CN113865771B - Plane frog-like parallel two-dimensional force sensor and manufacturing method thereof - Google Patents
Plane frog-like parallel two-dimensional force sensor and manufacturing method thereof Download PDFInfo
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- CN113865771B CN113865771B CN202111141535.7A CN202111141535A CN113865771B CN 113865771 B CN113865771 B CN 113865771B CN 202111141535 A CN202111141535 A CN 202111141535A CN 113865771 B CN113865771 B CN 113865771B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000005520 cutting process Methods 0.000 claims description 20
- 229920001971 elastomer Polymers 0.000 claims description 20
- 239000000806 elastomer Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 7
- 238000001125 extrusion Methods 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 239000011888 foil Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 13
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 230000002457 bidirectional effect Effects 0.000 description 3
- 238000012271 agricultural production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
Abstract
The invention relates to a plane frog-like parallel two-dimensional force sensor and a manufacturing method thereof, wherein elastic beams, guide beams and elastic movement branched chains which are symmetrically arranged on two sides of a symmetrical center visor are respectively connected in series, and are symmetrically connected in parallel on two sides of an offset loading table to form a parallel structure, the offset loading table is arranged at one end of a small fixed table, the elastic movement branched chains on two sides are obliquely arranged in parallel, and the plane frog-like two-dimensional force sensor is integrally shaped.
Description
Technical Field
The invention relates to a planar two-dimensional force sensor, in particular to a planar frog-type parallel two-dimensional force sensor and a manufacturing method thereof.
Background
The two-dimensional force sensor can measure force components in two orthogonal directions in a plane at the same time, and is widely applied to industrial and agricultural production occasions needing interactive force sensing in structural and non-structural environments.
The ideal working state of the two-dimensional force sensor is that the directions of the X, Y bidirectional forces of the loading are in the same plane, or the directions of the X, Y bidirectional torques are in the same plane at the central line, but in the specific use process, because the forces or torques of the loading in the X direction and the Y direction are often not in the same plane, a certain deviation exists. The existing two-dimensional force sensor has the problem of torque coupling due to the problem of the self structural shape, so that certain trouble is brought to the data operation after detection, decoupling work is needed through operation, the structure of the two-dimensional force sensor is required to be improved, the coupling is reduced, and the decoupling operation amount is reduced.
Meanwhile, the structure shape of the existing two-dimensional force sensor is generally a three-dimensional structure, for example, chinese patent application No. 20110226610. X discloses a two-dimensional force sensor, a multidirectional hole is formed, manufacturing of an elastic body can be completed only by multidirectional cutting processing, the cutting structure can be performed only after multidirectional positioning, and the processing precision is not good, so that the manufacturing cost is high.
Disclosure of Invention
The technical scheme of the invention is as follows: the utility model provides a parallelly connected two-dimensional force transducer of plane imitative frog formula, includes elastomer and a plurality of foil gage, its characterized in that: the elastic body comprises two guide beams with equal length, two fixing tables corresponding to the end parts of the two guide beams are respectively arranged at the symmetrical center plane first positions of the two guide beams, two sides of each fixing table are respectively connected with the end parts of the guide beams through elastic beams which are perpendicular to the guide beams, the elastic beams and the fixing tables surround to form a square frame first, an offset loading table is arranged in the square frame first, the length direction of the offset loading table and the two fixing tables are arranged on the concentric surfaces, the offset loading table is close to one fixing table, elastic movement branched chains connected with the inner side surfaces of the guide beams are respectively arranged on two side surfaces of the two ends of the offset loading table along the length direction, the elastic movement branched chains on two sides are symmetrically arranged about the symmetrical center plane first, the length direction center plane of each elastic movement branched chain is in an included angle alpha with the symmetrical center plane first, two symmetrical arc-shaped grooves which are arranged on the two side surfaces of the two ends of the elastic movement branched chains are arranged on the two flexible revolute pairs, four flexible revolute pairs on the four sides of each side of the offset loading table are respectively arranged on the four symmetrical center planes of the symmetrical center plane first, and are far away from the symmetrical center plane of the symmetrical plane first.
Preferably, the guide beam, the fixed table, the elastic beam, the bias loading table and the elastic movement branched chain have the same thickness and are of an integrated structure.
Preferably, the corners of the interconnecting parts of the guide beam, the fixed table, the elastic beam, the bias loading table and the elastic movement branched chain all adopt arc transition, and the included angle alpha ranges from 30 degrees to 60 degrees.
Preferably, the two fixing tables are a large fixing table and a small fixing table respectively, the biasing loading table is a small fixing table close to the large fixing table, the biasing loading table is a large fixing table far away from the large fixing table, two elastic Liang Jia are respectively arranged on two sides of the large fixing table, and two elastic beam A, the large fixing table and a guide Liang Gewei which are positioned on the same side form a square frame B; two sides of the small fixed table are respectively provided with an elastic beam B.
Preferably, the large fixing table is provided with four connecting hole nails, two symmetrical arrangement holes are respectively arranged on two sides of the symmetrical center surface nail, and the centers of the four connecting hole nails are coincident with the center of the large fixing table; two connecting holes B are arranged on the small fixed table, two sides of the symmetrical center plane A are symmetrically arranged, and the connecting holes B are positioned on the transverse central axis of the small fixed table; the distances from the two connecting holes A and the connecting hole B on the same side of the symmetrical center plane A to the symmetrical center plane A are the same.
Preferably, the offset loading platform is provided with four connections Kong Bing, two connections Kong Bing are symmetrically arranged on two sides of the symmetrical center plane, and the distances from the centers of the four connections Kong Bing to the intersection line of the central planes of the two pairs of elastic movement branched chains at two ends of the offset loading platform are the same.
Preferably, the number of the strain gauges is eight, four strain gauges are respectively arranged on two sides of the symmetrical center plane A, four strain gauges on each side are respectively attached to the side face of the elastic beam A, which is positioned close to the end part of the elastic Liang Jia, the four strain gauges on each side are positioned at four vertexes of a rectangle, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
Preferably, the number of the strain gauges is eight, and four strain gauges are arranged on two sides of the symmetrical center visor; two of the two elastic Liang Jia sides which are stuck inside the square frame B and are close to one end of the guide beam, and the other two elastic Liang Jia sides which are stuck outside the square frame B and are close to one end of the large fixing table, wherein four strain gauges on each side are positioned at four vertexes of an isosceles trapezoid, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
The manufacturing method of the planar frog type parallel two-dimensional force sensor comprises the following steps:
(1) manufacturing an extrusion die according to the section shape of the elastomer;
(2) extruding and molding the strip-shaped section bar with the cross section shape identical to that of the elastomer through a die;
(3) cutting an elastomer with proper thickness along the cross section of the strip-shaped section;
(4) and attaching strain gauges.
Preferably, a finish cutting step is further arranged between the steps (3) and (4), and the finish cutting step only comprises cutting in the direction perpendicular to the cross section direction of the elastomer, and does not comprise cutting in other directions, so that the cross section shape and the dimension of the elastomer meet the design requirements.
The beneficial technical effects of the invention are as follows:
according to the plane frog-like parallel two-dimensional force sensor and the manufacturing method thereof, elastic beams, guide beams and elastic movement branched chains which are symmetrically arranged on two sides of a symmetrical center visor are respectively connected in series, and are symmetrically connected in parallel on two sides of a bias loading table to form a parallel structure, the bias loading table is arranged at one end of a small fixed table, the elastic movement branched chains on two sides are obliquely arranged in parallel, and the plane frog-like two-dimensional force sensor is integrally formed.
Drawings
FIG. 1 is a perspective view of a planar frog-type parallel two-dimensional force sensor;
FIG. 2 is a top view of a planar frog-type parallel two-dimensional force sensor;
FIG. 3 is one of the top views of a planar frog-type parallel two-dimensional force sensor after attachment of a strain gauge;
FIG. 4 is a second top view of a planar frog-type parallel two-dimensional force sensor after attachment of a strain gauge;
FIG. 5 is a schematic diagram of path calibration in computer simulation;
fig. 6 is a schematic diagram of sinusoidal elastic strain on path a for vertical FZ or fy=1000n;
fig. 7 is a schematic diagram of sinusoidal elastic strain on path B for vertical FZ or fy=1000n;
fig. 8 is a schematic diagram of sinusoidal elastic strain on path C for vertical FZ or fy=1000n;
fig. 9 is a schematic diagram of sinusoidal elastic strain on path D with vertical FZ or fy=1000n;
fig. 10 is a schematic diagram of sinusoidal elastic strain on path a when a horizontal force fx=1000n is applied;
fig. 11 is a schematic diagram of sinusoidal elastic strain on path B when a horizontal force fx=1000n is applied;
fig. 12 is a schematic diagram of sinusoidal elastic strain on path C when a horizontal force fx=1000n is applied;
fig. 13 is a schematic diagram of sinusoidal elastic strain on path D when a horizontal force fx=1000n is applied;
fig. 14 is a schematic diagram of sinusoidal elastic strain on path a when torque mz=10 Nm is applied;
fig. 15 is a schematic diagram of sinusoidal elastic strain on path B when torque mz=10 Nm is applied;
fig. 16 is a schematic diagram of sinusoidal elastic strain on path C when torque mz=10 Nm is applied;
fig. 17 is a schematic diagram of sinusoidal elastic strain on path D when torque mz=10 Nm is applied;
in the figure: 1. guide beam, square frame A, big fixed table, 21, connecting hole A, 3, elastic beam, 31, square frame B, 4, elastic movement branched chain, 41, flexible revolute pair (two opposite arc grooves), 5, offset loading table, 51, connecting Kong Bing, 6, small fixed table, 61, connecting hole B and R1-R8. strain gauge.
Detailed Description
Embodiment one: referring to fig. 1-3, a planar frog-type parallel two-dimensional force sensor comprises an elastomer and a plurality of strain gauges, and is characterized in that: the elastic body comprises two guide beams with equal length, two fixing tables corresponding to the end parts of the two guide beams are respectively arranged at the symmetrical center plane first positions of the two guide beams, two sides of each fixing table are respectively connected with the end parts of the guide beams through elastic beams which are perpendicular to the guide beams, the elastic beams and the fixing tables surround to form a square frame first, an offset loading table is arranged in the square frame first, the length direction of the offset loading table and the two fixing tables are arranged on the concentric surfaces, the offset loading table is close to one fixing table, elastic movement branched chains connected with the inner side surfaces of the guide beams are respectively arranged on two side surfaces of the two ends of the offset loading table along the length direction, the elastic movement branched chains on two sides are symmetrically arranged about the symmetrical center plane first, the length direction center plane of each elastic movement branched chain is in an included angle alpha with the symmetrical center plane first, two symmetrical arc-shaped grooves which are arranged on the two side surfaces of the two ends of the elastic movement branched chains are arranged on the two flexible revolute pairs, four flexible revolute pairs on the four sides of each side of the offset loading table are respectively arranged on the four symmetrical center planes of the symmetrical center plane first, and are far away from the symmetrical center plane of the symmetrical plane first.
The guide beam, the fixed table, the elastic beam, the offset loading table and the elastic movement branched chain have the same thickness and are of an integrated structure.
The angle alpha between the guide beam, the fixed table, the elastic beam, the offset loading table and the elastic movement branched chain is in arc transition at the corner of the interconnection part, and the angle alpha is between 30 and 60 degrees.
The two fixing tables are a large fixing table and a small fixing table respectively, the biasing loading table is a small fixing table close to the large fixing table, the biasing loading table is a large fixing table far away from the large fixing table, two elastic Liang Jia are respectively arranged on two sides of the large fixing table, and two elastic beams A, the large fixing table and a guide Liang Gewei which are positioned on the same side form a square frame B; two sides of the small fixed table are respectively provided with an elastic beam B.
The large fixing table is provided with four connecting hole nails, two symmetrical arrangement holes are respectively arranged on two sides of the symmetrical center visor, and the centers of the four connecting hole nails are coincident with the center of the large fixing table; two connecting holes B are arranged on the small fixed table, two sides of the symmetrical center plane A are symmetrically arranged, and the connecting holes B are positioned on the transverse central axis of the small fixed table; the distances from the two connecting holes A and the connecting hole B on the same side of the symmetrical center plane A to the symmetrical center plane A are the same.
Four connections Kong Bing are arranged on the offset loading platform, two symmetrical arrangements are respectively arranged on two sides of the symmetrical center plane, and the distances from the centers of the four connections Kong Bing to the intersection line of the central planes of two pairs of elastic movement branched chains at two ends of the offset loading platform are the same.
The elastic body of the sensor is connected in series with the elastic beams, the guide beams and the elastic movement branched chains which are symmetrically arranged on two sides of the symmetrical center visor respectively, and meanwhile, the elastic beams, the guide beams and the elastic movement branched chains are symmetrically connected in parallel on two sides of the offset loading platform to form a parallel structure, the offset loading platform is arranged at one end of the small fixing platform, the elastic movement branched chains on the two sides are obliquely arranged in parallel, and the sensor is integrally shaped like a frog, so that on one hand, the problem of coupling caused by the X, Y bidirectional force of loading is not on a plane can be reduced, the calculation amount of later decoupling is reduced, the elastic body of a plane structure can also be reduced, the manufacturing difficulty of the elastic body is reduced, the cutting processing is reduced, and the processing precision is easy to ensure.
The number of the strain gauges is eight, four strain gauges are respectively arranged on two sides of the symmetrical center plane A, four of each side are respectively attached to the side face of the elastic beam A, which is arranged near the end part of the elastic Liang Jia, the four strain gauges on each side are located at four vertexes of a rectangle, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
The process of finite element software simulation of this example is shown in fig. 5-17, and the following table 1 is obtained from the simulation data of fig. 5-17:
TABLE 1 output Strain at strain gage attachment points under Shan Weili/moment load
| Path D | Path B | Path A | Path C | Path D | Path B | Path C | Path A | |
| Strain gauge | ε R1 (με) | ε R2 (με) | ε R3 (με) | ε R4 (με) | ε R5 (με) | ε R6 (με) | ε R7 (με) | ε R8 (με) |
| Position/mm | 4.1667 | 4.1667 | 4.1667 | 4.1667 | 20.833 | 20.833 | 20.833 | 20.833 |
| Fx＝1000N | 480.77 | -365.24 | 365.06 | -480.59 | -552.55 | 700.19 | 555.61 | -699.8 |
| Fy＝1000N | -1000.69 | 789.31 | 788.4 | -1000.58 | 1086.6 | -1398 | 1092.2 | -1396.5 |
| Mz＝10Nm | 23.597 | -0.3601 | 0.3667 | 23.641 | -16.415 | -13.023 | 16.418 | 13.041 |
Table 1 positions in column 1: the attachment position of the strain gauge along the path direction is shown, and the strain gauge is linearly distributed on the elastic beam, so that only one attachment position point of the strain gauge is selected for explanation. Wherein 1 mu epsilon: representing microstrain=10 -6 mm/mm
Specifically:
(1) When fx=1000n is applied
Full bridge 1 output: epsilon Fx ＝(ε R1 +ε R3 -ε R2 -ε R4 )/4＝422.91με
Full bridge 2 output: epsilon Fy ＝(ε R5 +ε R7 -ε R6 -ε R8 )/4＝0.16με＝0.67με
Full scale coupling strain 0.67/422.91 = 0.16% f.s.
(2) When fy=1000n is applied
Full bridge 1 output: epsilon Fx ＝(ε R1 +ε R3 -ε R2 -ε R4 )/4＝-0.255με
Full bridgeWay 2 output: epsilon Fy ＝(ε R5 +ε R7 -ε R6 -ε R8 )/4＝0.16με＝1243.3με
Full scale coupling strain: 0.255/1243.3 =0.02% f.s.
According to the strain value, the strain gauge pasting position and the patch group bridge scheme 1 on the defined path, the full-bridge 1 for measuring the force Fx and the bridge for measuring the Fy or Fz can be obtained with smaller coupling output.
(3) When mz=10nm is applied
Full bridge 1 output: epsilon Fx ＝(ε R1 +ε R3 -ε R2 -ε R4 )/4＝0.17με
Coupling strain 0.17/422.91 =0.04% f.s.
Full bridge 2 output: εFy= (ε) R5 +ε R7 -ε R6 -ε R8 )/4＝0.16με＝-0.00375με
Coupling strain: 0.00375/1243.3 =0.00% f.s.
According to the strain value, the strain gauge pasting position and the patch group bridge scheme 1 on the defined path, the coupling output of the full-bridge 1 for measuring the force Fx and the bridge for measuring the Fy or Fz to the torque Mz is smaller.
Embodiment two: referring to fig. 1, 2 and 4, a plane frog type parallel two-dimensional force sensor is basically the same as the first embodiment, and the same points are not repeated, except that eight strain gauges are arranged in the second embodiment, and four strain gauges are arranged on two sides of a symmetrical center plane; two of the two elastic Liang Jia sides which are stuck inside the square frame B and are close to one end of the guide beam, and the other two elastic Liang Jia sides which are stuck outside the square frame B and are close to one end of the large fixing table, wherein four strain gauges on each side are positioned at four vertexes of an isosceles trapezoid, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
Embodiment III: the manufacturing method of the planar frog type parallel two-dimensional force sensor based on the first embodiment or the second embodiment comprises the following steps:
(1) manufacturing an extrusion die according to the cross-sectional shape and the size of the elastomer;
(2) extruding and molding the strip-shaped section bar with the cross section shape identical to the cross section shape and the dimension of the elastomer through a die;
(3) cutting an elastomer with proper thickness along the cross section of the strip-shaped section;
(4) and attaching strain gauges.
Because each component part in the structure of the elastic body of the sensor is arranged on the same plane, and each hole is also arranged in the direction vertical to the plane, no structure needs to be cut and machined in the lateral direction vertical to the plane of the elastic body, the structure can be manufactured by adopting a process route of section bar slicing, and if the dimensional accuracy of the section bar during extrusion meets the design requirement, the process of cutting and machining can be omitted, the process is simplified, and the production cost is reduced.
Embodiment four: the fourth embodiment is basically the same as the third embodiment, and the difference is that a finish cutting step is further provided between the steps (3) and (4) in the fourth embodiment, and the step only includes cutting perpendicular to the cross section direction of the elastomer, and does not include cutting in other directions, so that the cross section shape and size of the elastomer meet the design requirements.
The implementation is mainly aimed at the situation that the dimensional accuracy is insufficient when the profile is extruded, and because no structure needs to be cut in the lateral direction perpendicular to the plane of the elastomer, the step only comprises cutting perpendicular to the cross section direction of the elastomer, so that the requirement on a positioning reference is reduced during cutting, and meanwhile, the processing can be finished by only one axial cutting tool, and the processing difficulty and cost are reduced.
Claims (8)
1. The utility model provides a parallelly connected two-dimensional force transducer of plane imitative frog formula, includes elastomer and a plurality of foil gage, its characterized in that:
the elastic body comprises two guide beams with equal length, two fixing tables corresponding to the end parts of the two guide beams are respectively arranged at the symmetrical center plane first positions of the two guide beams, two sides of each fixing table are respectively connected with the end parts of the guide beams through elastic beams which are vertically arranged with the guide beams, the elastic beams and the fixing tables surround to form a square frame first, an offset loading table is arranged in the square frame first, the length direction of the offset loading table is arranged with the concentric surfaces of the two fixing tables, the offset loading table is close to one fixing table, elastic movement branched chains connected with the inner side surfaces of the guide beams are respectively arranged at two side surfaces of the offset loading table along the length direction, the elastic movement branched chains at two sides are symmetrically arranged about the symmetrical center plane first, the length direction center surface of each elastic movement branched chain is in an included angle alpha with the symmetrical center plane first, two end parts of each elastic movement branched chain are provided with flexible revolute pairs, the flexible revolute pairs are two symmetrical arc-shaped grooves which are arranged at the side surfaces of the two ends of the elastic movement branched chains, four flexible revolute pairs at each side of the offset loading table are positioned at the four symmetrical top points of the symmetrical loading table, and are far away from the symmetrical loading table, and are respectively attached to the symmetrical top surfaces of the symmetrical loading table;
the guide beam, the fixed table, the elastic beam, the offset loading table and the elastic movement branched chain have the same thickness and are of an integrated structure;
the angle alpha between the guide beam, the fixed table, the elastic beam, the offset loading table and the elastic movement branched chain is in arc transition at the corner of the interconnection part, and the angle alpha is between 30 and 60 degrees.
2. The planar frog-parallel two-dimensional force sensor of claim 1, wherein: the two fixing tables are a large fixing table and a small fixing table respectively, the biasing loading table is a small fixing table close to the large fixing table, the biasing loading table is a large fixing table far away from the large fixing table, two elastic Liang Jia are respectively arranged on two sides of the large fixing table, and two elastic beams A, the large fixing table and a guide Liang Gewei which are positioned on the same side form a square frame B; two sides of the small fixed table are respectively provided with an elastic beam B.
3. The planar frog-parallel two-dimensional force sensor of claim 2, wherein: the large fixing table is provided with four connecting hole nails, two symmetrical arrangement holes are respectively arranged on two sides of the symmetrical center visor, and the centers of the four connecting hole nails are coincident with the center of the large fixing table; two connecting holes B are arranged on the small fixed table, two sides of the symmetrical center plane A are symmetrically arranged, and the connecting holes B are positioned on the transverse central axis of the small fixed table; the distances from the two connecting holes A and the connecting hole B on the same side of the symmetrical center plane A to the symmetrical center plane A are the same.
4. The planar frog-parallel two-dimensional force sensor of claim 2, wherein: four connections Kong Bing are arranged on the offset loading platform, two symmetrical arrangements are respectively arranged on two sides of the symmetrical center plane, and the distances from the centers of the four connections Kong Bing to the intersection line of the central planes of two pairs of elastic movement branched chains at two ends of the offset loading platform are the same.
5. The planar frog-parallel two-dimensional force sensor of claim 2, wherein: the number of the strain gauges is eight, four strain gauges are respectively arranged on two sides of the symmetrical center plane A, four of each side are respectively attached to the side face of the elastic beam A, which is arranged near the end part of the elastic Liang Jia, the four strain gauges on each side are located at four vertexes of a rectangle, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
6. The planar frog-parallel two-dimensional force sensor of claim 2, wherein: the number of the strain gauges is eight, and four strain gauges are respectively arranged at two sides of the symmetrical center plane; two of the two elastic Liang Jia sides which are stuck inside the square frame B and are close to one end of the guide beam, and the other two elastic Liang Jia sides which are stuck outside the square frame B and are close to one end of the large fixing table, wherein four strain gauges on each side are positioned at four vertexes of an isosceles trapezoid, and the centers of the four strain gauges on each side are overlapped with the center of the square frame B.
7. A method of manufacturing a planar frog-parallel two-dimensional force sensor as claimed in any one of claims 1 to 6, comprising the steps of:
(1) manufacturing an extrusion die according to the section shape of the elastomer;
(2) extruding and molding the strip-shaped section bar with the cross section shape identical to that of the elastomer through a die;
(3) cutting an elastomer with proper thickness along the cross section of the strip-shaped section;
(4) and attaching strain gauges.
8. The method for manufacturing the planar frog type parallel two-dimensional force sensor according to claim 7, wherein the method comprises the following steps: and (3) a finish cutting step is further arranged between the steps (3) and (4), and the step only comprises cutting in the direction perpendicular to the cross section direction of the elastomer, and does not comprise cutting in other directions, so that the cross section shape and the dimension of the elastomer meet the design requirements.
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