CN100453964C - Electric capacity method testing device for electrostrictive material characteristic - Google Patents
Electric capacity method testing device for electrostrictive material characteristic Download PDFInfo
- Publication number
- CN100453964C CN100453964C CNB2007101338903A CN200710133890A CN100453964C CN 100453964 C CN100453964 C CN 100453964C CN B2007101338903 A CNB2007101338903 A CN B2007101338903A CN 200710133890 A CN200710133890 A CN 200710133890A CN 100453964 C CN100453964 C CN 100453964C
- Authority
- CN
- China
- Prior art keywords
- plate
- capacitance
- electrostriction
- electric capacity
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention relates to a micro-strain micro-driving force testing device of electrostrictive materials, in particular to a capacitance testing device with the characteristic of electrostrictive materials, which comprises a base and a support bracket, wherein the support bracket is arranged on the base; the invention is characterized in that the support bracket is provided with a fixed excitation coil, the end surface of the fixed excitation coil is provided with a capacitance fixed plate, the base is provided with an adjustable high-voltage source, the two ends of the adjustable high-voltage source are respectively connected with a positive plate and a negative plate, the electrostrictive materials to be tested is arranged between the two plates, one plate is in contact with a three-dimensional micro-displacement table, a supporting piece connected with the other plate is provided with a movable excitation coil, the end surface of the movable excitation coil is provided with a capacitance movable plate, and the capacitance fixed plate faces the capacitance movable plate. The invention realizes the purpose of simplifying the structure and making the testing process conveniently operated.
Description
Technical field:
The present invention relates to electrostriction material microstrain, micro-driving force proving installation, relate in particular to a kind of capacitance method proving installation of electrostriction material characteristic.
Background technology
Non-optical method had line electric-resistivity method (10 by the principle branch during displacement of the lines or strain testing were used
-2-20mm), strain resistor method (10
-4-10
2Mm), capacitance method (10
-4-10mm), respond to same footwork (10
-3-10
2Mm), the difference induction method (10
-4-10
-1Mm) etc., it has different measuring speed, scope and precision, as the electric-resistivity method of ruling only is suitable for the low speed occasion for the reliable contact that guarantees resistance, and the difference induction method has than high measurement accuracy but measurement range is limited, and the strain resistor method needs measurand that bigger driving force is arranged.
Electrostriction material need have little deformation and certain driving force simultaneously, and traditional test can only be tested the electrostriction coefficient of free state electrostriction material, research for electrostriction coefficient under stressed loading condition and driving force thereof is very few, so be necessary the driving force performance of electrostriction material is further launched research.A ring very important in the driving force performance study is exactly a micro-force measurement, and micro-force measurement adopts the MEMS device to finish usually, also has the Fibre Optical Sensor of employing, a day equality method to finish.
Capacitance method and differential transformer method are converted into electrical measurement with little distortion measurement, all need to contact the genus contact method with measured surface and measure.Capacitance method has advantages such as response speed is fast, highly sensitive, noise resisting ability is strong, also has bigger measurement range simultaneously and be suitable for the electrostriction material microstrain than high measurement accuracy to measure, for the test of material electrostrictive properties provides reliable approach.
Capacitance type sensor is a very important class in the sensor, its variation with tested non electrical quantity is converted to electric capacitance change, obtain measured variation by the variation that detects electric capacity, but has simple in structure, high resolution non-cpntact measurement, cost is low, response speed is fast, highly sensitive, advantage such as noise resisting ability is strong, and can under mal-conditions such as high temperature, radiation and judder, work, be widely used in the detection of sensing amounts such as pressure, humidity, solid moisture, sense of touch, information fusion imaging, micrometric displacement, thing position, acceleration.The micrometric displacement that little power produces can be converted into little capacitance variations during micro-force measurement, thereby measure little power by measuring little electric capacity.
Summary of the invention
The objective of the invention is to propose a kind of capacitance method proving installation of simple in structure, a kind of electrostriction material characteristic that test process is convenient to operate, can directly measure microstrain characteristic, the micro-driving force characteristic of tested electrostriction material by this device.
The present invention adopts following technical scheme:
The present invention proposes capacitance method electrostriction material characteristic test device, this device detects the micrometric displacement that the generation small strain of electrostriction material under high electric field intensity causes by capacitance method, loads electromagnetic force or produces the balance driving force by solenoid.Little capacitance detecting has adopted the switching mode weak capacitive detection circuit, and this circuit cost is low, also can eliminate simultaneously than the influence of the big a lot of stray capacitance over the ground of measured capacitance to measurement result.
Capacitance method electrostrictive properties proving installation totally comprises adjustable high voltage power supply, fixed pedestal, three-dimensional micrometric displacement platform, high pressure positive/negative plate, measurand film, field coil group, micro-displacement sensing electric capacity and test control circuit thereof.During system works, high-voltage power supply is carried in highfield on the film to be measured, and film produces strain, and the micro-displacement sensing capacitance measurement goes out corresponding micrometric displacement; Under carrying out the stressed loading condition of material electrostriction coefficient when research produce the power load by drive coil; During the research material driving force, offset the micrometric displacement that highfield produces or produce the driving force that equivalent micrometric displacement is measured material indirectly with drive coil, micro-displacement sensing electric capacity can be used as force transducer simultaneously and uses during as elastic body with electrostriction material.
Whole testing device places on the antivibration platform to eliminate the influence of vibration to test result.Comprised a three-dimensional micrometric displacement platform in the device with the sensing capacitance fine setting in the convenient test, this micrometric displacement platform also is applicable to the calibration and the demarcation of little electric capacity and micrometric displacement simultaneously.
Compared with prior art, the present invention has following advantage:
1. physical construction of the present invention is simple;
2. the micrometric displacement switching mode weak capacitive detection circuit of Cai Yonging, this circuit cost is low, also can eliminate simultaneously than the influence of the big a lot of stray capacitance over the ground of measured capacitance to measurement result;
3. adopt test philosophy can measure electrostriction material electric field-electrostriction strain curve under certain pressure, equivalent driving force characteristic and balance driving force characteristic.
Description of drawings:
Fig. 1 is a general structure synoptic diagram of the present invention, and Figure 1A is a kind of specific embodiment of the present invention, and Figure 1B is an another kind of specific embodiment of the present invention, the 1-fixed pedestal, the three-dimensional micrometric displacement platform of 2-, the adjustable high-voltage power supply of 3-, the 4-negative plate, 5-positive plate, 6-electrostriction film, the 7-support member, 8-moves field coil, and 9-decides field coil, 10-electric capacity movable plate electrode, the 11-capacitor fixed plate, the 12-support bar.
Fig. 2 is test result figure of the present invention, and to detect voltage output be not linear relationship for displacement and little capacitance method when measurement range is very big, but for very little micrometric displacement (in tens micrometer ranges) can think and little electric capacity between have linear relationship.
Fig. 3 is little capacitance measurement electromagnetic force result, the elastic deformation that utilizes capacitance measurement polyurethane under the electromagnetic force effect, to produce, can obtain being carried in magnetic force on the polyurethane elastomer by measuring little capacitance variations, adopted dc coil to produce electromagnetic force in the system, the diagram horizontal ordinate is the voltage that alignment circle two ends are loaded.
Fig. 4 is the electrostriction strain curve that the polyurethane elastomer of different nano barium phthalate content takes place with electric field intensity.
The polyurethane elastomer of the certain nano barium phthalate content of Fig. 5 is electrostriction strain and the variation relation of time under the extra electric field effect.
Embodiment
A kind of capacitance method proving installation of electrostriction material characteristic, comprise: pedestal 1 and support bar 12, support bar 12 is located on the pedestal 1, it is characterized in that on support bar 12, being provided with and decide field coil 9, on the end face of deciding field coil 9, be provided with capacitor fixed plate 10, on pedestal 1, be provided with adjustable high-voltage power supply 3, the two ends of adjustable high-voltage power supply 3 are connected with negative respectively, positive two pole plates 4,5, should be negative, positive two pole plates 4,5 are used to place electrostriction material 6 to be measured, wherein negative plate contacts with three-dimensional micrometric displacement platform 2, on the support member 7 that links to each other with positive plate, be provided with moving field coil 8, be provided with electric capacity movable plate electrode 10 on the end face of moving field coil 8, above-mentioned capacitor fixed plate 11 is faced mutually with electric capacity movable plate electrode 10.
Above-mentioned high-voltage power supply output area 0～10kV, the measuring accuracy 300mV/pF of above-mentioned capacitor fixed plate 10 and electric capacity movable plate electrode 11 formed electric capacity, capacity measurement scope 0～10pF, capacitance method detects micrometric displacement/microstrain, displacement measurement precision 1.9mV/ μ m,
Figure 1A and Figure 1B have reflected two kinds of forms of technique scheme respectively.
During system works, high-voltage power supply is carried in highfield on the film to be measured, and film produces strain, and the micro-displacement sensing capacitance measurement goes out corresponding micrometric displacement; Under carrying out the stressed loading condition of material electrostriction coefficient when research produce the power load by drive coil; During the research material driving force, offset the micrometric displacement that highfield produces or produce the driving force that equivalent micrometric displacement is measured material indirectly with drive coil, micro-displacement sensing electric capacity can be used as force transducer simultaneously and uses during as elastic body with electrostriction material.
Whole testing device places on the antivibration platform to eliminate the influence of vibration to test result.Comprised a three-dimensional micrometric displacement platform in the device with the sensing capacitance fine setting in the convenient test, this micrometric displacement platform also is applicable to the calibration and the demarcation of little electric capacity and micrometric displacement simultaneously.
Utilize the present invention can carry out the electric field-electrostriction strain curve, the electric field under different pressures-electrostriction strain curve of electrostriction material, in the test of balance driving force under the different electric field actions and the performances such as equivalent driving force under different electric field actions.
1) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0～10kV, serial corresponding strain displacement takes place in film, thereby little capacitance test circuit detects electric field-electrostriction strain curve that the corresponding micrometric displacement of this series obtains this electrostriction material.
2) give the film on-load pressure by solenoid, load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0～10kV, serial corresponding strain displacement takes place in film, and corresponding micrometric displacement obtains the electric field-electrostriction strain curve of this electrostriction material under different pressures thereby little capacitance test circuit detects this series.
3) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0～10kV, keeping thin film strain for film load balance power by solenoid is zero, thereby obtains the balance driving force of this electrostriction material under different electric field actions.
4) load series high voltage for tested electrostriction film by high-pressure polar plate, voltage range is 0～10kV, serial corresponding strain displacement takes place in film, film is produced for the film on-load pressure by solenoid again and be equal to displacement, thereby obtain the equivalent driving force of this this electrostriction material under different electric field actions.
It is as follows to use this device to detect electrostriction material characteristic step:
(1) tested electrostriction film is cut into 30mm * 30mm size and be clamped in the positive or negative high voltage pole plate, adjust the initial position of capacitive transducer by transferring three-dimensional micrometric displacement platform, making the capacitance measurement output valve is zero.
(2) voltage makes tested electrostriction film that corresponding strain take place on the adjusting high-pressure polar plate, records electric field-electrostriction strain curve by capacitance measurement circuit.
(3) voltage makes tested electrostriction film that corresponding strain take place on the adjusting high-pressure polar plate, by drive coil to tested electrostriction film on-load pressure (load or equivalent strain) or pulling force (counteracting strain), thereby record electric field-electrostriction strain curve, equivalent driving force characteristic and balance driving force characteristic under the certain pressure of material by capacitance measurement circuit.
Claims (1)
1, a kind of capacitance method proving installation of electrostriction material characteristic, comprise pedestal (1) and bracing frame (12), bracing frame (12) is located on the pedestal (1), it is characterized in that on bracing frame (12), being provided with and decide field coil (9), on the end face of deciding field coil (9), be provided with capacitor fixed plate (10), on pedestal (1), be provided with adjustable high-voltage power supply (3), the two ends of adjustable high-voltage power supply (3) are connected with negative respectively, positive plate (4,5), should be negative, positive plate (4,5) be used to place electrostriction material to be measured (6) between, between described pedestal (1) and described negative plate (4), be provided with three-dimensional micrometric displacement platform (2), negative plate (4) contacts with three-dimensional micrometric displacement platform (2), with support member (7) that positive plate (5) is connected on be provided with moving field coil (8), be provided with electric capacity movable plate electrode (11) on the end face of moving field coil (8), above-mentioned capacitor fixed plate (10) is faced mutually with electric capacity movable plate electrode (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101338903A CN100453964C (en) | 2007-10-12 | 2007-10-12 | Electric capacity method testing device for electrostrictive material characteristic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101338903A CN100453964C (en) | 2007-10-12 | 2007-10-12 | Electric capacity method testing device for electrostrictive material characteristic |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101140158A CN101140158A (en) | 2008-03-12 |
| CN100453964C true CN100453964C (en) | 2009-01-21 |
Family
ID=39192207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101338903A Expired - Fee Related CN100453964C (en) | 2007-10-12 | 2007-10-12 | Electric capacity method testing device for electrostrictive material characteristic |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100453964C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102707248B (en) * | 2012-05-30 | 2014-08-13 | 安泰科技股份有限公司 | Device for measuring magnetostriction in dual-channel capacitance method and method thereof |
| WO2014019444A1 (en) * | 2012-07-30 | 2014-02-06 | 北京联想软件有限公司 | Method and system for adjusting electric field intensity |
| CN103677068B (en) * | 2012-09-17 | 2015-12-16 | 联想(北京)有限公司 | A kind of control method of electric field intensity and system |
| CN104237461B (en) * | 2014-07-31 | 2016-08-17 | 北京科技大学 | A kind of electromechanical performance testing device inflating pre-deformation and method of testing |
| CN104849138B (en) * | 2015-03-23 | 2018-10-26 | 同济大学 | A kind of device measuring film compression modulus |
| CN109781533A (en) * | 2019-03-19 | 2019-05-21 | 青岛大学 | Anisotropic membrane electrostrictive device for evaluating performance and evaluation method |
| CN115342965A (en) * | 2022-09-21 | 2022-11-15 | 内蒙古工业大学 | Capacitance type gas pressure sensor structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484749A (en) * | 2001-01-10 | 2004-03-24 | 米其林技术公司 | Method and device for evaluating deformations and forces |
| CN1696643A (en) * | 2005-05-31 | 2005-11-16 | 清华大学 | Suspension type static and dynamic material testing machine of tiny tensile |
| US20050284224A1 (en) * | 2004-04-27 | 2005-12-29 | Ngk Insulators, Ltd. | Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof |
| CN1947271A (en) * | 2004-04-27 | 2007-04-11 | 日本碍子株式会社 | Elastic body inspection method, inspection device, and dimension prediction program |
| CN201081720Y (en) * | 2007-10-26 | 2008-07-02 | 东南大学 | Capacitance method tester for testing driving force characteristics of electrostriction material |
-
2007
- 2007-10-12 CN CNB2007101338903A patent/CN100453964C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484749A (en) * | 2001-01-10 | 2004-03-24 | 米其林技术公司 | Method and device for evaluating deformations and forces |
| US20050284224A1 (en) * | 2004-04-27 | 2005-12-29 | Ngk Insulators, Ltd. | Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof |
| CN1947271A (en) * | 2004-04-27 | 2007-04-11 | 日本碍子株式会社 | Elastic body inspection method, inspection device, and dimension prediction program |
| CN1696643A (en) * | 2005-05-31 | 2005-11-16 | 清华大学 | Suspension type static and dynamic material testing machine of tiny tensile |
| CN201081720Y (en) * | 2007-10-26 | 2008-07-02 | 东南大学 | Capacitance method tester for testing driving force characteristics of electrostriction material |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101140158A (en) | 2008-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100453964C (en) | Electric capacity method testing device for electrostrictive material characteristic | |
| CN105823907B (en) | Parallel plate capacitor type mems accelerometer built-in self-test circuit and self-test method | |
| EP1909060B1 (en) | Micro surface shape measuring probe | |
| CN109163012B (en) | Single-degree-of-freedom magnetic-liquid double-suspension bearing control system and control method thereof | |
| CN100507483C (en) | Piezoelectric film cantilever beam type micro-force sensor micro-force loading device | |
| CN105423885A (en) | Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic | |
| JP2010527447A (en) | Electrostatic pressure sensor with porous dielectric diaphragm | |
| CN102353576B (en) | Small-size test device for mechanical and electrical coupling characteristics | |
| CN101710006B (en) | Three-dimensional micro-force measuring device | |
| CN201081720Y (en) | Capacitance method tester for testing driving force characteristics of electrostriction material | |
| Zhang et al. | Leakage current characterization and compensation for piezoelectric actuator with charge drive | |
| CN110441551B (en) | Atomic force probe type sensor based on quartz ring resonator | |
| CN201514297U (en) | Test set for friction force dynamic process | |
| CN108120578B (en) | A kind of triple axle exciting bank that shock loading can be loaded to MEMS micro-structure | |
| CN108217587B (en) | Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics | |
| CN113588149A (en) | Flexible multi-mode touch sensor combining silicon-based MEMS unit and coil array | |
| CN108168816B (en) | It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank | |
| CN108168817B (en) | A kind of MEMS micro-structure triple axle exciting device based on pedestal motivational techniques | |
| Elbestawi | Force measurement | |
| CN108168814B (en) | A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure | |
| CN204240971U (en) | A kind of simple and effective extensometer stationary installation | |
| CN108163804B (en) | It is a kind of can dynamic driving MEMS micro-structure four-axle type exciting bank | |
| CN107894315B (en) | A kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structure | |
| CN108225702B (en) | A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics | |
| CN103033553A (en) | Detection method for mechanical property degradation of capacitive structural material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090121 Termination date: 20111012 |