CN109324382B - Theodolite-based high-precision plane mirror adjusting method - Google Patents
Theodolite-based high-precision plane mirror adjusting method Download PDFInfo
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- CN109324382B CN109324382B CN201811092001.8A CN201811092001A CN109324382B CN 109324382 B CN109324382 B CN 109324382B CN 201811092001 A CN201811092001 A CN 201811092001A CN 109324382 B CN109324382 B CN 109324382B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Abstract
The invention discloses a theodolite-based high-precision plane reflector adjusting method, which realizes high-precision adjustment of a reflector by removing parallelism errors of front and rear surfaces of the reflector. The method is realized through a theodolite, firstly, the theodolite leads out the optical axis of a lens, secondly, the included angle between the two surfaces is tested through a method that the theodolite respectively auto-collimates the front surface and the back surface of a reflector, the angle between the auto-collimation image of a reflecting surface and the optical axis is adjusted according to the spatial position relation, and the adjustment error caused by the included angle on the surface of the reflector is removed.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a theodolite-based high-precision plane mirror adjusting method.
Background
The photoelectric system is a comprehensive optical instrument integrating optical, mechanical, electronic, servo control, information and computer multidisciplinary technologies, and is widely developed and applied in the fields of national defense, military industry, aviation, aerospace and the like. With the development of the photoelectric technology, the requirements on system design and adjustment accuracy are gradually improved, the angle of a plane reflector is often required to be accurately controlled in the adjustment process of an optical system, the angle of the reflector is accurately adjusted through a theodolite in the current common method, but in the actual adjustment process, due to the blocking of devices such as structures and the like, the reflecting surfaces of some reflectors cannot be directly aimed through the theodolite, so that the back of the reflector is generally aimed through the theodolite, and the normal direction of the back of the reflector is replaced by the normal direction of the back of the reflector. As shown in fig. 1, the theodolite 3 leads the optical axis direction of the lens 1 out to the theodolite, then a reflector 2 is placed to make the light return according to the original path, the front and back surfaces of the reflecting surface are not parallel, the included angle is a, the reflector is adjusted by the method that the theodolite 3 aims at the back surface of the reflector, the optical axis of the lens 1 is reflected by the reflector 2 and then forms an included angle of 2a with the original optical axis, the processing error of the front and back surfaces of the reflector with higher precision is about 10 seconds, and the error generated by the surface of the reflector is adjusted by the method is 20 seconds. For high precision optical systems, this precision is not satisfactory. In order to improve the adjustment precision, the method adopted at present is to improve the processing precision of the reflector, reduce the parallelism error of two surfaces, bring difficulty to processing, and the processing precision can not be infinitely improved, so that the application range of the adjustment method is limited, and the adjustment method can not be applied to a high-precision optical system.
Disclosure of Invention
The technical problem solved by the invention is as follows: the method for adjusting the plane reflector based on the theodolite is characterized in that autocollimation images of the front surface and the rear surface of the reflector are tested through the theodolite on the premise that the parallelism accuracy requirement of the two surfaces of the reflector is not improved, the influence of parallelism errors of the front surface and the rear surface of the reflector on the adjustment accuracy is eliminated according to the included angle relationship of the autocollimation images, and the adjustment accuracy is greatly improved.
The purpose of the invention is realized by the following technical scheme: a theodolite-based high-precision plane mirror adjusting method comprises the following steps:
the method comprises the following steps: adjusting the theodolite to be coaxial with the lens, setting the horizontal reading of the theodolite to be a zero position after adjustment, and setting the optical axis of the theodolite as a second light ray;
step two: the reflector is arranged on the lens, the position of the theodolite is kept still, the rotating theodolite aims at the second surface of the reflector, the auto-collimation light of the theodolite is the third light, the rotation angle c of the theodolite at the moment is recorded,
step three: when the horizontal reading of the theodolite is at a zero position, rotating the theodolite to aim at the first surface of the reflector, taking the auto-collimation light as a first light, and recording the rotating angle d of the theodolite at the moment;
step four: obtaining a refraction angle a of the first light on the second surface of the reflector according to the rotation angle c and the rotation angle d of the theodolite;
step five: when the theodolite and the lens are coaxial, the theodolite is rotated by the rotation angle c ═ a, and then the reflector is rotated, so that the auto-collimation image of the second surface of the reflector in the theodolite is coincided with the cross line of the theodolite, and the normal direction of the first surface of the reflector is parallel to the optical axis of the lens.
In the method for adjusting the high-precision plane mirror based on the theodolite, in the third step, the refraction angle a is obtained by the following formula:
sinb＝n×sina；
where b is c + d, n is the refractive index of the mirror, and b is the incident angle b of the first light ray on the second surface.
In the method for adjusting the high-precision plane mirror based on the theodolite, in the third step, the included angle between the second light ray and the third light ray is equal to the rotation angle c of the theodolite.
In the method for adjusting the high-precision plane mirror based on the theodolite, in the third step, the included angle between the second light ray and the first light ray is equal to the rotation angle d of the theodolite.
Compared with the prior art, the invention has the following beneficial effects:
the optical axis of a lens is led out by a theodolite, the position of the theodolite is fixed, the front surface and the rear surface of a plane reflector are respectively autocollimated, the rotation angle values b and c of the theodolite are recorded, the included angle a between the two surfaces of the reflector is calculated according to the refractive index of the reflector, the autocollimation condition of the optical axis is calculated according to the space position relation, the angle between the autocollimation image of the reflector and the optical axis of an optical system is adjusted to be b-a, the adjustment error caused by the parallelism error of the front surface and the rear surface of the reflector is eliminated, the adjustment accuracy is determined by the measurement accuracy of the theodolite and can reach 2 seconds. Compared with the existing method, the method greatly improves the installation and adjustment precision of the reflector.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic diagram of a prior art setup method for a flat mirror;
FIG. 2 is a schematic diagram illustrating a principle of measuring an included angle between front and rear surfaces of a plane mirror according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a high-precision alignment method for a plane mirror according to an embodiment of the present invention;
fig. 4 is a schematic diagram of another application of the high-precision adjustment method for the plane mirror according to the embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
The embodiment provides a theodolite-based high-precision plane mirror adjusting method, which comprises the following steps:
the method comprises the following steps: adjusting the theodolite 6 to be coaxial with the lens 4, and setting the horizontal reading of the theodolite 6 to be a zero position after adjustment, wherein the optical axis of the theodolite 6 is a second light ray 62;
step two: the reflector 5 is arranged on the lens 4, the installation angle of the reflector is unknown at the moment, the position of the theodolite 6 is kept still, the rotating theodolite 6 aims at the second surface 52 of the reflector 5, the auto-collimation light of the theodolite 6 is a third light 63, the rotation angle c of the theodolite 6 at the moment is recorded,
step three: when the horizontal reading of the theodolite 6 is at a zero position, rotating the theodolite 6 to aim at the first surface 51 of the reflector 5, wherein the auto-collimation light is a first light 61, and recording the rotating angle d of the theodolite 6 at the moment;
step four: obtaining the refraction angle a of the first light ray 61 on the second surface 52 of the reflector 5 according to the rotation angle c and the rotation angle d of the theodolite 6;
step five: when the theodolite 6 and the lens 4 are coaxial, according to a tested refraction angle a and a geometric relation, the surface 51 of the reflector 5 is perpendicular to the optical axis of the lens 4, the rotation angle corresponding to the auto-collimation light 64 of the theodolite 6 is b-a, the rotation angle corresponding to the auto-collimation light 65 of the theodolite 6 is a, the theodolite is rotated to the rotation angle a, and then the reflector 5 is rotated, so that the auto-collimation image of the second surface 52 of the reflector 5 in the theodolite 6 is superposed with the cross line of the theodolite 6, and the normal direction of the first surface 51 of the reflector 5 is parallel to the optical axis of the lens 4; where b is the angle of incidence of light ray 61 at surface 52.
Referring to fig. 2, the adjustment requires that a reflector 5 is installed at the front end of a lens 4, and the light path is required to return according to the original path, but due to structural limitations, the surface 51 of the reflector 5 cannot be directly aimed by the theodolite, the optical axis direction of the lens 4 is as shown by the arrow direction in the figure, the theodolite 6 is adjusted to be coaxial with the lens 4, the horizontal reading of the theodolite 6 is set to be a zero position after the adjustment, and the optical axis of the theodolite 6 is as shown by a light ray 62 in the figure. The reflector 5 is mounted on the lens 4, the position of the theodolite 6 is kept still, the theodolite 6 is rotated (anticlockwise) to aim at the surface 52 of the reflector 5, the auto-collimation light of the theodolite 6 is shown as a light 63 in the figure, the rotation angle c (the included angle between the light 62 and the light 63) of the theodolite 6 at the moment is recorded, the theodolite 6 is rotated (clockwise) to aim at the surface 51 of the reflector 5 in a similar way, the auto-collimation light is shown as a light 61 in the figure, the rotation angle d (the included angle between the light 62 and the light 61) of the theodolite 6 at the moment is recorded, the incident angle b of the light 61 on the surface 52 is known from the geometrical relationship in the figure, the formula b is c + d, and the c + d is known to be a constant through analysis, and the constant corresponds to the included angle a between. At this time, the refraction angle of the light ray 61 on the surface 52 is a, and satisfies the law of refraction sinb ═ n × sina, knowing the refraction index n, and the rotation angles c, d of the theodolite 6, the refraction angle a can be calculated, and according to the trigonometric relationship, the refraction angle a on the surface 52 is equal to the included angle between the two surfaces of the reflector 5. From this the angle between the two surfaces of the mirror 5 can be calculated. Adjusting the reflector 5: according to the geometric relationship in the figure, the condition that the normal direction of the surface 51 is parallel to the optical axis of the lens 4 is that the light ray 61 in the reflector 5 needs to be parallel to the optical axis, so that it can be deduced that the auto-collimation angle c corresponding to the surface 52 needs to satisfy c ═ a, and by adjusting the included angle between the auto-collimation image of the surface 52 of the reflector 5 and the optical axis to a, the normal direction of the surface 51 of the reflector 5 can be ensured to be parallel to the optical axis of the lens 4, so that the emergent light ray of the lens 4 returns according to the original path, the adjustment error caused by the unparallel front and back surfaces of the reflector 5 is eliminated, and the adjustment precision of the reflector 5 is effectively improved.
Referring to fig. 2, the adjustment requires that a reflector 5 is installed at the front end of a lens 4, and the light path is required to return according to the original path, but due to structural limitations, the surface 51 of the reflector 5 cannot be directly aimed by the theodolite, the optical axis direction of the lens 4 is as shown by the arrow direction in the figure, the theodolite 6 is adjusted to be coaxial with the lens 4, the horizontal reading of the theodolite 6 is set to be a zero position after the adjustment, and the optical axis of the theodolite 6 is as shown by a light ray 62 in the figure. The reflector 5 is mounted on the lens 4, at this time, the reflecting surface 51 of the reflector 5 is not perpendicular to the optical axis 62 of the lens 4, the theodolite 6 is kept stationary, the theodolite 6 is rotated (counterclockwise) to aim at the surface 52 of the reflector 5, the auto-collimation light of the theodolite 6 is shown as a light 63 in the figure, the rotation angle c (the included angle between the light 62 and the light 63) of the theodolite 6 at this time is recorded, the theodolite 6 is rotated (clockwise) to aim at the surface 51 of the reflector 5 in the same way, the auto-collimation light is shown as a light 61 in the figure, the rotation angle d (the included angle between the light 62 and the light 61) of the theodolite 6 at this time is recorded, the incident angle b of the light 61 on the surface 52 satisfies the formula b + c, and the analysis shows that c + d is a constant, and the constant corresponds to the included angle a between the reflector 5 (the surface 52 and. At this time, the refraction angle of the light ray 61 on the surface 52 is a, and satisfies the law of refraction sinb ═ n × sina, knowing the refraction index n, and the rotation angles c, d of the theodolite 6, the refraction angle a can be calculated, and according to the trigonometric relationship, the refraction angle a on the surface 52 is equal to the included angle between the two surfaces of the reflector 5. From this the angle between the two surfaces of the mirror 5 can be calculated.
Referring to fig. 3, when the surface 51 of the reflector 5 is perpendicular to the optical axis 62 of the lens 4, it can be known from the geometric relationship in the figure that the light 64 inside the reflector 5 needs to be parallel to the optical axis, the included angle between the auto-collimation light 64 of the theodolite 6 and the surface 52 and the optical axis 62 is a, the included angle between the auto-collimation light 65 of the theodolite 6 and the surface 52 and the optical axis 62 is a, and by adjusting the included angle between the auto-collimation image of the surface 52 of the reflector 5 and the optical axis to be a, the normal direction of the surface 51 of the reflector 5 can be ensured to be parallel to the optical axis of the lens 4, so that the emergent light of the lens 4 returns according to the original path, thereby eliminating the installation error caused by the non-parallel front and back surfaces of the reflector 5 and effectively improving the. Only one theodolite is used in the adjustment process, three times of collimation are carried out, for example, the T6000 theodolite is taken as an example, the precision is 0.5', and the adjustment precision of the reflector is
Compared with the original method, the method greatly improves the measurement precision. In addition, the method reduces the processing precision requirement of the front and back surfaces of the reflector 5, so the method effectively reduces the processing cost and is an economical and high-precision adjusting method.
The invention is not limited to the auto-collimation adjustment of the reflector, in the actual adjustment process, the included angle between the optical axis direction and the reflector can be any angle, as shown in fig. 4, the adjustment requires the reflector 8 to fold the light path of the lens 7 by 90 degrees, and the invention only needs to increase the angle value needing to fold in the adjustment process of the back surface auto-collimation image of the reflector 8. And the theodolite 9 is adopted to respectively aim at the autocollimation images of the two surfaces of the reflector 8 to eliminate the angle error of the reflector.
The above-described embodiments are merely preferred embodiments of the present invention, and general changes and substitutions by those skilled in the art within the technical scope of the present invention are included in the protection scope of the present invention.
Claims (4)
1. A theodolite-based high-precision plane mirror adjusting method is characterized by comprising the following steps:
the method comprises the following steps: adjusting the theodolite (6) to be coaxial with the lens (4), setting the horizontal reading of the theodolite (6) to be a zero position after adjustment, and setting the optical axis of the theodolite (6) to be a second light ray (62);
step two: the reflector (5) is arranged on the lens (4), the position of the theodolite (6) is kept still, the theodolite (6) is rotated to aim at the second surface (52) of the reflector (5), the auto-collimation light of the theodolite (6) is a third light (63), the rotating angle c of the theodolite (6) at the moment is recorded,
step three: when the horizontal reading of the theodolite (6) is zero, rotating the theodolite (6) to aim at the first surface (51) of the reflector (5), wherein the auto-collimation light is a first light (61), and recording the rotating angle d of the theodolite (6) at the moment;
step four: obtaining a refraction angle a of the first light ray (61) on the second surface (52) of the reflector (5) according to the rotation angle c and the rotation angle d of the theodolite (6);
step five: when the theodolite (6) and the lens (4) are coaxial, the theodolite (6) is rotated by a rotating angle c ═ a, and then the reflector (5) is rotated, so that the auto-collimation image of the second surface (52) of the reflector (5) in the theodolite (6) is superposed with the cross line of the theodolite (6), and the normal direction of the first surface (51) of the reflector (5) is parallel to the optical axis of the lens (4).
2. The theodolite-based high-precision plane mirror alignment method according to claim 1, characterized in that: in step four, the refraction angle a is obtained by the following formula:
sinb＝n×sina；
wherein b is c + d, n is the refractive index of the mirror (5), and b is the incident angle b of the first light ray (61) on the second surface (52).
3. The theodolite-based high-precision plane mirror alignment method according to claim 1, characterized in that: the angle between the second ray (62) and the third ray (63) is equal to the rotation angle c of the theodolite (6).
4. The theodolite-based high-precision plane mirror alignment method according to claim 1, characterized in that: in step three, the included angle between the second light ray (62) and the first light ray (61) is equal to the rotation angle d of the theodolite (6).
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| CN111427053A (en) * | 2020-03-30 | 2020-07-17 | 中国科学院西安光学精密机械研究所 | Precise distance measuring device and method based on array mirror calibration |
| CN113900271A (en) * | 2021-09-30 | 2022-01-07 | 河北汉光重工有限责任公司 | Optical lens turning reflector debugging device and method |
| CN114488521B (en) * | 2022-01-04 | 2022-12-09 | 中国科学院西安光学精密机械研究所 | Space pose positioning method of plane reflector in convergent-refractive optical path |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3838357C2 (en) * | 1988-11-11 | 1992-10-15 | Krauss-Maffei Ag, 8000 Muenchen, De | |
| US5452142A (en) * | 1992-10-20 | 1995-09-19 | Hughes Aircraft Company | Approach for positioning, fabricating, aligning and testing grazing, convex, hyperbolic mirrors |
| DE10136387A1 (en) * | 2001-07-26 | 2003-02-13 | Zeiss Carl | Optical objective for semiconductor lithography has optical element with reflective reference surface used for adjustment relative to objective |
| JP2010164354A (en) * | 2009-01-14 | 2010-07-29 | Shimadzu Corp | Autocollimator |
| CN102937738A (en) * | 2012-11-20 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | System and method for achieving accurate positioning of off-axis aspheric surface reflector |
| CN104459936A (en) * | 2014-12-11 | 2015-03-25 | 北京空间机电研究所 | Microstress assembling method for large-caliber reflector assembly |
| CN107132636A (en) * | 2017-06-29 | 2017-09-05 | 佛山科学技术学院 | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system |
-
2018
- 2018-09-19 CN CN201811092001.8A patent/CN109324382B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3838357C2 (en) * | 1988-11-11 | 1992-10-15 | Krauss-Maffei Ag, 8000 Muenchen, De | |
| US5452142A (en) * | 1992-10-20 | 1995-09-19 | Hughes Aircraft Company | Approach for positioning, fabricating, aligning and testing grazing, convex, hyperbolic mirrors |
| DE10136387A1 (en) * | 2001-07-26 | 2003-02-13 | Zeiss Carl | Optical objective for semiconductor lithography has optical element with reflective reference surface used for adjustment relative to objective |
| JP2010164354A (en) * | 2009-01-14 | 2010-07-29 | Shimadzu Corp | Autocollimator |
| CN102937738A (en) * | 2012-11-20 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | System and method for achieving accurate positioning of off-axis aspheric surface reflector |
| CN104459936A (en) * | 2014-12-11 | 2015-03-25 | 北京空间机电研究所 | Microstress assembling method for large-caliber reflector assembly |
| CN107132636A (en) * | 2017-06-29 | 2017-09-05 | 佛山科学技术学院 | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system |
Non-Patent Citations (2)
| Title |
|---|
| Analysis on mirrors installation error of high-accuracy long focal length measurement system;Wang Yongpeng; Luo Jia; Bai Jian; Liang Yiyong;《Infrared and Laser Engineering》;20140225;全文 * |
| 一种测量船水平反射镜的水平方向定位方法;于萍;《长春理工大学学报（自然科学版）》;20130831;全文 * |
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