CN102945688B - X-ray KBA microscopic imaging system - Google Patents
X-ray KBA microscopic imaging system Download PDFInfo
- Publication number
- CN102945688B CN102945688B CN201210424817.2A CN201210424817A CN102945688B CN 102945688 B CN102945688 B CN 102945688B CN 201210424817 A CN201210424817 A CN 201210424817A CN 102945688 B CN102945688 B CN 102945688B
- Authority
- CN
- China
- Prior art keywords
- object lens
- face
- kba
- optical prism
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Lenses (AREA)
Abstract
The invention relates to an X-ray KBA (Kirkpatrick-Baez Advanced) microscopic imaging system, which comprises an object lens M1, an object lens M2, an object lens M3, an object lens M4, an optical prism piece N1 and an optical prism piece N2, wherein working reflection surfaces of the object lens M1 and the object lens M2 in the meridian direction push against a T1 surface and a T2 surface of the optical prism piece N1, which are adjacent to each other and form an included angle of eta1; and working reflection surfaces of the object lens M3 and the object lens M4 in the sagittal direction push against a T3 surface and a T4 surface of the optical prism piece N2, which are adjacent to each other and form an included angle of eta2. Compared with the prior art, the X-ray KBA microscopic imaging system is simple in structure, and does not have accuracy requirements on angles and thicknesses of the working reflection surfaces and the back, the processing difficulty and cost of optical elements of the KBA system are reduced greatly, and the assembling accuracy and the ultimate imaging quality of the KBA system are improved.
Description
Technical field
The present invention relates to a kind of X ray KBA micro imaging system, especially relate to a kind of X ray KBA micro imaging system of the optical prism block processed by ordinary optical, what belong to imaging system debugs field.
Background technology
Laser inertial confinement fusion (ICF) research is explored fundamental researchs such as national economy, national security and plasma physicss important and special meaning.The x-ray imaging diagnosis of implosion constricted zone is the key areas that laser ICF studies.Modified KB (i.e. KBA) micro imaging system is the important diagnostic means obtaining high-space resolution plasma X-ray image in millimeter even centimetre-sized visual field.The optical texture of KBA micro imaging system as shown in Figure 1, two groups of double mirrors that the objective lens of KBA micro imaging system is arranged in order by orthogonal placement are formed, object lens M1 and object lens M2 forms first group of double mirror on meridian direction, and object lens M3 and object lens M4 forms second group of double mirror on sagitta of arc direction.Single group double mirror is to there is serious astigmatism during x-ray imaging, only can be formed by the imaging relations of " object point is to a focal line ", and KBA structure realizes astigmatic compensation respectively by the double mirror of two groups of orthogonal placements on meridian and sagitta of arc direction, thus realize the imaging relations of " object point is to a picture point ".
KBA system is non co axial glancing incidence reflective structure, visible ray diffraction effect is very serious, in addition two pieces of object lens of same group of double mirror mutually restrict in imaging, therefore KBA system is debug and cannot be completed by the mode of visible ray direct imaging, also debuging of KBA system normal optical cannot be utilized to debug position and the angular relationship of means Accurate Calibration four pieces of object lens, so must have been tested based on x-ray imaging.First the object lens assembling of KBA system is completed, then the optimal imaging point position of having assembled rear KBA object lens is searched out by x-ray imaging experiment, finally utilize with the Double passage laser of KBA object lens rigid connection or simulate the utility appliance such as bead by this position mark out, realizing debuging of KBA system with this.
The resetting difficulty of KBA system is mainly reflected in KBA object lens fit on.The projection on meridian and sagitta of arc direction of the objective lens arrangement of KBA system as shown in Figure 2.If the radius-of-curvature of KBA object lens M1-object lens M4 is R; θ 1 and θ 2 is the center grazing angle of X ray when two pieces of object lens M1 and object lens M2 reflect respectively.Then as θ 1=θ 2, focal length does not change with grazing angle, and image field tilts to be corrected, the now optimal imaging point position of corresponding KBA system, the focal distance f 1 of corresponding meridian direction is shown in formula (1), and wherein η 1 is the angle (η of object lens M1 and object lens M2
1=θ
1+ θ
2).The focal distance f 2 in sagitta of arc direction is shown in formula (2), and wherein η 2 is the angle (η of object lens M3 and object lens M4
2=θ
3+ θ
4).
As shown from the above formula, the principal element affecting KBA system imaging quality is whether identical (the θ 1=θ 2 of two pieces of object lens work grazing angles of same group of double mirror, θ 3=θ 4), and whether the angle of two pieces of object lens (η 1 and η 2) meets design load, this is also the key issue of KBA object lens assembling, and the main means of precision optics machining that adopt solve at present.As shown in Figure 3, KBA system is independent focal imaging on meridian and sagitta of arc direction, therefore takes independent mode of assembling to two groups of double mirrors of meridian ellipse and sagittal surface.On meridian direction, 1. stainless steel part processes by precise numerical control machine the P1 and face P2 that appears, thus provide angle benchmark η 1 for first group of double mirror, and object lens M1 and object lens M2 is processed by precision optics and detects, make the central tangent S1 in object lens M1 working reflex face parallel with the object lens M1 back side, the central tangent S2 in object lens M2 working reflex face is parallel with the object lens M2 back side, and object lens M1 is identical with d2 with the thickness d 1 of object lens M2.Object lens M1 and the object lens M2 back side are leaned respectively at stainless steel part face P1 1. and face P2, just indirectly can be ensured the angle of first group of double mirror by angle benchmark η 1.The assembling mode that sagitta of arc direction adopts is identical with it, be only processing stainless steel part 2. angle benchmark be η 2.
1. 2. in optical-mechanical process, there is angle and scale error in object lens M1-object lens M4 and stainless steel part, thus have impact on KBA object lens assembly precision and final image quality, these errors mainly comprise: the size of stainless steel part and angular error, and the depth of parallelism at KBA object lens working reflex face and the back side and thickness error.Wherein angle and parallelism error directly cause angle benchmark η 1 and η 2 off-design value.Stainless steel part scale error and KBA object lens thickness error make the physical location NS2 in object lens working reflex face and ideal position S2 depart from Δ d2 (Fig. 4), cause angular deviation Δ θ 2=Δ d2/D1 equally, make θ 1 no longer equal with θ 2.
There is following technical problem underlying in above-mentioned KBA object lens assembling mode: 1. optics and machining accuracy require high, and mismachining tolerance affects KBA object lens assembly quality after adding up further, and then produce a very large impact KBA system optimal imaging point position.Stainless steel part 1. 2. the angular error of machining require to reach 20 ", the optical manufacturing metrical error of object lens face S1 and S2 and the back side depth of parallelism also requires to reach 20 ".2. 1. stainless steel part must machine on precise numerical control machine, and KBA object lens M1-object lens M4 must be processed by precision optics and detect, and significantly increases element processing cost and difficulty.2. although the position that leans that stainless steel part scale error and KBA object lens thickness error repeatedly finely tune object lens M1 and object lens M2 in can being tested by x-ray imaging is eliminated in stainless steel part position 1..As shown in Figure 5, after fine setting, the position that leans of object lens M2 becomes face NP2 from face P2, if repeatedly fine setting makes that face P2's and face NP2 be spaced apart Δ d2, now can eliminate above-mentioned two kinds of sizes and thickness error.But in fact still there is certain accuracy requirement to optics and machining.Meanwhile, this step just can only be completed by x-ray imaging experiment repeatedly, significantly increases object lens assembling and debugs experimental period.
Summary of the invention
Object of the present invention is exactly to overcome the defect and the X ray KBA micro imaging system that provides a kind of precision high, easy to assembly that above-mentioned prior art exists.
Object of the present invention can be achieved through the following technical solutions:
A kind of X ray KBA micro imaging system, this system comprises object lens M1, object lens M2, object lens M3, object lens M4, optical prism block N1 and optical prism block N2, and the object lens M1 wherein on meridian direction and the working reflex face of object lens M2 lean has angle η at optical prism block N1
1two adjacent surface T
1face and T
2on face, the object lens M3 on sagitta of arc direction and the working reflex face of object lens M4 lean has angle η at optical prism block N2
2two adjacent surface T
3face and T
4on face.
Described angle η
1and η
2identical with the Theoretical Design value of KBA system two groups of double mirror angles.
Described optical prism block N1 has angle η
1two adjacent surface T
1face and T
2the length in face makes X ray incide T
1grazing angle θ during center, face
1with incide T
2grazing angle θ during center, face
2identical.
Described optical prism block N2 has angle η
2two adjacent surface T
3face and T
4the length in face makes X ray incide T
3grazing angle θ during center, face
3with incide T
4grazing angle θ during center, face
4identical.
Described optical prism block N1 offers through T
1face and T
2the rectangular channel in face, described optical prism block N2 offers through T
3face and T
4the rectangular channel in face, described rectangular channel is as the imaging band of KBA micro imaging system.
The above-mentioned this precision with the optical prism block X ray KBA micro imaging system that is benchmark is determined by the machining precision of optical prism block completely.
Compared with prior art, the present invention has the following advantages:
(1) X ray KBA micro imaging system of the present invention directly ensures the angle of KBA system two groups of double mirrors by optical prism block, the angle machining precision of optical prism block N1 and optical prism block N2 directly determines KBA object lens assembly precision, avoid the angular error that exists of existing KBA object lens assembling mode to add up problem, namely 5 are better than by the angle precision of the optical prism block of ordinary optical processing preparation ", therefore present invention achieves the high precision assembling of KBA object lens.
(2) X ray KBA micro imaging system of the present invention passes through the T of design and control both optical prism block
1face and T
2face, T
3face and T
4the length in face, makes X ray incide T
1grazing angle θ during center, face
1with incide T
2grazing angle θ during center, face
2identical, X ray incides T
3grazing angle θ during center, face
3with incide T
4grazing angle θ during center, face
4identical.Its actual assembly precision depends on T
1face-T
4the dimensional accuracy in face, with object lens at T
1face-T
4the position that leans in face has nothing to do, and avoids the existing KBA object lens assembling stainless steel part scale error that exists of mode and the cumulative problem of KBA object lens thickness error.Can reach 0.1mm by the dimensional accuracy of optical prism block of ordinary optical processing preparation, there is not existing KBA object lens assembling mode needs repeatedly to finely tune object lens and leans the problem that position just can complete object lens assembling.
(3) X ray KBA micro imaging system of the present invention the first prism block of only needing ordinary optical to process and the second prism block, accuracy requirement is not had to the depth of parallelism of KBA object lens working reflex face and side and thickness, the stainless steel part simultaneously no longer needing precise numerical control machine to process, therefore significantly reduce the optics of KBA system and the difficulty of processing of mechanical organ and cost and object lens assembly difficulty, and then realize the high precision assembling of KBA object lens.
Accompanying drawing explanation
Fig. 1 is the light channel structure schematic diagram of X ray KBA micro imaging system;
Fig. 2 is X ray KBA micro imaging system objective lens arrangement at the projection view in meridian and sagitta of arc direction;
Fig. 3 is the schematic diagram that existing employing precision optics machining mode completes the assembling of KBA system object lens;
Fig. 4 is the schematic diagram that stainless steel part scale error and KBA object lens thickness error cause grazing angle deviation;
Fig. 5 leans at stainless steel part the schematic diagram that the grazing angle deviation that stainless steel part scale error and KBA object lens thickness error cause is eliminated in position by fine setting object lens;
Fig. 6 is X ray KBA micro imaging system schematic diagram of the present invention;
Fig. 7 is the structural representation of optical prism block N1;
Fig. 8 is the main TV structure schematic diagram of four pieces of KBA object lens;
Fig. 9 is the plan structure schematic diagram of four pieces of KBA object lens;
Perspective view after Figure 10 object lens M1 and object lens M2 assembles;
Plan structure schematic diagram after Figure 11 object lens M1 and object lens M2 assembles;
The KBA objective system structural representation that Figure 12 embodiment 1 utilizes optical prism block N1 and optical prism block N2 finally to obtain.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment 1
The present embodiment is for completing the object lens assembling of the X ray KBA micro imaging system of initial structure parameter as shown in table 1.Wherein d
1-d
4be respectively four pieces of object lens M1-object lens M4 long along the mirror on optical axis direction.In order to reduce costs, the present embodiment four pieces of object lens M1-object lens M4 used are identical, and structure is as shown in Fig. 8 ~ Fig. 9, and surperficial bore and thickness are respectively 20mm × 10mm and 10mm, and surfaceness is 0.2nm.The KBA object lens assembling of the present embodiment does not use KBA object lens bottom surface, does not therefore have accuracy requirement to the depth of parallelism of KBA object lens working reflex face and bottom surface and angle.
The structure of the present embodiment optical prism block N1 as shown in Figure 7, now leans at face T
1and T
2on object lens M1 and the angle of object lens M2 be 2.4 °, center grazing angle θ
1and θ
2be 1.2 °.The object lens assembling scheme of X ray KBA micro imaging system of the present invention is to the T of optical prism block N1
1and T
2the angle in face and size have optical manufacturing accuracy requirement.In the present embodiment, T
1and T
2angle and the angle precision thereof in face are respectively η
1=2.4 ° and Δ η
1=0.001 °, (3.6 ") cause the deviation delta θ of grazing angle to 0.001 ° of angle precision
11=Δ θ
21=Δ η
1/ 2=1.8 ".Face T
1and T
2dimensional accuracy be 0.1mm, cause face T
1central point is 0.1mm × sin (1.2 °)=2.1 μm in the vertical direction with the side-play amount of Theoretical Design value, this side-play amount and T
2the angular deviation of face central point is Δ θ
12=2.1 μm/15mm=28.8 ".Above-mentioned two kinds of deviation sum Δ θ
1=Δ θ
11+ Δ θ
12=30.6 ", the bias of corresponding object space central vision is only u
1(33.48 ")=18.8 μm, this bias is very slight relative to the impact of KBA system the millimeter even apparent field of centimetres for × sin.Which illustrate X ray KBA micro imaging system object lens assembly method of the present invention in theoretical and technical feasibility.On meridian direction, KBA object lens wiring layout as shown in Figure 10, Figure 11: first with epoxy resin, the optical prism block N1 back side is solidificated in the side that fixture (1) has fixed orifice; Then object lens M1 and object lens M2 is placed by diagram respectively, working reflex face respectively with the T of optical prism block N1
1and T
2face contacts, and makes one lateral edges and optical prism block N1 justify align; Precession elasticity bulb stopper makes object lens M1 and object lens M2 lean T at optical prism block N1
1and T
2on face, elasticity bulb stopper is adopted to avoid the damage of rigid fashion of extrusion to object lens M1 and object lens M2 reflecting surface.
The structure of optical prism block N2 is similar to optical prism block N1, leans at face T
3and T
4on object lens M3 and the angle of object lens M4 be 3.03 °, center grazing angle θ
1and θ
2be 1.515 °.The object lens assembling scheme of X ray KBA micro imaging system of the present invention is to the T of optical prism block N2
3and T
4the angle in face and size have optical manufacturing accuracy requirement.In the present embodiment, T
3and T
4angle and the angle precision thereof in face are respectively η
2=3.03 ° and Δ η
2=0.001 °, (3.6 ") cause grazing angle deviation delta θ to 0.001 ° of angle precision
31=Δ θ
41=Δ η
2/ 2=1.8 ".The dimensional accuracy of adjacent surface is 0.1mm, causes T
3face central point in the vertical direction with design load side-play amount 0.1mm × sin (1.515 °)=2.6 μm, corresponding and T
4face central point angular deviation is Δ θ
32=0.26 μm/15mm=35.8 ".Above-mentioned two kinds of deviation sum Δ θ
3=Δ θ
31+ Δ θ
32=37.6 ", the bias of corresponding object space central vision is only u
2(37.6 ")=26 μm, this bias is very slight relative to the impact of KBA system the millimeter even apparent field of centimetres for × sin.Which illustrate X ray KBA micro imaging system object lens assembly method of the present invention in theoretical and technical feasibility.KBA object lens installation step on sagitta of arc direction: first with epoxy resin, the optical prism block N2 back side is solidificated on fixture (2); Then object lens M3 and object lens M4 is placed by diagram respectively, working reflex face respectively with the T of optical prism block N2
3and T
4face contacts, and makes one lateral edges and optical prism block N2 justify align; Precession elasticity bulb stopper makes object lens M3 and object lens M4 lean T at optical prism block N2
3and T
4on face, elasticity bulb stopper is adopted to avoid the damage of rigid fashion of extrusion to object lens M3 and object lens M4 reflecting surface.
After above-mentioned steps completes, by fixed orifice, fixture (1) and fixture (2) are connected on same object lens base plate with screw, thus obtaining the object lens assembling of the X ray KBA micro imaging system of the present embodiment, final objective lens arrangement is as shown in figure 12.
Table 1
Embodiment 2
A kind of X ray KBA micro imaging system, as shown in figure 12, this system comprises object lens M1, object lens M2, object lens M3, object lens M4, optical prism block N1 and optical prism block N2, and the object lens M1 wherein on meridian direction and the working reflex face of object lens M2 lean has angle η at optical prism block N1
1two adjacent surface T
1face and T
2on face, the object lens M3 on sagitta of arc direction and the working reflex face of object lens M4 lean has angle η at optical prism block N2
2two adjacent surface T
3face and T
4on face.Angle η
1and η
2identical with the Theoretical Design value of KBA system two groups of double mirror angles.Optical prism block N1 has angle η
1two adjacent surface T
1face and T
2the length in face makes X ray incide T
1grazing angle θ during center, face
1with incide T
2grazing angle θ during center, face
2identical.Optical prism block N2 has angle η
2two adjacent surface T
3face and T
4the length in face makes X ray incide T
3grazing angle θ during center, face
3with incide T
4grazing angle θ during center, face
4identical.Optical prism block N1 offers through T
1face and T
2the rectangular channel in face, optical prism block N2 offers through T
3face and T
4the rectangular channel in face, rectangular channel is as the imaging band of KBA micro imaging system.The above-mentioned this precision with the optical prism block X ray KBA micro imaging system that is benchmark is determined by the machining precision of optical prism block completely.
Claims (2)
1. an X ray KBA micro imaging system, it is characterized in that, this system comprises object lens M1, object lens M2, object lens M3, object lens M4, optical prism block N1 and optical prism block N2, and the object lens M1 wherein on meridian direction and the working reflex face of object lens M2 lean has angle η at optical prism block N1
1two adjacent surface T
1face and T
2on face, the object lens M3 on sagitta of arc direction and the working reflex face of object lens M4 lean has angle η at optical prism block N2
2two adjacent surface T
3face and T
4on face;
Described angle η
1and η
2identical with the Theoretical Design value of X ray KBA micro imaging system two groups of double mirror angles;
Described optical prism block N1 has angle η
1two adjacent surface T
1face and T
2the length in face makes X ray incide T
1grazing angle θ during center, face
1with incide T
2grazing angle θ during center, face
2identical;
Described optical prism block N2 has angle η
2two adjacent surface T
3face and T
4the length in face makes X ray incide T
3grazing angle θ during center, face
3with incide T
4grazing angle θ during center, face
4identical.
2. a kind of X ray KBA micro imaging system according to claim 1, is characterized in that, described optical prism block N1 offers through T
1face and T
2the rectangular channel in face, described optical prism block N2 offers through T
3face and T
4the rectangular channel in face, described rectangular channel is as the imaging band of KBA micro imaging system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210424817.2A CN102945688B (en) | 2012-10-30 | 2012-10-30 | X-ray KBA microscopic imaging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210424817.2A CN102945688B (en) | 2012-10-30 | 2012-10-30 | X-ray KBA microscopic imaging system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102945688A CN102945688A (en) | 2013-02-27 |
| CN102945688B true CN102945688B (en) | 2015-02-18 |
Family
ID=47728623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210424817.2A Active CN102945688B (en) | 2012-10-30 | 2012-10-30 | X-ray KBA microscopic imaging system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102945688B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103235398A (en) * | 2013-04-17 | 2013-08-07 | 同济大学 | Multichannel normal-incidence electrode ultraviolet imaging objective lens and application thereof |
| CN103234634B (en) * | 2013-04-17 | 2015-11-04 | 同济大学 | A kind of imaging system and application thereof realizing multiple energy point spectrum resolution on extreme ultraviolet band |
| CN103234987B (en) * | 2013-04-17 | 2015-06-03 | 同济大学 | Time-resolved multicolor single-energy X-ray imaging spectrometer |
| CN104582225B (en) * | 2013-10-10 | 2017-04-12 | 同济大学 | X-ray optical structure for space-time spectrum diagnosis of laser plasma |
| CN106291898A (en) * | 2016-08-26 | 2017-01-04 | 鲁东大学 | A kind of glancing incidence KBA microscopic system for ICF |
| CN108982553B (en) * | 2018-04-26 | 2021-03-26 | 同济大学 | X-ray pinhole array camera with gamma radiation shielding effect and assembling method thereof |
| CN113112494A (en) * | 2021-04-29 | 2021-07-13 | 同济大学 | Three-dimensional collaborative diagnosis device for image with ICF hot spot spatial morphology evolving along with time |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2982921B2 (en) * | 1991-06-06 | 1999-11-29 | 日本電信電話株式会社 | X-ray mirror and its manufacturing method |
-
2012
- 2012-10-30 CN CN201210424817.2A patent/CN102945688B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
Non-Patent Citations (2)
| Title |
|---|
| KBAX射线显微镜装调方法研究;赵玲玲等;《强激光与粒子束》;20090331;第21卷(第3期);第369-372页 * |
| 非共轴掠入射KB与KBAX射线显微镜的成像特性分析;赵玲玲等;《应用光学》;20081130;第29卷(第6期);第884-888页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102945688A (en) | 2013-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102945688B (en) | X-ray KBA microscopic imaging system | |
| CN101858735B (en) | Large-caliber off-axis non-spherical measuring and calibration system | |
| CN102937738B (en) | System and method for achieving accurate positioning of off-axis aspheric surface reflector | |
| CN103064195B (en) | Adjustment method of non-coaxial optical system | |
| CN104075881A (en) | Parallel error measuring method suitable for multiband common-path telescope | |
| CN104391366A (en) | Terahertz-band off-axis three-reflector system and debugging method thereof | |
| CN110455226B (en) | Calibration system and method for laser collimation transceiving integrated straightness measurement | |
| CN105928619A (en) | Splicing grating splicing error detection system and splicing error correction method | |
| CN109991712B (en) | U-shaped folded light path adjusting device and method | |
| CN102717305A (en) | In-situ measurement method for optical free-form surface | |
| CN103487911B (en) | From axle optical element precision positioning adjusting gear | |
| CN109324382B (en) | Theodolite-based high-precision plane mirror adjusting method | |
| CN101477236B (en) | interferometer primary mirror adjusting mechanism and preparation method thereof | |
| CN103901593A (en) | Off-axis unblocked extreme ultraviolet lithography objective lens | |
| CN202916479U (en) | System for realizing accurate positioning of optical axis of off-axis non-spherical reflector | |
| CN203069863U (en) | Adjusting device applied to coincidence of image point in prism reflector and reflector reference point | |
| Zheng et al. | Effect of detector installation error on the measurement accuracy of multi-degree-of-freedom geometric errors of a linear axis | |
| CN102279473B (en) | Optical system of star simulator | |
| CN2935182Y (en) | Pentagonal prism group with high rotating precision | |
| CN202916480U (en) | System for realizing accurate positioning of curvature radius center of off-axis spherical reflector | |
| CN201247346Y (en) | Apparatus for regulating light path | |
| CN205374850U (en) | Transmission -type photoelectricity centering appearance | |
| CN202747999U (en) | Lens carrying out interference detection to cylindrical surface | |
| CN103542790A (en) | System capable of implementing accurate measurement on off-axis magnitude of off-axis reflector and method capable of implementing accurate measurement on off-axis magnitude of off-axis reflector | |
| CN202815297U (en) | Air medium split type three-dimensional right angle head |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |