CN108217587B - Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics - Google Patents
Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics Download PDFInfo
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- CN108217587B CN108217587B CN201711355477.1A CN201711355477A CN108217587B CN 108217587 B CN108217587 B CN 108217587B CN 201711355477 A CN201711355477 A CN 201711355477A CN 108217587 B CN108217587 B CN 108217587B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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- B81C99/0035—Testing
- B81C99/005—Test apparatus
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Abstract
The invention discloses a kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and MEMS micro-structure；Support plate and electric threaded shaft transmission mechanism are equipped in sleeve；The spherical groove and conical socket of clamping steel ball are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is stacked to be clamped between pressure sensor and elastic supporting member for supporting optical member；Bulb plunger is uniformly connected on upper coupling block, bulb plunger outer end heads into the rectangular recess of sleeve lining.The device flexibly can apply different size of pretightning force to stacking piezoelectric ceramics, keep pretightning force measured value obtained more accurate simultaneously, the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, it can be avoided falling off for test micro element, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, in particular to a kind of to be used for MEMS micro-structure dynamic characteristics
The four-axle type seat excitation apparatus of test.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics, In are described in a text
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.The Chinese invention patent of Publication No. CN101476970A discloses one kind and is based on
The seat excitation apparatus of piezoelectric ceramics applies pretightning force to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and leads to
It crosses to stack piezoelectric ceramics bottom and be mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, this
Outside, it is additionally provided with pressure sensor, in a device for detecting the pretightning force applied to piezoelectric ceramics and stacking piezoelectric ceramics
Power output at work.But there are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of four axis for the test of MEMS micro-structure dynamic characteristics
Formula seat excitation apparatus, the device can be more flexible to the different size of pretightning force of piezoelectric ceramics application is stacked, and make simultaneously
Pretightning force measured value obtained is more accurate, and compensation can be made to stack the adjusting of two working surface parallelism error of piezoelectric ceramics
Journey becomes more smooth and smooth, substantially reduces the shearing force stacked between each layer of piezoelectric ceramics, can be avoided and tests with micro-
Device falls off, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics, including sleeve, in sleeve
Equipped with piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block is stacked, in sleeve
It is equipped with elastic supporting member for supporting optical member and MEMS micro-structure above, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
The elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition being mutually connected vertically, for reducing substrate
Deflection；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down；
It is respectively equipped with spherical groove and conical socket on upper coupling block and the opposite face of lower connection block, the half of the steel ball
Diameter is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket, makes upper and lower coupling block by steel ball
Between formed an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end is pushed into respectively along circle
Circumferential direction is evenly arranged in the rectangular recess of sleeve lining, flat for assisting mobile base compensation to stack two working surface of piezoelectric ceramics
The adjusting of row degree error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness when for guaranteeing that lower connection block moves up and down.
As further preferred, it is uniformly connected with adjusting rod in upper coupling block outer marginal circumference, adjusting rod is respectively by circumferentially
Direction is evenly arranged on the long hole in sleeve wall and passes through；For realizing the reset of coupling block upper after test.
As further preferred, the substrate is square, and four support arms pass through the first linking arm respectively and are connected to base
One end of plate surrounding；To further decrease the deflection of substrate, MEMS micro-structure is avoided to fall off because of colloid cracking.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the upper coupling block outer rim is octagon, and is respectively equipped in each Middle face of outer rim
One connecting screw hole.
As further preferred, the bulb plunger is four and one end is threadedly attached in the four of coupling block outer rim
In a connecting screw hole.
As further preferred, the adjusting rod be four and with bulb plunger arranged for interval.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the center line of the long hole is parallel with the axis of sleeve with the center line of rectangular recess,
And central angle folded by the center line and sleeve axis of the center line of each long hole and adjacent rectangular recess is 45 degree.
As further preferred, the guiding axis is four, the center line of the long hole and adjacent guiding axis axis with
Central angle folded by the axis of sleeve is 22.5 degree.
The beneficial effects of the present invention are:
1, since the radius of steel ball is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket,
Point contact is then formed between steel ball and upper coupling block, is contacted between steel ball and lower connection block for line, stacks piezoelectricity when needing to compensate
The parallelism error of ceramic two working surfaces is come when adjusting mobile base, upper coupling block can be to be in rotation with the contact point of steel ball
The heart is rotated, and adjustment process is smooth, smooth, is not in the problem of steel ball is stuck, is substantially reduced and stack piezoelectric ceramics
Shearing force between each layer.
2, due to being uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve lining, the parallel of two working surface of piezoelectric ceramics is stacked when needing to compensate
Error is spent upper coupling block can be realized not by the cooperation of spring and steel ball in bulb plunger when adjusting mobile base
Swing on equidirectional, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to the support arm that elastic supporting member for supporting optical member includes one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
When work, the vibration deformation of elastic supporting member for supporting optical member is mainly from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
5, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives mobile base mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the B-B cross-sectional view of Fig. 2.
Fig. 5 is the C-C cross-sectional view of Fig. 2.
Fig. 6 is that the present invention removes the top view after annular roof plate.
Fig. 7 is the schematic perspective view of bulb plunger.
Fig. 8 is the structural schematic diagram of elastic supporting member for supporting optical member.
In figure: 1. sleeves, 101. rectangular channels, 102. long holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, 5. micro- knots
Structure mounting plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. thirds connect
Connect arm, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers, 901. steel balls, 902. plunger housings,
903. adjust screws, and 10. stack piezoelectric ceramics, 11. pressure sensors, 12. adjusting rods, coupling block on 13., and 1301. spherical surfaces are recessed
Slot, 14. steel balls, 15. lower connection blocks, 1501. conical sockets, 16. screws, 17. support plates, 18. linear stepping motors, 19. lead
To axis, 20. axle sleeves, 21. lead screws.
Specific embodiment
As shown in FIG. 1 to FIG. 8, a kind of four-axle type pedestal for the test of MEMS micro-structure dynamic characteristics of the present invention
Exciting bank, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by the first line of a couplet
The mobile base that block 13, steel ball 14 and lower connection block 15 are constituted is connect, elastic supporting member for supporting optical member 6 and the micro- knot of MEMS are equipped on sleeve 1
Structure 4.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2；The elastic supporting member for supporting optical member includes one piece of square substrate 602 and four circumference
Uniformly distributed support arm 601, each support arm 601 is by the first linking arm 6011, the second linking arm being successively mutually connected vertically
6012, third linking arm 6013 and the 4th linking arm 6014 composition, four support arms 601 are connected by the first linking arm 6011 respectively
It connects one end in 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and 602 outer rim of substrate forms one
L-type gap；For reducing the deflection of substrate, MEMS micro-structure 4 is avoided to fall off because of colloid cracking.The resilient support
Four support arms 601 of part 6 are fixed on above annular roof plate 2 by pillar 7 using screw support, and MEMS micro-structure 4 passes through micro-
Structure mounting plate 5 cements at the 602 upper surface center of substrate of elastic supporting member for supporting optical member 6.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 21 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 21 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, the screw of 16 upper end of screw and 15 underrun circumference uniform distribution of lower connection block connects
It connects, for driving lower connection block 15 to move up and down.
It is correspondingly provided with spherical groove 1301 and cone at center respectively on upper coupling block 13 and the opposite face of lower connection block 15
The radius of connected in star 1501, the steel ball 14 is less than the radius of curvature of spherical groove 1301 and is clamped in spherical groove 1301 and cone
Between connected in star 1501, make to form an adjustment gap, the adjustment between upper coupling block 13 and lower connection block 15 by steel ball 14
The size in gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 upper and lower ends of piezoelectric ceramics and is clamped in pressure sensor 11 and bullet
Between the substrate 602 of property supporting element 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the substrate 602 is pressed
In installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by stack piezoelectricity
The problem of ceramics 10 and 6 poor contact of elastic supporting member for supporting optical member.
13 outer rim of upper coupling block is octagon, and is radially respectively equipped with a connection in each Middle face of outer rim
Screw hole.It is along the circumferential direction uniformly connected with bulb plunger 9 in upper 13 outer rim of coupling block, the bulb plunger 9 is four and one end
It is threadedly attached in four connecting screw holes of coupling block outer rim, the bulb plunger 9 includes a plunger housing 902, In
It is sequentially installed with steel ball 901, spring in plunger housing 902 and adjusts screw 903.The steel ball of 9 outer end of bulb plunger pushes into respectively
It is along the circumferential direction evenly arranged in four rectangular recess 101 of 1 inner wall of sleeve, for assisting mobile base compensation to stack piezoelectric ceramics
The adjusting of 10 liang of working surface parallelism errors.
It is along the circumferential direction uniformly connected with adjusting rod 12 in upper 13 outer rim of coupling block, the adjusting rod 12 is four and difference
Radially be connected in remaining four connecting screw hole of coupling block outer rim, and with bulb plunger arranged for interval.Adjusting rod 12 divides
It is not passed through by four long holes 102 being along the circumferential direction evenly arranged on 1 wall of sleeve, for realizing answering for coupling block 13 is gone up after test
Position.The center line of the long hole 102 is parallel with the axis of sleeve 1 with the center line of rectangular recess 101, and each long hole 102
Center line and adjacent rectangular recess 101 center line folded by central angle be 45 degree.
Four guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit and is uniformly arranged in 15 lower end of lower connection block
Pilot hole on ring flange, levelness when for guaranteeing that lower connection block 15 moves up and down.It is located in 15 lower end of lower connection block and leads
It is installed with axle sleeve 20 respectively into hole.The axis institute of the center line of the long hole 102 and adjacent 19 axis of guiding axis and sleeve 1
The central angle of folder is 22.5 degree.
When work, starting linear stepping motor 18 is pushed up by lead screw 21 and the transmission of screw 16 by upper coupling block first
13, mobile base composed by steel ball 14 and lower connection block 15 applies pretightning force to piezoelectric ceramics 10 is stacked, while monitoring by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structure 4 is stacked, while contactless using external optical
Vibration detecting device detects the vibratory response of MEMS micro-structure 4, and the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, control linear stepping motor 18 drives lower connection block 15 and steel ball 14 downward after completing the excitation to MEMS micro-structure 4
It is mobile, then manually adjust four adjusting rods 12 and upper coupling block 13 is driven to move down, make to stack 10 top installation set 8 of piezoelectric ceramics
It is separated with elastic supporting member for supporting optical member 6, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics, including sleeve, set in sleeve
Have and stack piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, on sleeve
Face is equipped with elastic supporting member for supporting optical member and MEMS micro-structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；It is described
Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition connected vertically, for reducing the deformation of substrate
Amount；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down；
Spherical groove and conical socket are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small
In spherical groove radius of curvature and be clamped between spherical groove and conical socket, made between upper and lower coupling block by steel ball
Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end pushes into circumferentially side respectively
Into the rectangular recess for being evenly arranged on sleeve lining, for assisting mobile base compensation to stack the two working surface depth of parallelism of piezoelectric ceramics
The adjusting of error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness when for guaranteeing that lower connection block moves up and down.
2. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: being uniformly connected with adjusting rod in upper coupling block outer marginal circumference, adjusting rod is respectively by being along the circumferential direction evenly arranged in sleeve wall
Long hole pass through；For realizing the reset of coupling block upper after test.
3. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the substrate is square, and four support arms pass through one end that the first linking arm is connected to substrate surrounding respectively；With into one
Step reduces the deflection of substrate, and MEMS micro-structure is avoided to fall off because of colloid cracking.
4. the four-axle type seat excitation apparatus according to claim 3 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
5. the four-axle type seat excitation apparatus according to claim 2 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the upper coupling block outer rim is octagon, and is respectively equipped with a connecting screw hole in each Middle face of outer rim.
6. the four-axle type seat excitation apparatus according to claim 5 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the bulb plunger is four and one end is threadedly attached in four connecting screw holes of coupling block outer rim.
7. the four-axle type seat excitation apparatus according to claim 6 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the adjusting rod be four and with bulb plunger arranged for interval.
8. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoiding due to folded
Heap piezoelectric ceramics top work surface it is rough caused by stack asking for piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
Topic.
9. the four-axle type seat excitation apparatus according to claim 7 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the center line of the long hole is parallel with the axis of sleeve with the center line of rectangular recess, and the center line of each long hole
It is 45 degree with central angle folded by the center line of adjacent rectangular recess and the axis of sleeve.
10. the four-axle type seat excitation apparatus according to claim 9 for the test of MEMS micro-structure dynamic characteristics, special
Sign is: the guiding axis is four, circle folded by the axis of the center line of the long hole and adjacent guiding axis axis and sleeve
Heart angle is 22.5 degree.
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