CN108168818B - A kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics - Google Patents
A kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics Download PDFInfo
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- CN108168818B CN108168818B CN201711355483.7A CN201711355483A CN108168818B CN 108168818 B CN108168818 B CN 108168818B CN 201711355483 A CN201711355483 A CN 201711355483A CN 108168818 B CN108168818 B CN 108168818B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/022—Vibration control arrangements, e.g. for generating random vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/027—Specimen mounting arrangements, e.g. table head adapters
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- Microelectronics & Electronic Packaging (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics, including sleeve, piezoelectric ceramics, pressure sensor, upper coupling block, steel ball, lower connection block and elastic supporting member for supporting optical member and MEMS micro-structure；Lower part is equipped with electric threaded shaft transmission mechanism in sleeve, for driving lower connection block mobile；It is respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Guiding axis is along the circumferential direction evenly equipped in sleeve；Sliding seat is respectively equipped on guiding axis, upper coupling block passes through tension spring with each sliding seat respectively and connect.The device can apply different size of pretightning force to piezoelectric ceramics is stacked, keep pretightning force measured value obtained more accurate simultaneously, the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes more smooth and smooth, it can be avoided falling off for test micro element, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, in particular to the micro- knot of a kind of MEMS based on piezoelectric ceramics
Structure triple axle seat excitation apparatus.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of MEMS micro-structure triple axle bottom based on piezoelectric ceramics
Seat exciting bank, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
The pretightning force measured value obtained is more accurate, and the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, can be avoided test micro element
Fall off, convenient for test MEMS micro-structure dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics, including sleeve, are equipped in sleeve
Piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block are stacked, on sleeve
Equipped with elastic supporting member for supporting optical member and MEMS micro-structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down；
It is respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, the half of the steel ball
Diameter is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove, makes upper and lower coupling block by steel ball
Between formed an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness when for guaranteeing that lower connection block moves up and down；
It is arranged with sliding seat respectively on guiding axis, the upper coupling block and each sliding seat are respectively by along upper coupling block
The uniformly distributed tension spring connection of outer marginal circumference；For assisting mobile base compensation to stack two working surface parallelism error of piezoelectric ceramics
It adjusts.
As further preferred, corresponded in upper coupling block outer rim and be respectively equipped with attachment base at each sliding seat, the tension spring
It is connected between sliding seat and corresponding attachment base.
As further preferred, every guiding shaft position is corresponded in sleeve wall and is respectively equipped with long hole, long centerline hole and
Corresponding guiding axis axis and sleeve axis in one plane, for going up the reset of coupling block after test.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
As further preferred, the upper coupling block outer rim is hexagon.
As further preferred, the guiding axis is three and is uniformly connected between annular roof plate and support plate.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
The beneficial effects of the present invention are:
1, since the radius of steel ball is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove,
Line is then formed between steel ball and upper coupling block to contact, is point contact between steel ball and lower connection block, stacks piezoelectricity when needing to compensate
The parallelism error of ceramic two working surfaces is come when adjusting mobile base, upper coupling block can be with the contact point of steel ball and lower connection block
It is rotated for center of rotation, adjustment process is smooth, smooth, is not in the problem of steel ball is stuck, substantially reduces and stack
Shearing force between each layer of piezoelectric ceramics.
2, due to being along the circumferential direction laid with guiding axis in sleeve, it is arranged with sliding seat respectively on guiding axis, institute
It states coupling block and is connect with the tension spring that each sliding seat passes through circumference uniform distribution respectively；The work of piezoelectric ceramics two is stacked when needing to compensate
The parallelism error on surface when adjusting mobile base, can realize the upper coupling block in not Tongfang by the deformation of different springs
Upward swing, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives mobile base mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after annular roof plate.
Fig. 5 is the schematic perspective view of elastic supporting member for supporting optical member.
In figure: 1. sleeves, 101. long holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, 5. micro-structure mounting plates, 6.
Elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets, 9. sliding seats, 10. stack piezoelectric ceramics, 11. pressures
Force snesor, 12. attachment bases, coupling block on 13., 1301. conical sockets, 14. steel balls, 15. lower connection blocks, 1501. spherical surfaces are recessed
Slot, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. axle sleeves, 21. tension springs, 22. lead screws.
Specific embodiment
As shown in fig. 1~fig. 5, a kind of MEMS micro-structure triple axle pedestal excitation based on piezoelectric ceramics of the present invention
Device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13, the mobile base that steel ball 14 and lower connection block 15 are constituted, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of cylindrical tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.The three of the elastic supporting member for supporting optical member 6
A support chip 602 is fixed on above annular roof plate 2 by three pillars 7 using screw support, and with sleeve 1 in same axis
On.MEMS micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 22 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 22 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, and band is used for
Dynamic lower connection block 15 moves up and down.
Mutual corresponding conical socket is respectively equipped at center on upper coupling block 13 and the opposite face of lower connection block 15
1301 and spherical groove 1501, the radius of the steel ball 14 is less than the radius of curvature of spherical groove 1501 and is clamped in spherical groove
Between 1501 and conical socket 1301, make to be formed between upper coupling block 13 and lower connection block 15 between an adjustment by steel ball 14
Gap, the size in the adjustment gap are 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
Three guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 passes through the flange that 15 lower end of lower connection block is arranged in by clearance fit
Uniformly distributed pilot hole on disk, levelness when for guaranteeing that lower connection block 15 moves up and down.It is located in 15 lower end of lower connection block and leads
It is installed with axle sleeve 20 respectively into hole.
It is located above lower connection block 15 on guiding axis 19 and sliding seat 9, the first line of a couplet is arranged with by clearance fit respectively
It connects block 13 and is connect respectively by the tension spring 21 of circumference uniform distribution with each sliding seat 9.Upper 13 outer rim of coupling block is hexagon, upper
13 outer rim of coupling block corresponds at each sliding seat 9 insert respectively and is fixed with attachment base 12, the tension spring 21 be connected to sliding seat 9 with
Between corresponding attachment base 12；For assisting mobile base compensation to stack the tune of two working surface parallelism error of piezoelectric ceramics
Section.
19 position of every guiding axis is corresponded in sleeve wall and is respectively equipped with long hole 101,101 center line of long hole and corresponding is led
In one plane to 19 axis of axis and 1 axis of sleeve.
When work, control linear stepping motor 18 is pushed up by lead screw 22 and the transmission of screw 16 by upper coupling block first
13, mobile base composed by steel ball 14 and lower connection block 15 applies pretightning force to piezoelectric ceramics 10 is stacked, while monitoring by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structure 4 is stacked, while contactless using external optical
Vibration detecting device detects the vibratory response of MEMS micro-structure 4, and the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, control linear stepping motor 18 drives lower connection block 15 and steel ball 14 downward after completing the excitation to MEMS micro-structure 4
It is mobile, then coupling block 13 is manually adjusted by long hole 101 and is moved down, make to stack 10 top installation set 8 of piezoelectric ceramics and bullet
Property supporting element 6 separates, and avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (8)
1. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics, including sleeve are equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, set on sleeve
Flexible supporting element and MEMS micro-structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down；
Conical socket and spherical groove are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small
In spherical groove radius of curvature and be clamped between conical socket and spherical groove, made between upper and lower coupling block by steel ball
Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness when for guaranteeing that lower connection block moves up and down；
It is arranged with sliding seat respectively on guiding axis, the upper coupling block and each sliding seat are respectively by along upper coupling block outer rim
The tension spring of circumference uniform distribution connects；For assisting mobile base compensation to stack the tune of two working surface parallelism error of piezoelectric ceramics
Section.
2. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is: corresponded in upper coupling block outer rim and be respectively equipped with attachment base at each sliding seat, the tension spring be connected to sliding seat with it is corresponding
Attachment base between.
3. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is: correspond to every guiding shaft position in sleeve wall and be respectively equipped with long hole, long centerline hole and corresponding guiding axis axis with
Sleeve axis is in one plane.
4. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is: the elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim, institute
The thickness for stating support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structure is avoided to send out because of colloid cracking
Life falls off.
5. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 4, special
Sign is: the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three pillars.
6. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1 or 2,
Be characterized in: the upper coupling block outer rim is hexagon.
7. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1 or 3,
Be characterized in: the guiding axis is three and is uniformly connected between annular roof plate and support plate.
8. a kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics according to claim 1 or 4,
Be characterized in: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoid due to
Stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
Problem.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711355483.7A CN108168818B (en) | 2017-12-16 | 2017-12-16 | A kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics |
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| CN201711355483.7A CN108168818B (en) | 2017-12-16 | 2017-12-16 | A kind of MEMS micro-structure triple axle seat excitation apparatus based on piezoelectric ceramics |
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| CN108168818B true CN108168818B (en) | 2019-10-18 |
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Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414C3 (en) * | 1970-06-04 | 1984-01-05 | Braun Ag, 6000 Frankfurt | Spherical layer shaft bearing for absorbing smaller forces |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP5470724B2 (en) * | 2008-03-13 | 2014-04-16 | トヨタ自動車株式会社 | Vibration test equipment |
| CN101476970B (en) * | 2009-01-14 | 2010-09-29 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| DE102012112140A1 (en) * | 2012-12-12 | 2014-06-12 | Dorma Gmbh & Co. Kg | Cam-closer has cam mounted between followers, where each follower is mounted in piston, and one of follower has spherical upper surface with point contact with cam in partial manner |
| CN105318150B (en) * | 2014-07-15 | 2018-01-02 | 冠研（上海）专利技术有限公司 | Shockproof runners with align structures |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
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