CN108168816B - It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank - Google Patents
It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank Download PDFInfo
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- CN108168816B CN108168816B CN201711355467.8A CN201711355467A CN108168816B CN 108168816 B CN108168816 B CN 108168816B CN 201711355467 A CN201711355467 A CN 201711355467A CN 108168816 B CN108168816 B CN 108168816B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/022—Vibration control arrangements, e.g. for generating random vibrations
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Abstract
The present invention disclose it is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block and elastic supporting member for supporting optical member and MEMS micro-structure；It is equipped with annular roof plate in sleeve upper end, micro-structure is located on annular roof plate by elastic supporting member for supporting optical member；It is evenly equipped with guiding axis between top, bottom plate, lower connection block is evenly equipped with the guiding support arm for being passed through by sleeve wall and being covered on guiding axis；The spherical surface hill and spherical groove of cooperation are respectively equipped on upper and lower coupling block, the circumference uniform distribution tension spring between upper and lower coupling block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Lower part is equipped with the electric threaded shaft transmission mechanism of connection lower connection block in sleeve.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, in particular to it is a kind of can dynamic driving MEMS micro-structure
Triple axle exciting bank.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
Technical problem to be solved by the invention is to provide it is a kind of can the triple axle of dynamic driving MEMS micro-structure motivate dress
It sets, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make preload obtained
Power measured value is more accurate, and the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes more suitable
It is smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, bigger adjusting space is capable of providing, convenient for surveying
Try the dynamic characteristic parameter of MEMS micro-structure.
To solve the above problems, the present invention adopts the following technical scheme:
It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank, including sleeve and bottom plate are equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knot of MEMS are equipped on sleeve
Structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
It is evenly equipped with and is evenly equipped with guiding support arm and each guiding with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
Support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis；
Mutually matched spherical surface hill and spherical groove, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make coupling block
Point contact is formed between lower connection block；Circumference uniform distribution is connected between upper coupling block bottom surface and the guiding support arm of lower connection block
Tension spring, to assist connection block compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics；
The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensing
Between device and elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, three support chip outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the guiding axis is three.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
It is along the circumferential direction uniformly distributed respectively on the guiding support arm of upper coupling block bottom surface and lower connection block as further preferred
There is one-to-one spring mounting seat up and down, the tension spring both ends are connected to about two mutual corresponding spring mounting seats
On.
As further preferred, the tension spring is arranged in a vertical direction.
The beneficial effects of the present invention are:
1, due to being respectively equipped with mutually matched spherical surface hill and spherical surface on the opposite face of upper coupling block and lower connection block
Groove, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, is made
Point contact is formed between upper coupling block and lower connection block；When the parallelism error for needing compensation to stack two working surface of piezoelectric ceramics
Come when adjusting mobile base, upper coupling block can be swung using the contact point of spherical surface hill and spherical groove as center of rotation, adjust
Section process is smooth, smooth, is not in substantially reduce the shearing force stacked between each layer of piezoelectric ceramics the problem of blocking.
2, due between upper coupling block bottom surface and the guiding support arm of lower connection block circumference uniform distribution be connected with tension spring；Work as needs
Compensation stacks the parallelism error of two working surface of piezoelectric ceramics can carry out reality by the deformation of tension spring when adjusting mobile base
Now the upper swing of coupling block in different directions, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base composed by upper coupling block and lower connection block mobile to realize, adjustment process is simple, clever
It is living.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the structural schematic diagram of elastic supporting member for supporting optical member.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, the installation of 5. micro-structures
Plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets, 9. spring mounting seats, 10. stack piezoelectricity
Ceramics, 11. pressure sensors, 12. tension springs, coupling block on 13., 1301. spherical surface hills, 14. axle sleeves, 15. lower connection blocks,
1501. spherical grooves, 1502. guiding support arms, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20.
Thick stick.
Specific embodiment
As shown in Fig. 1~Fig. 6, one kind of the present invention can dynamic driving MEMS micro-structure triple axle exciting bank,
Including a cannulated sleeve 1, it is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper 13 and of coupling block
The mobile base that lower connection block 15 is constituted is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
Passing through with bottom surface screw respectively on sleeve 1, to be fixed with outer diameter equal and be greater than the annular roof plate 2 of sleeve outer diameter
With bottom plate 3, the MEMS micro-structure 4 is mounted on annular roof plate 2 by elastic supporting member for supporting optical member 6.The elastic supporting member for supporting optical member 6 is by one
A cylinder tabletting 601 and circumference uniform distribution are constituted in three radially arranged support chips 602 of 601 outer rim of tabletting, the branch
The thickness of blade 602 is much smaller than the thickness of tabletting 601；To reduce the deflection of tabletting 601, avoid MEMS micro-structure 4 because of colloid
It cracks and falls off.Three 602 outer ends of support chip of the elastic supporting member for supporting optical member 6 pass through Hollow Pillar 7 respectively and use screw branch
Support is fixed on above annular roof plate 2, and on the same axis with sleeve 1.MEMS micro-structure 4 passes through 5 cementation of micro-structure mounting plate
At the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block and couples on after insert
13 either flush of block stacks piezoelectric ceramics 10 and is bonded on pressure sensor 11 for cylindrical and lower end, stacks piezoelectric ceramics 10
Both ends are clamped between pressure sensor 11 and the tabletting 601 of elastic supporting member for supporting optical member 6.It sets and glues stacking 10 upper end of piezoelectric ceramics button
It is connected to installation set 8, the tabletting 601 of the elastic supporting member for supporting optical member 6 is pressed in installation set 8, for avoiding due to stacking piezoelectric ceramics 10
Top work surface it is rough caused by the problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and guiding axis 19 is uniformly connected with by circumferential screw, this
Embodiment guiding axis 19 for three, be along the circumferential direction evenly equipped in sleeve wall with guiding axis one-to-one three it is U-shaped
Gap 101.The lower connection block 15 is cylinder, and in 15 outer rim lower circumferential of lower connection block, uniformly distributed there are three be oriented to support arm 1502
And each guiding support arm 1502 is passed through by corresponding U-shaped gap 101 respectively and is sleeved on guiding axis 19 by clearance fit,
The through-hole through guiding axis is respectively equipped on each guiding support arm 1502 and is installed with axle sleeve 14, the second line of a couplet respectively in through-hole
Connecing block 15 can slide up and down in sleeve 1 along the vertical direction under the guiding role of guiding axis 19.
Mutually matched spherical surface hill 1301 and ball are respectively equipped on upper coupling block 13 and the opposite face of lower connection block 15
Face groove 1501, the spherical surface hill 1301 is inserted into spherical groove 1501 and the radius of curvature of spherical surface hill is less than spherical groove
Radius of curvature, make to form point contact between coupling block 13 and lower connection block 15.In upper 13 bottom surface of coupling block and lower connection block
Circumference uniform distribution is connected with tension spring 12 between 15 guiding support arm 1502；The flat of two working surface of piezoelectric ceramics is stacked when needing to compensate
Row degree error is come when adjusting mobile base, upper coupling block 13 can be to turn with the contact point of spherical surface hill 1301 and spherical groove 1501
Dynamic center is swung, while realizing the swing of upper coupling block in different directions, adjustable sky by the deformation of tension spring
Between it is bigger.
It is equal in circumferential direction through screw respectively on the guiding support arm 1502 of upper 13 bottom surface of coupling block and lower connection block 15
It is furnished with one-to-one spring mounting seat 9 up and down, the tension spring 12 is arranged in a vertical direction and both ends are connected on two
Under on mutual corresponding spring mounting seat 9.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 20 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is fixed on 17 bottom surface of support plate, 20 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is located at the bottom center of lower connection block and passes through with lower connection block 15
The screw of circumference uniform distribution connects, for driving lower connection block 15 to move up and down.
When work, control linear stepping motor 18 starts and is pushed up by lead screw 20 and the transmission of screw 16 by upper first
The mobile base that coupling block 13 and lower connection block 15 are constituted applies pretightning force to piezoelectric ceramics 10 is stacked, while monitoring is passed by pressure
The preload force data that sensor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops work
Make.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, using stacking
The inverse piezoelectric effect of piezoelectric ceramics 10 realizes the excitation to MEMS micro-structure 4, while the vibration measuring contactless using external optical
Device detects the vibratory response of MEMS micro-structure 4, and the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Most
Afterwards, after completing the excitation to MEMS micro-structure 4, control linear stepping motor 18 drives lower connection block 15 and 13 structure of upper coupling block
At mobile base move down, make to stack 10 top installation set 8 of piezoelectric ceramics and separated with elastic supporting member for supporting optical member 6, avoid stacking
Piezoelectric ceramics 10 is constantly in the state of stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (8)
1. one kind can dynamic driving MEMS micro-structure triple axle exciting bank, including sleeve and bottom plate are equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are equipped with elastic supporting member for supporting optical member and the micro- knot of MEMS on sleeve
Structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have and is evenly equipped with guiding support arm and each guiding support arm with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively；
Mutually matched spherical surface hill and spherical groove, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes coupling block under
Point contact is formed between coupling block；Circumference uniform distribution is connected with drawing between upper coupling block bottom surface and the guiding support arm of lower connection block
Spring, to assist connection block compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics；
The pressure sensor is installed in the centre bore of coupling block top surface, stack piezoelectric ceramics be clamped in pressure sensor with
Between elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down.
2. one kind according to claim 1 can dynamic driving MEMS micro-structure triple axle exciting bank, it is characterized in that: institute
Stating elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim, the support chip
Thickness be less than tabletting thickness；To reduce the deflection of tabletting, MEMS micro-structure is avoided to fall off because of colloid cracking.
3. one kind according to claim 2 can dynamic driving MEMS micro-structure triple axle exciting bank, it is characterized in that: institute
Three support chip outer ends for stating elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
4. one kind according to claim 1 can dynamic driving MEMS micro-structure triple axle exciting bank, it is characterized in that: institute
Stating guiding axis is three.
5. one kind according to claim 1 or 2 or 3 can dynamic driving MEMS micro-structure triple axle exciting bank, it is special
Sign is: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoiding due to folded
Heap piezoelectric ceramics top work surface it is rough caused by stack asking for piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
Topic.
6. one kind according to claim 1 can dynamic driving MEMS micro-structure triple axle exciting bank, it is characterized in that:
It is respectively provided with the through-hole through guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
7. it is according to claim 1 or 6 it is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank, feature
It is: is along the circumferential direction evenly equipped with one-to-one spring up and down respectively on the guiding support arm of upper coupling block bottom surface and lower connection block
Mounting base, the tension spring both ends are connected on about two mutual corresponding spring mounting seats.
8. one kind according to claim 7 can dynamic driving MEMS micro-structure triple axle exciting bank, it is characterized in that: institute
Tension spring is stated to be arranged in a vertical direction.
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| CN201711355467.8A CN108168816B (en) | 2017-12-16 | 2017-12-16 | It is a kind of can dynamic driving MEMS micro-structure triple axle exciting bank |
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| CN109883639B (en) * | 2019-03-25 | 2020-06-26 | 浙江大学宁波理工学院 | Three-degree-of-freedom electro-hydraulic control type micro-excitation system |
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