CN114454217A - Redundant sensing multi-dimensional force sensor and force control robot - Google Patents

Redundant sensing multi-dimensional force sensor and force control robot Download PDF

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Publication number
CN114454217A
CN114454217A CN202111485609.9A CN202111485609A CN114454217A CN 114454217 A CN114454217 A CN 114454217A CN 202111485609 A CN202111485609 A CN 202111485609A CN 114454217 A CN114454217 A CN 114454217A
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China
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strain
displacement
force sensor
determine module
dimensional force
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CN202111485609.9A
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Chinese (zh)
Inventor
张小川
孙恺
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Suzhou Elite Robot Co Ltd
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Suzhou Elite Robot Co Ltd
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Priority to CN202111485609.9A priority Critical patent/CN114454217A/en
Publication of CN114454217A publication Critical patent/CN114454217A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices

Abstract

The invention provides a redundant sensing multidimensional force sensor and a force control robot, wherein the redundant sensing multidimensional force sensor comprises: external frame, internal platform, strain formula determine module and capacitanc determine module, strain formula determine module include strain roof beam with set up in strain gauge of roof beam, capacitanc determine module includes detection circuitry unit and displacement roof beam, multidimension force sensor passes through strain formula determine module and the redundant detection power of capacitanc determine module moment information, will one of them's of strain formula determine module and capacitanc determine module testing result is as the benchmark value, and wherein another's testing result is as the reference value, strain roof beam, displacement roof beam and internal platform forms an organic whole structure. The specific embodiment of the invention has the beneficial effects that: the redundant power information that detects of multidimension force transducer, job stabilization nature and accuracy obtain promoting, and the structural design of integration is simple and easily processing simultaneously.

Description

Redundant sensing multi-dimensional force sensor and force control robot
Technical Field
The invention relates to the technical field of sensors, in particular to a multi-dimensional force sensor for measuring redundant sensing of force/moment and a force-controlled robot.
Background
With the continuous development of the robot technology, the force control requirement on the tail end of the robot actuating mechanism is increased. The multi-dimensional force sensor can detect the force and the moment in the space, and can meet the force control requirement of the tail end of the robot so as to enrich the working types which can be executed by the robot. The robot field puts higher demands on the reliability and accuracy of the operation of the multi-dimensional force sensor, and for some products with compact structures, such as a cooperative robot, the multi-dimensional force sensor is required to be compact in structure and small in size.
The patent with the application number of CM2010057766 provides a sensor design adopting double cross beams, so that the inter-dimensional coupling is reduced, the sensor precision is improved, but the sensor is large in size and is not suitable for being applied to an industrial robot; (ii) a The patent application No. CN201620008204 provides a six-dimensional force sensor with more compact structure, small overall volume, low height, but small measuring range. The patent with the application number of CN201910064852 provides a force sensor with a snake-shaped structure beam, improves the design of a traditional cross beam, improves the sensitivity of an elastic body when the elastic body is stressed, and has the advantages that when the whole size of the force sensor is small, the gap of the snake-shaped structure beam is small, and the snake-shaped structure beam is difficult to process and manufacture. The patent with the application number of CN201910524444 provides a six-dimensional force sensor applied to an industrial field, adopts the traditional cross beam knot design, is provided with a limiting structure, has certain overload capacity, but has higher rigidity and lower sensor sensitivity, and is difficult to be applied to the tail end of a robot actuating mechanism.
Meanwhile, on the basis of ensuring the sensitivity and the volume of the sensor, when the multi-dimensional force sensor is applied to a robot and other working scenes, higher requirements are put forward on the stability and the data reliability of the multi-dimensional force sensor so as to avoid the robot from generating misjudgment and even damaging the robot.
Disclosure of Invention
In view of this, the present invention aims to provide a multidimensional force sensor and a force-controlled robot, which are easy to process and have good working reliability and stability, so as to solve the problems that the multidimensional force sensor in the prior art has a complex structure, is difficult to process, and cannot ensure the working reliability.
The invention can adopt the following technical scheme: the utility model provides a multidimension force transducer of redundant perception, includes outer frame, inside platform, strain formula determine module and capacitanc determine module, strain formula determine module is including connecting the straining beam of inside platform and outer frame with set up in the foil gage of straining beam, capacitanc determine module include detection circuitry unit and connect in the displacement roof beam of inside platform, multidimension force transducer passes through strain formula determine module and the redundant detection power moment information of capacitanc determine module, will one of them's of strain formula determine module and capacitanc determine module testing result is as the benchmark value, and wherein another's testing result is as the reference value, strain beam, displacement roof beam and inside platform forms an organic whole structure.
Furthermore, the multi-dimensional force sensor comprises a plurality of strain beams which are uniformly distributed between the inner platform and the outer frame in the circumferential direction, the strain beams form a quadrangular frustum pyramid structure, the large head end of the quadrangular frustum pyramid structure is connected to the inner platform, and the small head end of the quadrangular frustum pyramid structure is connected to the outer frame.
Furthermore, the displacement beam extends towards the external frame and forms a gap with the external frame, one end of the displacement beam close to the external frame comprises a negative electrode surface, the negative electrode surface and an electrode end of the detection circuit unit form a capacitor, the overlapping area and/or the distance between the negative electrode surface and the detection circuit unit are preset values, the detection circuit unit is fixedly installed, and the displacement beam moves under stress to detect force/moment information according to the change of the capacitor.
Further, the negative electrode surface is formed into an L-shaped section, the L-shaped section includes a first pole surface and a second pole surface orthogonal to the first pole surface, and a distance between the first pole surface and the detection circuit unit and a distance between the second pole surface and the detection circuit unit are greater than 0.05 mm and less than 0.45 mm.
Further, there is an overlapping area between the first and second pole faces and the detection circuit unit, and when the displacement beam moves, the overlapping area between one of the first and second pole faces and the detection circuit unit changes, and the overlapping area of the other pole face remains unchanged.
Further, the displacement beam comprises a horizontal beam extending to the outer frame and a vertical beam formed at an end of the horizontal beam, the vertical beam is formed at an end of the horizontal beam close to the outer frame, and the L-shaped section is formed at the vertical beam.
Further, the displacement beam is arranged in a sinking manner in the height direction relative to the strain beam.
Further, the outer frame includes the supporting part that floats the roof beam and connect adjacent floating roof beam, the supporting part extends in order to form the extension to inside platform, form the clearance between extension and the displacement roof beam so that multidimension force transducer has overload protection furtherly, be provided with two displacement roof beams between the adjacent roof beam that meets an emergency, two displacement roof beams form to have the arc breach, the extension have with arc breach complex arc is protruding.
Further, the inner platform of the multi-dimensional force sensor comprises a mounting hole formed in the middle, and the inner platform comprises a rectangular protruding portion so as to be suitable for a press-fitting mounting mode.
The following technical scheme can be adopted: a force-controlled robot comprising a base, a joint, a link, and a tool flange disposed at an end of the robot, at least one of the joint and the tool flange mounting a multi-dimensional force sensor as described in any one of the preceding paragraphs.
Compared with the prior art, the specific implementation mode of the invention has the beneficial effects that: the multi-dimensional force sensor comprises a capacitive detection component and a strain type detection component which are used for independent detection, and the detection accuracy and reliability are improved; by integrally designing the internal platform, the displacement beam and the strain beam, the multi-dimensional force sensor has a compact structure and is easy to process; through the structural distribution and design of the strain beam and the displacement beam, the sensitivity of the multi-dimensional force sensor is good, decoupling is easy, and meanwhile, the overload protection capability is achieved.
Drawings
FIG. 1 is a schematic diagram of a multi-dimensional force sensor of one embodiment of the present invention
FIG. 2 is a cross-sectional view of the multi-dimensional force sensor of FIG. 1
FIG. 3 is a partial enlarged view of the cross-sectional view of FIG. 2
FIG. 4 is a schematic diagram of a force-controlled robot in accordance with one embodiment of the present invention
Detailed Description
In order to make the technical solution of the present invention more clear, embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the detailed description of the embodiments is intended only to teach one skilled in the art how to practice the invention, and is not intended to be exhaustive of all possible ways of practicing the invention, nor is it intended to limit the scope of the practice of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
It should be noted that the terms "center", "upper", "lower", "front", "rear", "left", "right", "horizontal", "top", "bottom", "vertical", "horizontal", "vertical", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only used for convenience of description or simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed, installed, and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The invention protects a redundant sensing multi-dimensional force sensor, referring to fig. 1-3, comprising an external frame, an internal platform 10, a strain type detection component and a capacitive detection component, wherein the strain type detection component comprises a strain beam 31 connecting the internal platform 10 and the external frame 20 and a strain gauge 32 arranged on the strain beam 31, the capacitive detection component comprises a detection circuit unit 43 and a displacement beam 41 connected to the internal platform 10, when the multi-dimensional force sensor 100 is stressed, the strain beam 31 is deformed to detect force/moment information through strain change, the displacement beam 41 moves to detect force/moment information through capacitance change, the multi-dimensional force sensor 100 can detect force/moment information through the strain type detection component and the capacitive detection component in a redundant manner, and the detection result of one of the strain type detection component and the capacitive detection component is used as a reference value, the other detection result is used as a reference value, for example, the reference value and the reference value are compared, and when the two values are consistent or the difference between the two values is within an error range, the detection result is accurate; alternatively, when the detection result of one of the capacitive detection assembly and the strain detection assembly fails, force/torque information can be output by means of the detection of the other. Through the power/moment information is detected to two kinds of different modes of capacitanc determine module and strain formula determine module, detection between them is independent and the detection principle is different, understandable, capacitanc determine module and strain formula determine module have independent power, both can independent work, and electrical detection between them is also independent, guarantees capacitanc determine module and strain formula determine module independent work, mutual noninterference in the source to guarantee the accuracy of the data of multidimension force transducer output, and any detection of the same kind is made mistakes and can not influence the detection output of another way, multidimension force transducer's stability is better.
In a specific embodiment, the strain-type detection assembly and the capacitive detection assembly are integrated, the strain beam 31, the displacement beam 41 and the inner platform 10 are formed into an integrated structure, the strain beam 31 connects the inner platform 10 and the outer frame 20, one end of the displacement beam 41 is connected to the inner platform 10, the other end of the displacement beam 41 extends to the outer frame 20 and forms a gap with the outer frame 20, when the multi-dimensional force sensor 100 is stressed, both the displacement beam 41 and the strain beam 31 can move, and both the displacement beam 41 and the strain beam 31 are connected to the inner platform 10, so that the three are formed into an integrated structure, and the structure is simple and easy to process. Optionally, a plurality of strain beams 31 of the strain type detection assembly are circumferentially and uniformly distributed between the inner platform 10 and the outer frame 20, and the displacement beams 41 and the strain beams 31 are arranged in a staggered manner, so that the balanced stress of the strain beams 31 and the displacement beams 41 is ensured, and the accuracy of the detection result is ensured.
Strain roof beam 31 can form into multiform, and is optional, strain roof beam 31 forms into the truncated pyramid structure, and 4 sides of truncated pyramid structure are comparatively level and smooth, are convenient for paste foil gage 32, the big head end of truncated pyramid structure connect in inside platform 10, little head end connect in outside frame 20 to improve the sensitivity that meets an emergency and detects, and, through changing the proportion between big head end and the little head end, the sensitivity of the specific direction of adaptation that can be easy improves the SNR of STRAIN formula determine module.
Displacement beam 41 is along multidimension force sensor 100 circumference distribution between inside platform 10 and outer frame 20, displacement beam 41 along inside platform 10 to outer frame 20 extend and with form the clearance between the outer frame, displacement beam 41 is close to outer frame 20 one end and includes negative pole face 42, negative pole face 42 with the electrode end formation electric capacity of detection circuitry unit 43. Interior platform 10 is used for fixed mounting, and when multidimensional force sensor 100 received moment, the length and the displacement size positive correlation of displacement roof beam 41 will negative pole face 42 sets up in displacement roof beam 41 and is close to the distal end of outer frame 20, can obtain bigger displacement when displacement roof beam 41 received moment for it is more sensitive to the detection of moment. An overlapping surface and an interval exist between the negative electrode surface 42 and the detection circuit unit 43, capacitance detection can be performed based on one or two of the overlapping surface and the interval according to a specifically adopted decoupling algorithm, the overlapping surface and/or the interval between the negative electrode surface 42 and the detection circuit are/is a preset value, and when the displacement beam 41 moves, the overlapping surface and/or the interval changes to detect capacitance change so as to detect force/moment information. Understandably, the detection unit is fixedly installed, the displacement beam 41 is stressed to move so as to detect force/moment information according to capacitance change, the detection unit is fixedly installed, so that the stability is better, the change of the displacement beam 41 is more sensitive and easy to detect, meanwhile, the integration of the displacement beam 41 and a strain beam structure is ensured, and the structural realization is easy.
The negative electrode surface 42 may have various shapes, in a preferred embodiment, referring to fig. 2 to 3, the negative electrode surface 42 is formed as an L-shaped section, that is, the negative electrode surface includes a first electrode surface and a second electrode surface orthogonal to the first electrode surface, a distance exists between each of the first electrode surface and the second electrode surface and the detection circuit unit 43, the smaller distance is not favorable for deformation of the displacement beam 41, and the larger distance is easily influenced for sensitivity of capacitance detection, according to analysis, when the distance is greater than 0.05 mm and less than 0.45 mm, the capacitive detection assembly exhibits better performance, and when the displacement beam 41 moves, the distance changes to obtain the stress information of the multidimensional force sensor 100 through the change of capacitance. Wherein, this interval scope is applicable to the electric capacity that the air is the medium, and when adopting other media, this interval can change, adopts the air to be the medium, can make the electric capacity structure comparatively simple. And when the distance between one of the first pole face and the second pole face and the detection circuit unit is changed, the distance between the other of the first pole face and the second pole face and the detection circuit unit is kept unchanged, so that the sensor can be conveniently decoupled. Optionally, the first and second pole faces and the detection circuit unit 43 have overlapping areas, and when the displacement beam 41 moves, the overlapping area between one of the first and second pole faces and the detection circuit changes, and the overlapping area of the other pole face remains unchanged, it can be understood that the overlapping area is a projected overlapping area, and accordingly, when the displacement beam 41 is subjected to a force in one direction, only the overlapping area of one pole face changes, and the overlapping area of the other pole face does not change, so that the capacitive detection assembly is easy to decouple. By providing the L-shaped negative electrode surface, assuming that the Z-axis direction of the multi-dimensional force sensor 100 is the height direction, one of the first and second electrode surfaces extends in the Z-axis direction, and the other extends in the XY-axis direction, the L-shaped negative electrode surface can cause capacitance change by changes in both the pitch and the overlap area, and can detect displacement in the horizontal and vertical directions and changes in the tilt angle due to applied torque, respectively; meanwhile, when two electrode plates of the capacitor are vertically arranged, the sensitivity of capacitor detection is correspondingly improved compared with the common parallel arrangement.
In a specific embodiment, the multi-dimensional force sensor 100 is a six-dimensional force sensor, the strain gauge type detection assembly includes 4 strain beams 31 uniformly distributed between the outer frame 20 and the inner platform 10, the 4 strain beams 31 are formed into a cross beam structure, 24 strain gauges are distributed on the strain beams 31 to form 6 full-bridge circuits, and six sets of force detection information are output. The displacement beams 41 are arranged between the adjacent strain beams 31, one end of each displacement beam 41, which is close to the outer frame 20, is formed as a negative electrode to form a capacitance with the detection circuit unit 43, the capacitive detection assembly comprises 8 displacement beams, each displacement beam can obtain one capacitance parameter, and by arranging 8 displacement beams, when the multidimensional force sensor is a six-dimensional force sensor, the variation condition of the six-dimensional force can be reflected through the variation trend of the 8 capacitance parameters, as shown in the following table:
C1 C2 C3 C4 C5 C6 C7 C8
Fx - - - -
Fy - - - -
Fz
Tx - - - -
Ty - - - -
Tz
x, Y, Z directions can be stressed and torque respectively, and 8 capacitors present 6 different combinations when stressed, so that the capacitance detection results of the multi-dimensional force sensor are easy to decouple, and the stresses in different directions are not interfered with each other.
The outer frame 20 of the multi-dimensional force sensor 100 comprises floating beams 22 and supports 21 connecting adjacent floating beams 22, the supports 21 extend towards the inner platform 10 to form extensions 211, and gaps are formed between the extensions 211 and the displacement beams to enable the multi-dimensional force sensor 100 to have overload protection capability. Specifically, be provided with two displacement roof beams 41 between the adjacent strain beam 31, two displacement roof beams 41 are formed into and have the arc breach, extension 211 have with arc breach complex arc is protruding for it is not fragile to have overload protection ability when multidimension force sensor 100 atress, and curved cooperation is easily processed, and the flexibility is better when the atress contacts, and is not fragile. The displacement beam 41 is also used as an overload protection structure, an additional overload protection beam is not needed, the structural design is simplified, and the multi-dimensional force sensor is compact in structure.
And a displacement beam 41 is arranged between the adjacent strain beams 31, the height of the displacement beam 41 in the Z direction is less than that of the strain beam 31, and the displacement beam 41 is designed in a sinking way relative to the strain beam 31 so as to facilitate the strain beam to carry out the patch mounting.
The internal platform 10 of the multi-dimensional force sensor is used for being mounted to a target mounting position, the internal platform 10 comprises a mounting hole formed in the middle, the internal platform 10 is formed to comprise a rectangular protruding/recessed portion so as to be suitable for a mounting mode of press mounting, after the internal platform 10 and the target mounting position are subjected to press mounting, no displacement is generated between the internal platform 10 and the target mounting position when the internal platform is stressed, and the internal platform 10 can be fixed only through 1 mounting hole, so that the volume of the internal platform can be reduced, the size of the external frame 20 is unchanged under the condition of limited space, the volume of the internal platform is reduced, the lengths of the displacement beam 41 and the strain beam 31 which are arranged between the internal platform and the external frame 20 can be prolonged, and the detection sensitivity of the multi-dimensional force sensor is enhanced.
The beneficial effects of the above preferred embodiment are: through setting up but the independent detection of strain formula determine module and capacitanc determine module, the redundant detection power/moment information of multidimension force transducer guarantees the accuracy and the reliability that the sensor detected, and the integrated design of displacement roof beam, strain roof beam and inside boss makes multidimension force transducer's simple structure and easily processing simultaneously, provides a redundant detection power/moment information and simplifies structural design's multidimension force transducer.
The invention is also used for providing a force-controlled robot, referring to fig. 4, a force-controlled robot 200 includes a base 210, a joint 220, a connecting rod 230 and a tool flange 240 disposed at the end of the robot, the joint serves as a connecting element and a power element, the tool flange 240 is used for connecting a working tool, the force-controlled robot includes the multi-dimensional force sensor 100 as described in any one of the above, at least one of the joint 220 and the tool flange 240 is provided with the multi-dimensional force sensor, an internal platform of the multi-dimensional force sensor has a rectangular protrusion or a recess, and a corresponding joint or tool flange provided with the multi-dimensional force sensor has a rectangular recess or protrusion matching with the internal platform to form a press-fitting structure with the internal platform of the multi-dimensional force sensor.
It should be noted that, in the description of "force" herein, unless otherwise specified, the "force" and "moment" are, of course, included, and are not necessarily excluded.
Finally, it is to be noted that the above description is intended to be illustrative and not exhaustive, and that the invention is not limited to the disclosed embodiments, and that several modifications and variations may be resorted to by those skilled in the art without departing from the scope and spirit of the invention as set forth in the appended claims. Therefore, the protection scope of the present invention should be subject to the claims.

Claims (11)

1. The utility model provides a multidimension force transducer of redundant perception, its characterized in that includes outer frame, inside platform, strain formula determine module and capacitanc determine module, strain formula determine module is including connecting the straining roof beam of inside platform and outer frame with set up in strain gauge of straining roof beam, capacitanc determine module includes detection circuit unit and connect in the displacement roof beam of inside platform, multidimension force transducer passes through strain formula determine module and the capacitanc determine module redundancy detection power moment information, will one of them's of strain formula determine module and capacitanc determine module testing result is as the benchmark value, and wherein another's testing result is as the reference value, strain roof beam, displacement roof beam and the inside platform forms into an organic whole structure.
2. The multi-dimensional force sensor of claim 1, comprising a plurality of strain beams circumferentially distributed between the inner platform and the outer frame, the strain beams formed in a quadrangular frustum structure with a large head end connected to the inner platform and a small head end connected to the outer frame.
3. The multidimensional force sensor of claim 1, wherein the displacement beam extends towards the outer frame and forms a gap with the outer frame, one end of the displacement beam close to the outer frame comprises a negative electrode surface, the negative electrode surface forms a capacitance with an electrode end of the detection circuit unit, an overlapping area and/or an interval between the negative electrode surface and the detection circuit unit is a preset value, the detection circuit unit is fixedly installed, and the displacement beam is forced to move to detect force/moment information according to capacitance change.
4. The multi-dimensional force sensor according to claim 3, wherein the negative electrode surface is formed as an L-shaped section including a first pole surface and a second pole surface orthogonal to the first pole surface, and a distance between the first pole surface and the detection circuit unit is greater than 0.05 mm and less than 0.45 mm.
5. The multi-dimensional force sensor according to claim 4, wherein there is an overlapping area between the first and second pole faces and the detection circuit unit, and when the displacement beam moves, the overlapping area between one of the first and second pole faces and the detection circuit unit changes, and the overlapping area of the other one of the first and second pole faces remains unchanged.
6. The multi-dimensional force sensor of claim 4, wherein the displacement beam comprises a horizontal beam extending toward the outer frame and a vertical beam formed at an end of the horizontal beam, the vertical beam being formed at an end of the horizontal beam near the outer frame, the L-shaped cut surface being formed at the vertical beam.
7. The multi-dimensional force sensor of claim 1, wherein the displacement beam is countersunk in a height direction relative to the strain beam.
8. The multi-dimensional force sensor of claim 1, wherein the outer frame comprises floating beams and supports connecting adjacent floating beams, the supports extending toward the inner platform to form extensions, the extensions and displacement beams forming a gap therebetween to provide overload protection for the multi-dimensional force sensor.
9. The multi-dimensional force sensor of claim 8, wherein two displacement beams are disposed between adjacent strain beams, the two displacement beams being formed with arcuate notches, the extensions having arcuate projections that mate with the arcuate notches.
10. A multi-dimensional force transducer according to claim 1, wherein the internal platform of the multi-dimensional force transducer includes a mounting hole formed in the middle portion, the internal platform including a rectangular raised portion to accommodate a press-fit mounting arrangement.
11. A force-controlled robot comprising a base, a joint, a link, and a tool flange provided at an end of the robot, at least one of the joint and the tool flange having the multi-dimensional force sensor of any one of claims 1-10 mounted thereon.
CN202111485609.9A 2021-12-07 2021-12-07 Redundant sensing multi-dimensional force sensor and force control robot Pending CN114454217A (en)

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