CN108217589B - A kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics - Google Patents
A kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics Download PDFInfo
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Abstract
The invention discloses a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block and MEMS micro-structure；Support plate and electric threaded shaft transmission mechanism are equipped in sleeve；Spherical surface hill and spherical groove are respectively equipped between upper and lower coupling block；Piezoelectric ceramics is stacked to be clamped between pressure sensor and elastic supporting member for supporting optical member；Mounting blocks are connected with by the connecting rod of circumference uniform distribution in upper coupling block outer rim, bulb plunger is separately installed on mounting blocks, bulb plunger outer end steel ball pushes into the rectangular recess of sleeve outer wall.The device more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is reduced, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
Description
Technical field
The invention belongs to micromachine electronic system technology field, in particular to the micro- knot of a kind of MEMS based on piezoelectric ceramics
Structure triple axle dynamic loading device.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics, In are described in a text
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
It is dynamic the technical problem to be solved by the present invention is to provide a kind of MEMS micro-structure triple axle based on piezoelectric ceramics
State loading device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
The pretightning force measured value obtained is more accurate, and the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, convenient for test MEMS micro-structure
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics, including sleeve, are equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knot of MEMS are equipped on sleeve
Structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down；
Mutually matched spherical surface hill and spherical groove, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make coupling block
Point contact is formed between lower connection block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectricity
Ceramics are clamped between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Long hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, for assisting upper connection block compensation to stack piezoelectric ceramics two
The adjusting of working surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness when for guaranteeing that lower connection block moves up and down.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of every group of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with screw is adjusted, for bulb plunger to be headed into rectangular recess.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support arms are constituted, and the thickness of the support arm is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three Hollow Pillars.
As further preferred, the upper coupling block outer rim is inequilateral hexagon, and the connecting rod passes through screw thread respectively
It is connected in the corresponding screw hole of coupling block outer rim.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the center line of the long hole and rectangular recess is parallel with the axis of sleeve, and each square
Sleeve central angle folded by the center line of connected in star and adjacent guiding axis axis is 60 degree.
As further preferred, the guiding axis is three and is uniformly connected between annular roof plate and support plate.
The beneficial effects of the present invention are:
1, due to being respectively equipped with mutually matched spherical surface hill and spherical surface on the opposite face of upper coupling block and lower connection block
Groove, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, then
Point contact is formed between upper coupling block and lower connection block, when the parallelism error for needing compensation to stack two working surface of piezoelectric ceramics
Come when adjusting the mobile base as composed by upper coupling block and lower connection block, upper coupling block can be with spherical surface hill and spherical groove
Contact point is that center of rotation is rotated, and adjustment process is smooth, smooth, is not in substantially reduce folded the problem of being stuck
Shearing force between each layer of heap piezoelectric ceramics.
2, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered by circumference uniform distribution respectively
Long hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl is pushed into respectively in the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, stacks the work of piezoelectric ceramics two when needing to compensate
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base composed by upper coupling block and lower connection block mobile to realize, adjustment process is simple, clever
It is living.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after annular roof plate.
Fig. 5 is the schematic perspective view of elastic supporting member for supporting optical member.
In figure: 1. sleeves, 101. rectangular recess, 102. long holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, 5. is micro-
Structure mounting plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support arms, 7. pillars, 8. installation sets, 9. bulb plungers, 10. is folded
Heap piezoelectric ceramics, 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical surface hills, 14. adjust screws, and 15.
Lower connection block, 1501. spherical grooves, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. axle sleeves,
21. connecting rod, 22. lead screws.
Specific embodiment
As shown in fig. 1~fig. 5, a kind of MEMS micro-structure triple axle dynamically load based on piezoelectric ceramics of the present invention
Device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13 and lower connection block 15 constitute mobile base, on sleeve 1 be equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support arms 602 of 601 outer rim of tabletting, wherein the thickness of support arm 602 is less than the thickness of tabletting 601；To reduce
The deflection of tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.Three support arms of elastic supporting member for supporting optical member 6
602 are fixed on above annular roof plate 2 by three Hollow Pillars 7 using screw support, and on the same axis with sleeve 1.
MEMS micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 22 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 22 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, and band is used for
Dynamic lower connection block 15 moves up and down.
Mutually matched spherical surface hill 1301 and ball are respectively equipped on upper coupling block 13 and the opposite face of lower connection block 15
Face groove 1501, the spherical surface hill 1301 is inserted into spherical groove 1501 and the radius of curvature of spherical surface hill is less than spherical groove
Radius of curvature, make to form point contact between coupling block and lower connection block, and make 13 bottom surface of coupling block and lower connection block 15
An adjustment gap is formed between top surface, which is preferably 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
Three guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit be uniformly arranged under lower connection block 15 respectively
Pilot hole on end flanges disk, levelness when for guaranteeing that lower connection block 15 moves up and down.It is located in 15 lower end of lower connection block
Axle sleeve 20 is installed in pilot hole respectively.
13 outer rim of upper coupling block is inequilateral hexagon, is uniformly connected with connecting rod in upper 13 outer marginal circumference of coupling block
21, long hole 102 of 21 outer end of connecting rod respectively by circumference uniform distribution in sleeve wall is pierced by and is connected with mounting blocks 12, in mounting blocks
Bulb plunger 9 is separately installed on 12, the steel ball of 9 outer end of bulb plunger pushes into respectively to be along the circumferential direction evenly arranged on outside sleeve 1
In the rectangular recess 101 of wall, for assisting mobile base compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics
And the above reset of coupling block 13 after test.It is two that the connecting rod 21, which is three groups of circumference uniform distribution and every group, each installation
Block 12 is fixed by screws in the outer end of every group of two connecting rods 21 respectively, and 21 inner end of connecting rod is threadedly attached in respectively
In the corresponding screw hole of 13 outer rim of coupling block.The bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks, and outside the through-hole
It is equipped in port by screw thread and adjusts screw 14, for the steel ball of 9 outer end of bulb plunger to be headed into corresponding rectangular recess 101
It is interior.The diametric clearance of the width of the long hole 102 and connecting rod 21 cooperates, the center line of long hole 102 and rectangular recess 101 with
The axis of sleeve 1 is parallel, and sleeve central angle folded by the center line of each rectangular recess 101 and adjacent 19 axis of guiding axis
It is 60 degree.
When work, control linear stepping motor 18 is pushed up by lead screw 22 and the transmission of screw 16 by upper coupling block first
13 and lower connection block 15 composed by mobile base to stack piezoelectric ceramics 10 apply pretightning force, while monitor by pressure sensor
The 11 preload force datas measured, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops working.So
Afterwards, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, using stacking piezoelectricity
The inverse piezoelectric effect of ceramics 10 realizes the excitation to MEMS micro-structure 4, while the vibration detecting device contactless using external optical
The vibratory response for detecting MEMS micro-structure 4 detects the power output for stacking piezoelectric ceramics 10 using pressure sensor 11.Finally, working as
After completing to the excitation of MEMS micro-structure 4, control linear stepping motor 18 drives lower connection block 15 to move down, then manual depression
Three mounting blocks 12 drive upper coupling blocks 13 to move down, and make to stack 10 top installation set 8 of piezoelectric ceramics and divide with elastic supporting member for supporting optical member 6
It leaves, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (9)
1. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics, including sleeve are equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are equipped with elastic supporting member for supporting optical member and the micro- knot of MEMS on sleeve
Structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down；
Mutually matched spherical surface hill and spherical groove, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes coupling block under
Point contact is formed between coupling block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting upper connection block compensation to stack piezoelectric ceramics two
The adjusting of surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit to be arranged in lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness when for guaranteeing that lower connection block moves up and down.
2. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 1, special
Sign is: the connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in every group respectively
The outer end of two connecting rods.
3. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 2, special
Sign is: the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and is equipped in through-hole external port and is adjusted screw, and being used for will
Bulb plunger heads into rectangular recess.
4. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 1, special
Sign is: the elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support arms of tabletting outer rim, institute
The thickness for stating support arm is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structure is avoided to send out because of colloid cracking
Life falls off.
5. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 4, special
Sign is: the elastic supporting member for supporting optical member is supported and fixed on above annular roof plate by three Hollow Pillars.
6. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 2, special
Sign is: the upper coupling block outer rim is inequilateral hexagon, and the connecting rod is threadedly attached in coupling block outer rim respectively
In corresponding screw hole.
7. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 1 or 5,
Be characterized in: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoid due to
Stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
Problem.
8. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 1, special
Sign is: the center line of the long hole and rectangular recess is parallel with the axis of sleeve, and the center line of each rectangular recess and phase
Sleeve central angle folded by adjacent guiding axis axis is 60 degree.
9. a kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics according to claim 8, special
Sign is: the guiding axis is three and is uniformly connected between annular roof plate and support plate.
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| CN201711355484.1A CN108217589B (en) | 2017-12-16 | 2017-12-16 | A kind of MEMS micro-structure triple axle dynamic loading device based on piezoelectric ceramics |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414C3 (en) * | 1970-06-04 | 1984-01-05 | Braun Ag, 6000 Frankfurt | Spherical layer shaft bearing for absorbing smaller forces |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP5470724B2 (en) * | 2008-03-13 | 2014-04-16 | トヨタ自動車株式会社 | Vibration test equipment |
| CN101476970B (en) * | 2009-01-14 | 2010-09-29 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| DE102012112140A1 (en) * | 2012-12-12 | 2014-06-12 | Dorma Gmbh & Co. Kg | Cam-closer has cam mounted between followers, where each follower is mounted in piston, and one of follower has spherical upper surface with point contact with cam in partial manner |
| CN105318150B (en) * | 2014-07-15 | 2018-01-02 | 冠研（上海）专利技术有限公司 | Shockproof runners with align structures |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
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