensor is subjected to an acting force in the X direction or a moment in the Y direction, the central vertical elastic beam generates large deformation, so that a Wheatstone bridge circuit consisting of the fifth and sixth strain gauge groups is used for measuring the acting force in the X direction Fx and the moment in the Y direction My respectively.
In the structure, besides the strain gauge groups are adhered to corresponding positions of the four horizontal elastic beam branches, two pairs of strain gauges are also adhered to two side faces of the central vertical elastic beam 2 facing the X-direction elastic beam branch, and the measurement error is relatively small. The sensor structure has coupling in two directions (such as Fy and Mz, fz and Mx, and Fx and My), so that the decoupling algorithm can be simplified, and decoupling is easier.
Claims (7)
1. The six-dimensional force sensor with the elastomer structure is characterized by comprising a horizontal elastic beam (1), a central vertical elastic beam (2), a loading shaft (3) and an outer ring fixing table (4), wherein the horizontal elastic beam (1) is of a cross structure, the horizontal elastic beam (1) comprises four equal-length branches, one end of the central vertical elastic beam (2) is fixed at the central position of the cross structure of the horizontal elastic beam (1) and is perpendicular to the surface where the cross structure is located, the loading shaft (3) is installed at the other end of the central vertical elastic beam (2), the outer ring fixing table (4) is a circular ring-shaped component sleeved on the outer side of the horizontal elastic beam (1), the outer ring fixing table (4) comprises an inner side surface (41), the tail ends of the four branches of the horizontal elastic beam (1) are fixed on the inner side surface (41) of the outer ring fixing table (4), the tail ends of the four branches of the horizontal elastic beam (1) are of an S-shaped structure, and strain gauges are attached to the horizontal elastic beam (1) and the central vertical elastic beam (2); the four branches of the horizontal elastic beam (1) comprise two X-direction elastic beam branches (11) and two Y-direction elastic beam branches (12), the two X-direction elastic beam branches (11) are arranged on the same straight line, the two Y-direction elastic beam branches (12) are arranged on the same straight line, the opening directions of the S-shaped structures on the two X-direction elastic beam branches (11) are the same, and the opening directions of the S-shaped structures on the two Y-direction elastic beam branches (12) are the same and are vertical to the opening direction of the S-shaped structures on the X-direction elastic beam branches (11); the two X-direction elastic beam branches (11) have the same structure and are adhered with the same strain gauges at symmetrical positions; the X-direction elastic beam branch (11) comprises a left side surface (111) and a right side surface, a first strain gauge (01) and a second strain gauge (02) are attached to the central axis of the left side surface (111), and a third strain gauge and a fourth strain gauge are respectively attached to the positions, corresponding to the first strain gauge (01) and the second strain gauge (02), on the right side surface; the two Y-direction elastic beams have the same branch structure and are adhered with the same strain gauges at symmetrical positions; the Y-direction elastic beam branch (12) comprises an upper surface (121) and a lower surface, a fifth strain gauge (05) and a sixth strain gauge (06) are attached to the central axis of the upper surface (121), and a seventh strain gauge and an eighth strain gauge are respectively attached to the positions, corresponding to the fifth strain gauge (05) and the sixth strain gauge (06), on the lower surface; the central vertical elastic beam (2) comprises a front side surface (21) and a rear side surface, the front side surface (21) and the rear side surface face the two X-direction elastic beam branches (11) respectively, a ninth strain gage (09) and a tenth strain gage (10) are attached to the central axis of the front side surface (21), and an eleventh strain gage and a twelfth strain gage are attached to the positions, corresponding to the ninth strain gage (09) and the tenth strain gage (10), on the rear side surface respectively; the loading shaft (3) is of a cylindrical structure.
2. Six-dimensional force sensor with elastomeric structure according to claim 1, characterized in that the four branches of the central vertical elastic beam (2) and horizontal elastic beam (1) are each a quadrangular prism with square cross section.
3. The six-dimensional force sensor having an elastomer structure according to claim 1, wherein the first strain gauge (01), the second strain gauge (02), the third strain gauge, the fourth strain gauge, the fifth strain gauge (05), the sixth strain gauge (06), the seventh strain gauge, the eighth strain gauge, the ninth strain gauge (09), the tenth strain gauge (10), the eleventh strain gauge, and the twelfth strain gauge are the same strain gauge.
4. The six-dimensional force sensor with an elastomer structure according to claim 1, wherein a distance from the first strain gauge (01) to the Y-direction elastic beam branch (12) is set to d1, a distance from the fifth strain gauge (05) to the center vertical elastic beam (2) is set to d2, and a distance from the ninth strain gauge (09) to the X-direction elastic beam branch (11) is set to d3, wherein d1= d2= d3; setting the distance from the second strain gauge (02) to the Y-direction elastic beam branch (12) as d4, the distance from the sixth strain gauge (06) to the center vertical elastic beam (2) as d5, and the distance from the tenth strain gauge (10) to the X-direction elastic beam branch (11) as d6, wherein d4= d5= d6; and d1 ≠ d4.
5. Six-dimensional force sensor with an elastomeric structure according to claim 1 or 2, characterised in that the thickness of the S-shaped structure is 1mm.
6. The six-dimensional force sensor with an elastomer structure according to claim 1 or 2, wherein the outer ring fixing table (4) is provided with a plurality of upper and lower through holes for fixing the sensor.
7. The six-dimensional force sensor with an elastomer structure according to claim 1, wherein the opening direction of the S-shaped structure at the end of the X-direction elastic beam branch (11) is a left-right direction; the opening direction of the S-shaped structure at the tail end of the Y-direction elastic beam branch (12) is the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190373.3A CN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190373.3A CN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107044898A CN107044898A (en) | 2017-08-15 |
| CN107044898B true CN107044898B (en) | 2022-11-29 |
Family
ID=59544230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710190373.3A Active CN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107044898B (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981987B (en) * | 2018-08-07 | 2020-08-11 | 东南大学 | Small-dimension space coupling elastic beam six-dimension force sensor |
| CN109186831B (en) * | 2018-09-28 | 2020-05-19 | 中国科学院长春光学精密机械与物理研究所 | Torque sensor |
| CN109855774A (en) * | 2019-01-23 | 2019-06-07 | 广西大学 | A kind of condenser type multi-dimension force sensor of layering |
| CN109855773A (en) * | 2019-01-23 | 2019-06-07 | 广西大学 | A kind of force snesor with serpentine configuration beam |
| CN109708787B (en) * | 2019-03-07 | 2024-01-26 | 合肥工业大学 | Non-coupling multi-dimensional force sensor overload protection method and device |
| CN110368098B (en) * | 2019-08-14 | 2021-09-07 | 安徽工程大学 | Puncture force detection sensor |
| CN111728744B (en) * | 2020-05-15 | 2021-07-13 | 吉林大学 | Spherical bionic six-dimensional force sensor |
| CN112179534A (en) * | 2020-10-28 | 2021-01-05 | 珠海格力电器股份有限公司 | Strain sensor and robot with same |
| CN113092270A (en) * | 2021-04-02 | 2021-07-09 | 浙江辰鑫机械设备有限公司 | High-precision electro-hydraulic servo universal testing machine |
| CN113375852B (en) * | 2021-06-22 | 2022-12-27 | 华北水利水电大学 | Mechanical decoupling type six-dimensional force and torque sensor |
| CN114812908B (en) * | 2021-07-23 | 2024-03-26 | 北京市计量检测科学研究院 | eight-branch orthogonal parallel six-component force sensor and structure optimization method thereof |
| CN113865771B (en) * | 2021-09-27 | 2023-11-17 | 华北水利水电大学 | Plane frog-like parallel two-dimensional force sensor and manufacturing method thereof |
| CN114018462B (en) * | 2021-10-22 | 2022-10-11 | 珠海格力电器股份有限公司 | Force sensor and intelligent equipment |
| CN114323394A (en) * | 2021-12-30 | 2022-04-12 | 航天南洋（浙江）科技有限公司 | Six-dimensional force sensor |
| CN114577434B (en) * | 2022-03-04 | 2024-04-02 | 中航电测仪器(西安)有限公司 | High-precision six-component balance and method |
| CN114603605B (en) * | 2022-03-07 | 2023-11-07 | 常熟理工学院 | Exoskeleton terminal tendency force detection device, detection method and manufacturing method |
| CN116698260B (en) * | 2023-07-07 | 2023-11-14 | 锐马（福建）电气制造有限公司 | Three-dimensional six-dimensional force sensor |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035148A (en) * | 1989-02-01 | 1991-07-30 | Wacoh Corporation | Force detector using resistance elements |
| CN2421630Y (en) * | 2000-06-02 | 2001-02-28 | 哈尔滨工业大学 | Multidimensional sensor |
| CN101672705A (en) * | 2009-09-29 | 2010-03-17 | 西北工业大学 | Six-dimensional force sensor |
| CN201561825U (en) * | 2009-09-29 | 2010-08-25 | 西北工业大学 | Elastomer of six-dimensional force sensor |
| CN102095534A (en) * | 2010-12-08 | 2011-06-15 | 上海交通大学 | Double rood beam high-sensitivity six-dimensional moment sensor |
| CN103376172A (en) * | 2013-07-10 | 2013-10-30 | 上海交通大学 | Six-dimensional force sense sensor for minimally invasive surgical robot |
| CN103528746A (en) * | 2013-11-01 | 2014-01-22 | 哈尔滨工业大学 | Cross-shaped beam type elastomer for six-dimensional force sensor |
| CN203443725U (en) * | 2013-06-26 | 2014-02-19 | 宁波柯力传感科技股份有限公司 | Double-range tension sensor |
| CN103604561A (en) * | 2013-11-27 | 2014-02-26 | 东南大学 | Calibration device and method of six-axis force/torque sensor |
| CN103940544A (en) * | 2014-03-11 | 2014-07-23 | 东南大学 | Double crossed beam combination type finger joint six-dimensional force sensor |
| CN104048790A (en) * | 2014-06-06 | 2014-09-17 | 南京航空航天大学 | Dual orthogonal six-axis force sensor and measuring method |
| JP5667723B1 (en) * | 2014-08-15 | 2015-02-12 | 株式会社ワコーテック | Force sensor |
| CN205333238U (en) * | 2016-01-05 | 2016-06-22 | 泰科思（深圳）传感器有限公司 | Compact structure answers sextuple force transducer of variant |
| JP2019215369A (en) * | 2019-08-23 | 2019-12-19 | 株式会社トライフォース・マネジメント | Force sensor |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0474942A (en) * | 1990-07-16 | 1992-03-10 | Enplas Corp | Three-dimensional input device of stress sensor |
| CN2112378U (en) * | 1991-10-19 | 1992-08-12 | 华中理工大学 | Wrist strength transducer elastomer |
| JP2003185514A (en) * | 2001-12-21 | 2003-07-03 | Lion Corp | Measuring apparatus for three-dimensional loaded load |
| CN101034022A (en) * | 2007-04-17 | 2007-09-12 | 燕山大学 | Six dimensional RSS force sensor |
| CN101750173B (en) * | 2010-01-21 | 2011-04-20 | 重庆大学 | Piezoelectric type six-dimensional force sensor |
| CN202216801U (en) * | 2011-08-08 | 2012-05-09 | 东南大学 | Double-force-source calibration device for six-dimensional force sensor |
| JP6329239B2 (en) * | 2013-03-12 | 2018-05-23 | ストライカー・コーポレイション | Sensor assembly and method for measuring force and torque |
| CN103698076B (en) * | 2014-01-03 | 2015-08-19 | 东南大学 | A kind of six-dimensional force for realizing Range Extension and torque sensor |
| CN104048791B (en) * | 2014-06-24 | 2016-01-13 | 东南大学 | A kind of diesis beam type six-dimensional force of low retinoic acid syndrome and torque sensor |
-
2017
- 2017-03-28 CN CN201710190373.3A patent/CN107044898B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035148A (en) * | 1989-02-01 | 1991-07-30 | Wacoh Corporation | Force detector using resistance elements |
| CN2421630Y (en) * | 2000-06-02 | 2001-02-28 | 哈尔滨工业大学 | Multidimensional sensor |
| CN101672705A (en) * | 2009-09-29 | 2010-03-17 | 西北工业大学 | Six-dimensional force sensor |
| CN201561825U (en) * | 2009-09-29 | 2010-08-25 | 西北工业大学 | Elastomer of six-dimensional force sensor |
| CN102095534A (en) * | 2010-12-08 | 2011-06-15 | 上海交通大学 | Double rood beam high-sensitivity six-dimensional moment sensor |
| CN203443725U (en) * | 2013-06-26 | 2014-02-19 | 宁波柯力传感科技股份有限公司 | Double-range tension sensor |
| CN103376172A (en) * | 2013-07-10 | 2013-10-30 | 上海交通大学 | Six-dimensional force sense sensor for minimally invasive surgical robot |
| CN103528746A (en) * | 2013-11-01 | 2014-01-22 | 哈尔滨工业大学 | Cross-shaped beam type elastomer for six-dimensional force sensor |
| CN103604561A (en) * | 2013-11-27 | 2014-02-26 | 东南大学 | Calibration device and method of six-axis force/torque sensor |
| CN103940544A (en) * | 2014-03-11 | 2014-07-23 | 东南大学 | Double crossed beam combination type finger joint six-dimensional force sensor |
| CN104048790A (en) * | 2014-06-06 | 2014-09-17 | 南京航空航天大学 | Dual orthogonal six-axis force sensor and measuring method |
| JP5667723B1 (en) * | 2014-08-15 | 2015-02-12 | 株式会社ワコーテック | Force sensor |
| CN205333238U (en) * | 2016-01-05 | 2016-06-22 | 泰科思（深圳）传感器有限公司 | Compact structure answers sextuple force transducer of variant |
| JP2019215369A (en) * | 2019-08-23 | 2019-12-19 | 株式会社トライフォース・マネジメント | Force sensor |
Non-Patent Citations (1)
| Title |
|---|
| 《六维力/力矩传感器静态解耦算法的研究与应用》;茅晨，宋爱国，高翔，徐国政;《传感技术学报》;20151231;全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107044898A (en) | 2017-08-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107044898B (en) | Six-dimensional force sensor with elastomer structure | |
| CN106124113B (en) | Novel six-dimensional force and torque sensor | |
| CN103528746B (en) | A kind of cross beam type elastomer for six-dimensional force sensor | |
| Liang et al. | Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams | |
| CN103091026B (en) | Parallel structure six-dimension force sensor | |
| CN104048791B (en) | A kind of diesis beam type six-dimensional force of low retinoic acid syndrome and torque sensor | |
| Wu et al. | Optimum design method of multi-axis force sensor integrated in humanoid robot foot system | |
| CN112611499B (en) | Method for measuring micro displacement of load platform of multi-dimensional force sensor and method for mounting measuring sensitive element | |
| CN102095534A (en) | Double rood beam high-sensitivity six-dimensional moment sensor | |
| CN109632159B (en) | Six-dimensional force and moment sensor | |
| CN103076131A (en) | Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm | |
| CN205449351U (en) | Small -size three -dimensional force transducer | |
| CN108981987B (en) | Small-dimension space coupling elastic beam six-dimension force sensor | |
| US20150187961A1 (en) | Piezoresistive sensor | |
| KR102183179B1 (en) | Multi-axis force-torque sensor using straingauges | |
| CN109238528B (en) | Six-dimensional force sensor | |
| CN109238530B (en) | Cloth piece measuring method of six-dimensional force sensor | |
| CN111198062A (en) | Strain type six-dimensional force sensor | |
| CN206648770U (en) | A kind of six-dimension force sensor of flexible body structure | |
| Sun et al. | Design and optimization of a novel six-axis force/torque sensor with good isotropy and high sensitivity | |
| CN105841857A (en) | Parallel-type five-dimensional force sensor | |
| JP2023534074A (en) | Multi-DOF Force/Torque Sensors and Robots | |
| US20050120809A1 (en) | Robotic force sensing device | |
| KR101759102B1 (en) | Improving performance wheel dynamometer on rotation | |
| CN210123320U (en) | Three-dimensional force sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |