CN206648770U - A kind of six-dimension force sensor of flexible body structure - Google Patents

A kind of six-dimension force sensor of flexible body structure Download PDF

Info

Publication number
CN206648770U
CN206648770U CN201720307336.1U CN201720307336U CN206648770U CN 206648770 U CN206648770 U CN 206648770U CN 201720307336 U CN201720307336 U CN 201720307336U CN 206648770 U CN206648770 U CN 206648770U
Authority
CN
China
Prior art keywords
foil gauge
spring beam
branch
center
horizontal resiliency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720307336.1U
Other languages
Chinese (zh)
Inventor
宋爱国
付立悦
李昂
张培军
张达鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Southeast University
Jiangsu Tianhong Machinery Industry Co Ltd
Original Assignee
Southeast University
Jiangsu Tianhong Machinery Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Southeast University, Jiangsu Tianhong Machinery Industry Co Ltd filed Critical Southeast University
Priority to CN201720307336.1U priority Critical patent/CN206648770U/en
Application granted granted Critical
Publication of CN206648770U publication Critical patent/CN206648770U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The utility model discloses a kind of six-dimension force sensor of flexible body structure, including horizontal resiliency beam, the vertical spring beam in center, loading axis and outer ring fixed station, horizontal resiliency beam is decussate texture, horizontal resiliency beam includes four isometric branches, one end of the vertical spring beam in center is fixed on the center of horizontal resiliency beam decussate texture, it is and vertical with the face where decussate texture, loading axis is arranged on the other end of the vertical spring beam in center, outer ring fixed station is to be set in the circle shape part on the outside of horizontal resiliency beam, the end of four branches of horizontal resiliency beam is fixed on the medial surface of outer ring fixed station, the end of four branches of horizontal resiliency beam is S type structures, foil gauge is also covered with the vertical spring beam of horizontal resiliency beam and/or center.S type structures in the utility model, make it when by the active force of respective direction as flexible link;The design of the vertical spring beam in center reduces retinoic acid syndrome, so as to simplied decoupling algorithm, improves measurement accuracy.

Description

A kind of six-dimension force sensor of flexible body structure
Technical field
The utility model belongs to sensor technical field, more particularly to a kind of six-dimensional force sensing of flexible body structure Device.
Background technology
What six-dimension force sensor measured is the three-dimensional orthogonal power (Fx, Fy, Fz) and three-dimensional of cartesian coordinate system three dimensions Orthogonal torque (Mx, My, Mz), due to its dynamometry abundant information, measurement accuracy is high the features such as, be mainly used in power and power-position control Occasion processed, such as end effector of robot, the detection of vehicle traveling process wheel power, Contour extraction, precision assembly, two hands coordination etc., Especially extremely important effect has been played in the occasion such as aviation robot, space station Docking simulation.
Cross beam type structure is a kind of most form of current six-dimension force sensor use, and resistance-strain type of dynamometer principle It is that most one kind is applied in current six-dimension force sensor.A kind of cross beam type six-dimensional force is disclosed in patent CN103528746A Sensor elastomer, it is made up of four inner beams, four Wai Liang and four overload protection beams etc., can improve sensitivity, reduces Retinoic acid syndrome, but structure is relative complex.A kind of compact-sized strain-type six-dimensional force is disclosed in patent CN205333238U Sensor, it includes base elastomer, rood beam elastomer etc., and base elastomer has a cavity, and rood beam elastomer is located at In cavity, overall structure is more compact.
In the world to more than the study hotspot of multiple dimension force/moment sensor in Cleaning Principle, method innovation and novel elastomer Structure design etc..And the distinctive retinoic acid syndrome of multiple dimension force/moment sensor turns into main existing for multiple dimension force/moment sensor Problem is wanted, governs measurement accuracy, so as to directly affect follow-up force feedback and power control performance.
Utility model content
Purpose of utility model:In order to reduce the measurement error of six-dimension force sensor, the utility model, which provides one kind, has bullet The six-dimension force sensor of property body structure.
Technical scheme:A kind of six-dimension force sensor of flexible body structure, including horizontal resiliency beam, center are vertical spring Beam, loading axis and outer ring fixed station, the horizontal resiliency beam are decussate texture, and horizontal resiliency beam includes four isometric branches, One end of the vertical spring beam in center is fixed on the center of horizontal resiliency beam decussate texture, and with decussate texture institute Face it is vertical, the loading axis is arranged on the other end of the vertical spring beam in center, and the outer ring fixed station is is set in level Circle shape part on the outside of spring beam, outer ring fixed station include medial surface, and the end of four branches of horizontal resiliency beam is fixed on On the medial surface of outer ring fixed station, the ends of four branches of horizontal resiliency beam is S type structures, the horizontal resiliency beam and/ Or also it is covered with foil gauge on the vertical spring beam in center.
Operation principle:When sensor is by Y-direction directed force F y, two X occur bending and deformation to spring beam branch, and two Tension and compression deformation occurs for GeYXiang spring beams branch and its variable quantity very little can be neglected, and now S types structure in its end can regard flexible ring as Section, the Wheatstone full-bridge circuits that Fy can be formed by being pasted on X to the foil gauge of spring beam left and right side measure;Work as biography When sensor is by Z-direction opplied moment Mz, two X occur bending and deformation to spring beam branch, and two X are to spring beam branch Deformation caused by the same position of left and right side is equal in magnitude, in opposite direction, and Mz can be left to spring beam by being pasted on X The Wheatstone full-bridge circuits of the foil gauge composition of right flank measure.
When sensor is by Z-direction directed force F z, Liang GeYXiang spring beams branch occurs bending and deformation, and two Y-direction bullets Deformation caused by the same position on the upper and lower surface of Xing Liang branches is equal in magnitude, in opposite direction, and Fz can be by being pasted on two The full-bridge circuit of the foil gauge composition on the upper and lower surface of Y-direction spring beam branch measures;When sensor is by X-direction torque Mx, two GeYXiang spring beams branch occurs bending and deformation, and two X twist deformation to spring beam branch, and deflection very little can neglect Slightly, the full-bridge circuit that Mx can be formed by being pasted on the foil gauge of Liang GeYXiang spring beams branch upper and lower surface measures.
When sensor is by X-direction directed force F x or Y-direction torque My, the vertical spring beam in center occurs large curved and become Shape, and equal in magnitude, in opposite direction, Fx and My are strained caused by the same position of the forward and backward side of the vertical spring beam in center The bridge that can be formed by being pasted on the foil gauge of the center forward and backward side of vertical spring beam measures.
Beneficial effect:A kind of six-dimension force sensor of flexible body structure provided by the utility model, horizontal resiliency beam The tip designs of branch are S type structures, make it when by the active force of respective direction as flexible link;Compared to more existing Cross beam type six-dimension force sensor, more vertical spring beams in center, to experience the directed force F x of X-direction and Y-direction Torque M y;In addition to pasting foil gauge in four horizontal resiliency beam branches, at center, vertical spring beam divides towards Y-direction spring beam Two sides of branch are also covered with two pairs of foil gauges, reduce measurement error;Existing cross beam type six-dimension force sensor is three Coupling (between such as Fy, Mz, Fx, Fz, Mx, between My) between individual and more than three directions be present, and the flexible body knot of this patent Only there is coupling (between such as Fy, Mz, between Fz, Mx, between Fx, My) in the six-dimension force sensor of structure, reduce between both direction Retinoic acid syndrome, so as to simplify decoupling algorithm, improve measurement accuracy.
Brief description of the drawings
Fig. 1 is the six-dimension force sensor overall structure diagram of flexible body structure of the present utility model.
Embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, for convenience of description direction, a dimensional Cartesian coordinates system as depicted is established.
As shown in figure 1, the six-dimension force sensor of flexible body structure includes horizontal resiliency beam 1, the vertical spring beam in center 2nd, loading axis 3 and outer ring fixed station 4, the horizontal resiliency beam 1 are decussate texture, and horizontal resiliency beam 1 includes four isometric point Branch, one end of the vertical spring beam 2 in center is fixed on the center of the decussate texture of horizontal resiliency beam 1, and and cross Face where structure is vertical, and the loading axis 3 is arranged on the other end of the vertical spring beam 2 in center, and the outer ring fixed station 4 is set The circle shape part in the outside of horizontal resiliency beam 1 is located at, outer ring fixed station 4 includes medial surface 41, four branches of horizontal resiliency beam 1 End be fixed on the medial surface 41 of outer ring fixed station 4, the ends of four branches of horizontal resiliency beam 1 is S type structures, institute State and be also covered with foil gauge on the vertical spring beam of horizontal resiliency beam and/or center.The thickness of the S types structure is 1mm.Horizontal bullet The tip designs of Xing Liang branches are S type structures, it as flexible link, that is, is played floating when by the active force of respective direction Dynamic beam action.Compared to existing cross beam type six-dimension force sensor, the more vertical spring beams 2 in a center of the present embodiment, use To experience the directed force F x of X-direction and Y-direction torque M y.
Four branches of the vertical spring beam 2 in the center and horizontal resiliency beam 1 are the quadrangular that cross section is square. The loading axis 3 is cylindrical structure.The outer ring fixed station 4 is provided with 8 upper lower through-holes, for fixing sensor.
Four branches of the horizontal resiliency beam 1 include two X to spring beam branch 11 and Liang GeYXiang spring beams branch To spring beam branch 11 point-blank, point-blank, two X are to bullet for Liang GeYXiang spring beams branch 12 by 12, two X The opening direction of S type structures in Xing Liang branches 11 is identical, the opening direction of the S type structures in Liang GeYXiang spring beams branch 12 It is identical and vertical to the opening direction of the S type structures in spring beam branch 11 with X.In the present embodiment, the X divides to spring beam The opening direction of the S type structures of 11 ends of branch is left and right directions;The opening of the S type structures of the end of Y-direction spring beam branch 12 Direction is above-below direction.
In addition, the present embodiment to foil gauge paste position also have it is designed.
Described two X are identical to the structure of spring beam branch 11 and are covered with identical foil gauge in symmetrical position; One of X includes left surface 111 and right flank (being blocked in figure, be not shown) to spring beam branch 11, in left surface 111 Be covered with the first foil gauge 01 and the second foil gauge 02 on mandrel line, on right flank with the first foil gauge 01 and the second foil gauge 02 Corresponding position is covered with the 3rd foil gauge and the 4th foil gauge (being blocked in figure, be not shown) respectively;Another X is to spring beam Answered for corresponding with the first foil gauge 01, the second foil gauge 02, the 3rd foil gauge, the 4th foil gauge respectively four in branch 11 ' Become piece and be designated as the 13rd foil gauge 013, the 14th foil gauge 014, the 15th foil gauge, the 16th foil gauge.
Described two Y-direction spring beam branched structures are identical and are covered with identical foil gauge in symmetrical position;Its In a GeYXiang spring beams branch 12 include upper surface 121 and lower surface (being blocked in figure, be not shown), the center of upper surface 121 It is covered with the 5th foil gauge 05 and the 6th foil gauge 06 on axis, it is right with the 5th foil gauge 05 and the 6th foil gauge 06 on lower surface The position answered is covered with the 7th foil gauge and the 8th foil gauge (being blocked in figure, be not shown) respectively;Another Y-direction spring beam point (it is blocked in figure, does not show with the 5th foil gauge 05, the 6th foil gauge 06, the 7th foil gauge, the 8th foil gauge respectively in branch 12 ' Going out) four corresponding foil gauges are designated as the 17th foil gauge 017, the 18th foil gauge 018, the 19th foil gauge, the 20th Foil gauge (is blocked, be not shown) in figure.
The vertical spring beam 2 in center includes leading flank 21, trailing flank (being blocked in figure, be not shown), the and of left surface 22 Right flank (is blocked, be not shown) in figure, and leading flank 21 is respectively facing two X to spring beam branch 11, leading flank with trailing flank Be covered with the 9th foil gauge 09 and the tenth foil gauge 010 on 21 central axis, on trailing flank with the 9th foil gauge 09 and the tenth Position corresponding to foil gauge 010 is covered with the 11st foil gauge and the 12nd foil gauge (being blocked in figure, be not shown) respectively.
All foil gauges are identical foil gauge.If the first foil gauge 01 is to the distance of Y-direction spring beam branch 12 D1, if the distance of the 5th foil gauge 05 to the vertical spring beam 2 in center is d2, if the 9th foil gauge 09 arrives X to spring beam branch 11 Distance be d3, wherein d1=d2=d3;If the distance of the second foil gauge 02 to Y-direction spring beam branch 12 is d4, if the 6th should Become piece 06 to the vertical spring beam 2 in center distance into d5, if the tenth foil gauge 10 arrive X to the distance of spring beam branch 11 be d6, Wherein d4=d5=d6;And first foil gauge 01 to distance and the second foil gauge 02 of Y-direction spring beam branch 12 arrive Y-direction spring beam The distance of branch 12 is unequal, i.e. d1 ≠ d4.
This 20 foil gauges constitute six groups of foil gauge groups altogether.Each foil gauge group is by being electrically connected composition one Wheatstone full-bridges or half-bridge circuit, power or torque for one dimension of measurement space.
First foil gauge 01, the 3rd foil gauge, the 13rd foil gauge 013 and the 15th foil gauge form the first foil gauge Group;Second foil gauge 02, the 4th foil gauge, the 14th foil gauge 014 and the 16th foil gauge form the second foil gauge group.Work as biography Sensor by Y-direction active force or Z-direction torque when, the horizontal resiliency beam of X-direction can be produced compared with large deformation, therefore, First, the Wheatstone bridge circuits of two foil gauge groups composition are respectively used to measure the directed force F y of Y-direction and the torque of Z-direction Mz size.
5th foil gauge 05, the 7th foil gauge, the 17th foil gauge 017 and the 19th foil gauge form the 3rd foil gauge Group;6th foil gauge 06, the 8th foil gauge, the 18th foil gauge 018 and the 20th foil gauge form the 4th foil gauge group.Work as biography When sensor is by the torque of Z-direction active force or X-direction, the horizontal resiliency beam of Y-direction is produced compared with large deformation, therefore, third and fourth The Wheatstone bridge circuits of foil gauge group composition are respectively used to measure the big of the Z-direction directed force F z and torque Mx of X-direction It is small.
9th foil gauge 09 and the 11st foil gauge at the back side the 5th foil gauge group of composition, the tenth foil gauge 10 and the back side 12nd foil gauge forms the 6th foil gauge group.When sensor is by X-direction active force or Y-direction torque, center vertical bullet Property beam produce compared with large deformation, therefore, the Wheatstone bridge circuits of the five, the six foil gauge groups composition are respectively used to measure X side To directed force F x and Y-direction torque My size.
The structure in the relevant position of four horizontal resiliency beam branches in addition to being pasted with foil gauge group, in the vertical bullet in center Two sides of the property beam 2 towards X to spring beam branch are also covered with two pairs of foil gauges, and measurement error is relatively small.The sensor There is coupling (between such as Fy, Mz, between Fz, Mx, between Fx, My) in structure, decoupling algorithm can be made simple between both direction Change, be more prone to decouple.

Claims (10)

1. a kind of six-dimension force sensor of flexible body structure, it is characterised in that vertical including horizontal resiliency beam (1), center Spring beam (2), loading axis (3) and outer ring fixed station (4), the horizontal resiliency beam (1) are decussate texture, horizontal resiliency beam (1) four isometric branches are included, one end of the vertical spring beam in center (2) is fixed on horizontal resiliency beam (1) decussate texture Center, and vertical with the face where decussate texture, the loading axis (3) is arranged on the vertical spring beam in center (2) The other end, the outer ring fixed station (4) are to be set in the circle shape part on the outside of horizontal resiliency beam (1), outer ring fixed station (4) bag Medial surface (41) is included, the end of four branches of horizontal resiliency beam (1) is fixed on the medial surface (41) of outer ring fixed station (4), The end of four branches of horizontal resiliency beam (1) is S type structures, the horizontal resiliency beam (1) and/or the vertical spring beam in center (2) foil gauge is also covered with.
2. the six-dimension force sensor of flexible body structure according to claim 1, it is characterised in that the center is vertical Four branches of spring beam (2) and horizontal resiliency beam (1) are the quadrangular that cross section is square.
3. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the level Four branches of spring beam (1) include two X to spring beam branch (11) and Liang GeYXiang spring beams branch (12), and two X are to bullet Point-blank, point-blank, two X are to spring beam branch for Liang GeYXiang spring beams branch (12) for Xing Liang branches (11) (11) opening direction of the S type structures on is identical, and the opening direction of the S type structures in Liang GeYXiang spring beams branch (12) is identical It is and vertical to the opening direction of the S type structures in spring beam branch (11) with X.
4. the six-dimension force sensor of flexible body structure according to claim 3, it is characterised in that described two X to Spring beam branch (11) structure is identical and is covered with identical foil gauge in symmetrical position;X is to spring beam branch (11) Including left surface (111) and right flank, the first foil gauge (01) and the second strain are covered with the central axis of left surface (111) Piece (02), position corresponding with the first foil gauge (01) and the second foil gauge (02) is covered with the 3rd foil gauge respectively on right flank With the 4th foil gauge;
Described two Y-direction spring beam branched structures are identical and are covered with identical foil gauge in symmetrical position;Y-direction elasticity Beam branch (12) includes upper surface (121) and lower surface, the 5th foil gauge (05) being covered with the central axis of upper surface (121) With the 6th foil gauge (06), position corresponding with the 5th foil gauge (05) and the 6th foil gauge (06) is covered with respectively on lower surface 7th foil gauge and the 8th foil gauge;
The vertical spring beam in center (2) includes leading flank (21), trailing flank, left surface (22) and right flank, leading flank (21) Two X are respectively facing to spring beam branch (11) with trailing flank, and the 9th foil gauge is covered with the central axis of leading flank (21) (09) and the tenth foil gauge (10), position corresponding with the 9th foil gauge (09) and the tenth foil gauge (10) is pasted respectively on trailing flank It is covered with the 11st foil gauge and the 12nd foil gauge.
5. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that the first foil gauge (01), the second foil gauge (02), the 3rd foil gauge, the 4th foil gauge, the 5th foil gauge (05), the 6th foil gauge (06), the 7th Foil gauge, the 8th foil gauge, the 9th foil gauge (09), the tenth foil gauge (10), the 11st foil gauge and the 12nd foil gauge are equal For identical foil gauge.
6. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that set the first foil gauge (01) it is d1 to the distance of Y-direction spring beam branch (12), if the distance of the 5th foil gauge (05) to the vertical spring beam in center (2) is D2, if the 9th foil gauge (09) to X to the distance of spring beam branch (11) be d3, wherein d1=d2=d3;If the second foil gauge (02) it is d4 to the distance of Y-direction spring beam branch (12), if the distance of the 6th foil gauge (06) to the vertical spring beam in center (2) is D5, if the tenth foil gauge (10) to X to the distance of spring beam branch (11) be d6, wherein d4=d5=d6;And d1 ≠ d4.
7. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the S types knot The thickness of structure is 1mm.
8. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the loading Axle (3) is cylindrical structure.
9. the six-dimension force sensor of flexible body structure according to claim 1 or 2, it is characterised in that the outer ring Fixed station (4) is provided with multiple upper lower through-holes, for fixing sensor.
10. the six-dimension force sensor of flexible body structure according to claim 4, it is characterised in that the X is to elasticity The opening direction of the S type structures of beam branch (11) end is left and right directions;The S type knots of Y-direction spring beam branch (12) end The opening direction of structure is above-below direction.
CN201720307336.1U 2017-03-28 2017-03-28 A kind of six-dimension force sensor of flexible body structure Expired - Fee Related CN206648770U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720307336.1U CN206648770U (en) 2017-03-28 2017-03-28 A kind of six-dimension force sensor of flexible body structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720307336.1U CN206648770U (en) 2017-03-28 2017-03-28 A kind of six-dimension force sensor of flexible body structure

Publications (1)

Publication Number Publication Date
CN206648770U true CN206648770U (en) 2017-11-17

Family

ID=60279127

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720307336.1U Expired - Fee Related CN206648770U (en) 2017-03-28 2017-03-28 A kind of six-dimension force sensor of flexible body structure

Country Status (1)

Country Link
CN (1) CN206648770U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109079826A (en) * 2018-10-12 2018-12-25 中国石油大学(华东) A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot
CN110243528A (en) * 2019-07-08 2019-09-17 台州学院 A kind of sextuple force checking device based on liquid pressure measurement
CN113167669A (en) * 2019-01-28 2021-07-23 日本电产科宝电子株式会社 Elastic body and force sensor using same
CN113252227A (en) * 2021-06-21 2021-08-13 深圳市鑫精诚科技有限公司 Six-dimensional force sensor with overload protection structure
WO2024207553A1 (en) * 2023-04-03 2024-10-10 东南大学 Thin film sputtering technology-based combined six-dimensional force sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109079826A (en) * 2018-10-12 2018-12-25 中国石油大学(华东) A kind of orthogonal beam type six-dimension force sensor of diameter of Spherical Volume and joint of robot
CN113167669A (en) * 2019-01-28 2021-07-23 日本电产科宝电子株式会社 Elastic body and force sensor using same
CN110243528A (en) * 2019-07-08 2019-09-17 台州学院 A kind of sextuple force checking device based on liquid pressure measurement
CN110243528B (en) * 2019-07-08 2020-11-03 台州学院 Six-dimensional force detection device based on liquid pressure measurement
CN113252227A (en) * 2021-06-21 2021-08-13 深圳市鑫精诚科技有限公司 Six-dimensional force sensor with overload protection structure
WO2024207553A1 (en) * 2023-04-03 2024-10-10 东南大学 Thin film sputtering technology-based combined six-dimensional force sensor

Similar Documents

Publication Publication Date Title
CN107044898A (en) A kind of six-dimension force sensor of flexible body structure
CN206648770U (en) A kind of six-dimension force sensor of flexible body structure
CN103076131B (en) Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm
CN106124113B (en) Novel six-dimensional force and torque sensor
CN108981987A (en) A kind of small retinoic acid syndrome spring beam six-dimension force sensor
CN103091026B (en) Parallel structure six-dimension force sensor
CN106644233B (en) Six-dimensional force sensor
CN103487194B (en) Crossing decoupling six-dimension force sensor
CN107782482A (en) Multiple dimension force/moment sensor
CN106768522B (en) Six-dimensional force sensor elastomer
CN102095534A (en) Double rood beam high-sensitivity six-dimensional moment sensor
CN101598613A (en) The micro five-dimensional force sensor and the method for acquiring force vector information thereof of band overload protection
CN103940544A (en) Double crossed beam combination type finger joint six-dimensional force sensor
CN2165435Y (en) Six-freedom force and moment transducer
CN113561163B (en) Dual-channel multidimensional force sensor and robot
CN109238528B (en) Six-dimensional force sensor
CN102087153A (en) Wheel spoke type fault-tolerant six-dimension force sensor with parallel structure
CN207423488U (en) A kind of big load piece box type balance for hold-down test
CN102052984A (en) Redundancy fault-tolerant type parallel-structured six-dimensional force sensor
CN101907502B (en) Parallel-connection three-dimensional force sensor with decoupling structure
CN2221208Y (en) Multi-component force and moment sensor
CN102338675A (en) Three-dimensional force sensor
CN202255706U (en) Three-dimensional force sensor
CN1168964C (en) Four dimensional force and moment sensor of direct output type robot
CN2359684Y (en) Frame type three-D force transducer

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171117

Termination date: 20200328