CN202916480U - System for realizing accurate positioning of curvature radius center of off-axis spherical reflector - Google Patents

System for realizing accurate positioning of curvature radius center of off-axis spherical reflector Download PDF

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Publication number
CN202916480U
CN202916480U CN201220617048.3U CN201220617048U CN202916480U CN 202916480 U CN202916480 U CN 202916480U CN 201220617048 U CN201220617048 U CN 201220617048U CN 202916480 U CN202916480 U CN 202916480U
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China
Prior art keywords
graticule
rotating shaft
spherical reflector
curvature radius
high accuracy
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Expired - Fee Related
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CN201220617048.3U
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Chinese (zh)
Inventor
张学敏
魏儒义
闫肃
段嘉友
李华
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Priority to CN201220617048.3U priority Critical patent/CN202916480U/en
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Abstract

The utility model relates to a system for realizing accurate positioning of the curvature radius center of an off-axis spherical reflector. The system for realizing accurate positioning of the curvature radius center of the off-axis spherical reflector includes a high-precision flat board, a rotary shaft, a reticle containing a reticule and a high-precision microscope. An inner hole is arranged in the high-precision flat board. The rotary shaft is arranged in the inner hole of the high-precision flat board. The reticle containing the reticule is arranged on the rotary shaft vertically and rotates freely along with the rotary shaft in the inner hole of the high-precision flat board. The high-precision microscope and the reticle containing the reticule are arranged in a manner of sharing the same optical axis. The system for realizing accurate positioning of the curvature radius center of the off-axis spherical reflector provided by the utility model is high in positioning precision, easy to adjust and convenient to operate.

Description

Realize off-axis curvature radius of spherical reflector center Precise Position System
Technical field
The utility model belongs to optical precision and debugs the field, relates to a kind of mirror curvature center of radius Precise Position System, relates in particular to a kind of realization off-axis curvature radius of spherical reflector center Precise Position System.
Background technology
The diversified development of optical system develops into off-axis optical system from traditional coaxial optical system, more till now off-axis optical system.The day by day complexity of optical system form, so that the resetting difficulty increase, for partial optical system, because the singularity of its system, be that optical element in the optical system does not have common optical axis, so that utilize the Method of Adjustment of conventional can not realize effectively debuging of this type systematic.And because the off-axis optical element does not have the optical axis center part, therefore utilize the method for traditional contact interval measurement can't realize the accurate location of each catoptron relative position, thereby can't guarantee the final image quality of focal length and system of system.In addition, because off-axis optics system optics quantity is more, it is too many to adjust variable when the method for utilizing area of computer aided to debug is assisted adjustment to system, reduces so that adjust validity, can not realize the effective location of each off-axis spherical reflector in the off-axis optics.
The utility model content
In order to solve the above-mentioned technical matters that exists in the background technology, the utility model provide a kind of bearing accuracy high, be easy to adjust and the realization off-axis curvature radius of spherical reflector center Precise Position System of convenient operation.
Technical solution of the present utility model is: the utility model provides a kind of realization off-axis curvature radius of spherical reflector center Precise Position System, and its special character is: described realization off-axis curvature radius of spherical reflector center Precise Position System comprises High Accuracy Flat, rotating shaft, contains graticule and the high precision microscope of crosshair; Be provided with endoporus on the described High Accuracy Flat; Described rotating shaft is arranged in the endoporus of High Accuracy Flat; The described graticule that contains crosshair vertically is arranged in the rotating shaft and with rotating shaft and carries out free rotation in the endoporus of High Accuracy Flat; The described high precision microscope depth of field is little, distinguishablely goes out the small amount of movement of graticule, and resolution is better than 0.01mm, and with the graticule that contains crosshair with the optical axis setting.
Above-mentioned rotating shaft is T-shaped, and described T-shaped rotating shaft comprises horizontal segment and vertical section of linking to each other with horizontal segment; In the described vertical section endoporus that is arranged on High Accuracy Flat; The described graticule that contains crosshair vertically is arranged on the horizontal segment of T-shaped rotating shaft.
Gap between above-mentioned T-shaped vertical section and the High Accuracy Flat endoporus is less than 0.01mm.
The above-mentioned graticule that contains crosshair is single graticule or combination graticule.
The combinations thereof graticule comprise the graticule that contains crosshair and with the sheet glass of the equal size of graticule; Described graticule and the sheet glass that contains crosshair fits together.
Said system also comprises the base that is arranged between High Accuracy Flat and the rotating shaft; Described base stretches in the endoporus of High Accuracy Flat and with High Accuracy Flat and is fixed together; Described rotating shaft is arranged in the base and carries out the gap less than the rotation of 0.01mm in base.
Said system also comprises the graduation sheet frame; Described graduation sheet frame vertically is arranged on the horizontal segment of rotating shaft; The described graticule that contains crosshair is embedded in the graduation sheet frame.
Said system also comprises the web joint that is horizontally set in the rotating shaft; Described graduation sheet frame is arranged on the web joint.
The utility model has the advantages that:
The utility model provides a kind of realization off-axis curvature radius of spherical reflector center Precise Position System, accurately locates by radius-of-curvature centralized positioning auxiliary mould and the autocollimation principle realization radius-of-curvature center of design.For radius-of-curvature center that can fine each spherical reflector of assurance, designed High Accuracy Flat according to the light path trend, this flat board is processed by high-accuracy mechanical, flatness is better than 0.005mm, and guarantee center, hole and spherical reflector on this High Accuracy Flat radius-of-curvature Center position the two be strictly to overlap, precision is up to 0.01mm.Whole fixture system provided by the utility model overlaps with the high precision of the turning axle of dull and stereotyped endoporus as long as realize graticule center of reticule line, just can find the visible centre of sphere of each off-axis spherical reflector, thereby utilize the autocollimation principle, realize the accurate location at catoptron center.After the utility model utilizes radius-of-curvature centralized positioning auxiliary mould to realize that the radius-of-curvature center of spherical reflector is accurately located, need to adjust according to autocollimatic principle the position of spherical reflector, so that the radius-of-curvature center of spherical reflector strictly overlaps with the radius-of-curvature center that positioning assisting tooling is determined.According to optical principle, if the differentiation plate of the cross in the radius-of-curvature centralized positioning frock and curvature radius of spherical reflector center superposition, this moment, the cross-graduation plate similarly was what overlap with its autocollimatic that becomes through spherical reflector.Simultaneously, the utility model can not effectively be determined this technical matters of center offset in order to solve monolithic cross-graduation plate, the combination graticule that employing is made of single graticule and equal big or small sheet glass, thereby crosshair is placed on the center of combination graticule, behind Rotate 180 °, does not have optical path difference.The utility model has solved in the prior art realizes low, complicated this problem of adjustment process of off-axis curvature radius of spherical reflector centralized positioning precision, has the bearing accuracy height, is easy to the advantage such as adjustment.
Description of drawings
Fig. 1 a is based on system described in the utility model synoptic diagram is adjusted at concave spherical mirror radius-of-curvature center;
Fig. 1 b is based on system described in the utility model synoptic diagram is adjusted at protruding spherical mirror radius-of-curvature center;
Fig. 2 is the general structure synoptic diagram of radius-of-curvature centralized positioning auxiliary mould provided by the utility model;
Fig. 3 a is the structural representation of the flat board that adopts of the utility model;
Fig. 3 b is that the A-A of Fig. 3 a is to structural representation;
Fig. 3 c is that the B-B of Fig. 3 a is to structural representation;
Fig. 3 d is the backsight structural representation of Fig. 3 a;
Fig. 4 is the structural representation of the base that adopts of the utility model;
Fig. 5 a is the structural representation of the rotary shaft rack that adopts of the utility model;
Fig. 5 b is the side-looking structural representation of Fig. 5 a;
Fig. 6 a is the structural representation of the web joint that adopts of the utility model;
Fig. 6 b is the side-looking structural representation of Fig. 6 a;
Fig. 7 a is the structural representation of the graduation sheet frame that adopts of the utility model;
Fig. 7 b is the side-looking structural representation of Fig. 7 a;
Fig. 8 a1 is the structural representation of the single graticule that adopts of the utility model;
Fig. 8 a2 is the side-looking structural representation of Fig. 8 a1;
Fig. 8 b1 is the structural representation of the combination graticule that adopts of the utility model;
Fig. 8 b2 is the side-looking structural representation of Fig. 8 b1;
Wherein:
The 1-High Accuracy Flat; The 2-base; The 3-rotary shaft rack; The 4-web joint; 5-graduation sheet frame; 6-high precision microscope.
Embodiment
Referring to Fig. 2, the utility model provides a kind of off-axis curvature radius of spherical reflector center Precise Position System of realizing to comprise High Accuracy Flat, rotating shaft, contain graticule and the high precision microscope of crosshair; Be provided with endoporus on the High Accuracy Flat; Rotating shaft is arranged in the endoporus of High Accuracy Flat; The graticule that contains crosshair vertically is arranged in the rotating shaft and with rotating shaft and carries out free rotation in the endoporus of High Accuracy Flat; The high precision microscope with contain the graticule of crosshair with the optical axis setting.It is T-shaped that rotating shaft is, and T-shaped rotating shaft comprises horizontal segment and vertical section of linking to each other with horizontal segment; Vertically section is arranged in the endoporus of High Accuracy Flat; The graticule that contains crosshair vertically is arranged on the horizontal segment of T-shaped rotating shaft.Gap between T-shaped vertical section and the High Accuracy Flat endoporus is less than 0.01mm.The graticule that contains crosshair is single graticule or combination graticule.The combination graticule comprise the graticule that contains crosshair and with the sheet glass of the equal size of graticule; The graticule and the sheet glass that contain crosshair fit together.System also comprises the base that is arranged between High Accuracy Flat and the rotating shaft; Base stretches in the endoporus of High Accuracy Flat and with High Accuracy Flat and is fixed together; Rotating shaft is arranged in the base and carries out the gap less than the rotation of 0.01mm in base.System also comprises the graduation sheet frame; The graduation sheet frame vertically is arranged on the horizontal segment of rotating shaft; The graticule that contains crosshair is embedded in the graduation sheet frame.System also comprises the web joint that is horizontally set in the rotating shaft; The graduation sheet frame is arranged on the web joint.
Referring to Fig. 3 a, Fig. 3 b, Fig. 3 c and Fig. 3 d, for radius-of-curvature center that can fine each spherical reflector of assurance, designed High Accuracy Flat 1 according to the light path trend, process by high-accuracy mechanical, guarantee center, hole and spherical reflector on this High Accuracy Flat 1 radius-of-curvature Center position the two be strictly to overlap, precision is 0.01mm.
Referring to Fig. 4, the cylindrical of base 2 grinds with the endoporus high precision on the High Accuracy Flat 1 and cooperates, and guarantees tolerance clearance less than 0.01mm, and is connected with dull and stereotyped by screw.
Referring to Fig. 5 a, Fig. 5 b, Fig. 6 a and Fig. 6 b, rotary shaft rack 3 is transition tool with web joint 4, the cylindrical of rotary shaft rack 3 grinds with the endoporus high precision on the base 2 and cooperates, guarantee that tolerance clearance is less than 0.01mm, and be connected the location with web joint 4 by screw, and connecting flat board has the translation of 0.5mm to adjust surplus with respect to rotary shaft rack in X, Y-direction, is used for adjusting the graticule center and overlaps with the high precision at dull and stereotyped endoporus center.
Referring to Fig. 7 a and Fig. 7 b, in the graduation sheet frame 5 graticule is housed, and is connected the location with web joint by screw.Whole fixture system overlaps with the high precision of the turning axle of dull and stereotyped endoporus as long as realize graticule center of reticule line, just can find the visible centre of sphere of each off-axis spherical reflector, thereby utilize the autocollimation principle, realize the accurate location at catoptron center, bearing accuracy can reach 0.01mm.
In order to realize that accurately the graticule center of reticule overlaps with the high precision at dull and stereotyped endoporus center, the method for taking to rotate alignment is adjusted.Concrete steps are:
1, adjusts the position of high precision microscope 6, so that aiming graticule center, microscopic fields of view center;
2, graticule Rotate 180 °, realize 180 ° of accurately rotations of graticule by auto-collimation collimator, observe the variable quantity of its center in microscope behind the graticule Rotate 180 °, directions X is adjusted 1/2 of variable quantity, be capable of regulating repeatedly several times so that graticule around the center of turning axle directions X variable quantity<0.01mm;
3, graticule half-twist is adjusted the microscopical position of high precision, so that aiming graticule center, microscopic fields of view center;
4, graticule Rotate 180 °, realize 180 ° of accurately rotations of graticule by auto-collimation collimator, observe the variable quantity of its center in microscope behind the graticule Rotate 180 °, Y-direction is adjusted 1/2 of variable quantity, be capable of regulating repeatedly several times so that graticule around the center of turning axle Y-direction variable quantity<0.01mm;
5, through multiple reversal polyphony whole assurance X, Y-direction Rotate 180 ° graticule center variable quantity<0.01mm, then can think graticule center and the error<0.01mm of rotating shaft center.
Referring to Fig. 8 a1 and Fig. 8 a2, single cross-graduation plate is behind Rotate 180 °, can produce certain optical path difference, the optical path difference size equals the thickness of graticule, so that behind the graticule Rotate 180 ° the variable quantity of its center in microscope be optical path difference and center offset and, can not effectively determine center offset.In order to address this problem, designed the combination graticule, referring to Fig. 8 b1 and Fig. 8 b2, this combination graticule is made of the sheet glass of single graticule and equal size, thereby crosshair is placed on the center of combination graticule, behind Rotate 180 °, does not have optical path difference.
After utilizing radius-of-curvature centralized positioning auxiliary mould to realize that the radius-of-curvature center of spherical reflector is accurately located, need to adjust according to autocollimatic principle the position of spherical reflector, so that the radius-of-curvature center of spherical reflector strictly overlaps with the radius-of-curvature center that positioning assisting tooling is determined.According to optical principle, if the differentiation plate of the cross in the radius-of-curvature centralized positioning frock and curvature radius of spherical reflector center superposition, this moment, the cross-graduation plate similarly was what overlap with its autocollimatic that becomes through spherical reflector.Fig. 1 a and Fig. 1 b are respectively concave spherical mirror and synoptic diagram is adjusted at protruding spherical mirror radius-of-curvature center.
Set-up procedure is as follows:
1, utilizes internal focusing telescope or centerscope, make the graticule center of reticule be imaged on the instrument field of view center; 2, illuminate graticule; 3, transfer the locus of worker's spherical mirror, make autocollimatic image position that the graticule crosshair becomes through spherical mirror in the field of view center of internal focusing telescope; 4, carefully adjustment autocollimatic picture and graticule are clear simultaneously, in order to improve precision, can use the high magnification instrument to monitor, wish that graticule and autocollimatic are as coplanarity<0.02mm.Through above adjustment, realized the accurate location at off-axis curvature radius of spherical reflector center.

Claims (8)

1. realize off-axis curvature radius of spherical reflector center Precise Position System for one kind, it is characterized in that: described system comprises High Accuracy Flat, rotating shaft, contains graticule and the high precision microscope of crosshair; Be provided with endoporus on the described High Accuracy Flat; Described rotating shaft is arranged in the endoporus of High Accuracy Flat; The described graticule that contains crosshair vertically is arranged in the rotating shaft and with rotating shaft and carries out free rotation in the endoporus of High Accuracy Flat; Described high precision microscope with contain the graticule of crosshair with the optical axis setting.
2. realization off-axis curvature radius of spherical reflector according to claim 1 center Precise Position System, it is characterized in that: described rotating shaft is T-shaped, and described T-shaped rotating shaft comprises horizontal segment and vertical section of linking to each other with horizontal segment; In the described vertical section endoporus that is arranged on High Accuracy Flat; The described graticule that contains crosshair vertically is arranged on the horizontal segment of T-shaped rotating shaft.
3. realization off-axis curvature radius of spherical reflector according to claim 2 center Precise Position System is characterized in that: the gap between described T-shaped vertical section and the High Accuracy Flat endoporus is less than 0.01mm.
4. realization off-axis curvature radius of spherical reflector according to claim 3 center Precise Position System, it is characterized in that: the described graticule that contains crosshair is single graticule or combination graticule.
5. realization off-axis curvature radius of spherical reflector according to claim 4 center Precise Position System is characterized in that: described combination graticule comprise the graticule that contains crosshair and with the sheet glass of the equal size of graticule; Described graticule and the sheet glass that contains crosshair fits together.
6. according to claim 1 and 2 or 3 or 4 or 5 described realization off-axis curvature radius of spherical reflector center Precise Position Systems, it is characterized in that: described system also comprises the base that is arranged between High Accuracy Flat and the rotating shaft; Described base stretches in the endoporus of High Accuracy Flat and with High Accuracy Flat and is fixed together; Described rotating shaft is arranged in the base and carries out the gap less than the rotation of 0.01mm in base.
7. realization off-axis curvature radius of spherical reflector according to claim 6 center Precise Position System, it is characterized in that: described system also comprises the graduation sheet frame; Described graduation sheet frame vertically is arranged on the horizontal segment of rotating shaft; The described graticule that contains crosshair is embedded in the graduation sheet frame.
8. realization off-axis curvature radius of spherical reflector according to claim 7 center Precise Position System, it is characterized in that: described system also comprises the web joint that is horizontally set in the rotating shaft; Described graduation sheet frame is arranged on the web joint.
CN201220617048.3U 2012-11-20 2012-11-20 System for realizing accurate positioning of curvature radius center of off-axis spherical reflector Expired - Fee Related CN202916480U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102944923A (en) * 2012-11-20 2013-02-27 中国科学院西安光学精密机械研究所 System and method for accurately positioning center of curvature radius of off-axis spherical reflector
CN107036791A (en) * 2017-06-02 2017-08-11 西安北方光电科技防务有限公司 Measure the device and method of non-coaxial optical system focal length, rear cut-off distance and resolution
CN114326138A (en) * 2022-01-05 2022-04-12 中国工程物理研究院激光聚变研究中心 High-precision rotating table optical axis assembling and adjusting method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102944923A (en) * 2012-11-20 2013-02-27 中国科学院西安光学精密机械研究所 System and method for accurately positioning center of curvature radius of off-axis spherical reflector
CN102944923B (en) * 2012-11-20 2014-10-29 中国科学院西安光学精密机械研究所 System and method for accurately positioning center of curvature radius of off-axis spherical reflector
CN107036791A (en) * 2017-06-02 2017-08-11 西安北方光电科技防务有限公司 Measure the device and method of non-coaxial optical system focal length, rear cut-off distance and resolution
CN107036791B (en) * 2017-06-02 2024-02-09 西安北方光电科技防务有限公司 Device and method for measuring focal length, back intercept and discrimination of different coaxial optical system
CN114326138A (en) * 2022-01-05 2022-04-12 中国工程物理研究院激光聚变研究中心 High-precision rotating table optical axis assembling and adjusting method
CN114326138B (en) * 2022-01-05 2023-06-13 中国工程物理研究院激光聚变研究中心 Optical axis adjustment method for high-precision rotary table

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Granted publication date: 20130501

Termination date: 20151120

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