CN206113868U - Nanometer displacement table 6 -degree of freedom calibrating device - Google Patents
Nanometer displacement table 6 -degree of freedom calibrating device Download PDFInfo
- Publication number
- CN206113868U CN206113868U CN201620868854.6U CN201620868854U CN206113868U CN 206113868 U CN206113868 U CN 206113868U CN 201620868854 U CN201620868854 U CN 201620868854U CN 206113868 U CN206113868 U CN 206113868U
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- nanometer displacement
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Abstract
The utility model discloses a because beam split laser Interferometer's 6 -degree of freedom nanometer displacement table's calibrating device belongs to the accurate range finding technical field of laser, the device is including supporting platform, beam split measuring device system and nanometer displacement table, the measurement of nanometer moving platform 6 degree of freedom gesture has been guaranteed in this kind of design, has solved an arbitrary gesture nanometer yardstick displacement measurement difficult problem, all -attitude discernment that the nanometer displacement table that is applicable to X axle, Y axle, Z axle and rotation angle changes simultaneously with the precision measurement calibration surpasses.
Description
Technical field
This utility model belongs to nanometer displacement platform calibration field, and in particular to a kind of nanometer displacement platform six degree of freedom calibration cartridge
Put.
Background technology
At present, typically measure to calibrate nanometer displacement platform using two methods of single shaft interferometer and multi-axis interferometer,
But there is certain technological deficiency in two kinds of measuring methods, specific defect is as follows：
Nanometer displacement platform is calibrated using single shaft interferometer measurement.During measurement, it is axial that single shaft interferometer can only measure one
Displacement or angle, must increase the number of interferometer and plane mirror if realizing that nanometer displacement platform is multivariant and measure
Measure, and the orthogonality of mirror position is difficult to be guaranteed, and increased the installation and debugging difficulty of interferometer and measurement mirror etc..Nothing
Method is realized being measured while nanometer displacement platform multiple degrees of freedom information.
Nanometer displacement platform is calibrated using multi-axis interferometer.During measurement, multi-axis interferometer can realize that some is axial
Measure while displacement and angle, using multiple multi-axis interferometers and plane mirror the measurement of nanometer displacement platform carried out, it is possible to achieve
The measurement of nanometer displacement platform six degree of freedom, but due to the impact of the factors such as light path layout so that multi-axis interferometer range measurement
Mirror is distant, can there is very big dead path-length error.And the laser that laser instrument sends is directly over after spectroscope and reflecting mirror
Into multiaxis axle interferometer, due to measuring displacement based on optical maser wavelength, the factor such as temperature, pressure, humidity when air becomes
During change, the aerial wavelength of laser can be changed, so that measurement result is inaccurate.Although wavelength compensation can be carried out,
The impact produced due to airwaves cannot be fully compensated.
In sum, there is presently no one can realize what value was directly traced to the source, with grade measurement range, nanometer
Level accuracy of measurement, can directly be traceable to the measuring instrument equipment of the definition of " rice " in the International System of Units.
Utility model content
In order to solve the problems referred to above of prior art presence, this utility model provides a kind of nanometer displacement platform six degree of freedom
Calibrating installation, can realize what value was directly traced to the source by having designed and manufactured for the technical scheme, and with grade model is measured
Enclose, nanometer measurement accuracy, can directly be traceable to the measuring instrument equipment of the definition of " rice " in the International System of Units.
The technical scheme that this utility model is adopted for：A kind of nanometer displacement platform six degree of freedom calibrating installation, including：Support
System, laser system and measuring system, the support system includes support platform and air floating platform, and the laser system is arranged on
In the support platform, the measuring system is arranged on the air floating platform, and the laser system and the measuring system are electric
Connection；The measuring system includes fixed support, nanometer displacement platform, measurement mirror and three-dimensional interference instrument, and the nanometer displacement platform leads to
Cross nanometer displacement adjustment plate to be fixed on the air floating platform, and the nanometer displacement platform is located at the support bracket fastened lower section,
The measurement mirror by measurement mirror base be arranged on it is described it is support bracket fastened on, the X-axis of the three-dimensional interference instrument, Y-axis and Z axis are equal
Pairwise orthogonal is fixed on the fixed support and vertical with three reflectings surface of the measurement mirror respectively.
The further optimization of technical solutions of the utility model, passes through optical fiber between the laser system and the measuring system
Connection.
The further optimization of technical solutions of the utility model, the fixed support is the marble support of gantry structure, and
Square opening is offered on the fixed support, the measurement mirror is connected through the square opening with measurement mirror base.
The further optimization of technical solutions of the utility model, the support platform, the air floating platform and the fixation
Frame is made by marble.
The further optimization of technical solutions of the utility model, sets between the nanometer displacement adjustment plate and the air floating platform
The first adjusting means is equipped with, first adjusting means includes ball-and-socket supporting construction and two adjusting screw rods, two regulations
Screw rod is separately positioned on the both sides of the ball-and-socket supporting construction.
The further optimization of technical solutions of the utility model, the side of the nanometer displacement adjustment plate is provided with horizontal coarse adjustment
Nut.
The further optimization of technical solutions of the utility model, the laser system includes laser instrument, beam-shrinked mirror, spectroscope
Group, fiber coupler and wavelength compensation instrument, the laser system is connected by fiber coupler with the measuring system optical fiber.
The further optimization of technical solutions of the utility model, the laser instrument is by firm banking and the support platform phase
Connection, and the second adjusting means is provided between the firm banking and the support platform, second adjusting means is band
There is the threaded rod of bulb；The both sides of the firm banking are provided with handle.
The further optimization of technical solutions of the utility model, also including protective cover, the protective cover is arranged on the measurement
The outside of system.
The beneficial effects of the utility model are：By arranging adjusting means, Neng Goushi in laser system and measuring system
Existing calibration of the nanometer displacement platform on six-freedom degree；Fiber optic conduction will be adopted between laser system and measuring system, reduced
The Thermal Error that light source heating tape comes；Measuring system lower section is supported using air floating platform, and measuring system can be made not receive motion structure
The impact of vibration；Laser system is big using weight, and the marble platform for being not likely to produce deformation is supported, stable mechanical performance reliability；
Fixed support is designed using the seat shape of similar gantry structure, and adopts marble material, both ensure that stablizing for mechanical performance
Reliability also reduces dead path-length error；First adjusting apparatus are set between nanometer displacement adjustment plate and air floating platform, are conveniently carried out
Three-dimensional regulation, so as to realize the calibration of different degree of freedom, same measurement mirror is positioned and is connected by ball-and-socket and Magnet, is reduced
Abbe error and cosine error；Measuring system is constituted using laser interferometer, reference mirror and measurement reflecting mirror, can be by
Displacement is traceable to the definition of " rice " in the International System of Units.
Description of the drawings
Fig. 1 is the overall structure diagram of this utility model nanometer displacement platform six degree of freedom calibrating installation；
Fig. 2 is the structural representation of this utility model measuring system；
Fig. 3 is the structural representation of this utility model laser system.
In figure：1st, support system；11st, support platform；12nd, air floating platform；2nd, laser system；21st, firm banking；22nd,
Two adjusting meanss；23rd, laser instrument；24th, fiber coupler；25th, wavelength compensation instrument；26th, beam-shrinked mirror；27th, handle；28th, spectroscope
Group；3rd, measuring system；31st, fixed support；32nd, nanometer displacement adjustment plate；33rd, nanometer displacement platform；34th, horizontal coarse adjustment nut；35、
Ball-and-socket supporting construction；36th, adjusting screw rod；37th, mirror base is measured；38th, mirror is measured；4th, optical fiber.
Specific embodiment
To make the purpose of this utility model, technical scheme and advantage clearer, below will be to technology of the present utility model
Scheme is described in detail.Obviously, described embodiment is only a part of embodiment of this utility model, rather than all
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not before creative work is made
Resulting all other embodiment is put, the scope that this utility model is protected is belonged to.
As shown in Figure 1, Figure 2 and Figure 3, this utility model provides a kind of nanometer displacement platform six degree of freedom calibrating installation, bag
Include：Support system, laser system and measuring system, the support system includes support platform and air floating platform, the laser system
System is arranged in the support platform, and the measuring system is arranged on the air floating platform, the laser system and the survey
Amount system is electrically connected；The measuring system includes fixed support, nanometer displacement platform, measurement mirror and three-dimensional interference instrument, the nanometer
Displacement platform is fixed on the air floating platform by nanometer displacement adjustment plate, and the nanometer displacement platform is located at the fixed support
Lower section, the measurement mirror by measure mirror base be arranged on it is described it is support bracket fastened on, X-axis, the Y-axis of the three-dimensional interference instrument
With being fixed on the fixed support and vertical with three reflectings surface of the measurement mirror respectively for the equal pairwise orthogonal of Z axis, it is described
Laser system includes laser instrument, beam-shrinked mirror, light splitting microscope group, fiber coupler and wavelength compensation instrument, and the laser system passes through light
Fine bonder is connected with the measuring system optical fiber.
The technical program is preferred, and X-axis, Y-axis and Z axis interferometer adopt the ZMI series interferometers of ZYGO companies,；Herein
ZYGO companies ZMI series interferometer also can be easy be replaced by other kinds of interferometer, realize different type sample
Measurement.Measurement plate is gathered using ZMI4004, the displacement resolution of 0.15nm is capable of achieving.
The nanometer displacement platform six degree of freedom calibrating installation is mainly used to measure nanometer displacement platform 6DOF simultaneously, and system is most
Big measurement range is 10 × 10 × 10mm.Measurement mainboard is capable of achieving using 1024 electronic fine-grained ZMI4004 collection measurement plates
The displacement resolution of 0.15nm.
Connected by optical fiber between the laser system and the measuring system, can reduce and be produced during conduction
Thermal Error.The fixed support is the marble support of gantry structure, and square opening is offered on the fixed support, described
Measurement mirror is connected through the square opening with measurement mirror base.The support platform, the air floating platform and the fixation
Frame is made by marble.
The first adjusting means is provided between the nanometer displacement adjustment plate and the air floating platform, described first adjusts dress
Put including ball-and-socket supporting construction and two adjusting screw rods, two adjusting screw rods are separately positioned on the ball-and-socket supporting construction
Both sides.
The side of the nanometer displacement adjustment plate is provided with horizontal coarse adjustment nut, can be adjusted by horizontal coarse adjustment nut and be received
The horizontal displacement of rice adjustment of displacement plate, then carries out the tune in upper and lower orientation by a street device to nanometer displacement adjustment plate
Section.
The laser instrument is connected by firm banking with the support platform, and the firm banking supports flat with described
The second adjusting means is provided between platform, second adjusting means is the threaded rod with bulb；The two of the firm banking
Side is provided with handle.Post is accepted in threaded rod bottom with ball-and-socket to accept, also with a clamp nut between threaded rod and marble
It is fixed, prevents threaded rod from skidding, adjust these three threaded rods just can carries out height, pitching and roll angle to laser instrument
Adjustment
Also include protective cover, the protective cover is arranged on the outside of the measuring system.
A kind of nanometer displacement platform six degree of freedom calibrating installation that this utility model is provided, the concrete structure and work of measuring system
Make principle as follows：Laser from optical fiber out is directly entered X-axis interferometer, Y-axis interferometer and Z axis interferometer, dry from laser
Interferometer is returned to after the measured mirror reflection of interferometer laser out, by the change before and after laser interferometer measurement laser frequency
Change, you can the change in displacement value and angle change value of nanometer displacement platform are obtained according to corresponding computing formula.Wherein nanometer displacement
Platform is mounted below nanometer displacement platform adjustment plate, the nanometer displacement platform for having various different sizes on nanometer displacement platform adjustment plate
Installing hole, can install the nanometer displacement platform of different specification size；There is axle center ball-and-socket to support below nanometer displacement platform adjustment plate
Structure, is the small ball that a diameter is 20mm as the axle center ball for supporting fulcrum, and ball-and-socket 1 is embedded in nanometer displacement platform tune
In imposite, ball-and-socket 2 is embedded in marble substrate；2 two dimension angular adjustment structures are installed in nanometer displacement platform adjustment plate,
Two closely-pitched screw rods are used to adjust the luffing angle of 2 axles, and fine thread bushing is arranged in nanometer displacement platform adjustment plate, passes through
The height for adjusting 2 closely-pitched screw rods reaches the effect of pitch regulation；Left side adjustment is installed on the left of nanometer displacement platform adjustment plate
Structure, wherein lead screw are fixed on the side wall of planer-type, and spring is clipped between disk and disk, and the side of disk withstands on nanometer
On the side wall in displacement platform adjustment face, the afterbody of screw rod is deep into the inside in adjustment face；Install on the right side of nanometer displacement platform adjustment plate
There is right side adjustment structure, thin teeth screw withstands nanometer displacement platform adjustment face, by adjusting thin teeth screw the anglec of rotation is adjusted.
The above, specific embodiment only of the present utility model, but protection domain of the present utility model do not limit to
In this, any those familiar with the art can readily occur in change in the technical scope that this utility model is disclosed
Or replace, all should cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should be described with power
The protection domain that profit is required is defined.
Claims (9)
1. a kind of nanometer displacement platform six degree of freedom calibrating installation, it is characterised in that include：Support system (1), laser system (2)
With measuring system (3), the support system (1) includes support platform (11) and air floating platform (12), and the laser system (2) sets
Put in the support platform (11), the measuring system (3) is arranged on the air floating platform (12), the laser system
(2) electrically connect with the measuring system (3)；
The measuring system (3) includes fixed support (31), nanometer displacement platform (33), measurement mirror (38) and three-dimensional interference instrument, institute
State nanometer displacement platform (33) to be fixed on the air floating platform (12) by nanometer displacement adjustment plate (32), and the nanometer displacement
Platform (33) is arranged on described solid positioned at the lower section of the fixed support (31), the measurement mirror (38) by measurement mirror base (37)
Fixed rack (31) it is upper, the X-axis of the three-dimensional interference instrument, Y-axis and the equal pairwise orthogonal of Z axis are fixed on the fixed support (31)
It is upper and vertical with three reflectings surface of measurement mirror (38) respectively.
2. nanometer displacement platform six degree of freedom calibrating installation according to claim 1, it is characterised in that：The laser system
(2) connected by optical fiber and the measuring system (3) between.
3. nanometer displacement platform six degree of freedom calibrating installation according to claim 1, it is characterised in that：The fixed support
(31) to offer square opening on the marble support of gantry structure, and the fixed support (31), the measurement mirror (38) is worn
Cross the square opening to be connected with measurement mirror base (37).
4. nanometer displacement platform six degree of freedom calibrating installation according to claim 1, it is characterised in that：The support platform
(11), the air floating platform (12) and the fixed support (31) are made by marble.
5. nanometer displacement platform six degree of freedom calibrating installation according to claim 1, it is characterised in that：The nanometer displacement is adjusted
The first adjusting means is provided between imposite (32) and the air floating platform (12), first adjusting means is supported including ball-and-socket
Structure (35) and two adjusting screw rods (36), two adjusting screw rods (36) are separately positioned on the ball-and-socket supporting construction (35)
Both sides.
6. nanometer displacement platform six degree of freedom calibrating installation according to claim 5, it is characterised in that：The nanometer displacement is adjusted
The side of imposite (32) is provided with horizontal coarse adjustment nut (34).
7. the nanometer displacement platform six degree of freedom calibrating installation according to any one of claim 1-5, it is characterised in that：It is described
Laser system (2) includes laser instrument (23), beam-shrinked mirror (26), light splitting microscope group (28), fiber coupler (24) and wavelength compensation instrument
(25), the laser system (2) is connected by fiber coupler (24) with the measuring system (3) optical fiber (4).
8. nanometer displacement platform six degree of freedom calibrating installation according to claim 6, it is characterised in that：The laser instrument (23)
It is connected with the support platform by firm banking (21), and between the firm banking (21) and the support platform (11)
The second adjusting means (22) is provided with, second adjusting means (22) is the threaded rod with bulb；The firm banking
(21) both sides are provided with handle (27).
9. nanometer displacement platform six degree of freedom calibrating installation according to claim 6, it is characterised in that：Also include protective cover,
The protective cover is arranged on the outside of the measuring system (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620868854.6U CN206113868U (en) | 2016-08-11 | 2016-08-11 | Nanometer displacement table 6 -degree of freedom calibrating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620868854.6U CN206113868U (en) | 2016-08-11 | 2016-08-11 | Nanometer displacement table 6 -degree of freedom calibrating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206113868U true CN206113868U (en) | 2017-04-19 |
Family
ID=58512397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620868854.6U Expired - Fee Related CN206113868U (en) | 2016-08-11 | 2016-08-11 | Nanometer displacement table 6 -degree of freedom calibrating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206113868U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052570A (en) * | 2016-08-11 | 2016-10-26 | 中国计量科学研究院 | Nanometer-displacement-bench six-degree-of-freedom calibrating device |
| CN112066961A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Abbe error control system for precision measurement |
| CN112113509A (en) * | 2019-06-20 | 2020-12-22 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
-
2016
- 2016-08-11 CN CN201620868854.6U patent/CN206113868U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052570A (en) * | 2016-08-11 | 2016-10-26 | 中国计量科学研究院 | Nanometer-displacement-bench six-degree-of-freedom calibrating device |
| CN112113509A (en) * | 2019-06-20 | 2020-12-22 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN112113509B (en) * | 2019-06-20 | 2022-06-17 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN112066961A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Abbe error control system for precision measurement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170419 Termination date: 20210811 |