CN109855774A - A kind of condenser type multi-dimension force sensor of layering - Google Patents
A kind of condenser type multi-dimension force sensor of layering Download PDFInfo
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- CN109855774A CN109855774A CN201910065266.7A CN201910065266A CN109855774A CN 109855774 A CN109855774 A CN 109855774A CN 201910065266 A CN201910065266 A CN 201910065266A CN 109855774 A CN109855774 A CN 109855774A
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- 238000005259 measurement Methods 0.000 claims abstract description 30
- 239000003990 capacitor Substances 0.000 claims abstract description 14
- 230000005611 electricity Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 4
- 238000003754 machining Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 230000008569 process Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The invention discloses a kind of condenser type multi-dimension force sensors of layering, are made of deformation layer, measurement layer.Deformation layer mainly includes deformation layer outer ring, deformation layer inner ring and serpentine configuration variable shaped beam.Deformation layer inner ring is equipped with threaded hole and through-hole, is respectively used to connection measurement layer and input shaft.Deformation layer outer ring is equipped with counter sink, the connection for outer load.There are sensor moving electrode part and measurement inner ring in measurement layer, sensor moving electrode part includes vertical-type sense capacitor moving electrode part and parallel-plate sense capacitor moving electrode part.Using measurement layer and deformation layer, different materials are can be used in layer distributed, measurement layer and deformation layer to the present invention up and down, while sensor being made to be easier to process, and are reduced cost of manufacture, are improved machining accuracy, so as to improve sensor accuracy class.
Description
Technical field
The invention belongs to sensor technical fields, are related to force snesor, in particular to the condenser type multi-dimensional force of a kind of layering
Sensor.
Background technique
Multi-dimension force sensor can be realized the measurement of Spatial Multi-Dimensional force signal, most important as realization industrial intelligentization
One of sensor is widely used in the fields such as machining, automobile manufacture, intelligent robot and aerospace.Power sensing
Device type is more, can be divided into strain-type, piezoelectric type, piezomagnetic, optical profile type and condenser type etc. in such a way that force signal generates.At present
More mature force snesor is mainly electromagnetic type and strain-type in the market.The essence of electromagnetic type force sensor output signal is two
Road has dephased angular displacement signal, by obtaining force information after being combined processing to signal；The sensor is a kind of nothing
The noncontacting proximity sensor of abrasion, but since volume is larger, it can not be applied in robot.Strain-type sensitivity is higher, rings
Should be very fast, however its structure and complex circuit designs, power decoupling is difficult, needs additional A/D converter, and accurate paste is needed to answer
Become piece, and foil gauge is easily damaged, and excessively sensitive to electromagnetic noise.
Capacitive force transducer has that temperature stability is good, structure is simple, adaptable, electrostatic attraction is small, dynamic response
Well, the advantages that and can be realized non-contact detection.The pole however condenser type multi-dimension force sensor main structure processing at present is got up
For complexity, causes plus precision is not high, to influence measurement accuracy.
Summary of the invention
It is an object of the present invention to be directed to the deficiency of current condenser type multi-dimension force sensor, a kind of electricity of layering is proposed
Appearance formula multi-dimension force sensor, using layer distributed above and below measurement layer and deformation layer.
In order to achieve the above objectives, The technical solution adopted by the invention is as follows:
A kind of condenser type multi-dimension force sensor of layering, it is mainly made of deformation layer 1, measurement layer 2；The deformation layer 1
Including at least deformation layer outer ring 3, deformation layer inner ring 4, serpentine configuration variable shaped beam 5, overload protection beam 6；On the deformation layer inner ring 4
Equipped with threaded hole 7 and through-hole 8；The measurement layer 2 includes at least measurement layer inner ring 9, parallel-plate sense capacitor moving electrode part
10, vertical-type sense capacitor moving electrode part 11；Parallel-plate sense capacitor moving electrode part 10 and vertical-type inductance capacitance
11 quantity of device moving electrode part is 4, and is all uniformly distributed in 9 outside of measurement layer inner ring.Measurement layer 2 its pass through threaded hole 7
It is fixedly connected on deformation layer inner ring 4；The serpentine configuration variable shaped beam 5 is distributed along on the outside of deformation layer inner ring 4 in spoke type；Institute
Stating overload protection beam 6 is the cantilever beam for being connected to 4 outer rim of deformation layer inner ring, and is uniformly distributed on the outside of deformation layer inner ring 4, is used for
Overload protection arrangement is installed.
The features of the present invention and beneficial effect are:
Using measurement layer and deformation layer, different materials are can be used in layer distributed, measurement layer and deformation layer to the present invention up and down,
Make sensor be easier to process simultaneously, reduce sensor cost, improve machining accuracy, to improve the measurement essence of sensor
Degree.
Detailed description of the invention
Fig. 1 is stereogram exploded view of the invention；
Fig. 2 is assembling figure of the invention；
In attached drawing: 1. deformation layers；2. measurement layer；3. deformation layer inner ring；4. deformation layer outer ring；5. serpentine configuration variable shaped beam；
6. overload protection beam；7. threaded hole；8. through-hole；9. measurement layer inner ring；10. parallel-plate sense capacitor moving electrode part；11. hanging down
Straight type sense capacitor moving electrode part.
Specific embodiment
For a better understanding of the present invention, exemplary embodiment of the invention will be described in conjunction with attached drawing below.
As shown in attached drawing 1 to 2, a kind of condenser type multi-dimension force sensor of layering, it is mainly by 2 groups of deformation layer 1, measurement layer
At；The deformation layer 1 includes at least deformation layer outer ring 3, deformation layer inner ring 4, serpentine configuration variable shaped beam 5, overload protection beam 6；Institute
Deformation layer inner ring 4 is stated equipped with threaded hole 7 and through-hole 8；The measurement layer 2 includes at least measurement layer inner ring 9, parallel-plate induced electricity
Container moving electrode part 10, vertical-type sense capacitor moving electrode part 11；Parallel plate capacitor moving electrode part 10 and vertical-type
11 quantity of capacitor moving electrode part is 4, and is all uniformly distributed in 9 outside of measurement layer inner ring.Measurement layer 2 its pass through threaded hole
7 are fixedly connected on deformation layer inner ring 4；The serpentine configuration variable shaped beam 5 is distributed along on the outside of deformation layer inner ring 4 in the auxiliary formula of wheel,
One end is connected to 3 inside of deformation layer outer ring, and the other end is connected to 4 inside of deformation layer inner ring；The overload protection beam 6 is connection
It is uniformly distributed in the cantilever beam of 4 outer rim of deformation layer inner ring, and on the outside of deformation layer inner ring 4, for installing overload protection arrangement.Figure
Middle 5 number of serpentine configuration variable shaped beam is 4, but in the actual production process, can adjust serpentine configuration according to the size of elastic force
The number of deformation ellbeam 5.
The course of work of the invention is as follows: deformation layer inner ring 4 is transmitted by external load by serpentine configuration variable shaped beam 5
To deformation layer outer ring 3, during in transmitting, serpentine configuration variable shaped beam 5 deformation occurs make measurement layer 2 occur small deflection, from
And the pole span of capacitor is caused to change, so that the capacitance of capacitor is changed, the change value of capacitance acquired by detection circuit,
The power of all directions is calculated finally by corresponding decoupling formula.
Finally, it is stated that the above is only the preferred embodiment of the present invention, and the present invention is not intended to be limited to the above implementation
Example, can also do various modifications or changes.Therefore, the description and the appended drawings are regarded in an illustrative, rather than a restrictive.It is all
The equivalence techniques variation studied with the principle of the invention, is both contained in the scope of the patents of the invention.
Claims (3)
1. a kind of condenser type multi-dimension force sensor of layering, it is characterised in that: it includes at least deformation layer (1), measurement layer (2)；
The deformation layer (1) includes at least deformation layer outer ring (3), deformation layer inner ring (4), serpentine configuration variable shaped beam (5), overload protection beam
(6)；The deformation layer inner ring (4) is equipped with threaded hole (7) and through-hole (8)；The measurement layer (2) is fixed by threaded hole (7)
It is connected on deformation layer inner ring (4)；Described serpentine configuration variable shaped beam (5) one end is connected on the inside of deformation layer outer ring (3), the other end
It is connected on the outside of deformation layer inner ring (4)；The overload protection beam (6) is the cantilever beam for being connected to deformation layer inner ring (4) outer rim, is used
In installation overload protection arrangement.
2. a kind of condenser type multi-dimension force sensor of layering according to claim 1, it is characterised in that: the measurement layer
(2) measurement layer inner ring (9), parallel-plate sense capacitor moving electrode part (10), the dynamic electricity of vertical-type sense capacitor are included at least
Pole part (11).
3. a kind of condenser type multidimensional torque sensor of layering according to claim 1, it is characterised in that: measurement layer (2)
With deformation layer (3) layer distributed up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910065266.7A CN109855774A (en) | 2019-01-23 | 2019-01-23 | A kind of condenser type multi-dimension force sensor of layering |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910065266.7A CN109855774A (en) | 2019-01-23 | 2019-01-23 | A kind of condenser type multi-dimension force sensor of layering |
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| Publication Number | Publication Date |
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| CN109855774A true CN109855774A (en) | 2019-06-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910065266.7A Pending CN109855774A (en) | 2019-01-23 | 2019-01-23 | A kind of condenser type multi-dimension force sensor of layering |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112539862A (en) * | 2020-12-04 | 2021-03-23 | 法奥意威(苏州)机器人系统有限公司 | Torque measuring device for robot joint |
| CN113432761A (en) * | 2021-05-31 | 2021-09-24 | 杭州电子科技大学 | Touch sensor for robot with inertial environment compensation function and manufacturing method thereof |
| CN114454217A (en) * | 2021-12-07 | 2022-05-10 | 苏州艾利特机器人有限公司 | Redundant sensing multi-dimensional force sensor and force control robot |
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2019
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112539862A (en) * | 2020-12-04 | 2021-03-23 | 法奥意威(苏州)机器人系统有限公司 | Torque measuring device for robot joint |
| CN113432761A (en) * | 2021-05-31 | 2021-09-24 | 杭州电子科技大学 | Touch sensor for robot with inertial environment compensation function and manufacturing method thereof |
| CN114454217A (en) * | 2021-12-07 | 2022-05-10 | 苏州艾利特机器人有限公司 | Redundant sensing multi-dimensional force sensor and force control robot |
| CN114454217B (en) * | 2021-12-07 | 2024-06-04 | 苏州艾利特机器人有限公司 | Redundant sensing multidimensional force sensor and force control robot |
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