CN108217584B - A kind of triple axle exciting device for MEMS micro-structure progress dynamically load - Google Patents
A kind of triple axle exciting device for MEMS micro-structure progress dynamically load Download PDFInfo
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- CN108217584B CN108217584B CN201711355469.7A CN201711355469A CN108217584B CN 108217584 B CN108217584 B CN 108217584B CN 201711355469 A CN201711355469 A CN 201711355469A CN 108217584 B CN108217584 B CN 108217584B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81C99/0035—Testing
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Abstract
The invention discloses a kind of for carrying out the triple axle exciting device of dynamically load, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and elastic supporting member for supporting optical member and MEMS micro-structure to MEMS micro-structure；It is equipped with annular roof plate and bottom plate at sleeve both ends, micro-structure is located on top plate by elastic supporting member for supporting optical member；Guiding axis is evenly equipped between top plate and bottom plate, lower connection block is equipped with guiding support arm and is passed through by sleeve wall and covered on guiding axis, is respectively equipped with locking device on guiding support arm；Spherical groove is respectively equipped on upper coupling block and lower connection block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim is supported in sleeve by the bulb plunger that connecting rod connects.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, in particular to a kind of for moving to MEMS micro-structure
The triple axle exciting device of state load.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
It is a kind of for carrying out the three of dynamically load to MEMS micro-structure the technical problem to be solved by the present invention is to provide
Shaft type exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make institute
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjustment process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, convenient for test MEMS micro-structure
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of triple axle exciting device for MEMS micro-structure progress dynamically load, including sleeve, set in sleeve
Have and stack piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, on sleeve
Face is equipped with elastic supporting member for supporting optical member and MEMS micro-structure, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is installed by elastic supporting member for supporting optical member
On annular roof plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, along circle in sleeve wall
Circumferential direction, which is evenly equipped with, is evenly equipped with guiding support arm and every with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
A guiding support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis, and guiding axis is located on each guiding support arm
Place is respectively equipped with locking device, for lower connection block to be fixed on guiding axis；
Spherical groove is respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is less than two
The radius of curvature of spherical groove is simultaneously clamped between two spherical grooves, makes to form one between upper and lower coupling block by steel ball
Adjust gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member；
It is uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Long hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, the U-shaped gap is quite and mutually equidistant along circumference direction with rectangular recess quantity
Arranged for interval.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
As further preferred, the guiding axis is three.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fixed on guiding axis by lock-screw.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with screw is adjusted, for bulb plunger to be headed into rectangular recess.
The beneficial effects of the present invention are:
1, due to being respectively equipped with spherical groove on the opposite face of upper coupling block and lower connection block, the radius of steel ball is less than two
The radius of curvature of a spherical groove is simultaneously clamped between two spherical grooves, then forms point contact between steel ball and upper coupling block,
Point contact is also formed between first steel ball and lower connection block；When the depth of parallelism for needing compensation to stack two working surface of piezoelectric ceramics is missed
Difference come when adjusting mobile base, upper coupling block can be rotated using the contact point with steel ball as center of rotation, adjustment process is smooth,
Smoothly, be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
2, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered by circumference uniform distribution respectively
Long hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl is pushed into respectively in the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall；The work of piezoelectric ceramics two is stacked when needing to compensate
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space are bigger；On capable of being easy to implement by mounting blocks after testing simultaneously
The reset of coupling block.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after annular roof plate.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101. rectangular recess, 102. long holes, 103.U type gap, 2. annular roof plates, 3. bottom plates,
4.MEMS micro-structure, 5. micro-structure mounting plates, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets,
9. piezoelectric ceramics is stacked bulb plunger, 10., 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical grooves,
14. steel ball, 15. lower connection blocks, 1501. spherical grooves, 1502. guiding support arms, 16. adjusting screws, 17. lock-screws, 18. axis
Fixed ring, 19. guiding axis, 20. axle sleeves, 21. connecting rods.
Specific embodiment
As shown in FIG. 1 to FIG. 7, a kind of triple axle piezoelectricity for the test of MEMS micro-structure dynamic characteristics of the present invention
Ceramic exciting bank, including a cannulated sleeve 1, in sleeve 1 be equipped with stack piezoelectric ceramics 10, pressure sensor 11 and by
The mobile base that upper coupling block 13, steel ball 14 and lower connection block 15 are constituted is equipped with elastic supporting member for supporting optical member 6 and MEMS on sleeve 1
Micro-structure 4.
Pass through screw respectively with bottom surface on sleeve 1 and be fixed with annular roof plate 2 and bottom plate 3, the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of cylindrical tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.The three of the elastic supporting member for supporting optical member 6
A support chip 602 is fixed on above annular roof plate 2 by three pillars 7 using screw support, and with sleeve 1 in same axis
On.MEMS micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
The upper coupling block 13 and lower connection block 15 are cylindrical shape, in the opposite of upper coupling block 13 and lower connection block 15
Mutual corresponding spherical groove 1301 and spherical groove 1501 are respectively equipped on face at center, the radius of the steel ball 14 is less than two
The radius of curvature of a spherical groove is simultaneously clamped between spherical groove 1501 and spherical groove 1301, makes upper connection by steel ball 14
An adjustment gap is formed between block 13 and lower connection block 15, the size in the adjustment gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
19, it is along the circumferential direction evenly equipped in sleeve wall and one-to-one three U-shaped gap 103 of guiding axis.Outside lower connection block 15
Edge circumference uniform distribution is there are three guiding support arm 1502 and each guiding support arm 1502 is passed through and covered by corresponding U-shaped gap 103 respectively
On guiding axis 19, the through-hole through guiding axis 19 is respectively equipped on each guiding support arm 1502 and is inlayed respectively in through-hole
Equipped with axle sleeve 20, axle sleeve 20 and 19 glade plane space of guiding axis cooperate.
It is located at guiding axis 19 on each guiding support arm 1502 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 19.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 19
Fixed ring 18 is equipped in 18 side of axis fixed ring and is open and is fixed on guiding axis 19 by lock-screw 17.
It is uniformly connected with connecting rod 21 in upper 13 outer marginal circumference of coupling block, 21 outer end of connecting rod is being covered by circumference uniform distribution respectively
Long hole 102 on barrel is pierced by and is connected with mounting blocks 12, and bulb plunger 9, bulb plunger 9 are separately installed on mounting blocks 12
The steel ball of outer end is pushed into respectively in the rectangular recess 101 for being along the circumferential direction evenly arranged on 1 outer wall of sleeve, for assisting mobile base
Compensation stacks the reset of upper coupling block 13 after the adjusting and test of two working surface parallelism error of piezoelectric ceramics.The connection
Bar 21 is three groups of circumference uniform distribution and every group is two, and each mounting blocks 12 are fixed by screws in two connecting rods 21 respectively
Outer end, 21 inner end of connecting rod are threadedly attached in respectively in the corresponding screw hole of 13 outer rim of coupling block.The bulb plunger 9 is inserted
It in the through-hole at 12 middle part of mounting blocks, and is equipped in the through-hole external port by screw thread and adjusts screw 16, be used for ball
Headpin plug 9 heads into rectangular recess 101.The width of the long hole 102 and the diameter glade plane space of connecting rod 21 cooperate, long hole
102 and rectangular recess 101 center line it is parallel with the axis of sleeve, the U-shaped gap 103 and 101 quantity phase of rectangular recess
When and along 1 circumferencial direction of sleeve mutual equidistant interval arrangement, the center line and adjacent rectangular recess 101 of each U-shaped gap 103
Central angle folded by the axis of center line and sleeve 1 is 60 degree.
When work, the lock-screw 17 in each axis fixed ring 18 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13, steel ball 14 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked,
The preload force data measured by pressure sensor 11 is monitored simultaneously to screw each after the size of pretightning force reaches setting value
Lock-screw 17 in axis fixed ring 18, lower connection block 15 is fixed on guiding axis 19.Then, it is being stacked using external power supply
Apply pulse signal or swept-frequency signal between two electrodes of piezoelectric ceramics 10, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10
Excitation to MEMS micro-structure 4, while being rung using the vibration of the contactless vibration detecting device detection MEMS micro-structure 4 of external optical
It answers, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when completing the excitation to MEMS micro-structure 4
Afterwards, unclamping the lock-screw 17 in each axis fixed ring 18 unclamps axis fixed ring 18, manually adjusts lower connection block 15 to moving down
It is dynamic, then drive upper coupling block 13 to move down by mounting blocks 12, make to stack 10 top installation set 8 of piezoelectric ceramics and resilient support
Part 6 separates, and avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. it is a kind of for carrying out the triple axle exciting device of dynamically load, including sleeve to MEMS micro-structure, it is equipped in sleeve
Piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block are stacked, on sleeve
Equipped with elastic supporting member for supporting optical member and MEMS micro-structure, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is mounted on ring by elastic supporting member for supporting optical member
On shape top plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is circumferentially square in sleeve wall
To being evenly equipped with, U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each lead correspondingly with guiding axis
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively to support arm, guiding axis is located on each guiding support arm and is punished
Not She You locking device, for lower connection block to be fixed on guiding axis；
Spherical groove, less than two spherical surfaces of radius of the steel ball are respectively equipped on upper coupling block and the opposite face of lower connection block
The radius of curvature of groove is simultaneously clamped between two spherical grooves, makes to form an adjustment between upper and lower coupling block by steel ball
Gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensor
Between elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of surface parallelism error.
2. it is according to claim 1 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the U-shaped gap and rectangular recess quantity quite and along the mutual equidistant interval in circumference direction are arranged.
3. it is according to claim 1 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim,
The thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, avoid MEMS micro-structure due to colloid cracking
It falls off.
4. it is according to claim 3 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
5. it is according to claim 1 or 2 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
It is characterized in that: the guiding axis is three.
6. it is according to claim 5 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis, in axis
Fixed ring side, which is equipped with, to be open and is fixed on guiding axis by lock-screw.
7. a kind of for carrying out the triple axle exciting dress of dynamically load to MEMS micro-structure described according to claim 1 or 3 or 4
It sets, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
Bad problem.
8. it is according to claim 6 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
It is characterized in: is respectively provided with the through-hole through guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. it is according to claim 5 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
Be characterized in: the connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in often respectively
The outer end of two connecting rods of group.
10. it is according to claim 9 a kind of for carrying out the triple axle exciting device of dynamically load to MEMS micro-structure,
It is characterized in: in the through-hole that the bulb plunger is inserted into the middle part of mounting blocks, and is equipped in through-hole external port and adjusts screw, be used for
Bulb plunger is headed into rectangular recess.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711355469.7A CN108217584B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle exciting device for MEMS micro-structure progress dynamically load |
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| CN201711355469.7A CN108217584B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle exciting device for MEMS micro-structure progress dynamically load |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414C3 (en) * | 1970-06-04 | 1984-01-05 | Braun Ag, 6000 Frankfurt | Spherical layer shaft bearing for absorbing smaller forces |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP5470724B2 (en) * | 2008-03-13 | 2014-04-16 | トヨタ自動車株式会社 | Vibration test equipment |
| CN101476970B (en) * | 2009-01-14 | 2010-09-29 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| DE102012112140A1 (en) * | 2012-12-12 | 2014-06-12 | Dorma Gmbh & Co. Kg | Cam-closer has cam mounted between followers, where each follower is mounted in piston, and one of follower has spherical upper surface with point contact with cam in partial manner |
| CN105318150B (en) * | 2014-07-15 | 2018-01-02 | 冠研（上海）专利技术有限公司 | Shockproof runners with align structures |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
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