CN108195536B - A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load - Google Patents
A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load Download PDFInfo
- Publication number
- CN108195536B CN108195536B CN201711355455.5A CN201711355455A CN108195536B CN 108195536 B CN108195536 B CN 108195536B CN 201711355455 A CN201711355455 A CN 201711355455A CN 108195536 B CN108195536 B CN 108195536B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric ceramics
- mems micro
- sleeve
- optical member
- guiding axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a kind of for carrying out the four-axle type exciting device of dynamically load, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and elastic supporting member for supporting optical member and MEMS micro-structure to MEMS micro-structure；It is equipped with annular roof plate in sleeve upper end, micro-structure is located on annular roof plate by elastic supporting member for supporting optical member；Guiding axis is evenly equipped between annular roof plate and bottom plate, lower connection block is equipped with guiding support arm and covers on guiding axis, is respectively equipped with locking device on guiding support arm；Spherical groove is respectively equipped on upper and lower coupling block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim is uniformly connected with mounting blocks and is positioned at sleeve outer wall by bulb plunger.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, in particular to a kind of for moving to MEMS micro-structure
The four-axle type exciting device of state load.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics, In are described in a text
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
It is a kind of for carrying out the four of dynamically load to MEMS micro-structure the technical problem to be solved by the present invention is to provide
Shaft type exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make institute
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjustment process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, convenient for test MEMS micro-structure
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load, including sleeve and bottom plate, are covering
It is equipped in cylinder and stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, In
Elastic supporting member for supporting optical member and MEMS micro-structure are equipped with above sleeve, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by being successively mutually perpendicular to phase
The first linking arm even, the second linking arm, third linking arm and the 4th linking arm composition, for reducing the deflection of substrate；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
It is evenly equipped with and is evenly equipped with guiding support arm and each guiding with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
Support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis, is located at guiding axis on each guiding support arm and is distinguished
Equipped with locking device, for lower connection block to be fixed on guiding axis；
Spherical groove is respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is less than two
The radius of curvature of spherical groove is simultaneously clamped between two spherical grooves, makes to form one between upper and lower coupling block by steel ball
Adjust gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member；
It is uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Long hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, the U-shaped gap is quite and mutually equidistant along circumference direction with rectangular recess quantity
Arranged for interval.
As further preferred, the substrate is square, and four support arms pass through the first linking arm respectively and are connected to base
One end of plate surrounding and with substrate outer edge formed a L-type gap；To further decrease the deflection of substrate, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the guiding axis is four.
As further preferred, the connecting rod is four groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of every group of two connecting rods.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fixed on guiding axis by lock-screw.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
The beneficial effects of the present invention are:
1, due to being respectively equipped with spherical groove on the opposite face of upper coupling block and lower connection block, the radius of steel ball is less than two
The radius of curvature of a spherical groove is simultaneously clamped between two spherical grooves, then divides between steel ball and upper coupling block and lower connection block
It Xing Cheng not point contact；When needing to compensate the parallelism error for stacking two working surface of piezoelectric ceramics to adjust mobile base, on
Coupling block can be rotated using the contact point with steel ball as center of rotation, and adjustment process is smooth, smooth, be not in steel ball by card
Firmly the problem of, substantially reduces the shearing force stacked between each layer of piezoelectric ceramics.
2, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered by circumference uniform distribution respectively
Long hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl is pushed into respectively in the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall；The work of piezoelectric ceramics two is stacked when needing to compensate
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space are bigger；On capable of being easy to implement by mounting blocks after testing simultaneously
The reset of coupling block.
3, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided to pressure
The interference of force snesor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, exciting force obtained
Measured value it is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible.
5, due to the support arm that elastic supporting member for supporting optical member includes one piece of substrate and four circumference uniform distributions, each support arm is by successively
It is mutually perpendicular to the first connected linking arm, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
When work, the vibration deformation of elastic supporting member for supporting optical member is mainly from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the B-B cross-sectional view of Fig. 2.
Fig. 5 is that the present invention removes the top view after annular roof plate.
Fig. 6 is the top view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of lower connection block.
Fig. 8 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101. rectangular recess, 102. long holes, 103.U type gap, 2. annular roof plates, 3. bottom plates,
4.MEMS micro-structure, 5. micro-structure mounting plates, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second
Linking arm, 6013. third linking arms, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers,
10. stack piezoelectric ceramics, 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical grooves, 14. steel balls, 15.
Lower connection block, 1501. spherical grooves, 1502. guiding support arms, 16. adjusting screws, 17. axis fixed rings, 18. lock-screws, 19.
Guiding axis, 20. axle sleeves, 21. connecting rods.
Specific embodiment
As shown in FIG. 1 to FIG. 8, a kind of four-axle type for carrying out dynamically load to MEMS micro-structure of the present invention is sharp
Vibrating device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper connection
The mobile base that block 13, steel ball 14 and lower connection block 15 are constituted is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure on sleeve 1
4。
Pass through with bottom surface screw respectively on sleeve 1 and is fixed with the equal annular roof plate 2 and bottom plate 3 of outer diameter, it is described
MEMS micro-structure 4 is mounted on annular roof plate 2 by elastic supporting member for supporting optical member 6.The elastic supporting member for supporting optical member includes one piece of square substrate
602 and four circumference uniform distributions support arm 601, each support arm 601 is by the first linking arm being successively mutually connected vertically
6011, the second linking arm 6012, third linking arm 6013 and the 4th linking arm 6014 composition, four support arms 601 pass through respectively
First linking arm 6011 is connected to one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and base
602 outer rim of plate forms a L-type gap；For reducing the deflection of substrate, avoid MEMS micro-structure 4 due to colloid cracks
It falls off.Four support arms 601 of the elastic supporting member for supporting optical member 6 are fixed on annular roof plate 2 by pillar 7 using screw support respectively
Face, and on the same axis with sleeve 1.MEMS micro-structure 4 cements in the substrate of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5
At 602 upper surfaces center.
Mutual corresponding spherical groove is respectively equipped at center on upper coupling block 13 and the opposite face of lower connection block 15
1301 and spherical groove 1501, the radius of the steel ball 14 is much smaller than the radius of curvature of two spherical grooves and to be clamped in spherical surface recessed
Between slot 1501 and spherical groove 1301, make to be formed between upper coupling block 13 and lower connection block 15 between an adjustment by steel ball 14
Gap, the size in the adjustment gap are 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, stacks the base that 10 upper and lower ends of piezoelectric ceramics are clamped in elastic supporting member for supporting optical member 6
Between plate 602 and pressure sensor 11.Installation set 8, the resilient support are set and are bonded with stacking 10 upper end of piezoelectric ceramics button
The substrate 602 of part 6 is pressed in installation set 8, for avoiding the rough institute by stacking 10 top work surface of piezoelectric ceramics
Caused the problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and four guiding axis is uniformly connected with by circumferential screw
19, it is along the circumferential direction evenly equipped in sleeve wall and one-to-one four U-shaped gap 103 of guiding axis.The lower connection block 15
For cylinder, it is evenly distributed in 15 outer marginal circumference of lower connection block there are four guiding support arm 1502 and each guiding support arm 1502 is respectively by right
The U-shaped gap 103 answered is passed through and is sleeved on guiding axis 19 by clearance fit, is respectively equipped on each guiding support arm 1502
Through guiding axis through-hole and be installed in through-hole axle sleeve 20 respectively.
It is located at guiding axis 19 on each guiding support arm 1502 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 19.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 19
Fixed ring 17 is equipped in 17 side of axis fixed ring and is open and by 18 clamping fixed of lock-screw on guiding axis 19.
The upper coupling block 13 is eight prismatic, is uniformly connected with connecting rod 21 in upper 13 outer marginal circumference of coupling block, connects
Long hole 102 of 21 outer end of bar respectively by circumference uniform distribution in sleeve wall is pierced by and is connected with mounting blocks 12, divides on mounting blocks 12
Bulb plunger 9 is not installed, the steel ball of 9 outer end of bulb plunger pushes into the square for being along the circumferential direction evenly arranged on 1 outer wall of sleeve respectively
In connected in star 101, for assisting mobile base compensation to stack the adjusting and survey of two working surface parallelism error of piezoelectric ceramics
The reset of upper coupling block 13 after examination.It is two that the connecting rod 21, which is four groups of circumference uniform distribution and every group, and each mounting blocks 12 divide
It is not fixed by screws in the outer end of every group of two connecting rods 21,21 inner end of connecting rod is threadedly attached in coupling block respectively
In the corresponding screw hole of 13 outer rims.The bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks, and in the through-hole external port
It is equipped with by screw thread and adjusts screw 16, for heading into bulb plunger 9 in corresponding rectangular recess 101.The long hole 102
Width and the diameter glade plane space of connecting rod 21 cooperate, and the center line of long hole 102 and rectangular recess 101 is flat with the axis of sleeve
Row, the U-shaped gap 103 is with 101 quantity of rectangular recess quite and along the mutual equidistant interval arrangement of 1 circumferencial direction of sleeve, each U
Central angle folded by the axis of the center line of type gap 103 and adjacent 101 center line of rectangular recess and sleeve is 45 degree.
When work, the lock-screw 18 in each axis fixed ring 17 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13, steel ball 14 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked,
The preload force data measured by pressure sensor 11 is monitored simultaneously to screw each after the size of pretightning force reaches setting value
Lock-screw 18 in axis fixed ring 17, lower connection block 15 is fixed on guiding axis 19.Then, it is being stacked using external power supply
Apply pulse signal or swept-frequency signal between two electrodes of piezoelectric ceramics 10, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10
Excitation to MEMS micro-structure 4, MEMS micro-structure 4 are vibrated under the cooperation of elastic supporting member for supporting optical member 6, while using external optical
The vibratory response of contactless vibration detecting device detection MEMS micro-structure 4, stacks piezoelectric ceramics using the detection of pressure sensor 11
10 power output.Finally, unclamping lock-screw 18 unclamps axis fixed ring 17, hand after completing the excitation to MEMS micro-structure 4
The dynamic lower connection block 15 that adjusts moves down, then drives upper coupling block 13 to move down by adjusting mounting blocks 12, makes to stack piezoelectricity
Ceramic 10 top installation sets 8 are separated with elastic supporting member for supporting optical member 6, avoid stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (9)
1. it is a kind of for carrying out the four-axle type exciting device of dynamically load, including sleeve and bottom plate to MEMS micro-structure, in sleeve
Interior be equipped with stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, is covering
Cylinder is equipped with elastic supporting member for supporting optical member and MEMS micro-structure above, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；It is described
Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition being vertically connected, for reducing the deformation of substrate
Amount；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have and is evenly equipped with guiding support arm and each guiding support arm with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively, be located at guiding axis on each guiding support arm and be respectively equipped with
Locking device, for lower connection block to be fixed on guiding axis；
Spherical groove, less than two spherical surfaces of radius of the steel ball are respectively equipped on upper coupling block and the opposite face of lower connection block
The radius of curvature of groove is simultaneously clamped between two spherical grooves, makes to form an adjustment between upper and lower coupling block by steel ball
Gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensor
Between elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of surface parallelism error.
2. it is according to claim 1 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the U-shaped gap and rectangular recess quantity quite and along the mutual equidistant interval in circumference direction are arranged.
3. it is according to claim 1 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the substrate is square, four support arms pass through respectively the first linking arm be connected to substrate surrounding one end and with
Substrate outer edge forms a L-type gap；To further decrease the deflection of substrate, MEMS micro-structure is avoided to send out because of colloid cracking
Life falls off.
4. it is according to claim 3 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
Be characterized in: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
5. it is according to claim 1 or 2 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
It is characterized in that: the guiding axis is four.
6. it is according to claim 5 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the connecting rod is four groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in often respectively
The outer end of two connecting rods of group.
7. it is according to claim 1 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis, in axis
Fixed ring side, which is equipped with, to be open and is fixed on guiding axis by lock-screw.
8. a kind of for carrying out the four-axle type exciting dress of dynamically load to MEMS micro-structure described according to claim 1 or 3 or 4
It sets, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
Bad problem.
9. it is according to claim 1 a kind of for carrying out the four-axle type exciting device of dynamically load to MEMS micro-structure,
It is characterized in: is respectively provided with the through-hole through guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711355455.5A CN108195536B (en) | 2017-12-16 | 2017-12-16 | A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711355455.5A CN108195536B (en) | 2017-12-16 | 2017-12-16 | A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108195536A CN108195536A (en) | 2018-06-22 |
| CN108195536B true CN108195536B (en) | 2019-11-29 |
Family
ID=62576848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711355455.5A Expired - Fee Related CN108195536B (en) | 2017-12-16 | 2017-12-16 | A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108195536B (en) |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414C3 (en) * | 1970-06-04 | 1984-01-05 | Braun Ag, 6000 Frankfurt | Spherical layer shaft bearing for absorbing smaller forces |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP5470724B2 (en) * | 2008-03-13 | 2014-04-16 | トヨタ自動車株式会社 | Vibration test equipment |
| CN101476970B (en) * | 2009-01-14 | 2010-09-29 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| DE102012112140A1 (en) * | 2012-12-12 | 2014-06-12 | Dorma Gmbh & Co. Kg | Cam-closer has cam mounted between followers, where each follower is mounted in piston, and one of follower has spherical upper surface with point contact with cam in partial manner |
| CN105318150B (en) * | 2014-07-15 | 2018-01-02 | 冠研（上海）专利技术有限公司 | Shockproof runners with align structures |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
-
2017
- 2017-12-16 CN CN201711355455.5A patent/CN108195536B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN108195536A (en) | 2018-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108217587B (en) | Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics | |
| CN108036912B (en) | Exciting device outside a kind of MEMS micro-structure triple axle piece based on inverse piezoelectric effect | |
| CN108151991B (en) | A kind of four-axle type Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics | |
| CN108217590B (en) | Triple axle seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics | |
| CN108120578B (en) | A kind of triple axle exciting bank that shock loading can be loaded to MEMS micro-structure | |
| CN108168817B (en) | A kind of MEMS micro-structure triple axle exciting device based on pedestal motivational techniques | |
| CN108195536B (en) | A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load | |
| CN108168815B (en) | A kind of MEMS micro-structure triple axle exciting bank by Piezoelectric Ceramic | |
| CN108225700B (en) | A kind of MEMS micro-structure four-axle type exciting bank by Piezoelectric Ceramic | |
| CN108163805B (en) | Triple axle exciting device for the test of MEMS micro-structure dynamic characteristics | |
| CN108168814B (en) | A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure | |
| CN108020392B (en) | Exciting device outside a kind of MEMS micro-structure four-axle type piece based on inverse piezoelectric effect | |
| CN108163804B (en) | It is a kind of can dynamic driving MEMS micro-structure four-axle type exciting bank | |
| CN108217582B (en) | A kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques | |
| CN108217584B (en) | A kind of triple axle exciting device for MEMS micro-structure progress dynamically load | |
| CN108217585B (en) | It is a kind of using piezoelectric ceramics as the MEMS micro-structure four-axle type exciting device of driving source | |
| CN108217583B (en) | A kind of MEMS micro-structure triple axle exciting bank with mobile base structure | |
| CN108168816B (en) | It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank | |
| CN108163806B (en) | A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics | |
| CN107894315B (en) | A kind of four-axle type exciting bank that shock loading can be loaded to MEMS micro-structure | |
| CN108181069B (en) | A kind of MEMS micro-structure four-axle type dynamic loading device based on piezoelectric ceramics | |
| CN108225699B (en) | It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source | |
| CN108225702B (en) | A kind of triple axle Piezoelectric Ceramics Excitation device for the test of MEMS micro-structure dynamic characteristics | |
| CN108181068B (en) | A kind of triple axle exciting device that piece external excitation can be carried out to MEMS micro-structure | |
| CN108225701B (en) | A kind of MEMS micro-structure triple axle seat excitation apparatus by stacking Piezoelectric Ceramic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191129 Termination date: 20201216 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |