CN113155826A

CN113155826A - Detection device

Info

Publication number: CN113155826A
Application number: CN202010055816.XA
Authority: CN
Inventors: 姜鹤鸣; 布莱恩·基思·豪泽尔; 邓茜; 曹明友; 杨斌; 黄怡; 温欣; 黄雁樵; 伍子毅; 克雷格·爱德华·乌里齐; 颜景堂
Original assignee: MGI Tech Co Ltd
Current assignee: MGI Tech Co Ltd
Priority date: 2020-01-07
Filing date: 2020-01-17
Publication date: 2021-07-23

Abstract

The invention provides a detection device which comprises a horizontal support platform, a vertical support platform and an optical detection device, wherein the vertical support platform is arranged on the horizontal support platform, the optical detection device comprises an objective lens, an exciting light emitting module and a laser receiving acquisition module, and the laser receiving acquisition modules are arranged on the vertical support platform and are distributed on the vertical support platform in two dimensions. The detection device provided by the invention has the advantages of more compact overall structure, smaller occupied space, more conformity with ergonomics and convenience for machine debugging.

Description

Detection device

Technical Field

The invention relates to the field of biochemical substance analysis, in particular to a detection device.

Background

Generally, the resolution requirements of imaging systems in high-throughput biochemical analysis instruments, such as high-throughput sequencers, are high. But limited by diffraction limits, the higher the resolution, the shallower the depth of focus of the imaging system, on the order of a hundred nanometers. The faster the scanning speed is in the gene sequencing process based on the Time-delay-integration (TDI) camera, the larger the area shot in unit Time is, and it is required to ensure that the scanned area can be imaged with high resolution and clarity, that is, the distance between the microscope objective and the sample carrier is required to be kept consistent all the Time in the scanning and imaging process. The scanned imaged area is to be kept synchronously within the optimal imaging focal depth range of the imaging system, and besides the need for a focusing feedback and adjustment system with extremely high sensitivity and accuracy, the imaged area of the sample carrier needs to meet the requirement of high flatness. Meanwhile, if it is required to ensure that data in a single imaging area can be imaged clearly and at high resolution, the whole field of view must be ensured within the range of depth of field, and the imaging area of the sample carrier and the optical axis of the objective lens need to be ensured to have good verticality.

On the image side, the camera imaging planes of the respective channels are required to be kept within the respective imaging focal depth ranges. Based on the requirement of gene sequencing algorithm, in order to improve the effective information amount, the smaller the positional deviation of each channel camera is, the better, usually the deviation below 10um is required, so that the adjustment requirement is difficult to achieve without a precise adjustment mechanism.

In the gene sequencing process based on the TDI camera, the integral direction of the camera and the motion direction of the platform need to be kept consistent in height, meanwhile, the motion speed of the platform needs to be kept highly matched with the integral frequency of the camera in the integral direction, otherwise, images will generate smear, and clear images cannot be obtained.

On the other hand, four basic groups of ATCG need to be distinguished in gene sequencing, so imaging of a plurality of channels is often involved, each channel comprises a plurality of dichroic mirrors and reflecting mirrors which are arranged at 45 degrees, the installation angle and the position of each lens are guaranteed only by means of machining precision and rough adjustment, an ideal imaging state of optical design cannot be achieved easily, and the method is high in adjustment difficulty, low in efficiency and not beneficial to production.

Meanwhile, the whole optical path is complex, the position precision requirement of each part is high, the working distance of the microscope objective is easy to deviate from the depth of field range due to external vibration, the position change of each part can be caused for a long time, the optical path change is caused, and the imaging quality and the reliability of the instrument are seriously influenced. It is therefore desirable to minimize the effect of vibration on the performance of the optical imaging system.

In summary, how to better match various precise optical devices for application on a high-throughput gene sequencer, how to facilitate the assembly and adjustment of each module, and keep the long-term stability, and the overall size is not excessively large, becomes a problem to be considered urgently.

Disclosure of Invention

In view of the above, it is desirable to provide a detection device to solve at least one of the above problems.

The application provides a detection device, detection device includes horizontal supporting bench, arranges vertical supporting bench and the optical detection device on the horizontal supporting bench in, optical detection device includes objective, exciting light outgoing module and receives the laser collection module, wherein, receive the laser collection module install in on the vertical supporting bench and be two-dimensional distribution on the vertical supporting bench.

Furthermore, the detection device further comprises a lower frame, the horizontal support platform is arranged on the lower frame, the lower frame is further used for carrying a sample carrier, a position, corresponding to the position of the objective lens, of the horizontal support platform is provided with a vacancy avoiding position, and the optical detection device detects the sample on the sample carrier through the vacancy avoiding position.

Further, the horizontal support platform comprises a honeycomb plate and a horizontal panel arranged on the honeycomb plate, the honeycomb plate is arranged on the lower frame, the horizontal panel is arranged on the honeycomb plate, and a plurality of hollows are arranged on the honeycomb plate.

Furthermore, a groove is formed in the horizontal panel and used for mounting the vertical supporting platform, a protrusion protruding towards the center of the groove is arranged on the side edge of the groove, and the protrusion is used for positioning the vertical supporting platform.

Further, the detection device also comprises a shock absorption supporting assembly, and the lower frame is supported on the shock absorption supporting assembly to reduce or isolate external shock.

Further, the detection device further comprises a moving platform, the moving platform is mounted on the lower frame and located right below the objective lens, and the moving platform is used for moving the sample carrier in cooperation with the detection of the optical detection device; and/or the moving platform comprises a plane moving mechanism and an angle adjusting mechanism, wherein the plane moving mechanism is used for moving the sample carrier in a plane, and the angle adjusting mechanism is used for rotating the sample carrier in the plane.

Further, optical detection device includes spectroscope and/or plane mirror, spectroscope and/or plane mirror are installed in fixed frame respectively, fixed frame is being installed extremely by direct or indirect on the vertical supporting bench, be equipped with the stress release structure on the fixed frame, the stress release structure is used for avoiding the deformation of fixed frame is passed to spectroscope or plane mirror, perhaps, the stress release structure is for offering in on the fixed frame, encircle the logical groove of L type of spectroscope or plane mirror.

Furthermore, the laser-receiving acquisition module comprises a plurality of optical components, the optical components are mounted on the vertical support platform through respective mounting assemblies and/or adjusting assemblies, and the positions and/or angles of the optical components are precisely adjusted through precise thread pairs and/or screws for fixing the mounting assemblies and/or the adjusting assemblies and/or a plurality of abutting pieces abutting against the mounting assemblies and/or the adjusting assemblies.

Furthermore, the plurality of abutting pieces are distributed along a preset direction, and the angle of the mounting assembly and/or the adjusting assembly in the preset direction is realized by adjusting the acting force applied to the mounting assembly and/or the adjusting assembly by the plurality of abutting pieces, so that the position and/or the angle of the corresponding optical component in the preset direction are/is adjusted.

Furthermore, the optical detection device further comprises an automatic focusing module, wherein the automatic focusing module and the exciting light emitting module are arranged on the horizontal support platform and are respectively arranged on the front side and the rear side of the vertical support platform.

According to the detection device provided by the embodiment of the invention, the horizontal support platform and the vertical support platform are arranged, so that the optical components are arranged in a three-dimensional space formed by the horizontal support platform and the vertical support platform along a two-dimensional direction, the whole structure of the detection device is more compact, the occupied space is smaller, the detection device is more in line with ergonomics, and the machine debugging is facilitated.

In addition, the optical components are mounted on the vertical supporting platform through respective mounting assemblies and/or adjusting assemblies, the positions and/or angles of the optical components are precisely adjusted through precise thread pairs and/or screws for fixing the mounting assemblies and/or the adjusting assemblies and/or a plurality of abutting pieces abutting against the mounting assemblies and/or the adjusting assemblies, and the imaging quality of an optical imaging system of the detection device is guaranteed.

Moreover, the whole detection device is supported by the damping support component, so that the influence of external vibration on the performance of the components in the detection device is effectively avoided.

Drawings

Fig. 1 is a schematic perspective view of a detection device according to an embodiment of the present invention.

Fig. 2 is a front view of the detection device shown.

Fig. 3 and 4 are spatial position relationship diagrams of optical devices according to an embodiment of the present invention.

FIG. 5 is a perspective view of a shock absorbing support assembly of the inspection device shown in FIG. 1.

Fig. 6 is a schematic view illustrating the installation of the lower frame and the movable platform with the shock-absorbing support assembly shown in fig. 5.

Fig. 7 is a perspective view of the lower frame shown in fig. 6.

Fig. 8 and 9 are exploded views of the sample carrier adjustment assembly at two angles.

Fig. 10 is a schematic perspective view of the detection apparatus shown in fig. 1 with optical components removed.

Fig. 11 is a perspective view of a honeycomb panel of the detecting device shown in fig. 2.

Fig. 12 is a perspective view of a horizontal panel of the detecting device shown in fig. 2.

FIGS. 13-15 are schematic views of the inspection device of FIG. 1 at various angles after mounting of the optical components on the upper frame.

Fig. 16 is a perspective view of a portion of the optical component and its mounting assembly shown in fig. 15.

Fig. 17 is a perspective view of a linear light source adjustment assembly of the detection device shown in fig. 2.

Fig. 18 is a cross-sectional view of the linear light source adjustment assembly shown in fig. 17.

Fig. 19 and 20 are perspective views of different angles of the objective lens adjusting assembly of the detecting device shown in fig. 2.

Fig. 21 is a schematic view of a structure of mounting an objective lens on the objective lens adjusting assembly shown in fig. 19.

Fig. 22 and 23 are schematic perspective views of different angles of a part of the dichroic mirror adjusting assembly of the detection apparatus shown in fig. 2.

Fig. 24 is a schematic perspective view of a part of the dichroic mirror adjusting assembly of the detecting device shown in fig. 2 at different angles.

FIG. 25 is a perspective view of a telescope mounting assembly of the detection apparatus shown in FIG. 2.

Fig. 26 and 27 are perspective views of a mirror adjustment assembly of the detecting device shown in fig. 2.

Fig. 28 is a perspective view of a camera adjustment assembly of the detection apparatus shown in fig. 2.

Fig. 29 and 30 are exploded views of the camera adjustment assembly of fig. 28 at two different angles.

FIG. 31 is a schematic view of the adjustment principle of the fine adjustment assembly according to an embodiment of the present invention.

The following detailed description will further illustrate the invention in conjunction with the above-described figures.

Description of the main elements

Bottom wall 332 of detection device 1

Convex surface 3321 of frame 3

Positioning surface 3312 of mobile platform 5

Mounting structures

3313, 3111d, 7601 of optical detection device 7

Angle adjusting mechanism 51 of upper frame 31

Lower frame 33 plane moving mechanism 52

Sample carrier adjustment assembly 9 mount 91

Objective lens 71 tilt adjusting table 92

Base 93 of excitation light emission module 72

Focusing module 73 limiting block 911

Locking device 921 of laser collecting module 74

Sub-laser collection module 741 buckle 922

Camera modules 7411, G, K and spacer 923

O、S

Precision thread pairs 924, 7602, 7556 of laser-guided channel 7412,

7517a、7622、7651

Dichroic mirror A, B, C, D, locking

screws

925, 7559c, 7642,

H 7541

Filter E, I, L, P pressing device 926

Cylinder mirror F, J, M, Q honeycomb panel 3111

Plane mirror N, R, T horizontal panel 3113

Horizontal support platform 311 supports ribs 315

Vertical support table 313 hollowed 3111a

Objective lens adjusting unit 751 honeycomb edge 3111b

Camera adjustment assembly 753

mating structures

3111c, 3113a

Barrel mirror mounting assembly 754 clear space 3114

Linear light source adjusting component 755 groove 3113b

Focusing module mounting assembly 756 protrusion 3113c

Mirror adjustment assembly 757 through-hole 3113d

Bottom surface 3151 of shock absorbing support assembly 35

Vertical face 3152 of frame mounting base 351

3153 the fixing hole 3511 is open

Automatic focusing supporting seat 7561 of transportation locking piece 3512

Concave plane 3513 auto-focus and illumination holder 7562

Fixed seat

Support leg 352

concave surface

3131, 7563

Mounting elbow 3521 raised point 3132

Vibration isolation device 3522 fixes

frames

760, 761, 762, 765

Sidewall 331, 7572b stress relief structure 7603, 7623

Prismatic projection 3311 optical fiber adjusting seat 7551

Bottom 7572a of fiber optic adapter 7552

Cylindrical mirror mounting 7553 reflector fine-tuning device 7573

Optical fiber 7554 level adjusting member 7573a

Set screw 7555 vertical adjuster 7573b

Cylindrical mirror system 7557 base rotational positioning member 7573c

Light source fixing frame 7559 horizontal rotating positioning piece 7573d

Circular holes

7559a, 7532b vertical rotary positioning piece 7573e

Slit

7559b butting pieces

7573f, 7573g, 7558

Straight slotted hole 7559d camera base 7531

Up-down adjusting piece 7532 for objective lens fixing piece 7511 camera

Objective lens adjusting holder 7512 camera rotation adjusting member 7533

Ascent adjustment motor 7513 camera module mount 7534

Camera rotation adjusting mechanism 7535 with motor fixing part 7514

Lifting mechanism mounting base 7515 left and right camera adjusting mechanism 7536

Up-down adjusting mechanism 7537 for transporting fixing member 7516 camera

Front-back adjusting mechanism 7538 of precision adjusting mechanism 7517 camera

Fastening screw 7517b groove-shaped pin hole 7534a

Positioning groove 7512a slotted hole 7534b

Auxiliary adjusting assembly 7518 long slotted

holes

7531a, 7532a

Fixing

seat

763, 766 fine-tuning screw 7538a

Right angle 7631 screw 7537a

Chamfer 7632 boss 7533a

Screw 7621 arc slotted hole 7533b

Fixing

base

764, 767 fixing slot 7533c

Positioning pin

7641, 7542 fine adjustment jackscrew 7533d

Countersunk threaded holes 7671 solid 81, 83

Circular pin hole 7672 hold down assembly 82

Slotted pin hole 7673 adjusting bolt 821

Locking threaded hole 7543 elastic device 822

Reflector frame 7571 with screw holes 831

Mirror mounting adjustment base 7572 fine adjustment assembly 84

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It will be understood that when an element is referred to as being "mounted on" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.

It is to be understood that the terms "upper," "lower," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the purpose of convenience in describing embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or component in question must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention. The terms "first" and "second" are used merely to distinguish one object from another, and do not refer to a particular sequential relationship.

Referring to fig. 1 and 2, a detecting device 1 according to an embodiment of the present invention includes a frame 3, a moving platform 5 disposed on the frame 3, and an optical detecting device 7. The frame 3 includes an upper frame 31 and a lower frame 33, the upper frame 31 is disposed on the lower frame 33, the optical detection device 7 is mounted on the upper frame 31, and the movable platform 5 is mounted on the lower frame 33. The moving platform 5 carries a sample carrier adjusting assembly 9 (see fig. 8 and 9), a sample carrier (such as a sequencing chip, not shown) is disposed on the sample carrier adjusting assembly 9, and the moving platform 5 moves the sample carrier by moving the sample carrier adjusting assembly 9, and completes optical detection on the sample carrier by cooperating with the optical detection device 7.

Please refer to fig. 3 and 4, which are schematic space layouts of an optical detection apparatus 7 according to an embodiment. Due to the limitation of the spatial layout positions of the optical components, each of fig. 3 and 4 does not show all the optical components of the optical detection device 7, but only shows a part of the optical components, and the parts of the optical components shown in the two drawings are different.

The optical detection device 7 includes an objective lens 71, an excitation light emitting module 72, an auto-focusing module 73, and a laser receiving module 74. The excitation light emitted by the excitation light emitting module 72 reaches the sample carrier through the objective lens 71, the sample carried by the sample carrier is excited to generate the excited light, the excited light is collected and recorded by the excited light collecting module 74 through the objective lens 71, and the biological characteristic information of the sample carrier can be obtained by analyzing the excited light recorded by the excited light collecting module 74. In this embodiment, the stimulated light collection module 74 includes a plurality of sub stimulated light collection modules 741, and each sub stimulated light collection module 741 is configured to collect and record a stimulated light. Each sub-stimulated light collection module 741 includes a camera module 7411 and a stimulated light guide channel 7412. Each laser-receiving guidance channel 7412 is formed by an optical component having functions of splitting, filtering, guiding and/or converging, which may include a dichroic mirror, a plane emission mirror, a filter and/or a tube mirror. The automatic focusing module 73 is used for emitting detection light, the detection light enters the objective lens 71 after passing through the plane mirror T and the dichroic mirror A, B, then is emitted from the objective lens 71 to the sample carrier, and returns to the detection light after being reflected by the sample carrier, the detection light reaches the automatic focusing module 73 after passing through the objective lens 71, the dichroic mirror B, A and the plane mirror T, and is recorded by the automatic focusing module 73, whether the sample carrier is located on the focal plane of the objective lens 71 or not can be confirmed by analyzing the reflected detection light, and if the sample carrier is not located on the focal plane, the amount of the sample carrier deviating from the focal plane can be obtained by analyzing the reflected detection light, so that the objective lens 71 is correspondingly adjusted to enable the sample carrier to be located on the focal plane of the objective lens 71.

Specifically, in the embodiment shown in fig. 3 and 4, the excitation light exits from the fiber end surface 7211 (square fiber end surface in the present embodiment) of the laser 721, enters the objective lens 71 through the dichroic mirror a and the dichroic mirror B, and is projected onto the sample. The dichroic mirror A is arranged on an emergent light path of the exciting light and the detecting light, and is used for reflecting the exciting light and transmitting the detecting light. The dichroic mirror B is arranged at an angle of 45 degrees with the optical axes of the dichroic mirror A and the objective lens, and functions to reflect the detection/detection light and the excitation light and transmit the received laser light. Laser light from a sample is collected by the objective lens 71, enters the tube lens F through the dichroic mirror B, C, D and the optical filter E, and is recorded by the camera module G, and the dichroic mirror B, C, D, the optical filter E and the tube lens F form a laser light guide channel 7412; or, the laser beam from the sample is collected by the objective 71, enters the tube lens J through the dichroic mirror B, C, H and the optical filter I, and is then recorded by the camera module K, and the dichroic mirror B, C, H, the optical filter I and the tube lens J form another laser beam guiding channel 7412; or, the laser beam from the sample is collected by the objective 71, enters the barrel mirror M through the dichroic mirror B, C, H and the optical filter L, is reflected to the camera module O by the plane mirror N after exiting from the barrel mirror M, and is recorded by the camera module O, and the dichroic mirror B, C, H, the optical filter L, the barrel mirror M, and the plane mirror N form another laser beam guidance channel 7412; alternatively, the laser beam emitted from the sample is collected by the objective lens 71, enters the tube mirror Q through the dichroic mirror B, C, D and the optical filter P, exits from the tube mirror Q, is reflected by the plane mirror R to the camera module S, and is recorded by the camera module S, and the dichroic mirror B, C, D, the optical filter P, and the tube mirror Q constitute the fourth laser beam guidance channel 7412. In this embodiment, the stimulated light is fluorescence, and the dichroic mirror C, D, H directs the fluorescence of different wavelengths into different channels by projection and reflection, and is recorded by different camera modules G/K/O/S. Filters E, I, L and P are single channel fluorescence filters that allow only one wavelength range of fluorescence to enter the corresponding camera module G/K/O/S, so that each camera module G/K/O/S records only one wavelength range of fluorescence signals.

As shown in fig. 2, the upper frame 31 includes a horizontal support platform 311 and a vertical support platform 313, the horizontal support platform 311 is mounted on the lower frame 33, the vertical support platform 313 is mounted on the horizontal support platform 311, and the optical components are arranged in a three-dimensional space formed by the horizontal support platform 311 and the vertical support platform 313 through the respective mounting components and/or adjusting components, so that the optical detection device 7 has a more compact structure and occupies a smaller space than the conventional one-dimensional arrangement.

In this embodiment, the mounting assembly and/or adjusting assembly includes an objective lens adjusting assembly 751, a dichroic mirror fine-tuning assembly, a camera adjusting assembly 753, a tube lens mounting assembly 754, a line light source adjusting assembly 755, a focusing module mounting assembly 756, a mirror adjusting assembly 757, etc., which will be described in detail later in this specification.

The lower frame 33 is mounted on a shock-absorbing support member 35, and the external shock is isolated/reduced by the shock-absorbing support member 35. Referring to fig. 5, a perspective view of a shock absorbing support assembly 35 according to an embodiment is shown. The shock absorbing support assembly 35 includes a frame mounting base 351 and a plurality of support legs 352 mounted on the frame mounting base 351. The frame mounting base 351 is provided with a plurality of fixing holes 3511, in this embodiment, the fixing holes 3511 are 10M 6 countersunk holes distributed at the edge of the frame mounting base 351, and the fixing holes 3511 are used for fixing the whole detection device 1 on a table top on which the detection device 1 is placed. At least one side of frame mount base 351 still is equipped with transportation retaining member 3512, transportation retaining member 3512 is connected with frame mount base 351 through the screw for detection device 1 is spacing in the transportation, improves the stability of detection device 1 when long distance transport, avoids leading to 1 inner assembly of detection device to change because of external force factors such as vibration impact. In this embodiment, the transport locks 3512 are provided on each side of the frame mounting base 351. The frame-mounting base 351 further has a plurality of concave planes 3513, and each concave plane 3513 is provided with a fixing structure (two M6 screw holes in this embodiment, not shown) for mounting the supporting foot 352 in the concave plane 3513. In this embodiment, in order to ensure the parallelism of the detection apparatus 1 with respect to the frame mounting base 351, the heights of the supporting legs 352 after mounting need to be substantially the same, so that the mounting plane of the supporting legs 352 has a high requirement for flatness, and the processing difficulty can be greatly reduced by providing the concave plane 3513 as the mounting plane of the supporting legs 352.

Each leg 352 includes a mounting elbow 3521 and a vibration isolator 3522, the mounting elbow 3521 being connected at a bottom end to the frame mounting base 351 and at a top end to the vibration isolator 3522, respectively. Each vibration isolation device 3522 is provided with a shock absorbing pad (not shown), and as shown in fig. 6, the lower frame 33 is mounted on the vibration isolation device 3522, and in this embodiment, the lower frame 33 is mounted inside 4 vibration isolation devices 3522 through 16M 6 screws. The shock absorbing support assembly 35 can support the weight of the detection device of more than 100kg approximately and can isolate the vibration frequency of more than 30 HZ. So as to avoid the change of imaging performance and reliability of the optical imaging system caused by the change of the optical path and the like due to the deviation of the working distance of the objective lens 71 out of the range of depth of field caused by external vibration or the position change of each component.

Referring to fig. 6 and 7, the lower frame 33 is suspended from the shock-absorbing support assembly 35 and suspended above the frame mounting base 351. The lower frame 33 is substantially U-shaped, and two opposite sidewalls 331 are formed with rib-shaped protrusions 3311 to the outside, and are mounted to the vibration isolating unit 3522 through the rib-shaped protrusions 3311. A plurality of high-precision and high-flatness convex surfaces 3321 are arranged on the bottom wall 332 between the two side walls 331, and the convex surfaces 3321 are used for installing the mobile platform 5. The underframe 33 is provided with the mounting structure (a plurality of M6 screw holes, not shown in the figure in this embodiment) that corresponds transportation retaining member 3512 for connect transportation retaining member 3512, be connected with frame mount base 351, reach spacing in detection device 1 transportation, improve detection device 1 at the stability of long distance transportation, avoid leading to detection device 1 internal component to change because of external force factors such as vibration impact, influence detection device 1's correlation performance. It should be noted that the transportation locking member 3512 is only used when the detection device 1 is transported, and the lower frame 33 and the shock-absorbing support assembly 35 need to be locked and limited, and when the detection device 1 is not transported or used, the transportation locking member 3512 is detached, so as to prevent the performance of the detection device 1 from being affected by the transmission of external vibration to the lower frame 33.

The top of the two side walls 331 of the lower frame 33 is provided with a plurality of high-precision positioning surfaces 3312, each positioning surface 3312 is provided with a mounting structure 3313, in this embodiment, the mounting structures 3313 are mounting holes, and the positioning surfaces 3312 and the mounting structures 3313 are used for mounting a horizontal support platform 311 for supporting the layout of the whole optical detection apparatus 7.

Referring to fig. 6, the movable platform 5 is mounted on the lower frame 33 and located right below the objective lens 71. The moving platform 5 is used for supporting the sample carrier regulating assembly 9, and includes an angle adjusting mechanism 51 and a plane moving mechanism 52 (an XY plane moving mechanism in the present embodiment). The plane moving mechanism 52 is used for moving the sample carrier regulating assembly 9 in a plane (such as an XY plane) so as to move the sample carrier in cooperation with the detection of the optical detection device 7, so that the sample in the sample carrier can be detected. The angle adjusting mechanism 51 is arranged on the plane moving mechanism 52 and moves along with the plane moving mechanism 52, and meanwhile, the angle adjusting mechanism 51 can also rotate in the XY plane, so that the installation angle of the sample carrier adjusting assembly 9 can be accurately adjusted. In the present embodiment, the planar moving mechanism 52 uses a high-speed linear motor (not shown) to realize high-speed movement in the XY direction, the stroke of the motor in the XY direction is >160mm, and the moving speed of the planar moving mechanism 52 is >75 mm/s. The control precision of the motor movement speed and the positioning precision in the movement process can reach the nanometer level. The angle adjusting mechanism 51 includes an angle rotating motor (not shown), and in the present embodiment, the adjusting range of the angle rotating motor is ± 3.5 °, so that the mounting angle of the chip adjusting assembly can be precisely adjusted by ± 3.5 °. The moving platform 5 can better ensure that the motion speed of the sample carrier and the integration frequency of the camera in the integration direction are kept highly matched. Meanwhile, the installation angle of the sample carrier adjusting assembly 9 relative to the moving platform 5 is rotated based on the requirement of a gene sequencing algorithm so as to realize accurate alignment.

In this embodiment, the sample carrier adjustment assembly 9 is mounted on the moving platform 5 by screw locking. Referring to fig. 8 and 9, the sample carrier adjusting assembly 9 includes a mounting base 91, an inclination adjusting platform 92, a base 93, an inclination adjusting mechanism, a limit locking device, and the like. Be equipped with the air flue on mount pad 91, the back is placed on mount pad 91 to the sample carrier, can tightly adsorb the sample carrier on mount pad 91 through vacuum pump evacuation. The mounting seat 91 is mounted on the inclination adjusting platform 92, a limiting block 911 is arranged below the mounting seat 91 and used for limiting the mounting position of the mounting seat 91 on the inclination adjusting platform 92, a locking device 921 is arranged on the inclination adjusting platform 92, and the locking device 921 and the limiting block 911 form a limiting locking device. The position of the mounting seat 91 in the height direction is positioned by the buckle 922 on the locking device 921 and the limiting block 911 together, and then the mounting seat 91 is locked at the fixed position on the inclination adjusting table 92 by applying a side thrust by the locking device 921. The installation mode enables the installation of the installation seat 91 to be more convenient and quicker in a limited space, and meanwhile, the surface shape change caused by uneven stress when the installation seat 91 is fixed can be avoided. A fixed-length distance head 923 is arranged in the middle of the side edge of the inclination adjusting table 92; two adjustable precision screw pairs 924 as a tilt adjusting mechanism are respectively arranged at two ends of the other side of the tilt adjusting table 92. The distance head 923 provides a reference for tilt adjustment of the mount 91 by rotating the two precision thread pairs 924 so that the entire mount 91 is level with respect to the end face of the objective lens 71. Two accurate screw thread pairs 924 form three point stationary plane with distance head 923 to guarantee to arrange the difference in height of the whole image forming region of the sample carrier on mount pad 91 in within 10um, the highest regulation precision of the plane degree of mount pad 91 can arrive about 1 um. And the fast focusing function of the automatic focusing module 73 is matched, so that when the whole mounting seat 91 is moved to scan and image, the image obtained by the optical detection device 7 is kept in the depth of field range, and the image can be imaged clearly with high resolution. A pressing device 926 formed by a locking screw 925, a washer (not shown) and a wave spring (not shown) is additionally arranged beside the distance head 923 and the precision thread pair 924, respectively, and the pressing device 926 can ensure that the tilt adjusting table 92 is always locked on the base 93 when the tilt adjusting table 92 is adjusted.

Referring to fig. 10, the upper frame 31 constitutes the whole optical supporting platform, the upper frame 31 is mounted on the lower frame 33 and mainly includes a horizontal supporting platform 311 and a vertical supporting platform 313, in this embodiment, the horizontal supporting platform 311 includes a honeycomb panel 3111 disposed at the lower end and a horizontal panel 3113 disposed at the upper end. In addition, the upper frame 31 further includes at least one support rib 315. In the present embodiment, the upper frame 31 includes three support ribs 315. The entire detecting device 1 is similar in structure to a house, the lower frame 33 is a solid foundation, the honeycomb panel 3111 and the horizontal panel 3113 are floor slabs or floors, the vertical support 313 is similar to a ridge beam, and the support rib 315 is a roof beam.

Referring to fig. 11, the honeycomb plate 3111 is similar to a honeycomb structure and includes a plurality of hollow parts 3111 a. This structure reduces the weight of the detecting device 1, and has the effects of reducing the rigid deformation and reducing the transmission of external vibration. A fitting structure 3111c (a plurality of M6 countersunk holes in this embodiment) corresponding to the mounting structure 3313 on the lower frame 33 is provided on the honeycomb edge 3111b on the upper surface of the honeycomb panel 3111 for fixing the honeycomb panel 3111 to the lower frame 33. A clearance 3114 is provided at a position where the honeycomb plate 3111 and the horizontal plate 3113 move up and down with respect to the objective lens 71. Simultaneously still be equipped with mounting structure 3115 at honeycomb panel 3111 and the mounted position that horizontal panel 3113 corresponds vertical supporting bench 313, in this embodiment, mounting structure is 5 phi 12's through-hole, and this through-hole position sets up the below at the fixed screw of horizontal panel 3113 and vertical supporting bench 313, makes things convenient for vertical supporting bench 313's installation and adjustment, when the vertical supporting bench 313 of needs installation adjustment, need not all take apart the connection between honeycomb panel 3111 and the horizontal panel 3113 and can dismantle vertical supporting bench 313 alone. A plurality of mounting structures 3111d (M6 countersunk holes in this embodiment) are regularly arranged on the honeycomb panel 3111 for fixedly connecting with the horizontal panel 3113; an engaging structure 3113a (a plurality of threaded holes) is disposed at a corresponding position on the horizontal panel 3113.

Referring to fig. 12, the horizontal panel 3113 is shaped to fit the honeycomb panel 3111. The horizontal panel 3113 is provided with a rectangular groove 3113b, the vertical support table 313 is mounted in the groove 3113b, a protrusion 3113c is arranged on a side of the groove 3113b facing the center of the groove 3113b, and the protrusion 3113c is a semicircular protrusion in the present embodiment and is used for accurately positioning the mounting position of the vertical support table 313. The flatness of the groove 3113b and the flatness of the lower surface of the horizontal panel 3113 are controlled to be within 0.03mm, so as to ensure the perpendicularity of the vertical support table 313 relative to the horizontal panel 3113 during installation, i.e. to ensure the installation reference of each optical component in the optical detection apparatus 7. A plurality of through holes 3113d are formed on the horizontal panel 3113, and the positions of the through holes 3113d correspond to the positions where the honeycomb panel 3111 is connected to the lower frame 33, so that the installation and adjustment above the honeycomb panel are facilitated. Referring to fig. 10, in the present embodiment, the three support ribs 315 are installed between the horizontal panel 3113 and the vertical support platform 313 and are respectively disposed at the left front, the right front and the left rear of the vertical support platform 313. The bottom surface 3151 of each support rib 315 is secured to the horizontal panel 3113 and the vertical surface 3152 is secured to the vertical support table 313. The support ribs 315 support the vertical support tables 313, preventing the vertical support tables 313 from being deformed in the vertical direction, so that the vertical support tables 313 are always kept perpendicular to the horizontal panel 3113. One or more openings 3153 are also provided in the two support ribs 315 located at the front left and front right of the vertical support 313, the openings 3153 being used to allow power lines to pass through the camera module and/or to facilitate adjustment of the camera module G/K/O/S.

In this embodiment, the vertical support platform 313 is a flat plate in a roof shape, and each optical component in the optical detection device 7 is sequentially mounted on the front surface of the vertical support platform 313 according to the need of the optical imaging system.

Most of the optical components in the optical detection device 7 are mounted on the vertical support table 313. Referring to fig. 13-16, firstly, the optical path of the auto-focusing system is shown, the focusing module mounting assembly 756 includes an auto-focusing support 7561 and an auto-focusing and illumination fixing seat 7562, the auto-focusing module 73 is disposed behind the vertical support 313 and fixed on the auto-focusing support 7561, the auto-focusing support 7561 is mounted at the left rear position of the horizontal panel 3113, and the plane mirror T, the dichroic mirror a, the dichroic mirror B, the objective 71 and other optical components of the reverse laser transmission auto-focusing light beam are disposed in front of the vertical support 313. The vertical support table 313 is provided with a through hole (not shown) through which the detection light in the autofocus module 73 passes, and the detection light passes through the through hole in the vertical support table 313, passes through the plane mirror T, the dichroic mirror a and the dichroic mirror B through which the reverse laser light passes through the autofocus light beam, enters the objective 71, finally reaches the surface of the sample carrier, is reflected by the surface of the sample carrier, and returns to the detection light. The auto-focusing module 73 has a focusing feedback system with extremely high sensitivity and accuracy, and can judge whether the objective lens 71 is in the optimal imaging position according to the returned detection light, and finally realize the distance adjustment between the objective lens 71 and the sample carrier by driving the objective lens 71 to move on the Z axis, thereby realizing the auto-focusing function.

Referring to fig. 15, the plane mirror T, the dichroic mirror a, and the dichroic mirror B are all disposed on the auto-focusing and illuminating fixing seat 7562, the vertical supporting seat 313 is provided with a concave surface 3131, the auto-focusing and illuminating fixing seat 7562 is installed in the concave surface 3131, the edge of the concave surface 3131 is provided with a protruding point 3132 protruding toward the concave surface 3131, and the protruding point 3132 is used as a positioning point of the auto-focusing and illuminating fixing seat 7562 and the plane mirror T, the dichroic mirror a, and the dichroic mirror B thereon. The concave surface 3131 has high flatness and verticality, and the concave surface 3131 is arranged instead of directly fixing the automatic focusing and lighting fixing seat 7562 on the vertical supporting table 313, so that the processing difficulty is reduced, and the positions of the plane reflecting mirror T, the dichroic mirror a and the dichroic mirror B in the whole optical imaging system can be better ensured to reach an ideal state.

The plane mirror T and the dichroic mirror a are both mounted (glued in this embodiment) in respective fixed frames 760, and a plurality of mounting structures 7601 (3 countersunk screw holes in this embodiment) are provided at the edge of each fixed frame 760 for fixedly mounting the fixed frame 760 on the autofocus and illumination fixing base 7562; and precise thread pairs 7602 are respectively arranged beside the mounting structure 7601 and used for precisely adjusting the angles of the plane reflecting mirror T and the dichroic mirror A. A stress release structure 7603 is further provided on the fixing frame 760, in this embodiment, the stress release structure 7603 is an L-shaped through groove provided on the peripheral side of the plane mirror T/dichroic mirror a, and the stress release structure 7603 is provided between the mounting structure 7601 and the plane mirror T/dichroic mirror a, and is mainly used for avoiding that, when the fixing frame 760 is mounted, the fixing frame 760 is deformed by a force and transmitted to the surface of the plane mirror T/dichroic mirror a, so that the surface shape of the plane mirror T/dichroic mirror a changes, which results in a change in the performance of the optical imaging system. In other embodiments, the stress relieving structure 7603 may be a multi-segment through-groove provided between the plurality of mounting structures 7601 and the plane mirror T/dichroic mirror a. The dichroic mirror B is mounted (glued in this embodiment) in an L-shaped fixing frame 761, and the fixing frame 761 is mounted in a high-flatness concave surface 7563 inclined at 45 degrees on the autofocus and illumination fixing base 7562, and in this embodiment, the fixing frame 761 is fixed in the concave surface 7563 by two screws, and a countersunk screw hole (not shown) in the fixing frame 761 has a certain adjustment range, so that fine adjustment of a plurality of degrees of freedom such as the vertical, horizontal, and rotational angles of the dichroic mirror B can be performed.

Referring to fig. 17 and 18, the line light source adjusting assembly 755 is installed on the horizontal panel 3113, located in front of the dichroic mirror a, and includes an optical fiber adjusting seat 7551, an optical fiber adapter 7552, and a cylindrical mirror installing seat 7553, where the optical fiber 7554 is connected to the optical fiber adapter 7552, the optical fiber adapter 7552 is fixed on the optical fiber adjusting seat 7551, and the optical fiber adjusting seat 7551 is provided with a plurality of, for example, three fixing screws 7555 and a plurality of, for example, three precision screw pairs 7556, so that the position of the optical fiber 7554 can be adjusted up and down, left and right, and the light emitted from the optical fiber 7554 and the cylindrical mirror system 7557 have the same optical axis. The optical fiber adjusting base 7551 and the cylindrical mirror mounting base 7553 are coaxially matched, and the relative angle between the optical fiber 7554 and the cylindrical mirror mounting base 7553 is coaxially rotated, so that the angle between the optical fiber 7554 and the cylindrical mirror system 7557 can be adjusted. The distance between the light exit surface of the optical fiber 7554 and the cylindrical mirror system 7557 can be finely adjusted by moving the optical fiber adjusting base 7551 in the optical axis direction. A plurality of abutting members 7558 (3 push wires distributed at 120 ° in the present embodiment) are provided at the rear end of the cylindrical mirror mount 7553, and are used to fix the optical fiber adjusting mount 7551. Based on the above adjustment, cylindrical mirror system 7557 can be guaranteed to form an excitation spot matching the chip size of camera module G, K, O, S according to the design requirements. The linear light source adjusting assembly 755 further includes a light source fixing frame 7559, a front end cylindrical surface of the cylindrical mirror mounting base 7553 passes through a top end circular hole 7559a of the light source fixing frame 7559 to be coaxially matched, the position of an illumination spot in the whole light path can be rotatably adjusted, and coaxial locking can be performed through a slit 7559b at the top end of the light source fixing frame 7559 and a locking screw 7559 c. A countersunk straight slot hole 7559d is formed in the bottom end of the light source fixing frame 7559, the straight slot hole 7559d can be used for fine adjustment of the relative position of the whole linear light source adjusting assembly 755, a fixing threaded hole (not shown) is formed in the horizontal panel 3113 and matched with the straight slot hole 7559d, and a central connecting line of the two fixing threaded holes is arranged at an angle of 45 degrees with the dichroic mirror A so as to ensure that a central optical axis of the cylindrical mirror system 7557 is overlapped with the center of the objective lens 71 after being reflected twice, so that a rectangular light spot shaped by the cylindrical mirror system 7557 can be exactly overlapped with the size of a chip of the TDI linear array camera module G/K/O/S after being projected onto a sample carrier through the objective lens 71 and excited by fluorescence.

Referring to fig. 19 to 21, the objective lens adjusting assembly 751 includes an objective lens holder 7511, an objective lens adjusting base 7512, a lift adjusting motor 7513, a motor holder 7514, a lift mechanism mount 7515, and a transport holder 7516. The objective lens adjustment assembly 751 further includes multiple sets of fixed adjustment mechanisms. The objective lens adjusting assembly 751 is located above the moving platform 5 and suspended on the vertical support table 313 through the honeycomb plate 3111 and the horizontal panel 3113. The objective lens adjusting component 751 realizes the functions of adjusting the concentricity of the objective lens 71 in the whole optical imaging system in a multi-dimensional high-precision manner and finely adjusting the verticality of the objective lens 71 relative to an object plane and an image plane, the adjusting precision of the objective lens adjusting component 751 can reach hundreds of nanometers, and the objective lens adjusting component 751 drives the objective lens 71 to be matched with the focusing module 73 to realize rapid and high-precision focusing under the driving of the ascending adjusting motor 7513. The objective 71 is connected to an objective holder 7511 by a fine screw, the objective holder 7511 is connected to an objective adjustment holder 7512 by a plurality of sets of fine adjustment mechanisms 7517, the three sets of fine adjustment mechanisms 7517 include a fine screw pair 7517a and two fastening screws 7517b, and a fastening screw 7517b with a spring washer is disposed on each side of the fine screw pair 7517 a. The three sets of precision adjusting mechanisms 7517 are arranged on the objective fixing member 7511 in a 120-degree triangular tripod position, and the inclination angle of the objective 71 can be adjusted through the three sets of precision adjusting mechanisms 7517, so that the perpendicularity between the optical axis of the objective 71 and the sample carrier is realized, the whole imaging field of view is kept in the imaging field depth range of the objective 71, and the middle field of view and the edge field of view can be clearly imaged. Meanwhile, a positioning groove 7512a having a certain installation orientation is provided on the objective lens adjustment holder 7512, thereby achieving accurate positioning of the objective lens 71 and avoiding damage to the contact surface at the time of adjustment. The objective fixing member 7511 and the objective adjusting base 7512 are further connected by an auxiliary adjusting assembly 7518, in this embodiment, an auxiliary adjusting assembly 7518 is provided at a position 751760 degrees from each group of precision adjusting mechanisms, and the auxiliary adjusting assembly 7518 can ensure that the objective 71 and the objective fixing member 7511 do not fall off after all the fastening screws 7517b are loosened in the precision adjusting process, thereby greatly facilitating the functional requirements of precision adjustment and the like. The objective lens adjusting mount 7512 is connected to the lift adjusting motor 7513 together with the objective lens holder 7511 and the objective lens 71, and the lift adjusting motor 7513 is connected to the motor holder 7514 and is connected to the lift mechanism mount 7515 together to constitute the objective lens adjusting unit 751, and the objective lens adjusting unit 751 is mounted on the vertical support base 313 via the lift mechanism mount 7515. The objective fixing member 7511 and the objective adjusting seat 7512 are designed to be rigid and lightweight by hollowing out and setting up reinforcing ribs, and the elevation adjusting motor 7513 can drive about 625g of load to adjust the nanometer precision up and down, so that the distance between the object plane and the objective 71 can be adjusted by adjusting the position of the objective 71, and the optical detection device 7 can achieve the optimal/better imaging state in the whole scanning process.

In this embodiment, most dichroic mirror fine setting subassembly all contains three groups and adjusts locking Assembly, can carry out the planar angle fine setting of dichroic mirror to guarantee that the light path carries out the turn propagation along ideal optical axis according to the designing requirement, simultaneously, the fixed frame of all dichroic mirrors has set up stress release structure, avoids the lens deformation because of lens viscose solidification and fixing base screw locking lead to, thereby influences optical imaging system's imaging quality.

Dichroic mirror C, H, D is arranged above dichroic mirror B, dichroic mirrors C, H, D are glued in respective fixing frames, then fixed to corresponding fixing seats through three sets of adjusting and locking assemblies, and are installed on the optical vertical fixing plate through fastening screws according to the positions of the dichroic mirrors in the optical imaging system in a locking mode. Referring to fig. 22 and 23, the fixing frames 762 of the dichroic mirrors C and D are installed on two perpendicular angle surfaces 7631 of the same fixing seat 763, the two perpendicular angle surfaces 7631 respectively form an angle of 45 degrees with the optical axis, the cross section of the fixing seat 763 is triangular, and an inclined surface 7632 of the fixing seat 763, which connects the two perpendicular angle surfaces 7631, is parallel to the optical axis. A plurality of countersunk screw holes (not labeled) are formed in the edge of each fixing frame 762, and are used for allowing screws 7621 to penetrate through to fixedly install the fixing frames 762 on the fixing seats 763; be equipped with accurate screw thread pair 7622 respectively beside the screw hole, can carry out dichroic mirror C/D's angle fine setting through accurate screw thread pair 7622 to guarantee that the accuracy makes dichroic mirror C/D be 45 installation for the optical axis according to the light path design requirement, every fixed frame 762 has set up stress release structure 7623 simultaneously, avoids because of the lens viscose solidification and the lens seat screw locking lens that leads to warp, thereby influences optical imaging system's imaging quality. A fixing base 764 is arranged below the fixing base 763, a plurality of (2 in this embodiment) positioning pins 7641 are arranged on the fixing base 764, and are used for accurately positioning the mounting positions of the dichroic mirror C and the dichroic mirror D, and a plurality of (4 in this embodiment) locking screws 7642 are further arranged on the fixing base 764, and are used for locking the whole dichroic mirror fine-tuning assembly, so that the dichroic mirror C and the dichroic mirror D are prevented from shifting along with time, and the stability of a light path is ensured.

Similarly, referring to fig. 24, dichroic mirror H is glued into fixed frame 765, and similarly, the angle of dichroic mirror H in the optical path with respect to the optical axis can be adjusted by three precision thread pairs 7651 on fixed frame 765. The fixing frame 765 is fixed on the fixing seat 766, the fixing seat 766 is arranged on the fixing base 767, a plurality of (for example, three) threaded holes are formed in the bottom edge of the fixing seat 766, and a plurality of (for example, three) countersunk threaded holes 7671 matched with the fixing base 767 are formed in the fixing base 767 and used for connecting the fixing seat 766 with the fixing base 767. The fixing base 767 is provided with positioning pin holes along the optical axis direction, one of the positioning pin holes is a circular pin hole 7672 in interference fit and used for positioning, the other one is a groove-shaped pin hole 7673 and used for determining the optical axis direction, meanwhile, the assembling is convenient, and the processing difficulty is reduced.

The light split by the dichroic mirror D/H needs to pass through an optical filter E/I/L/P and a barrel mirror F/J/M/Q for light condensation and finally enters a TDI camera module G/K/O/S, and in the light path, the barrel mirror F, J, M, Q is required to have good concentricity with the optical axis. The filters E, I, L, P are mounted on corresponding tube mirrors F, J, M, Q. referring to fig. 25, each tube mirror F, J, M, Q is mounted on a respective tube mirror mounting assembly 754. the lower surface of the tube mirror mounting assembly 754 has better flatness, while the mounting surface of the tube mirror F, J, M, Q has higher perpendicularity and cylindricity. The stability and concentricity of the installation of the tube lens F/J/M/Q are ensured by tightly locking the tube lens F/J/M/Q by a locking screw 7541 at the top end of the tube lens installation component 754. At the bottom of the barrel mirror mounting assembly 754, there are provided positioning pins 7542 (two in this embodiment) for precisely positioning the mounting position of the barrel mirror F/J/M/Q in the entire optical path while ensuring parallelism of the optical axis of the barrel mirror F/J/M/Q itself with the optical axis of the entire optical path. The bottom of the telescope mounting assembly 754 is further provided with a plurality of (e.g., 4) locking threaded holes 7543, and screws (not shown) with spring washers are connected to the locking threaded holes 7543 at the bottom of the telescope mounting assembly 754 through counter bores (not shown) at the back of the vertical support table 313, so that the whole telescope mounting assembly 754 is locked and the position of the telescope F/J/M/Q is ensured to be stable and unchanged.

In this embodiment, in order to make the whole optical detection device 7 more compact, more ergonomic in length, width and height, and convenient for debugging, a plane mirror N, R is further provided to turn the light. Referring to fig. 26 and 27, the flat mirror N, R is fixed to the vertical support 313 by a mirror adjustment assembly 757. The plane mirror N, R is first mounted (glued in this embodiment) on a mirror frame 7571, and the mirror frame 7571 is mounted on a mirror mounting adjustment base 7572, and the mirror mounting adjustment base 7572 includes a bottom portion 7572a and a side wall 7572b, and the bottom portion 7572a and the side wall 7572b together form a space for accommodating the mirror frame 7571. Mirror frame 7571 is fixed to side wall 7572 b. In addition, mirror adjustment assembly 757 includes two or more mirror fine adjustment devices 7573, where two or more mirror fine adjustment devices 7573 include a horizontal adjustment member 7573a, a vertical adjustment member 7573b, and a base rotary positioning member 7573 c. In this embodiment, the base rotating positioning member 7573c includes a horizontal rotating positioning member 7573d and a vertical rotating positioning member 7573e, and both the horizontal rotating positioning member 7573d and the vertical rotating positioning member 7573e are positioning pins. Wherein, the horizontal rotation positioning member 7573d is disposed on the bottom portion 7572a and the vertical support table 313, and is located at a turning point of the optical axis of the optical imaging system, and the mirror adjusting assembly 757 can rotate with the horizontal rotation positioning member 7573d as an axis; a vertical rotation positioning member 7573e is provided on the side wall 7572b, and the mirror adjustment unit 757 can be rotated with the vertical rotation positioning member 7573e as an axis. The vertical adjusting piece 7573b is arranged on the side wall 7572b, at least two propping pieces 7573f propping against the reflecting mirror frame 7571 are arranged on the vertical adjusting piece 7573b along the vertical direction, and the verticality of the reflecting surface of the reflecting mirror N/R relative to the vertical supporting platform 313 can be finely adjusted by adjusting the force applied to the reflecting mirror frame 7571 by the propping pieces 7573f, so as to ensure that the turning point and the turning angle of the turning light path reach the ideal state of each lens in the optical imaging system. The horizontal adjusting member 7573a is arranged in front of or behind the bottom portion 7572a, the horizontal adjusting member 7573a is provided with at least two abutting members 7573g abutting against the bottom portion 7572a along the horizontal direction, and the angle of the reflector frame 7571 in the horizontal direction can be finely adjusted by adjusting the force applied to the bottom portion 7572a by the abutting members 7573 g. The abutting

pieces

7573f and 7573g are jackscrews, and fine adjustment of the position of the reflector N, R and the angle orientation between the reflecting surface and the optical axis can be realized by tightening or loosening the separately arranged jackscrews, so that the reflector N, R and the optical axis of the system form a 45-degree angle required by the optical imaging system.

After being focused by the barrel lens F/J/M/Q, light rays are imaged on the camera module G/K/O/S, and due to the working principle of time-delay integration of the TDI camera, the motion direction of the mobile platform 5 needs to be kept consistent with the height of the integration direction of the camera module G/K/O/S, the imaging positions of the same object point on the four camera modules G, K, O, S need to be kept consistent, and meanwhile, the camera chip needs to be kept consistent with the optimal imaging image plane. To achieve the above functions, as shown in fig. 28 to 30, the camera adjusting assembly 753 mainly includes a camera base 7531, a camera up-and-down adjusting member 7532, a camera rotation adjusting member 7533, a camera assembly fixing member 7534, and a multi-dimensional fine adjustment mechanism such as a camera rotation adjusting mechanism 7535, a camera left-and-right adjusting mechanism 7536, a camera up-and-down adjusting mechanism 7537, and a camera front-and-rear adjusting mechanism 7538. Groove-shaped pin holes 7534a (two groove-shaped pin holes in this embodiment) are provided in the camera module mount 7534, and the approximate position of the camera module G/K/O/S in the optical axis direction imaging focal plane can be easily determined by positioning pins provided on the vertical support table 313. The camera module fixing member 7534 is provided with a plurality of slots 7534b perpendicular to the optical axis direction, and the entire camera module G/K/O/S can be fixed on the vertical supporting table 313 by screws passing through the slots 7534 b. The camera module fixing piece 7534 is provided with the left and right camera adjusting mechanism 7536 at one end of the camera module fixing piece 7534, the camera module fixing piece 7534 can be pushed by the aid of the left and right camera adjusting mechanism 7536, and the camera module fixing piece 7534 drives the whole camera adjusting assembly 753 and the camera module G/K/O/S to move relatively on a plane perpendicular to an optical axis, so that a central pixel in the short direction of a camera chip is aligned with the optical axis conveniently. The camera base 7531 is disposed on the camera module fixing member 7534, and is connected to the camera module fixing member 7534, in this embodiment, the camera base 7531 is L-shaped as a whole, the bottom of the camera base 7531 is provided with a plurality of (4 in this embodiment) long slots 7531a along the optical axis direction, and the long slots 7531a provide a guide for adjusting the front and back (optimal imaging position) of the camera module G/K/O/S in the optical path. The front-back camera adjusting mechanism 7538 is fixed on the side edge of the camera assembly fixing piece 7534 and located in front of or behind the camera base 7531, in the embodiment, the front-back camera adjusting mechanism 7538 is located behind the camera base 7531, the fine adjusting screw 7538a of the front-back camera adjusting mechanism 7538 is buckled at the rear end of the bottom of the camera base 7531, the fine adjusting screw 7538a pushes the camera base 7531 to move on the camera assembly fixing piece 7534 along the front-back position, and therefore adjustment of the focal plane position of the camera module G/K/O/S can be achieved. A camera up-down adjusting mechanism 7537 is provided at the top end or the bottom end of the camera base 7531, and in this embodiment, the camera up-down adjusting mechanism 7537 is fixed to the upper end of the camera base 7531, and one end of the camera up-down adjusting mechanism 7537 is connected to a camera up-down adjusting member 7532 fixedly mounted on the camera base 7531. The camera up-and-down adjusting piece 7532 is provided with four up-and-down long slot holes 7532a, and the camera up-and-down adjusting piece 7532 can be driven to carry out fine adjustment on the up-and-down position relative to the camera base 7531 through fine rotation adjustment of a screw rod 7537a in the camera up-and-down adjusting mechanism 7537, so that a central pixel in the long direction of a camera chip coincides with an optical axis. A round hole 7532b is arranged on the camera up-and-down adjusting piece 7532, the center of the round hole 7532b is coaxially matched with a boss 7533a with a round hole in the center of the camera rotating adjusting piece 7533, and a rotating track in the G/K/O/S rotating adjusting process of the camera module is defined. A plurality of arc-shaped slot holes 7533b are further formed in the camera rotation adjusting member 7533, and in the present embodiment, an arc-shaped slot hole 7533b is formed at each of the centers of the four sides of the camera rotation adjusting member 7533, and the camera rotation adjusting member 7533 is fixed in position in the entire assembly after the camera rotation adjustment is completed. In addition, a precise adjusting top thread 7533d is respectively arranged beside two fixing groove holes 7533c in the vertical direction of the camera rotation adjusting piece 7533 and is used for adjusting the verticality (inclination) of a single imaging surface of the camera module G/K/O/S relative to the optical axis. The camera module G/K/O/S is mounted on the camera rotation adjusting member 7533. Through the matching adjustment of each component in the adjusting components, the multi-dimensional precise adjustment of the camera module G/K/O/S can be completed. By means of the rotation adjustment of the camera module G/K/O/S, the integration direction of the camera module G/K/O/S and the motion direction of the mobile platform 5 can keep consistent with each other in height. The camera up-down adjustment mechanism 7537 and the camera left-right adjustment mechanism 7536 make the height of the image formed by each channel camera module G, K, O, S uniform in the XY direction, and the deviation can be guaranteed to be 1-3 pixels. With the camera forward-backward adjustment mechanism 7538 and the camera rotation adjustment mechanism 7535, the entire imaging plane of each channel camera module G, K, O, S can be kept within the imaging focal depth range.

The principle of using the precise thread pair and the locking screw to complete the precise adjustment of each component is briefly described below. Referring to fig. 31, the solid 81 is mounted on the solid 83 by a plurality of pressing components 82, and the pressing components 82 provide elastic pressure to the solid 81 and the solid 83. The pressing assembly 82 includes an adjusting bolt 821 and an elastic device 822 sleeved on the adjusting bolt 821. The solid body 83 is provided with a screw hole 831, one end of the adjusting bolt 821 extends into the screw hole 831 and is connected with the screw hole 831, and the head of the adjusting bolt 821 is limited on the solid body 81. The elastic means 822 is pressed against the head of the adjusting bolt 821 at one end and against the body 81 at the other end, and the elastic means 822 is compressed to provide an elastic pressure to the body 81 towards the body 83.

A precision adjustment assembly 84, such as a precision threaded pair, adjusts the relative position between the

bodies

81 and 83. The fine adjustment assembly 84 provides the body 81 with a counter force opposite to the elastic pressure, and when the elastic pressure and the counter force applied to the body 81 are balanced, the body 81 is stabilized at a position opposite to the body 83. The opposite force is adjusted by the fine adjustment assembly 84, so that the relative position between the solid 81 and the solid 83 can be finely adjusted, and when the plurality of pressing assemblies 82 and the plurality of fine adjustment assemblies 84 are arranged between the solid 81 and the solid 83, the plane parallelism of the solid 81 relative to the solid 83 can be adjusted.

In summary, the embodiments of the present invention provide a detection device, in which a horizontal support platform and a vertical support platform are provided, so that optical components are arranged in a two-dimensional direction in a three-dimensional space formed by the horizontal support platform and the vertical support platform, and the detection device has a more compact overall structure, occupies a smaller space, better conforms to ergonomics, and facilitates machine debugging.

It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that suitable changes and modifications of the above embodiments are within the scope of the claimed invention as long as they are within the spirit and scope of the present invention.

Claims

1. The detection device is characterized by comprising a horizontal support platform, a vertical support platform and an optical detection device, wherein the vertical support platform is arranged on the horizontal support platform, and the optical detection device comprises an objective lens, an exciting light emitting module and a laser receiving acquisition module, wherein the laser receiving acquisition module is arranged on the vertical support platform and is distributed on the vertical support platform in a two-dimensional extending manner.

2. The detecting apparatus according to claim 1, wherein the detecting apparatus further comprises a lower frame, the horizontal supporting platform is disposed on the lower frame, the lower frame is further used for carrying a sample carrier, the horizontal supporting platform is provided with a position avoiding space corresponding to the position of the objective lens, and the optical detecting apparatus detects the sample on the sample carrier through the position avoiding space.

3. The detecting device for detecting the rotation of a motor rotor as claimed in claim 2, wherein the horizontal supporting platform comprises a cellular board and a horizontal panel arranged on the cellular board, the cellular board is installed on the lower frame, the horizontal panel is installed on the cellular board, and a plurality of hollows are arranged on the cellular board.

4. The detecting device for detecting the rotation of a motor rotor as claimed in claim 3, wherein a groove is formed in the horizontal panel for mounting the vertical supporting platform, a protrusion protruding towards the center of the groove is arranged on the side of the groove, and the protrusion is used for positioning the vertical supporting platform.

5. The detecting device for detecting the rotation of a motor rotor as claimed in claim 3, wherein the detecting device further comprises a shock absorbing support assembly, and the lower frame is supported on the shock absorbing support assembly to reduce or isolate external vibration.

6. The detecting device according to claim 3, wherein the detecting device further comprises a moving platform mounted on the lower frame and located directly below the objective lens, the moving platform being adapted to move the sample carrier in cooperation with the detection by the optical detecting device; and/or the moving platform comprises a plane moving mechanism and an angle adjusting mechanism, wherein the plane moving mechanism is used for moving the sample carrier in a plane, and the angle adjusting mechanism is used for rotating the sample carrier in the plane.

7. The detecting device according to claim 1, wherein the optical detecting device includes a beam splitter and/or a plane mirror, the beam splitter and/or the plane mirror are respectively installed in a fixing frame, the fixing frame is directly or indirectly installed on the vertical supporting platform, the fixing frame is provided with a stress releasing structure, the stress releasing structure is used for preventing deformation of the fixing frame from being transmitted to the beam splitter or the plane mirror, or the stress releasing structure is an L-shaped through groove which is opened on the fixing frame and surrounds the beam splitter or the plane mirror.

8. The inspection device according to claim 1, wherein the laser-receptive collection module comprises a plurality of optical components, the optical components are mounted on the vertical support platform by respective mounting assemblies and/or adjusting assemblies, and the position and/or angle of the optical components are precisely adjusted by precise thread pairs, and/or by screws for fixing the mounting assemblies and/or adjusting assemblies, and/or by a plurality of abutting members abutting against the mounting assemblies and/or adjusting assemblies.

9. The detecting device for detecting the rotation of a motor rotor according to claim 1, wherein the plurality of abutting members are distributed along a preset direction, and the angle of the mounting assembly and/or the adjusting assembly in the preset direction is realized by adjusting the acting force applied to the mounting assembly and/or the adjusting assembly by the plurality of abutting members, so as to adjust the position and/or the angle of the corresponding optical component in the preset direction.

10. The detecting device according to claim 1, wherein the optical detecting device further comprises an auto-focusing module, and the auto-focusing module and the excitation light exiting module are disposed on the horizontal support stage and are disposed on the front and rear sides of the vertical support stage.