CN106405787A - Angle adjusting device for reflector optical element - Google Patents

Angle adjusting device for reflector optical element Download PDF

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Publication number
CN106405787A
CN106405787A CN201611133634.XA CN201611133634A CN106405787A CN 106405787 A CN106405787 A CN 106405787A CN 201611133634 A CN201611133634 A CN 201611133634A CN 106405787 A CN106405787 A CN 106405787A
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CN
China
Prior art keywords
mirror
flexible support
opticss
angle
picture frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201611133634.XA
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Chinese (zh)
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CN106405787B (en
Inventor
李全松
张辉
王东方
王汝冬
杨怀江
隋永新
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201611133634.XA priority Critical patent/CN106405787B/en
Publication of CN106405787A publication Critical patent/CN106405787A/en
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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/192Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use

Abstract

The invention discloses an angle adjusting device for a reflector optical element. The angle adjusting device for the reflector optical element comprises a flexible support structure, a flexible support frame, an angle adjustment bolt and a flexible support plate. The reflector optical element is arranged on the flexible support frame through the flexible support structure. The flexible support frame is connected to the flexible support plate through the angle adjustment bolt. The angle adjusting device for the reflector optical element can accurately adjust a support angle of the reflector optical element.

Description

A kind of angular adjustment apparatus for mirror opticss element
Technical field
The present invention relates to optical element fields of measurement is and in particular to a kind of angle adjustment for mirror opticss element fills Put.
Background technology
Currently, integrated circuit processing technology develops rapidly, and photoetching resolution is constantly improved from 45nm to 22nm, as integrated The core component of circuit photoetching, photoetching projection objective lens the processing of optical element and the whole machine of optical system are debug precision have high Requirement.There is part off-axis aspheric surface optical element in photoetching projection objective lens development process, its detection need using vertical to Upper measurement fizeau interferometer, that is, measuring beam straight up, vertical upwards measurement fizeau interferometer development process in, Fei Suo Interferometer main frame is usually to adopt horizontal direction arrangement, and this is accomplished by a piece of reflecting mirror and horizontal survey light beam is reflected into vertical side To, and then need a kind of angular adjustment apparatus for mirror opticss element, it is capable of the angle of intense adjustment reflecting mirror, And minimum stress can be provided to support for mirror opticss element, to reduce adjustment with bearing stress to mirror opticss component side Shape precision affects.
Content of the invention
It is contemplated that overcoming the defect that prior art exists, the present invention employs the following technical solutions:
The invention provides a kind of angular adjustment apparatus for mirror opticss element.Described first for mirror opticss The angular adjustment apparatus of part include:Flexible support structure, flexible support picture frame, angle adjustment screw, flexible support plate;Described anti- Penetrate mirror optical element to be arranged on described flexible support picture frame by described flexible support structure;Described flexible support picture frame passes through Described angle adjustment mode connects for screw is on described flexible support plate.
In certain embodiments, the described angular adjustment apparatus for mirror opticss element also include fixed angle support Framework, described flexible support plate is fixedly installed in described fixed angle support frame.
In certain embodiments, described angle adjustment screw includes angle adjustment fine-pitch screw and angle adjustment fastening spiral shell Nail.
In certain embodiments, described flexible support structure is 3 points or multi-point flexibly supporting construction.
In certain embodiments, described mirror opticss element pass through described flexible support structure gluing be arranged on described soft Property support picture frame on.
In certain embodiments, described flexible support picture frame is provided with narrow slit structure.
In certain embodiments, described narrow slit structure is arcuate slots, and described narrow slit structure and described angle adjustment spiral shell The position of nail corresponds to.
In certain embodiments, described narrow slit structure has three, and is evenly arranged on described flexible support picture frame.
In certain embodiments, described angle adjustment screw has three groups, and is evenly arranged on described flexible support picture frame.
In certain embodiments, the surface of described mirror opticss element is plane or curved surface.
The technique effect of the present invention:Angular adjustment apparatus structure provided by the present invention for mirror opticss element can The support angle of fine setting mirror opticss element, and reduce by the stress supporting regulation to introduce to mirror opticss component side The impact of shape precision.
Brief description
Fig. 1 is the angular adjustment apparatus structural representation according to one embodiment of the invention for mirror opticss element Figure;
Fig. 2 is to be propped up for the flexibility in the angular adjustment apparatus of mirror opticss element according to one embodiment of the invention The structural representation of support picture frame.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with accompanying drawing and be embodied as Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only in order to explain this Bright, and be not construed as limiting the invention.
With reference to shown in Fig. 1-2, it is a kind of angular adjustment apparatus 100 for mirror opticss element 1 that the present invention provides. Described angular adjustment apparatus 100 include:Flexible support structure 9, flexible support picture frame 2, angle adjustment screw, flexible support plate; Described mirror opticss element 1 is arranged on described flexible support picture frame 2 by described flexible support structure 9;Described flexible Support picture frame 2 is by described angle adjustment mode connects for screw to described flexible support plate 6.
In certain embodiments, the described angular adjustment apparatus 100 for mirror opticss element also include fixed angle Support frame 8, described flexible support plate 6 is fixedly installed in described fixed angle support frame 8.
In certain embodiments, described angle adjustment screw includes angle adjustment fine-pitch screw 3 and angle adjustment fastening spiral shell Nail 4.
In certain embodiments, described flexible support structure 9 is 3 points or multi-point flexibly supporting construction.
In certain embodiments, described in described mirror opticss element 1 is arranged on by described flexible support structure 9 is gluing On flexible support picture frame 2.
In certain embodiments, described flexible support picture frame 2 is provided with narrow slit structure 5.
In certain embodiments, described narrow slit structure 5 is arcuate slots, and described narrow slit structure 5 and described angle adjustment The position of screw corresponds to.
In certain embodiments, described narrow slit structure 5 has three, and is evenly arranged on described flexible support picture frame 2.
In certain embodiments, described angle adjustment screw has three groups, and is evenly arranged in described flexible support picture frame 2 On.
In certain embodiments, the surface of described mirror opticss element 1 is plane or curved surface.
A kind of structure of the angular adjustment apparatus for mirror opticss element of the present invention as shown in Fig. 1 Fig. 2, reflecting mirror Optical element 1 passes through at 3 points or multi-point flexibly supporting construction 9 is gluing is connected on flexible support picture frame 2, and flexible support picture frame 2 leads to Cross 3 groups of angle adjustment fine-pitch screws 3 to be connected on flexible support plate 6 with angle adjustment trip bolt 4, flexible support plate 6 passes through Picture frame supports attachment screw 7 to be connected in fixed angle support frame 8.By above-mentioned connection, mirror opticss element 1 passes through solid Determine angle support frame 8 and carry out angle Primary Location, when adjusting the bearing height of 3 angle adjustment fine-pitch screws 3 respectively, because Bearing height is different, and flexible support picture frame 2 can be made to carry out angle adjustment around two incline directions of flexible support picture frame plane, and then Mirror opticss element 1 is driven to carry out fine angle adjustment.Angle adjustment terminates rear tightening angle adjustment trip bolt 4, in case Only the angle position of mirror opticss element 1 changes.Implemented by above-mentioned steps, it is possible to achieve mirror opticss element 1 High-efficiency high-precision angle regulation function.
Described adjusting screw adopts accurate fine-pitch screw, to improve the resolution of angle adjustment.In flexible support picture frame 2 On adjusting screw direction, it is machined with the narrow slit structure 5 of stress-removal, to reduce adjusting screw contact position local pressure mistake on picture frame Greatly, the impact to the deformation of flexible support picture frame.
Support mirror opticss element 1 by or multi-point flexibly supporting construction 9 at 3 points, and add on flexible support picture frame 2 Work has stress-removal narrow slit structure 5, can at utmost reduce angle adjustment and support to mirror opticss element 1 surface figure accuracy Impact.
Described mirror opticss element 1 passes through at 3 points or multi-point flexibly supporting construction is gluing connects to flexible support picture frame 2 On, flexible support structure 9 adopts spark machined mode to process.
From technique scheme as can be seen that compared with prior art, technical solution of the present invention has the advantages that:
(1) in the present invention, mirror opticss element is supported using 3 points or multi-point flexibly structural support mode, reduces just Property support impact to mirror opticss element surface figure accuracy.
(2) angle of the structural adjustment flexible support picture frame being supported by adjusting screw in the present invention, and then Indirect method The angle of mirror opticss element, and it is machined with stress-removal narrow slit structure in flexible support picture frame adjusting screw position, further Reduce the impact to mirror opticss element surface figure accuracy for the adjusting screw bearing stress.
(3) adopt the angle positioning mirror opticss element at the beginning of fixed angle support frame in the present invention, accurate using 3 groups The final angle of closely-pitched adjusting screw fine setting mirror opticss element, improves rigidity and the angle of reflecting mirror support structure The efficiency of adjustment.
In describing the invention it is to be understood that term " " center ", " longitudinal ", " horizontal ", " length ", " width ", " thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time The orientation of instruction such as pin ", " counterclockwise ", " axial ", " radially ", " circumferential " or position relationship be based on orientation shown in the drawings or Position relationship, is for only for ease of the description present invention and simplifies description, rather than the device of instruction or hint indication or element must Must have specific orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or hint relative importance Or the implicit quantity indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection ", " fixation " etc. Term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integral;Can be that machinery connects Connect or electrically connect;Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, can be in two elements The connection in portion or the interaction relationship of two elements, limit unless otherwise clear and definite.For those of ordinary skill in the art For, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score permissible It is the first and second feature directly contacts, or the first and second features pass through intermediary mediate contact.And, fisrt feature exists Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height and is less than second feature.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or the spy describing with reference to this embodiment or example Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be in office Combine in an appropriate manner in one or more embodiments or example.Additionally, in the case of not conflicting, the skill of this area The feature of the different embodiments described in this specification or example and different embodiment or example can be tied by art personnel Close and combine.
Although embodiments of the invention have been shown and described above it is to be understood that above-described embodiment is example Property it is impossible to be interpreted as limitation of the present invention, those of ordinary skill in the art within the scope of the invention can be to above-mentioned Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, does not constitute limiting the scope of the present invention.Any basis Various other corresponding change done by the technology design of the present invention and deformation, should be included in the guarantor of the claims in the present invention In the range of shield.

Claims (10)

1. a kind of angular adjustment apparatus for mirror opticss element are it is characterised in that include:
Flexible support structure, flexible support picture frame, angle adjustment screw, flexible support plate;
Described mirror opticss element is arranged on described flexible support picture frame by described flexible support structure;
Described flexible support picture frame is by described angle adjustment mode connects for screw to described flexible support plate.
2. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that also include solid Determine angle support frame, described flexible support plate is fixedly installed in described fixed angle support frame.
3. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described angle Adjusting screw includes angle adjustment fine-pitch screw and angle adjustment trip bolt.
4. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described flexibility Supporting construction is 3 points or multi-point flexibly supporting construction.
5. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described reflection Mirror optical element is arranged on described flexible support picture frame by described flexible support structure is gluing.
6. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described flexibility Support and be provided with narrow slit structure on picture frame.
7. the angular adjustment apparatus for mirror opticss element according to claim 6 are it is characterised in that described slit Structure is arcuate slots, and described narrow slit structure is corresponding with the position of described angle adjustment screw.
8. the angular adjustment apparatus for mirror opticss element according to claim 6 are it is characterised in that described slit Structure has three, and is evenly arranged on described flexible support picture frame.
9. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described angle Adjusting screw has three groups, and is evenly arranged on described flexible support picture frame.
10. the angular adjustment apparatus for mirror opticss element according to claim 1 are it is characterised in that described anti- The surface penetrating mirror optical element is plane or curved surface.
CN201611133634.XA 2016-12-10 2016-12-10 Angle adjusting device for reflector optical element Active CN106405787B (en)

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Application Number Priority Date Filing Date Title
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CN106405787B CN106405787B (en) 2020-08-21

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007676A (en) * 2017-12-20 2018-05-08 中国航天科工集团八0厂 A kind of test method for centrifuging spherical reflector centrifugation angle
CN111856703A (en) * 2020-07-21 2020-10-30 山东大学 Device for adjusting light beam height

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1245982A3 (en) * 2001-03-30 2003-08-27 Carl Zeiss Semiconductor Manufacturing Technologies Ag Apparatus for holding an optical element in an optical device
EP1376183A2 (en) * 2002-06-24 2004-01-02 Nikon Corporation Optical-element mountings exhibiting reduced deformation of optical elements held thereby
CN201876595U (en) * 2010-11-19 2011-06-22 无锡荣兴科技有限公司 Universal plane mirror two-dimensional angular adjustment mechanism
CN202486397U (en) * 2011-12-31 2012-10-10 武汉金运激光股份有限公司 Lens adjusting device
CN202615015U (en) * 2012-01-19 2012-12-19 昆山思拓机器有限公司 Laser optical fiber probe, beam expander and reflector integrated installing structure
JP2014123028A (en) * 2012-12-21 2014-07-03 Casio Comput Co Ltd Optical element fixing device, projector including the optical element fixing device, and angle adjustment method of optical element by the optical element fixing device
CN104516088A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Reflector support mechanism based on kinematic equilibrium
CN104723196A (en) * 2013-12-23 2015-06-24 北京海普瑞森科技发展有限公司 Four-degree-of-freedom adjusting table
CN105929519A (en) * 2016-07-12 2016-09-07 中国科学院光电技术研究所 Serial-connected load carrying type rapid reflector structure

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1245982A3 (en) * 2001-03-30 2003-08-27 Carl Zeiss Semiconductor Manufacturing Technologies Ag Apparatus for holding an optical element in an optical device
EP1376183A2 (en) * 2002-06-24 2004-01-02 Nikon Corporation Optical-element mountings exhibiting reduced deformation of optical elements held thereby
CN201876595U (en) * 2010-11-19 2011-06-22 无锡荣兴科技有限公司 Universal plane mirror two-dimensional angular adjustment mechanism
CN202486397U (en) * 2011-12-31 2012-10-10 武汉金运激光股份有限公司 Lens adjusting device
CN202615015U (en) * 2012-01-19 2012-12-19 昆山思拓机器有限公司 Laser optical fiber probe, beam expander and reflector integrated installing structure
JP2014123028A (en) * 2012-12-21 2014-07-03 Casio Comput Co Ltd Optical element fixing device, projector including the optical element fixing device, and angle adjustment method of optical element by the optical element fixing device
CN104723196A (en) * 2013-12-23 2015-06-24 北京海普瑞森科技发展有限公司 Four-degree-of-freedom adjusting table
CN104516088A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Reflector support mechanism based on kinematic equilibrium
CN105929519A (en) * 2016-07-12 2016-09-07 中国科学院光电技术研究所 Serial-connected load carrying type rapid reflector structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007676A (en) * 2017-12-20 2018-05-08 中国航天科工集团八0厂 A kind of test method for centrifuging spherical reflector centrifugation angle
CN111856703A (en) * 2020-07-21 2020-10-30 山东大学 Device for adjusting light beam height

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