CN108168815B - A kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic - Google Patents
A kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic Download PDFInfo
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- CN108168815B CN108168815B CN201711355464.4A CN201711355464A CN108168815B CN 108168815 B CN108168815 B CN 108168815B CN 201711355464 A CN201711355464 A CN 201711355464A CN 108168815 B CN108168815 B CN 108168815B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The invention discloses a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block and MEMS micro-structure；It is equipped with annular roof plate in sleeve upper end, MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；Lower connection block upper end is hemispherical round end and withstands on coupling block bottom surface；Piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger inner end pushes into the sliding slot of coupling block outer rim, and guiding axis is evenly distributed between annular roof plate and bottom plate.The device flexibly can apply different size of pretightning force to stacking piezoelectric ceramics, keep pretightning force measured value more accurate, the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is reduced, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
Description
Technical field
It is the invention belongs to micromachine electronic system technology field, in particular to a kind of micro- by the MEMS of Piezoelectric Ceramic
Structure triple axle exciting bank.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of MEMS micro-structure triple axle by Piezoelectric Ceramic
Exciting bank, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
Pretightning force measured value it is more accurate, compensation can be made, which to stack the adjustment process of two working surface parallelism error of piezoelectric ceramics, to be become
It is more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, bigger adjusting space is capable of providing,
Convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic, including sleeve and bottom plate, in sleeve
Equipped with piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block is stacked, elastic supporting member for supporting optical member and MEMS are equipped on sleeve
Micro-structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
Between annular roof plate and bottom plate be located at sleeve outside be evenly distributed in guiding axis, be along the circumferential direction evenly equipped in sleeve wall with
U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each guiding support arm difference to guiding axis correspondingly
It is passed through by corresponding U-shaped gap and is sleeved on guiding axis；It is located at guiding axis on each guiding support arm and is respectively equipped with locking
Device, for lower connection block to be fixed on guiding axis；
The lower connection block upper end is hemispherical round end and withstands at the baseplane center of coupling block, makes to couple above and below
Point contact is formed between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to circumferentially
Direction is laid in the plunger mounting base in sleeve wall, and the steel ball of bulb plunger inner end pushes into along the circumferential direction uniformly distributed respectively
In the sliding slot of upper coupling block outer rim, piezoelectric ceramics two is stacked for realizing block compensation is coupled in the positioning of upper coupling block and auxiliary
The adjusting of working surface parallelism error.
As further preferred, screw hole is along the circumferential direction evenly equipped in sleeve wall, the plunger mounting base passes through respectively
It is threadably mounted in screw hole.
As further preferred, the U-shaped gap and screw hole quantity are quite and along the mutual equidistant interval in circumference direction
Arrangement.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, three support chip outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the guiding axis is three.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole across guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, upper coupling block outer marginal circumference be uniformly connected with the one-to-one adjusting rod of U-shaped gap,
Adjusting rod outer end is stretched out by corresponding U-shaped gap respectively；For realizing the reset of coupling block upper after test.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fixed on guiding axis by lock-screw.
The beneficial effects of the present invention are:
1, since lower connection block upper end is hemispherical round end and is withstood at the baseplane center of upper coupling block, make to join above and below
It connects and forms point contact between block；It stacks the parallelism error of two working surface of piezoelectric ceramics when needing to compensate and adjusts mobile base
When, upper coupling block can be swung using the contact point with lower connection block as center of rotation, and adjustment process is smooth, smooth, will not be gone out
The problem of now blocking substantially reduces the shearing force stacked between each layer of piezoelectric ceramics.
2, since equipped with bulb plunger, bulb plunger outer end is connected to circumference uniform distribution between upper coupling block and sleeve
It is along the circumferential direction laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger inner end pushes into circumferentially side respectively
To being evenly arranged in the sliding slot of upper coupling block outer rim；It can not only realize that center of the upper coupling block in sleeve is fixed by bulb plunger
Position, and when needing to compensate the parallelism error for stacking two working surface of piezoelectric ceramics to adjust mobile base, it can pass through
The cooperation of spring and steel ball in bulb plunger is to realize the swing of upper coupling block in different directions, and adjustable space is more
Greatly.
3, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided to pressure
The interference of force snesor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, exciting force obtained
Measured value it is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible；Due to upper in each guiding support arm
It is respectively equipped with locking device at guiding axis, therefore the lower connection block after adjusting can be fixed on guiding axis, it is ensured that test is quasi-
Really.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after annular roof plate.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101.U type gap, 102. screw holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, 5. is micro-
Structure mounting plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets, 9. bulb plungers, 10. is folded
Heap piezoelectric ceramics, 11. pressure sensors, 12. adjusting rods, coupling block on 13., 1301. sliding slots, 14. plunger mounting bases, under 15.
Coupling block, 1501. guiding support arms, 16. guiding axis, 17. axle sleeves, 18. lock-screws, 19. axis fixed rings.
Specific embodiment
As shown in FIG. 1 to FIG. 7, a kind of MEMS micro-structure triple axle excitation dress by Piezoelectric Ceramic of the present invention
It sets, including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block 13
The mobile base constituted with lower connection block 15 is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
Pass through screw respectively with bottom surface on sleeve 1 and be fixed with annular roof plate 2 and bottom plate 3, the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.Three supports of the elastic supporting member for supporting optical member 6
602 outer end of piece is passed through Hollow Pillar 7 respectively and is fixed on above annular roof plate 2 using screw support, and with sleeve 1 in same axis
On.MEMS micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
The upper coupling block 13 and lower connection block 15 are cylindrical shape and cooperate respectively with 1 inner wall wide arc gap of sleeve, institute
It states 15 upper end of lower connection block to be hemispherical round end and withstand at the baseplane center of coupling block 13, make between upper and lower coupling block
Form point contact.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block and couples on after insert
13 top surface of block in the same plane, stacks piezoelectric ceramics 10 and is bonded on pressure sensor 11 for cylindrical and lower end, stack pressure
10 both ends of electroceramics are clamped between pressure sensor 11 and the tabletting 601 of elastic supporting member for supporting optical member 6.Stacking 10 upper end of piezoelectric ceramics
Button sets and is bonded with installation set 8, and the tabletting 601 of the elastic supporting member for supporting optical member 6 is pressed in installation set 8, for avoiding due to stacking pressure
10 top work surface of electroceramics it is rough caused by stack asking for piezoelectric ceramics 10 and 6 poor contact of elastic supporting member for supporting optical member
Topic.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
16, it is along the circumferential direction evenly equipped in sleeve wall and 16 one-to-one three U-shaped gap 101 of guiding axis.In lower connection block 15
Support arm 1501 is oriented to there are three outer marginal circumference is uniformly distributed and each guiding support arm 1501 is passed through simultaneously by corresponding U-shaped gap 101 respectively
It is sleeved on guiding axis 16 by clearance fit, the through-hole through guiding axis is respectively provided on each guiding support arm 1501
And it is installed with axle sleeve 17 respectively in through-hole.The lower connection block 15 can be under the guiding role of guiding axis 16 along the vertical direction
It is slided up and down in sleeve 1.
It is located at guiding axis 16 on each guiding support arm 1501 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 16.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 16
Fixed ring 19 is equipped in 19 side of axis fixed ring and is open and is fixed on guiding axis 16 by lock-screw 18.
Circumference uniform distribution is equipped with bulb plunger 9 between upper coupling block 13 and sleeve 1, and bulb plunger 9 is in the present embodiment with three
For a, 9 outer end of bulb plunger is threadedly attached in the plunger mounting base being along the circumferential direction laid in sleeve wall respectively
In 14, along the circumferential direction uniformly distributed there are three screw hole 102 in sleeve wall, 14 outer rim of plunger mounting base is ladder shaft-like and divides
Not by being mounted in corresponding screw hole 102 on the outside of sleeve 1 by being threaded into.The steel ball of 9 inner end of bulb plunger pushes into respectively
It is along the circumferential direction evenly arranged in three sliding slots 1301 of coupling block outer rim, the sliding slot 1301 is parallel with the axis of sleeve 1, leads to
Centralized positioning of the coupling block in sleeve can not only be realized by crossing bulb plunger；And piezoelectric ceramics two is stacked when needing to compensate
The parallelism error of working surface, can be by the cooperation of spring and steel ball in bulb plunger come real come when adjusting mobile base
Now the upper swing of coupling block in different directions, adjustable space are bigger.
The U-shaped gap 101 quite and along the mutual equidistant interval of 1 circumferencial direction of sleeve is arranged with screw hole quantity, each U-shaped
Central angle folded by the center line of gap 101 and adjacent 102 center line of screw hole is 60 degree.
It is uniformly connected with and the one-to-one adjusting rod 12 of U-shaped gap 101, adjusting rod 12 in upper 13 outer marginal circumference of coupling block
Inner end is threadedly coupled with upper 13 outer rim of coupling block, and 12 outer end of adjusting rod is stretched out by corresponding U-shaped gap 101 respectively；For realizing
The reset of upper coupling block 13 after test.
When work, the lock-screw 18 in each axis fixed ring 19 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked, monitor simultaneously
The preload force data measured by pressure sensor 11 tightens each axis fixed ring after the size of pretightning force reaches setting value
Lock-screw 18 on 19, lower connection block 15 is fixed on guiding axis 16.Then, piezoelectric ceramics is being stacked using external power supply
Apply pulse signal or swept-frequency signal between 10 two electrodes, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10 micro- to MEMS
The excitation of structure 4, while using the vibratory response of the contactless vibration detecting device detection MEMS micro-structure 4 of external optical, it utilizes
Pressure sensor 11 detects the power output for stacking piezoelectric ceramics 10.Finally, being unclamped after completing the excitation to MEMS micro-structure 4
Lock-screw 18 in each axis fixed ring 19 unclamps axis fixed ring 19, manually adjusts lower connection block 15 and moves down, then leads to
Toning pole 12 manually adjusts coupling block 13 and moves down, and makes to stack 10 top installation set 8 of piezoelectric ceramics and elastic supporting member for supporting optical member 6
It separates, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic, including sleeve and bottom plate, set in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member is equipped on sleeve and MEMS is micro-
Structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；In ring
It is located at outside sleeve between shape top plate and bottom plate and is evenly distributed in guiding axis, is along the circumferential direction evenly equipped with and is oriented in sleeve wall
U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each guiding support arm respectively by right to axis correspondingly
The U-shaped gap answered is passed through and is sleeved on guiding axis；It is located at guiding axis on each guiding support arm and is respectively equipped with locking device,
For lower connection block to be fixed on guiding axis；
The lower connection block upper end is hemispherical round end and to withstand at the baseplane center of coupling block, make upper and lower coupling block it
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure
Between force snesor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to along the circumferential direction
It is laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger inner end pushes into respectively to be along the circumferential direction evenly arranged on
In the sliding slot of coupling block outer rim, the work of piezoelectric ceramics two is stacked for realizing block compensation is coupled in the positioning of upper coupling block and auxiliary
The adjusting of surface parallelism error.
2. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 1, feature
It is: is along the circumferential direction evenly equipped with screw hole in sleeve wall, the plunger mounting base is respectively by being threadably mounted in screw hole.
3. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 2, feature
Be: the U-shaped gap and screw hole quantity quite and along the mutual equidistant interval in circumference direction are arranged.
4. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 1, feature
Be: the elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim, described
The thickness of support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, avoid MEMS micro-structure due to colloid cracks
It falls off.
5. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 4, feature
Be: three support chip outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
6. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 1 or 3, special
Sign is: the guiding axis is three.
7. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic described according to claim 1 or 3 or 4,
It is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoid by
In stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
The problem of.
8. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 6, feature
It is: is respectively provided with the through-hole across guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 1 or 3, special
Sign is: upper coupling block outer marginal circumference be uniformly connected with the one-to-one adjusting rod of U-shaped gap, adjusting rod outer end is respectively by right
The U-shaped gap answered stretches out；For realizing the reset of coupling block upper after test.
10. a kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic according to claim 1, feature
Be: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis, is fixed in axis
Ring side, which is equipped with, to be open and is fixed on guiding axis by lock-screw.
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