CN103487911B - From axle optical element precision positioning adjusting gear - Google Patents
From axle optical element precision positioning adjusting gear Download PDFInfo
- Publication number
- CN103487911B CN103487911B CN201310472198.9A CN201310472198A CN103487911B CN 103487911 B CN103487911 B CN 103487911B CN 201310472198 A CN201310472198 A CN 201310472198A CN 103487911 B CN103487911 B CN 103487911B
- Authority
- CN
- China
- Prior art keywords
- optical element
- steel plate
- spring steel
- screw
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention belongs to from axle field of optical device technology, be specially a kind of from axle optical element precision positioning adjusting gear.This adjusting gear forms by from axle optical element, lock screw, spring steel plate, adjustment pedestal, set screw, gib screw; Spring steel plate entirety is in convex shape, and both sides, its underpart are respectively equipped with window; Global shape and the form fit from axle optical element; Fixed from axle optical element and spring steel plate by gib screw; Adjustment pedestal and spring steel plate are fixed by lock screw; By adjusting the regulated quantity of 2 set screw of pedestal, realize the adjustment from axle optical element luffing angle and deflection angle.Structure of the present invention is simple, with low cost, highly sensitive, good stability, is applicable to the angular setting from axle optical element, is also applicable to the angular setting of the optical components such as other coaxial optical elements, self-adaptation mirror, CCD image-forming assembly.
Description
Technical field
The invention belongs to from axle field of optical device technology, be specifically related to a kind of can to the device carrying out angle orientation adjustment and location from axle optical element in optical system.
Background technology
A kind of extremely important optical device from axle optical element, it comprises planar optical elements, free form surface element, off-axis aspheric surface optical element, functional structure optical surface, optical prism, have a wide range of applications in image optics field and light optics field.Along with the raising day by day from the processing of axle optical element and detection level, increasing optical instrument have employed and designs from axle optical element.It mainly contains compact conformation, good imaging quality, spectral width, the advantage such as lightweight.Adopt the optical system from axle optical element can aberration correction, improve image quality, realize special imaging effect.As adopted in ultra-thin projector after axle optical element, projection than being reduced to less than 0.2, namely can realizing very-short-reach and projecting large imaging picture; Can realize as adopted off-axis paraboloidal mirror in parallel light tube collimating the light of different wave length, and without the need to focusing; As from the anti-telescopic optical system of axle three, adopt the imaging requirements that can realize high resolving power, Large visual angle, long-focus, wide spectral from axle optical element, and block without centre.As the uniform illumination adopting off-axis illumination can improve light in litho machine, and then improve the resolution of litho machine, wherein have employed in a large number from axle optical element in the illuminator and projection imaging system of EUV lithography machine.
Debuging of optical element all should guarantee that optical element is in given margin tolerance, and the optical element low to tolerance can guarantee its assembly precision by the mode of tolerance fit.The optical element that tolerance is high is then needed to adopt regulating device to regulate it, to guarantee that optical element is in rational margin tolerance.Because the orientation angles error effect from axle optical element is larger than coaxial system, so higher than coaxial system assembly precision from the assembly precision of axle optical element.And conventional regulative mode adopts complicated angle-adjusting mechanism, as two dimension angular adjustment platform, three-dimensional perspective adjustment platforms etc., its complex structure, volume are large, cost is high, stability is bad, sensitivity is not high, and can not be fixed from axle optical element simultaneously.
Adjustment from axle optical element is divided into two steps and position to adjust and angular setting.Position adjustment be exactly guarantee from the front and back position of axle optical element, orientation, left and right is in the given scope of tolerance.Angular setting ensures from the beat of axle optical element and pitching in given margin tolerance.Realize from the optical axis of axle optical element and the optical axis of optical system in given margin tolerance by position adjustment and the object of angular setting, and with the relative position of other optical elements also in given margin tolerance.Position adjustment belongs to preliminary adjustment, adopts conventional method to be easy to realize adjusting from the position of axle optical element and fixing.And angular setting belongs to intense adjustment, angular adjustment apparatus is generally made up of bracing frame, adjustment pedestal, reflection picture frame, linking springs, fulcrum ball, set screw, wherein adjust pedestal to be supported by fulcrum ball with reflection picture frame, be fixed by linking springs, adjusted by the adjustment screw near linking springs.Although this structure can realize, from the adjustment of axle optical element angle, using spring to connect, being also difficult to effectively be fixed, causing its reliability low from axle optical element; Also there is complex structure simultaneously, part be many, size is large, high in cost of production problem.This just requires that we design new adjustment and stationary installation, makes it also can realize being fixed from axle optical element while completing adjustment task.
Summary of the invention
The object of the invention is to provide that a kind of structure is simple, with low cost, highly sensitive, good stability can carry out angular adjustment to from axle optical element, simultaneously to the adjusting gear be fixed from axle optical element.
Adjusting gear provided by the invention, its structure as shown in Figure 1, forms by from axle optical element 1, lock screw 2, spring steel plate 3, adjustment pedestal 4, set screw 5, gib screw 6; Described spring steel plate 3 entirety is in convex shape, and both sides, its underpart are respectively equipped with window; Global shape and the form fit from axle optical element 1; The head both sides of spring steel plate 3 have locking screw, and corner, bottom has fixing threaded hole; Describedly to be fixed by fixing threaded hole from axle optical element 1 and spring steel plate 3 by gib screw 6; Described adjustment pedestal 4 and spring steel plate 3 are fixed by locking screw by lock screw 2; The bottom of adjustment pedestal 4 is provided with 2 and regulates screw, 2 set screw 5 are through regulating screw and spring steel plate 3 lower contacts, spring steel plate 3 is made to produce elastic deformation by the regulated quantity of set screw 5, and then realize the adjustment of angle of inclination (comprising luffing angle and deflection angle), simultaneously, the elastic force of the elastic deformation generation of spring steel plate 3, makes being fixed on adjustment pedestal 4 from axle optical element 1 and spring steel plate 3 after adjustment.
In the present invention, the angular adjustment amount of spring steel plate 3 can set as required.In one embodiment, the angular adjustment amount of spring steel plate 3 is ± 2.5 degree.
In the present invention, set screw 5 regulated quantity can set as required, and such as regulated quantity can be set as 3-6 mm.In one embodiment, set screw 5 regulated quantity is 5mm, can to realize from axle optical element pitching ± 2.5 degree and the adjustment of beat ± 2.5 degree.
Adjusting gear of the present invention uses spring steel plate to replace original adjusting mechanism be made up of linking springs, fulcrum ball, minute adjustment screw, realizes angular setting by the elastic deformation of spring steel plate, thus simplifies the structure of adjusting gear.This adjusting gear can also play fixation while completing adjustment, and adjust highly sensitive, precision is high, good stability.
Adjusting gear of the present invention can realize miniaturization and alleviate mechanism's weight, to be applicable to the adjustment from axle optical element of different size.
Adjusting gear structure of the present invention is simple, is easy to adjustment, easy to use.
What the spring steel plate of adjusting gear of the present invention adopted is common used material, and cost is low, easily manufactures.
Adjusting gear of the present invention is not only applicable to the angular setting from axle optical element, is also applicable to the angular setting of the optical components such as other coaxial optical elements, self-adaptation mirror, CCD image-forming assembly, also can be widely used in other adjustment fields simultaneously.
Accompanying drawing explanation
Fig. 1 is the structural drawing of adjusting gear.
Fig. 2 is the sectional view of adjusting gear.
Fig. 3 is spring steel plate structural diagrams.
Number in the figure: 1 be from axle optical element, 2 be lock screw, 3 be spring steel plate, 4 for adjustment pedestal, 5 be set screw, 6 for gib screw.
Embodiment
As shown in Figure 1, adjusting gear forms by from axle optical element 1, lock screw 2, spring steel plate 3, adjustment pedestal 4, set screw 5, gib screw 6.
As shown in Figure 1, adjusting gear is be fixed by gib screw 6 from axle optical element 1 and spring steel plate 3.The implementation case lock screw is M4 × 8mm.
As shown in Figure 2, the adjustment pedestal 4 of adjusting gear and spring steel plate 3 are fixed by lock screw 2.The implementation case lock screw is M4 × 6mm.
As shown in Figure 3, spring steel plate 3 there are 6 connecting holes, gib screw 6 passes through 4 connecting holes below and can be fixed from axle optical element 1 and spring steel plate 3, and lock screw 2 is passed through 2 connecting holes above and adjustment pedestal 4 and spring steel plate 3 can be fixed.The material of spring steel plate can be carbon constructional quality steel, carbon tool steel, high speed tool steel, stainless steel.The material of the spring steel plate of the implementation case is carbon structural steels.
As shown in Figure 2, spring steel plate should reserve certain amount of elastic deformation during fabrication, regulates to facilitate set screw 5.The spring steel plate thickness of this enforcement is 4mm, and amount of elastic deformation is 3mm, and angular adjustment amount is ± 2.5 °.
As shown in Figure 2, adjusting gear is the change by set screw 5 regulated quantity, makes spring steel plate 3 produce elastic deformation, and then realizes the adjustment at angle of inclination.This example case has 2 set screw 5, and set screw 5 regulated quantity is 5mm, can to realize from axle optical element pitching ± 2.5 ° and the adjustment of beat ± 2.5 °.
Claims (3)
1., from an axle optical element precision positioning adjusting gear, it is characterized in that forming by from axle optical element, lock screw, spring steel plate, adjustment pedestal, set screw, gib screw; Described spring steel plate entirety is in convex shape, and both sides, its underpart are respectively equipped with window; Global shape and the form fit from axle optical element; The head both sides of spring steel plate have locking screw, and corner, bottom has fixing threaded hole; Describedly to be fixed by fixing threaded hole from axle optical element and spring steel plate by gib screw; Described adjustment pedestal and spring steel plate are fixed by locking screw by lock screw; The bottom of adjustment pedestal is provided with 2 and regulates screw, 2 set screw are through regulating screw and spring steel plate lower contacts, spring steel plate is made to produce elastic deformation by the regulated quantity of set screw, and then realize the adjustment at angle of inclination, simultaneously, the elastic force of the elastic deformation generation of spring steel plate, makes being fixed on adjustment pedestal from axle optical element and spring steel plate after adjustment.
2. according to claim 1 from axle optical element precision positioning adjusting gear, it is characterized in that the angular adjustment amount of spring steel plate is ± 2.5 degree.
3. according to claim 1 from axle optical element precision positioning adjusting gear, it is characterized in that set screw regulated quantity is 3-6 mm, to realize from axle optical element pitching ± 2.5 degree and the adjustment of beat ± 2.5 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310472198.9A CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310472198.9A CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103487911A CN103487911A (en) | 2014-01-01 |
| CN103487911B true CN103487911B (en) | 2015-10-28 |
Family
ID=49828267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310472198.9A Expired - Fee Related CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103487911B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103984075B (en) * | 2014-05-27 | 2016-05-11 | 中国科学院上海光学精密机械研究所 | Two dimension angular adjustment rack |
| CN107402455B (en) * | 2017-09-13 | 2023-08-22 | 安徽海溢鑫科技有限公司 | Adjusting device for optical lens cone |
| CN113009664B (en) * | 2021-03-09 | 2022-08-26 | 中国人民解放军32801部队 | Adjusting device for adjusting optical element, optical element and adjusting method thereof |
| CN113341532B (en) * | 2021-06-30 | 2022-05-17 | 中国科学院长春光学精密机械与物理研究所 | High-precision, high-stability and compact telescope three-mirror pitching adjusting mechanism |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10111217A (en) * | 1996-10-07 | 1998-04-28 | Dainippon Screen Mfg Co Ltd | Optical axis adjusting equipment for aspherical mirror |
| JP2005086569A (en) * | 2003-09-09 | 2005-03-31 | Ntt Docomo Inc | Angle adjustment mechanism of optical instrument for optical communication |
| CN101387731A (en) * | 2008-10-22 | 2009-03-18 | 中国科学院长春光学精密机械与物理研究所 | Reflecting mirror inclination angle trimming regulating mechanism |
| CN203054316U (en) * | 2012-12-13 | 2013-07-10 | 海信集团有限公司 | Lens adjusting device |
-
2013
- 2013-10-11 CN CN201310472198.9A patent/CN103487911B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10111217A (en) * | 1996-10-07 | 1998-04-28 | Dainippon Screen Mfg Co Ltd | Optical axis adjusting equipment for aspherical mirror |
| JP2005086569A (en) * | 2003-09-09 | 2005-03-31 | Ntt Docomo Inc | Angle adjustment mechanism of optical instrument for optical communication |
| CN101387731A (en) * | 2008-10-22 | 2009-03-18 | 中国科学院长春光学精密机械与物理研究所 | Reflecting mirror inclination angle trimming regulating mechanism |
| CN203054316U (en) * | 2012-12-13 | 2013-07-10 | 海信集团有限公司 | Lens adjusting device |
Non-Patent Citations (1)
| Title |
|---|
| 离轴三反式多光谱相机的装调;梅贵，翟岩，苗健宇;《光机电信息》;20110831;第28卷(第8期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103487911A (en) | 2014-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10606042B2 (en) | Magnification optical system | |
| US10451961B2 (en) | Focus adjustment system for an image display device | |
| CN103487911B (en) | From axle optical element precision positioning adjusting gear | |
| US20150346494A1 (en) | Display apparatus | |
| CN111458896B (en) | Full-band high-precision zoom optical system image surface interfacing and coaxial adjusting method | |
| CN103186017A (en) | Adjusting device of projector and adjusting device of lens | |
| JP2011253023A (en) | Projection type video display device | |
| CN108332852B (en) | Working method of centering adjusting device of OCT spectrometer camera | |
| CN102945688B (en) | X-ray KBA microscopic imaging system | |
| TW200624985A (en) | Adjustable lens module and image projector applied with the lens module | |
| US10795113B2 (en) | Device and apparatus for imaging | |
| CN111948885B (en) | Projection imaging device | |
| CN101246249A (en) | Three-dimensional regulating mechanism for fixing offsetting image rotation K mirror of spacing remote sensing instrument | |
| US8985788B2 (en) | Optical apparatus and support stand thereof | |
| CN209147932U (en) | A kind of laser imaging range-measurement system | |
| US8979283B2 (en) | Optical apparatus | |
| US8107809B2 (en) | Camera bellows of rotating-mirror framing camera without principle error | |
| JP2015001579A (en) | Projection optical system, and image projection device | |
| CN209486405U (en) | The assembling & adjusting system of optical plate in a kind of optics module | |
| CN103293630B (en) | Threaded focusing mechanism | |
| CN202676988U (en) | Lens assembling centering device | |
| CN101144965A (en) | Adjusting board and adjusting device for radiation photography detector camera device | |
| CN114967024B (en) | High-precision optical lens eccentric adjustment structure and method | |
| CN111427224B (en) | Mounting structure of projection imaging lens group and projection imaging device | |
| JP4373858B2 (en) | Method of measuring declination angle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151028 Termination date: 20181011 |