CN106405787B - Angle adjusting device for reflector optical element - Google Patents
Angle adjusting device for reflector optical element Download PDFInfo
- Publication number
- CN106405787B CN106405787B CN201611133634.XA CN201611133634A CN106405787B CN 106405787 B CN106405787 B CN 106405787B CN 201611133634 A CN201611133634 A CN 201611133634A CN 106405787 B CN106405787 B CN 106405787B
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- Prior art keywords
- optical element
- flexible support
- angle adjusting
- mirror
- flexible
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/192—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use
Abstract
The invention discloses an angle adjusting device for a reflector optical element. The angle adjusting apparatus for a mirror optical element includes: the device comprises a flexible supporting structure, a flexible supporting mirror frame, an angle adjusting screw and a flexible supporting plate; the reflector optical element is arranged on the flexible support mirror frame through the flexible support structure; the flexible support frame is connected to the flexible support plate by the angle adjustment screw. The angle adjusting device for the reflector optical element provided by the invention can precisely adjust the supporting angle of the reflector optical element.
Description
Technical Field
The invention relates to the field of optical element measurement, in particular to an angle adjusting device for a reflector optical element.
Background
At present, the integrated circuit processing technology is rapidly developed, the photoetching resolution ratio is continuously improved from 45nm to 22nm, and as a core component of integrated circuit photoetching, a photoetching projection objective has extremely high requirements on the processing of an optical element and the whole adjusting precision of an optical system. There is some off-axis aspheric surface optical element in photoetching projection objective development process, it detects and needs to adopt vertical upwards to measure fizeau interferometer, measuring beam is vertical upwards promptly, in vertical upwards measuring fizeau interferometer's development process, fizeau interferometer host computer adopts the horizontal direction to arrange generally, this just needs a slice speculum to reflect horizontal measuring beam for vertical direction, and then needs an angle adjusting device for speculum optical element, can realize the angle of meticulous adjustment speculum, and can provide the minimum stress support for speculum optical element, influence to speculum optical element profile of face precision with the supporting stress in order to reduce the adjustment.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and adopts the following technical scheme:
the invention provides an angle adjusting device for a reflector optical element. The angle adjusting apparatus for a mirror optical element includes: the device comprises a flexible supporting structure, a flexible supporting mirror frame, an angle adjusting screw and a flexible supporting plate; the reflector optical element is arranged on the flexible support mirror frame through the flexible support structure; the flexible support frame is connected to the flexible support plate by the angle adjustment screw.
In some embodiments, the angle adjusting apparatus for a mirror optical element further includes a fixed angle support frame on which the flexible support plate is fixedly disposed.
In some embodiments, the angle adjustment screw includes an angle adjustment fine thread screw and an angle adjustment fastening screw.
In some embodiments, the flexible support structure is a three or more point flexible support structure.
In some embodiments, the mirror optic is adhesively disposed on the flexible support frame via the flexible support structure.
In some embodiments, the flexible support frame is provided with a slit structure.
In some embodiments, the slit structure is an arc-shaped slit, and the slit structure corresponds to a position of the angle adjustment screw.
In some embodiments, there are three of the slit structures and are uniformly arranged on the flexible support frame.
In some embodiments, the angular adjustment screws are in three groups and are uniformly arranged on the flexible support frame.
In some embodiments, the surface of the mirror optic is planar or curved.
The invention has the technical effects that: the angle adjusting device structure for the reflector optical element provided by the invention can precisely adjust the supporting angle of the reflector optical element and reduce the influence of stress introduced by supporting adjustment on the surface shape precision of the reflector optical element.
Drawings
FIG. 1 is a schematic structural diagram of an angle adjustment apparatus for a mirror optical element according to an embodiment of the present invention;
fig. 2 is a schematic view of a flexible support frame for use in an angle adjustment apparatus for mirror optics according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
Referring to fig. 1-2, there is provided an angle adjusting apparatus 100 for a mirror optical element 1 according to the present invention. The angle adjusting apparatus 100 includes: the flexible support structure 9, the flexible support frame 2, the angle adjusting screw and the flexible support plate; the mirror optical element 1 is arranged on the flexible support frame 2 through the flexible support structure 9; the flexible support frame 2 is connected to the flexible support plate 6 by means of the angular adjustment screws.
In some embodiments, the angle adjusting apparatus 100 for a mirror optical element further includes a fixed angle support frame 8, and the flexible support plate 6 is fixedly disposed on the fixed angle support frame 8.
In some embodiments, the angle adjustment screws include angle adjustment fine-toothed screws 3 and angle adjustment fastening screws 4.
In some embodiments, the flexible support structure 9 is a three-point or multi-point flexible support structure.
In some embodiments, the mirror optic 1 is adhesively mounted to the flexible support frame 2 by the flexible support structure 9.
In some embodiments, the flexible support frame 2 is provided with a slit structure 5.
In some embodiments, the slit structure 5 is an arc-shaped slit, and the slit structure 5 corresponds to a position of the angle adjustment screw.
In some embodiments, there are three of said slit structures 5, and they are uniformly arranged on said flexible support frame 2.
In some embodiments, there are three groups of angle adjustment screws, and they are uniformly arranged on the flexible support frame 2.
In some embodiments, the surface of the mirror optic 1 is planar or curved.
The structure of the angle adjusting device for the reflector optical element is shown in fig. 1 and fig. 2, the reflector optical element 1 is connected to the flexible supporting mirror frame 2 through a three-point or multi-point flexible supporting structure 9 in an adhesive mode, the flexible supporting mirror frame 2 is connected to the flexible supporting plate 6 through 3 groups of angle adjusting fine-tooth screws 3 and angle adjusting fastening screws 4, and the flexible supporting plate 6 is connected to the fixed angle supporting frame 8 through a mirror frame supporting connecting screw 7. Through the connection, the reflector optical element 1 is preliminarily positioned in an angle through the fixed angle supporting frame 8, and when the supporting heights of the 3 angle adjustment fine-tooth screws 3 are respectively adjusted, the flexible supporting mirror frame 2 can be adjusted in angle around two inclined directions of the plane of the flexible supporting mirror frame due to different supporting heights, so that the reflector optical element 1 is driven to be adjusted in precise angle. After the angle adjustment is completed, the angle adjustment fastening screw 4 is fastened to prevent the change in the angular position of the mirror optical element 1. By implementing the steps, the high-efficiency and high-precision angle adjusting function of the reflector optical element 1 can be realized.
The adjusting screw adopts a precise fine-tooth screw so as to improve the resolution of angle adjustment. In the direction of the adjusting screw of the flexible supporting spectacle frame 2, a slit structure 5 for eliminating stress is processed to reduce the influence of the local stress on the contact part of the adjusting screw on the spectacle frame on the deformation of the flexible supporting spectacle frame.
The reflector optical element 1 is supported by the three-point or multi-point flexible supporting structure 9, and the stress-relief slit structure 5 is processed on the flexible supporting mirror frame 2, so that the influence of angle adjustment and support on the surface shape precision of the reflector optical element 1 can be reduced to the greatest extent.
The reflector optical element 1 is adhered to the flexible support mirror frame 2 through three-point or multi-point flexible support structure glue, and the flexible support structure 9 is processed in an electric spark machining mode.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
(1) the reflector optical element is supported by adopting a three-point or multi-point flexible structure supporting mode, so that the influence of rigid support on the surface shape precision of the reflector optical element is reduced.
(2) According to the invention, the angle of the flexible support mirror frame is adjusted through the structure supported by the adjusting screw, so that the angle of the optical element of the reflector is indirectly adjusted, and the stress-relief slit structure is processed at the position of the adjusting screw of the flexible support mirror frame, so that the influence of the supporting stress of the adjusting screw on the surface shape precision of the optical element of the reflector is further reduced.
(3) According to the invention, the angle of the reflector optical element is initially positioned by adopting the fixed angle supporting frame, and the final angle of the reflector optical element is precisely adjusted by adopting 3 groups of precise fine-tooth adjusting screws, so that the rigidity of the reflector supporting structure and the angle adjusting efficiency are improved.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (5)
1. An angle adjusting apparatus for a mirror optical element, comprising: the device comprises a flexible supporting structure, a flexible supporting mirror frame, an angle adjusting screw and a flexible supporting plate;
the reflector optical element is arranged on the flexible support mirror frame through the flexible support structure; the reflector optical element is arranged on the flexible support mirror frame through the flexible support structure in an adhesive mode;
the flexible support frame is connected to the flexible support plate through the angle adjusting screw; a slit structure is arranged on the flexible support mirror frame, the slit structure is an arc slit, and the slit structure corresponds to the angle adjusting screw;
the flexible supporting plate is fixedly arranged on the fixed angle supporting frame;
the angle adjusting screw comprises an angle adjusting fine tooth screw and an angle adjusting fastening screw.
2. The angular adjustment apparatus for a mirror optical element according to claim 1, wherein the flexible support structure is a three-point or multi-point flexible support structure.
3. The angular adjustment apparatus for mirror optics according to claim 1, wherein the slit structures are three and are uniformly arranged on the flexible support frame.
4. The angular adjustment device for mirror optical elements according to claim 1, characterized in that said angular adjustment screws have three groups and are uniformly arranged on said flexible support frame.
5. The angle adjustment apparatus for a mirror optical element according to claim 1, wherein the surface of the mirror optical element is a flat surface or a curved surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133634.XA CN106405787B (en) | 2016-12-10 | 2016-12-10 | Angle adjusting device for reflector optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133634.XA CN106405787B (en) | 2016-12-10 | 2016-12-10 | Angle adjusting device for reflector optical element |
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| CN106405787A CN106405787A (en) | 2017-02-15 |
| CN106405787B true CN106405787B (en) | 2020-08-21 |
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| CN201611133634.XA Active CN106405787B (en) | 2016-12-10 | 2016-12-10 | Angle adjusting device for reflector optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108007676A (en) * | 2017-12-20 | 2018-05-08 | 中国航天科工集团八0厂 | A kind of test method for centrifuging spherical reflector centrifugation angle |
| CN108427170B (en) * | 2018-05-17 | 2023-04-18 | 中国科学院西安光学精密机械研究所 | Reflector supporting and adjusting mechanism and K mirror system for telescope image elimination rotation |
| CN109739004A (en) * | 2019-03-09 | 2019-05-10 | 无锡厦泰生物科技有限公司 | A kind of compressed spring type optical adjusting frame |
| CN111856703A (en) * | 2020-07-21 | 2020-10-30 | 山东大学 | Device for adjusting light beam height |
| CN114137689B (en) * | 2021-11-03 | 2023-06-20 | 中航洛阳光电技术有限公司 | Mirror mechanism capable of accurately and continuously adjusting angle |
| CN114527633B (en) * | 2022-01-10 | 2024-02-20 | 佛山市顺德区蚬华多媒体制品有限公司 | Galvanometer positioning tool and laser printer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE10115914A1 (en) * | 2001-03-30 | 2002-10-02 | Zeiss Carl | Device for storing an optical element in an optical system |
| JP4565261B2 (en) * | 2002-06-24 | 2010-10-20 | 株式会社ニコン | Optical element holding mechanism, optical system barrel, and exposure apparatus |
| CN201876595U (en) * | 2010-11-19 | 2011-06-22 | 无锡荣兴科技有限公司 | Universal plane mirror two-dimensional angular adjustment mechanism |
| CN202486397U (en) * | 2011-12-31 | 2012-10-10 | 武汉金运激光股份有限公司 | Lens adjusting device |
| CN202615015U (en) * | 2012-01-19 | 2012-12-19 | 昆山思拓机器有限公司 | Laser optical fiber probe, beam expander and reflector integrated installing structure |
| JP2014123028A (en) * | 2012-12-21 | 2014-07-03 | Casio Comput Co Ltd | Optical element fixing device, projector including the optical element fixing device, and angle adjustment method of optical element by the optical element fixing device |
| CN104723196B (en) * | 2013-12-23 | 2017-04-05 | 北京海普瑞森科技发展有限公司 | Four-degree-of-freedom adjusts platform |
| CN104516088B (en) * | 2014-12-17 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Reflector support mechanism based on kinematic equilibrium |
| CN105929519A (en) * | 2016-07-12 | 2016-09-07 | 中国科学院光电技术研究所 | Serial-connected load carrying type rapid reflector structure |
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