CN103487911A - Precision positioning and adjusting device for off-axis optical element - Google Patents
Precision positioning and adjusting device for off-axis optical element Download PDFInfo
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- CN103487911A CN103487911A CN201310472198.9A CN201310472198A CN103487911A CN 103487911 A CN103487911 A CN 103487911A CN 201310472198 A CN201310472198 A CN 201310472198A CN 103487911 A CN103487911 A CN 103487911A
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Abstract
The invention belongs to the technical field of off-axis optical devices and in particular relates to a precision positioning and adjusting device for an off-axis optical element. The adjusting device consists of the off-axis optical element, a locking screw, a spring steel sheet, an adjusting base, adjusting screws and a fixed screw, wherein the spring steel sheet is wholly convex, and windows are arranged on two sides of the lower part of the spring steel sheet respectively; the overall shape of the device is matched with a shape of the off-axis optical element; the off-axis optical element and the spring steel sheet are fixed through the fixed screw; the adjusting base and the spring steel sheet are fixed through the locking screw; a pitching angle and a deflection angle of the off-axis optical element are adjusted according to the adjusting amount of the two adjusting screws on the adjusting base. The device is simple in structure, low in cost, high in sensitivity and high in stability, can be applied to adjusting the angle of the off-axis optical element and also can be applied to angle adjustment on optical components such as other off-axis optical elements, adaptive mirrors and charge coupled device (CCD) imaging components.
Description
Technical field
The invention belongs to from the axle field of optical device technology, be specifically related to a kind of can be in optical system, from the axle optical element, carrying out the device of angle orientation adjusting and location.
Background technology
From the axle optical element, it is a kind of extremely important optical device, it comprises planar optical elements, free form surface element, off-axis aspheric surface optical element, functional structure optical surface, optical prism have a wide range of applications in image optics field and light optics field.Along with the raising day by day from the processing of axle optical element and detection level, increasing optical instrument has adopted from the axle optical element and has been designed.It mainly contains compact conformation, good imaging quality, spectral width, the advantage such as lightweight.Employing can aberration correction from the optical system of axle optical element, improves image quality, realizes special imaging effect.As adopted after the axle optical element, can, projection than being reduced to below 0.2, can realize that very-short-reach projects large imaging picture in ultra-thin projector; As adopted off-axis paraboloidal mirror can realize the light of different wave length is collimated in parallel light tube, and without focusing; As from the anti-telescopic optical system of axle three, adopt the imaging requirements that can realize high resolving power, large visual field, long-focus, wide spectrum from the axle optical element, and block without centre.As adopted off-axis illumination can improve the uniform illumination of light, and then improve the resolution of litho machine in litho machine, wherein adopted in a large number from the axle optical element in the illuminator of EUV litho machine and projection imaging system.
Debuging of optical element all should guarantee that optical element is in given margin tolerance, and the optical element low to tolerance can be guaranteed its assembly precision by the mode of tolerance fit.For tolerance, high optical element needs to adopt regulating device to regulate it, to guarantee that optical element is in rational margin tolerance.Large due to the orientation angles error effect from the axle optical element than coaxial system, so higher than coaxial system assembly precision from the assembly precision of axle optical element.And regulative mode commonly used is to adopt complicated angle-adjusting mechanism, as two dimension angular is adjusted platform, three-dimensional perspective is adjusted platform etc., and its complex structure, volume is large, cost is high, stability is bad, sensitivity is not high, and can not be simultaneously to being fixed from the axle optical element.
Being divided into two steps from the adjustment of axle optical element is position adjustment and angular setting.The position adjustment is exactly the front and back position guaranteed from the axle optical element, in orientation, the left and right scope given in tolerance.Angular setting is to guarantee from the beat of axle optical element and pitching in given margin tolerance.Purpose by position adjustment and angular setting is to realize that optical axis from the optical axis of axle optical element and optical system is in given margin tolerance, and with the relative position of other optical elements also in given margin tolerance.The position adjustment belongs to preliminary adjustment, adopts conventional method to be easy to realize adjusting and fixing from the position of axle optical element.And angular setting belongs to intense adjustment, angular adjustment apparatus generally is comprised of bracing frame, adjustment pedestal, reflection picture frame, linking springs, fulcrum ball, set screw, wherein adjusting pedestal is supported by fulcrum ball with the reflection picture frame, be fixed by linking springs, adjusted near the adjustment screw by linking springs.Although this structure can realize using spring to be connected from axle optical element angular setting, also is difficult to effectively be fixed from the axle optical element, causes its reliability low; Also have complex structure, part is many, size is large, the high in cost of production problem simultaneously.This just requires us to design new adjustment and stationary installation, and it also can be realized being fixed from the axle optical element when completing the adjustment task.
Summary of the invention
What the object of the invention was to provide a kind of simple in structure, with low cost, highly sensitive, good stability can be to carrying out angular adjustment from the axle optical element, simultaneously the adjusting gear to being fixed from the axle optical element.
Adjusting gear provided by the invention, its structure as shown in Figure 1, by from axle optical element 1, lock screw 2, spring steel plate 3, adjust pedestal 4, set screw 5, gib screw 6 and form; Described spring steel plate 3 integral body are convex shape, and both sides, its underpart are respectively equipped with window; Global shape with from the form fit of axle optical element 1; The head both sides of spring steel plate 3 have the locking screw, and four jiaos of bottoms have fixing threaded hole; Describedly from axle optical element 1 and spring steel plate 3, by gib screw 6, by fixing threaded hole, be fixed; Described adjustment pedestal 4 and spring steel plate 3 are fixed by the locking screw by lock screw 2; The bottom of adjusting pedestal 4 is provided with 2 and regulates screw, 2 set screw 5 contact with spring steel plate 3 bottoms through regulating screw, regulated quantity by set screw 5 makes spring steel plate 3 produce elastic deformation, and then realize the angle of inclination adjustment of (comprising luffing angle and deflection angle), simultaneously, the elastic force that the elastic deformation of spring steel plate 3 produces, being fixed on adjustment pedestal 4 from axle optical element 1 and spring steel plate 3 after making to adjust.
In the present invention, the angular adjustment amount of spring steel plate 3 can be set as required.In one embodiment, the angular adjustment amount of spring steel plate 3 is ± 2.5 degree.
In the present invention, set screw 5 regulated quantitys can be set as required, and for example regulated quantity can be set as 3-6 mm.In one embodiment, set screw 5 regulated quantitys are 5mm, can realize from the adjustment of axle optical element pitching ± 2.5 degree and beat ± 2.5 degree.
Adjusting gear of the present invention uses spring steel plate to replace original adjusting mechanism is comprised of linking springs, fulcrum ball, minute adjustment screw, and the elastic deformation by spring steel plate realizes angular setting, thus the structure of simplification adjusting gear.The fixation that this adjusting gear can also play when completing adjustment, adjust highly sensitively, and precision is high, good stability.
Adjusting gear of the present invention can be realized miniaturization and alleviate mechanism's weight, to be applicable to the adjustment from the axle optical element of different size.
Adjusting gear of the present invention is simple in structure, is easy to adjust, easy to use.
What the spring steel plate of adjusting gear of the present invention adopted is common used material, and cost is low, easily manufactures.
Adjusting gear of the present invention not only is applicable to from the angular setting of axle optical element, also is applicable to the angular setting of the optical components such as other coaxial optical elements, self-adaptation mirror, CCD image-forming assembly, also can be widely used in other adjustment fields simultaneously.
The accompanying drawing explanation
The structural drawing that Fig. 1 is adjusting gear.
The sectional view that Fig. 2 is adjusting gear.
Fig. 3 is the spring steel plate structural diagrams.
Number in the figure: 1 is to be that lock screw, 3 is that spring steel plate, 4 is that set screw, 6 is gib screw for adjusting pedestal, 5 from axle optical element, 2.
Embodiment
As shown in Figure 1, adjusting gear is by forming from axle optical element 1, lock screw 2, spring steel plate 3, adjustment pedestal 4, set screw 5, gib screw 6.
As shown in Figure 1, adjusting gear is to be fixed by gib screw 6 from axle optical element 1 and spring steel plate 3.The implementation case lock screw is M4 * 8mm.
As shown in Figure 2, the adjustment pedestal 4 of adjusting gear and spring steel plate 3 are fixed by lock screw 2.The implementation case lock screw is M4 * 6mm.
As shown in Figure 3,6 connecting holes are arranged on spring steel plate 3, gib screw 6 can be being fixed from axle optical element 1 and spring steel plate 3 by following 4 connecting holes, and gib screw 2 can be fixed adjusting pedestal 4 and spring steel plate 3 by top 2 connecting holes.The material of spring steel plate can be carbon constructional quality steel, carbon tool steel, high speed tool steel, stainless steel.The material of the spring steel plate of the implementation case is structural carbon steel.
As shown in Figure 2, spring steel plate should be reserved certain amount of elastic deformation during fabrication, to facilitate set screw 5, is regulated.The spring steel plate thickness of this enforcement is 4mm, and amount of elastic deformation is 3mm, and the angular adjustment amount is ± 2.5 °.
As shown in Figure 2, adjusting gear is by the variation of set screw 5 regulated quantitys, makes spring steel plate 3 produce elastic deformation, and then realizes the adjustment at angle of inclination.This example case has 2 set screw 5, and set screw 5 regulated quantitys are 5mm, the adjustment that can realize from axle optical element pitching ± 2.5 ° and beat ± 2.5 °.
Claims (3)
1. one kind from axle optical element precision positioning adjusting gear, it is characterized in that by forming from axle optical element, lock screw, spring steel plate, adjustment pedestal, set screw, gib screw; Described spring steel plate integral body is convex shape, and both sides, its underpart are respectively equipped with window; Global shape with from the form fit of axle optical element; The head both sides of spring steel plate have the locking screw, and four jiaos of bottoms have fixing threaded hole; Describedly from axle optical element and spring steel plate, by gib screw, by fixing threaded hole, be fixed; Described adjustment pedestal and spring steel plate are fixed by the locking screw by lock screw; The bottom of adjusting pedestal is provided with 2 and regulates screw, 2 set screw contact with the spring steel plate bottom through regulating screw, regulated quantity by set screw makes spring steel plate produce elastic deformation, and then realize the adjustment at angle of inclination, simultaneously, the elastic force that the elastic deformation of spring steel plate produces, being fixed on the adjustment pedestal from axle optical element and spring steel plate after making to adjust.
2. according to claim 1 from axle optical element precision positioning adjusting gear, the angular adjustment amount that it is characterized in that spring steel plate is ± 2.5 degree.
3. according to claim 1 from axle optical element precision positioning adjusting gear, it is characterized in that the set screw regulated quantity is 3-6 mm, to realize from the adjustment of axle optical element pitching ± 2.5 degree and beat ± 2.5 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310472198.9A CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310472198.9A CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
Publications (2)
| Publication Number | Publication Date |
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| CN103487911A true CN103487911A (en) | 2014-01-01 |
| CN103487911B CN103487911B (en) | 2015-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310472198.9A Expired - Fee Related CN103487911B (en) | 2013-10-11 | 2013-10-11 | From axle optical element precision positioning adjusting gear |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103984075A (en) * | 2014-05-27 | 2014-08-13 | 中国科学院上海光学精密机械研究所 | Two-dimensional angle adjusting frame |
| CN107402455A (en) * | 2017-09-13 | 2017-11-28 | 安徽海溢鑫科技有限公司 | A kind of adjusting means for optical tubes |
| CN113009664A (en) * | 2021-03-09 | 2021-06-22 | 中国人民解放军32801部队 | Adjusting device for adjusting optical element, optical element and adjusting method thereof |
| CN113155826A (en) * | 2020-01-07 | 2021-07-23 | 深圳华大智造科技有限公司 | Detection device |
| CN113341532A (en) * | 2021-06-30 | 2021-09-03 | 中国科学院长春光学精密机械与物理研究所 | High-precision, high-stability and compact telescope three-mirror pitching adjusting mechanism |
| TWI845347B (en) * | 2022-08-31 | 2024-06-11 | 大陸商上海微電子裝備（集團）股份有限公司 | Imaging field curvature compensation component, optical system and photolithography machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10111217A (en) * | 1996-10-07 | 1998-04-28 | Dainippon Screen Mfg Co Ltd | Optical axis adjusting equipment for aspherical mirror |
| JP2005086569A (en) * | 2003-09-09 | 2005-03-31 | Ntt Docomo Inc | Angle adjustment mechanism of optical instrument for optical communication |
| CN101387731A (en) * | 2008-10-22 | 2009-03-18 | 中国科学院长春光学精密机械与物理研究所 | Reflecting mirror inclination angle trimming regulating mechanism |
| CN203054316U (en) * | 2012-12-13 | 2013-07-10 | 海信集团有限公司 | Lens adjusting device |
-
2013
- 2013-10-11 CN CN201310472198.9A patent/CN103487911B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10111217A (en) * | 1996-10-07 | 1998-04-28 | Dainippon Screen Mfg Co Ltd | Optical axis adjusting equipment for aspherical mirror |
| JP2005086569A (en) * | 2003-09-09 | 2005-03-31 | Ntt Docomo Inc | Angle adjustment mechanism of optical instrument for optical communication |
| CN101387731A (en) * | 2008-10-22 | 2009-03-18 | 中国科学院长春光学精密机械与物理研究所 | Reflecting mirror inclination angle trimming regulating mechanism |
| CN203054316U (en) * | 2012-12-13 | 2013-07-10 | 海信集团有限公司 | Lens adjusting device |
Non-Patent Citations (1)
| Title |
|---|
| 梅贵，翟岩，苗健宇: "离轴三反式多光谱相机的装调", 《光机电信息》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103984075A (en) * | 2014-05-27 | 2014-08-13 | 中国科学院上海光学精密机械研究所 | Two-dimensional angle adjusting frame |
| CN107402455A (en) * | 2017-09-13 | 2017-11-28 | 安徽海溢鑫科技有限公司 | A kind of adjusting means for optical tubes |
| CN107402455B (en) * | 2017-09-13 | 2023-08-22 | 安徽海溢鑫科技有限公司 | Adjusting device for optical lens cone |
| CN113155826A (en) * | 2020-01-07 | 2021-07-23 | 深圳华大智造科技有限公司 | Detection device |
| CN113009664A (en) * | 2021-03-09 | 2021-06-22 | 中国人民解放军32801部队 | Adjusting device for adjusting optical element, optical element and adjusting method thereof |
| CN113341532A (en) * | 2021-06-30 | 2021-09-03 | 中国科学院长春光学精密机械与物理研究所 | High-precision, high-stability and compact telescope three-mirror pitching adjusting mechanism |
| CN113341532B (en) * | 2021-06-30 | 2022-05-17 | 中国科学院长春光学精密机械与物理研究所 | High-precision, high-stability and compact telescope three-mirror pitching adjusting mechanism |
| TWI845347B (en) * | 2022-08-31 | 2024-06-11 | 大陸商上海微電子裝備（集團）股份有限公司 | Imaging field curvature compensation component, optical system and photolithography machine |
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| Publication number | Publication date |
|---|---|
| CN103487911B (en) | 2015-10-28 |
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Granted publication date: 20151028 Termination date: 20181011 |