CN107131983A - A kind of no-coupling six-dimensional force sensor of binocular structure - Google Patents

A kind of no-coupling six-dimensional force sensor of binocular structure Download PDF

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Publication number
CN107131983A
CN107131983A CN201710340000.XA CN201710340000A CN107131983A CN 107131983 A CN107131983 A CN 107131983A CN 201710340000 A CN201710340000 A CN 201710340000A CN 107131983 A CN107131983 A CN 107131983A
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China
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foil gauge
mounting plate
upper mounting
lower platform
sensitive beam
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CN201710340000.XA
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Chinese (zh)
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孙永军
刘伊威
刘宏
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN201710340000.XA priority Critical patent/CN107131983A/en
Publication of CN107131983A publication Critical patent/CN107131983A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

A kind of no-coupling six-dimensional force sensor of binocular structure, belongs to sensor technical field, is related to a kind of force snesor, in order to solve the problem of existing six-dimension force sensor sensitivity is low, retinoic acid syndrome is big.The upper mounting plate loading bench and lower platform fixed station of the present invention is annular shape;Center hub is simultaneously centrally located;Lower platform sensitive beam and upper mounting plate sensitive beam are each attached in center hub, and lower platform sensitive beam is fixed on the inwall of lower platform fixed station;Lower platform sensitive beam is provided with a binocular structure through hole;Upper mounting plate sensitive beam is fixed on the inwall of upper mounting plate loading bench, and upper mounting plate sensitive beam is provided with No. two binocular structure through holes;Every four foil gauges constitute one group of favour stone full-bridge;Eight groups of favour stone full-bridges are used to realize the measurement of sextuple force information;Multiple screwed holes are provided with the upper and lower platform fixed station of upper mounting plate loading bench;Multiple screwed holes are used to be attached with outside Devices to test.Have the beneficial effect that sensitivity is high, without coupling between dimension.

Description

A kind of no-coupling six-dimensional force sensor of binocular structure
Technical field
The invention belongs to sensor technical field, it is related to a kind of force snesor.
Background technology
With developing rapidly for robot technology, for proposing higher want with the robot that multisensor is perceived Ask.Power is felt as one very important function of robot, and vital effect is played in robot development.Perceptually Robot Force feels a kind of most important sensor, and six-dimension force sensor is perceived in the wrist power of robot, dexterous robot finger Very big effect is played in terms of sharp power detection, the measurement of humanoid robot foot section power.Therefore, the correlation of six-dimension force sensor Technology is the big study hotspot and difficulties of robot field.The sensitivity of six-dimension force sensor, retinoic acid syndrome, precision and Sluggishness etc. is to influence the most important index of sensor performance.Sensitivity, the precision of six-dimension force sensor how are improved, is reduced Retinoic acid syndrome, reduction sluggishness are the focal issue for enjoying research all the time, but do not have a solution well so far Method.
It is existing to be used to detect that the elastomer after six-dimension force sensor stress is often solid beam, such as China Patent Publication No. Respectively CN 103940544 B, CN 103487194 B, CN 103528746 B, CN 103528726 B, CN 104048790 A, CN 100535620 C, CN 105651446 A patent, it is existing be used for detect six-dimension force sensor knot The advantage of structure is that the rigidity of sensor is big, sluggish small, but has the disadvantage that sensitivity is low, retinoic acid syndrome is big.Patent CN 106225977 A employs unidirectional transducer and improves measurement accuracy, and the spring beam of unidirectional transducer is binocular structure, but the elastomer of the patent For the elastomer of combination, thus there are problems that gap, so as to cause six-dimension force sensor to there is larger sluggish effect Should, influence measurement accuracy.Although the couple of force that the B of patent CN 102323000 can reduce sensor presence is closed, due to there is spiral shell Tether to connect and can produce uneven pretightning force, cause sensor that there is larger sluggishness, reduce measurement accuracy.Paper《One kind is sliding The Decoupling Analysis of the six-dimension force sensor of dynamic structure》(detailed source is:Wu B,Cai P.Decoupling analysis of a sliding structure six-axis force/torque sensor[J].Measurement Science Review,2013,13(4):187-193) although the decoupling six-dimension force snesor based on Sliding Structures proposed also uses double Mesh structure improve sensitivity, but be due to Sliding Structures presence so that sensor elastomer be non-integral type, therefore exist compared with Big sluggishness, reduces measurement accuracy.
The content of the invention
The invention aims to solve the problem of existing six-dimension force sensor sensitivity is low, retinoic acid syndrome is big, carry A kind of no-coupling six-dimensional force sensor of binocular structure is gone out.
A kind of no-coupling six-dimensional force sensor of binocular structure of the present invention, including 32 foil gauges, centers Wheel hub, upper mounting plate loading bench, four upper mounting plate sensitive beams, lower platform fixed station and four lower platform sensitive beams;
Upper mounting plate loading bench and lower platform fixed station are annular shape;
Center hub is simultaneously positioned at the center of upper mounting plate loading bench and the center of lower platform fixed station;
One end of each lower platform sensitive beam is each attached on the outer wall of center hub bottom, each lower platform sensitive beam The other end is each attached on the inwall of lower platform fixed station;And each lower platform sensitive beam is provided with a binocular structure and led to Hole;
One end of each upper mounting plate sensitive beam is each attached on the outer wall on center hub top, each upper mounting plate sensitive beam The other end is each attached on the inwall of upper mounting plate loading bench, and each upper mounting plate sensitive beam is provided with No. two binocular structures and led to Hole;
Every four foil gauges constitute one group of favour stone full-bridge;Eight groups of favour stone full-bridges are used to realize the survey of sextuple force information Amount;
It is provided with upper mounting plate loading bench on multiple upper mounting plate screwed holes, lower platform fixed station and is provided with multiple lower platform screw threads Hole;Multiple upper mounting plate screwed holes and multiple lower platform screwed holes are used to be attached with outside Devices to test.
The invention has the advantages that:
First, a binocular structure through hole is provided with each lower platform sensitive beam of the present invention, each upper mounting plate sensitive beam is provided with No. two binocular structure through holes;Under conditions of equal external dimension, compared to solid sensitive beam, lower platform of the invention is quick Sense beam and the composite bending modulus of upper mounting plate sensitive beam diminish, therefore, under the conditions of equal external load, and lower platform of the invention is sensitive Beam and the ess-strain of upper mounting plate sensitive beam are larger, therefore can greatly improve the sensitivity of sensor;
2nd, the present invention, should using a kind of complicated six-dimension force sensor with direct decoupling of sensing element structure design Sensor has non-coupling advantage.
Brief description of the drawings
Fig. 1 is that a kind of cross-section structure of the no-coupling six-dimensional force sensor of binocular structure described in embodiment one shows It is intended to;
Fig. 2 is the position relationship schematic diagram of foil gauge on lower platform fixed station in embodiment four;
Fig. 3 is the position relationship schematic diagram of foil gauge on upper mounting plate loading bench in embodiment four.
Embodiment
Embodiment one:Illustrate present embodiment, a kind of nothing of binocular structure described in present embodiment with reference to Fig. 1 Couple six-dimension force sensor, including 32 foil gauges 1, center hub 4, upper mounting plate loading bench 5, four upper mounting plate sensitive beams 7th, lower platform fixed station 8 and four lower platform sensitive beams 9;
Upper mounting plate loading bench 5 and lower platform fixed station 8 are annular shape;
Center hub 4 is simultaneously positioned at the center of upper mounting plate loading bench 5 and the center of lower platform fixed station 8;
One end of each lower platform sensitive beam 9 is each attached on the outer wall of the bottom of center hub 4, each lower platform sensitive beam 9 other end is each attached on the inwall of lower platform fixed station 8;And each lower platform sensitive beam 9 is provided with a binocular knot Structure through hole 2;
One end of each upper mounting plate sensitive beam 7 is each attached on the outer wall on the top of center hub 4, each upper mounting plate sensitive beam 7 other end is each attached on the inwall of upper mounting plate loading bench 5, and each upper mounting plate sensitive beam 7 is provided with No. two binocular knots Structure through hole 3;
Every four foil gauges 1 constitute one group of favour stone full-bridge;Eight groups of favour stone full-bridges are used to realize sextuple force information Measurement;
It is provided with upper mounting plate loading bench 5 on multiple upper mounting plate screwed holes 6, lower platform fixed station 8 and is provided with multiple lower platform spiral shells Pit 10;Multiple upper mounting plate screwed holes 6 and multiple lower platform screwed holes 10 are used to be attached with outside Devices to test, so that Six-dimensional force infomation detection for actual condition.
In the present embodiment, a binocular structure through hole 2 is provided with each lower platform sensitive beam 9, each upper mounting plate is quick Sense beam 7 is provided with No. two binocular structure through holes 3;Under conditions of equal external dimension, compared to solid sensitive beam, this implementation The composite bending modulus of lower platform sensitive beam 9 and upper mounting plate sensitive beam 7 in mode diminishes, therefore, under the conditions of equal external load, The ess-strain of lower platform sensitive beam 9 and upper mounting plate sensitive beam 7 in present embodiment is larger, therefore can greatly improve sensor Sensitivity;Present embodiment is using a kind of complicated six-dimensional force sensing with direct decoupling of sensing element structure design simultaneously Device, the sensor has non-coupling advantage.
Embodiment two:Present embodiment is without coupling to a kind of binocular structure described in embodiment one Six-dimension force sensor is further limited, in the present embodiment, and the shape and No. two binocular structures of a binocular structure through hole 2 are led to The shape in hole 3 is identical;And the cross-sectional area of binocular structure through hole 2 and the cross-sectional area of No. two binocular structure through holes 3 according to Set according to the range of the no-coupling six-dimensional force sensor of the binocular structure.
In the present embodiment, the cross section of the cross-sectional area of binocular structure through hole 2 and No. two binocular structure through holes 3 Product be able to can also be differed with identical.
Embodiment three:Present embodiment is without coupling to a kind of binocular structure described in embodiment one Six-dimension force sensor is further limited, in the present embodiment, circumferential direction of four lower platform sensitive beams 9 along center hub 4 It is uniformly distributed;Circumferential direction of four upper mounting plate sensitive beams 7 along center hub 4 is uniformly distributed.
In the present embodiment, the angle between two adjacent lower platform sensitive beams 9 is 90 degree, and adjacent two are upper flat Angle between platform sensitive beam 7 is all 90 degree.
Embodiment four:Illustrate present embodiment with reference to Fig. 2 and Fig. 3, present embodiment is to embodiment A kind of no-coupling six-dimensional force sensor of binocular structure described in three is further limited, in the present embodiment, and 32 should It is respectively foil gauge S1-S32 to become piece 1;And foil gauge S1-S32 initial resistivity value is identical;
Foil gauge S5, foil gauge S6, foil gauge S19 and foil gauge S17 constitute first group of favour stone full-bridge;
Foil gauge S11, foil gauge S12, foil gauge S22 and foil gauge S24 constitute second group of favour stone full-bridge;
Foil gauge S27, foil gauge S28, foil gauge S31 and foil gauge S32 constitute the 3rd group of favour stone full-bridge;
Foil gauge S25, foil gauge S26, foil gauge S29 and foil gauge S30 constitute the 4th group of favour stone full-bridge;
Foil gauge S1, foil gauge S2, foil gauge S9 and foil gauge S10 constitute the 5th group of favour stone full-bridge;
Foil gauge S15, foil gauge S7, foil gauge S8 and foil gauge S16 constitute the 6th group of favour stone full-bridge;
Foil gauge S13, foil gauge S14, foil gauge S21 and foil gauge S23 constitute the 7th group of favour stone full-bridge;
Foil gauge S3, foil gauge S4, foil gauge S18 and foil gauge S20 constitute the 8th group of favour stone full-bridge.
Embodiment five:Present embodiment is without coupling to a kind of binocular structure described in embodiment four Six-dimension force sensor is further limited, in the present embodiment, and a binocular structure through hole 2 is upper lower through-hole;
It is quick that four lower platform sensitive beams 9 are along the circumferential direction followed successively by the first lower platform sensitive beam 9-1, the second lower platform Feel beam 9-2, the 3rd lower platform sensitive beam 9-3 and the 4th lower platform sensitive beam 9-4;
Foil gauge S3 and foil gauge S4 are pasted onto on a first lower platform sensitive beam 9-1 side wall, foil gauge S18 and should Become piece S20 to be pasted onto on a 3rd lower platform sensitive beam 9-3 side wall;
Foil gauge S7 and foil gauge S8 are pasted onto on the first lower platform sensitive beam 9-1 another side wall, foil gauge S15 and Foil gauge S16 is pasted onto on the 3rd lower platform sensitive beam 9-3 another side wall;
Foil gauge S1 and foil gauge S2 are pasted onto on a 4th lower platform sensitive beam 9-4 side wall, foil gauge S9 and should Become piece S10 to be pasted onto on a second lower platform sensitive beam 9-2 side wall;
Foil gauge S23 and foil gauge S21 are pasted onto on the 4th lower platform sensitive beam 9-4 another side wall, foil gauge S13 On another side wall that the second lower platform sensitive beam 9-2 is pasted onto with foil gauge S14.
In the present embodiment, the 5th group of favour stone full-bridge is used to measure tangential force Fy;8th group of favour stone full-bridge is used for Measure tangential force Fx;6th group of favour stone full-bridge and the 7th group of favour stone full-bridge are used to measurement moment of torsion Mz.
Embodiment six:Present embodiment is without coupling to a kind of binocular structure described in embodiment five Six-dimension force sensor is further limited, in the present embodiment, No. two binocular structure through holes 3 and binocular structure through hole 2 Perforate direction is vertical;
It is quick that four upper mounting plate sensitive beams 7 are along the circumferential direction followed successively by the first upper mounting plate sensitive beam 7-1, the second upper mounting plate Feel beam 7-2, the 3rd upper mounting plate sensitive beam 7-3 and the 4th upper mounting plate sensitive beam 7-4;
Foil gauge S27 and foil gauge S28 are pasted onto on the first upper mounting plate sensitive beam 7-1 bottom surface, foil gauge S31 and strain Piece S32 is pasted onto on the 3rd upper mounting plate sensitive beam 7-3 bottom surface;
Foil gauge S5 and foil gauge S6 are pasted onto on the first upper mounting plate sensitive beam 7-1 top surface, foil gauge S17 and foil gauge S19 is pasted onto on the 3rd upper mounting plate sensitive beam 7-3 top surface;
Foil gauge S29 and foil gauge S30 are pasted onto on the 4th upper mounting plate sensitive beam 7-4 bottom surface, foil gauge S25 and strain Piece S26 is pasted onto on the second upper mounting plate sensitive beam 7-2 bottom surface;
Foil gauge S11 and foil gauge S12 are pasted onto on the 4th upper mounting plate sensitive beam 7-4 top surface, foil gauge S22 and strain Piece S24 is pasted onto on the second upper mounting plate sensitive beam 7-2 top surface.
In the present embodiment, first group of favour stone full-bridge is used to measure moment M x;Second group of favour stone full-bridge is used to survey Measure moment M y;3rd group of favour stone full-bridge and the 4th group of favour stone full-bridge are used to measurement axial force F z.
Embodiment seven:Present embodiment is without coupling to a kind of binocular structure described in embodiment one Six-dimension force sensor is further limited, in the present embodiment, and multiple upper mounting plate screwed holes 6 are on upper mounting plate loading bench 5 along circle Circumferential direction is uniformly distributed;Multiple lower platform screwed holes 10 are distributed uniformly and circumferentially on lower platform fixed station 8.
Embodiment eight:Present embodiment is without coupling to a kind of binocular structure described in embodiment one Six-dimension force sensor is further limited, in the present embodiment, center hub 4, upper mounting plate loading bench 5, four upper mounting plate sensitivities Beam 7, lower platform fixed station 8 and four lower platform sensitive beams 9 are structure as a whole;And the integrative-structure using duralumin, hard alumin ium alloy, Stainless steel or structural alloy steel are made.
In the present embodiment, center hub 4, upper mounting plate loading bench 5, four upper mounting plate sensitive beams 7, lower platforms is adopted to fix Platform 8 and four lower platform sensitive beams 9 are structure as a whole, the problems such as pretightning force and fit-up gap is not present in sensing element, so Sluggish small, precision is high.

Claims (8)

1. a kind of no-coupling six-dimensional force sensor of binocular structure, it is characterised in that including 32 foil gauges (1), centers Wheel hub (4), upper mounting plate loading bench (5), four upper mounting plate sensitive beams (7), lower platform fixed station (8) and four lower platform sensitive beams (9);
Upper mounting plate loading bench (5) and lower platform fixed station (8) are annular shape;
Center hub (4) is while positioned at the center of upper mounting plate loading bench (5) and the center of lower platform fixed station (8);
One end of each lower platform sensitive beam (9) is each attached on the outer wall of center hub (4) bottom, each lower platform sensitive beam (9) the other end is each attached on the inwall of lower platform fixed station (8);And each lower platform sensitive beam (9) is provided with No. one Binocular structure through hole (2);
One end of each upper mounting plate sensitive beam (7) is each attached on the outer wall on center hub (4) top, each upper mounting plate sensitive beam (7) the other end is each attached on the inwall of upper mounting plate loading bench (5), and each upper mounting plate sensitive beam (7) is provided with No. two Binocular structure through hole (3);
Every four foil gauges (1) constitute one group of favour stone full-bridge;Eight groups of favour stone full-bridges are used to realize the survey of sextuple force information Amount;
Multiple upper mounting plate screwed holes (6) are provided with upper mounting plate loading bench (5), lower platform fixed station is provided with multiple lower platforms on (8) Screwed hole (10);Multiple upper mounting plate screwed holes (6) and multiple lower platform screwed holes (10) are used to carry out with outside Devices to test Connection.
2. a kind of no-coupling six-dimensional force sensor of binocular structure according to claim 1 a, it is characterised in that binocular The shape of structure through hole (2) is identical with the shape of No. two binocular structure through holes (3);And the horizontal stroke of a binocular structure through hole (2) The amount of sectional area and the cross-sectional area of No. two binocular structure through holes (3) according to the no-coupling six-dimensional force sensor of the binocular structure Cheng Jinhang is set.
3. the no-coupling six-dimensional force sensor of a kind of binocular structure according to claim 1, it is characterised in that put down under four Circumferential direction of the platform sensitive beam (9) along center hub (4) is uniformly distributed;Four upper mounting plate sensitive beams (7) are along center hub (4) Circumferential direction is uniformly distributed.
4. the no-coupling six-dimensional force sensor of a kind of binocular structure according to claim 3, it is characterised in that 32 Foil gauge (1) is respectively foil gauge S1-S32;And foil gauge S1-S32 initial resistivity value is identical;
Foil gauge S5, foil gauge S6, foil gauge S19 and foil gauge S17 constitute first group of favour stone full-bridge;
Foil gauge S11, foil gauge S12, foil gauge S22 and foil gauge S24 constitute second group of favour stone full-bridge;
Foil gauge S27, foil gauge S28, foil gauge S31 and foil gauge S32 constitute the 3rd group of favour stone full-bridge;
Foil gauge S25, foil gauge S26, foil gauge S29 and foil gauge S30 constitute the 4th group of favour stone full-bridge;
Foil gauge S1, foil gauge S2, foil gauge S9 and foil gauge S10 constitute the 5th group of favour stone full-bridge;
Foil gauge S15, foil gauge S7, foil gauge S8 and foil gauge S16 constitute the 6th group of favour stone full-bridge;
Foil gauge S13, foil gauge S14, foil gauge S21 and foil gauge S23 constitute the 7th group of favour stone full-bridge;
Foil gauge S3, foil gauge S4, foil gauge S18 and foil gauge S20 constitute the 8th group of favour stone full-bridge.
5. a kind of no-coupling six-dimensional force sensor of binocular structure according to claim 4 a, it is characterised in that binocular Structure through hole (2) is upper lower through-hole;
It is quick that four lower platform sensitive beams (9) are along the circumferential direction followed successively by the first lower platform sensitive beam (9-1), the second lower platform Feel beam (9-2), the 3rd lower platform sensitive beam (9-3) and the 4th lower platform sensitive beam (9-4);
Foil gauge S3 and foil gauge S4 are pasted onto on a side wall of the first lower platform sensitive beam (9-1), foil gauge S18 and strain Piece S20 is pasted onto on a side wall of the 3rd lower platform sensitive beam (9-3);
Foil gauge S7 and foil gauge S8 are pasted onto on another side wall of the first lower platform sensitive beam (9-1), foil gauge S15 and should Become piece S16 to be pasted onto on another side wall of the 3rd lower platform sensitive beam (9-3);
Foil gauge S1 and foil gauge S2 are pasted onto on a side wall of the 4th lower platform sensitive beam (9-4), foil gauge S9 and strain Piece S10 is pasted onto on a side wall of the second lower platform sensitive beam (9-2);
Foil gauge S23 and foil gauge S21 are pasted onto on another side wall of the 4th lower platform sensitive beam (9-4), foil gauge S13 and Foil gauge S14 is pasted onto on another side wall of the second lower platform sensitive beam (9-2).
6. a kind of no-coupling six-dimensional force sensor of binocular structure according to claim 5, it is characterised in that No. two binoculars Structure through hole (3) is vertical with the perforate direction of a binocular structure through hole (2);
It is quick that four upper mounting plate sensitive beams (7) are along the circumferential direction followed successively by the first upper mounting plate sensitive beam (7-1), the second upper mounting plate Feel beam (7-2), the 3rd upper mounting plate sensitive beam (7-3) and the 4th upper mounting plate sensitive beam (7-4);
Foil gauge S27 and foil gauge S28 are pasted onto on the bottom surface of the first upper mounting plate sensitive beam (7-1), foil gauge S31 and foil gauge S32 is pasted onto on the bottom surface of the 3rd upper mounting plate sensitive beam (7-3);
Foil gauge S5 and foil gauge S6 are pasted onto on the top surface of the first upper mounting plate sensitive beam (7-1), foil gauge S17 and foil gauge S19 is pasted onto on the top surface of the 3rd upper mounting plate sensitive beam (7-3);
Foil gauge S29 and foil gauge S30 are pasted onto on the bottom surface of the 4th upper mounting plate sensitive beam (7-4), foil gauge S25 and foil gauge S26 is pasted onto on the bottom surface of the second upper mounting plate sensitive beam (7-2);
Foil gauge S11 and foil gauge S12 are pasted onto on the top surface of the 4th upper mounting plate sensitive beam (7-4), foil gauge S22 and foil gauge S24 is pasted onto on the top surface of the second upper mounting plate sensitive beam (7-2).
7. the no-coupling six-dimensional force sensor of a kind of binocular structure according to claim 1, it is characterised in that multiple flat Platform screwed hole (6) is distributed uniformly and circumferentially on upper mounting plate loading bench (5);Multiple lower platform screwed holes (10) are in lower platform Fixed station is distributed uniformly and circumferentially on (8).
8. a kind of no-coupling six-dimensional force sensor of binocular structure according to claim 1, it is characterised in that center hub (4), upper mounting plate loading bench (5), four upper mounting plate sensitive beams (7), lower platform fixed station (8) and four lower platform sensitive beams (9) It is structure as a whole;And the integrative-structure is made of duralumin, hard alumin ium alloy, stainless steel or structural alloy steel.
CN201710340000.XA 2017-05-15 2017-05-15 A kind of no-coupling six-dimensional force sensor of binocular structure Pending CN107131983A (en)

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CN109100073A (en) * 2018-07-06 2018-12-28 江西洪都航空工业集团有限责任公司 A kind of six-dimension force sensor and its measurement method based on strain inverting
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CN112414606A (en) * 2020-10-26 2021-02-26 珠海格力电器股份有限公司 Load cell elastomer, load cell and motion control device with load cell elastomer
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CN108041764A (en) * 2018-01-17 2018-05-18 彭玉鑫 A kind of wearable vola array three-dimensional strength measurement system
CN109100073A (en) * 2018-07-06 2018-12-28 江西洪都航空工业集团有限责任公司 A kind of six-dimension force sensor and its measurement method based on strain inverting
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CN112414606A (en) * 2020-10-26 2021-02-26 珠海格力电器股份有限公司 Load cell elastomer, load cell and motion control device with load cell elastomer
CN114136524A (en) * 2021-10-29 2022-03-04 西安交通大学 Six-dimensional force measuring platform and decoupling method thereof
CN115060405A (en) * 2022-06-10 2022-09-16 深圳市森斯维尔技术有限公司 Miniaturized six-dimensional force sensor based on special amorphous alloy material

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