CN108217589A - A kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics - Google Patents
A kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics Download PDFInfo
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- CN108217589A CN108217589A CN201711355484.1A CN201711355484A CN108217589A CN 108217589 A CN108217589 A CN 108217589A CN 201711355484 A CN201711355484 A CN 201711355484A CN 108217589 A CN108217589 A CN 108217589A
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Abstract
The invention discloses a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block and MEMS micro-structures；Support plate and electric threaded shaft transmission mechanism are equipped in sleeve；Spherical surface hill and spherical groove are respectively equipped between upper and lower coupling block；Piezoelectric ceramics is stacked to be clamped between pressure sensor and elastic supporting member for supporting optical member；Mounting blocks are connected with by the connecting rod of circumference uniform distribution in upper coupling block outer rim, bulb plunger is separately installed on mounting blocks, bulb plunger outer end steel ball is pushed into the rectangular recess of sleeve outer wall.The device more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, make obtained pretightning force measured value more accurate, the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is reduced, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
Description
Technical field
The invention belongs to micromachine electronic system technology field, the micro- knots of more particularly to a kind of MEMS based on piezoelectric ceramics
Structure triple axle dynamic loading device.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide for a kind of MEMS micro-structure triple axles based on piezoelectric ceramics and move
State loading device, the device more flexible can apply different size of pretightning force, while make to be obtained to stacking piezoelectric ceramics
The pretightning force measured value obtained is more accurate, can become the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, convenient for test MEMS micro-structures
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics, including sleeve, are equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knots of MEMS are equipped on sleeve
Structure, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
The spherical surface hill and spherical groove of mutual cooperation, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make coupling block
Point contact is formed between lower connection block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectricity
Ceramics are clamped between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Slot hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into and is along the circumferential direction distributed in the rectangular recess of sleeve outer wall, for upper connection block compensation to be assisted to stack piezoelectric ceramics two
The adjusting of working surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness during for ensureing that lower connection block moves up and down.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of every group of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with adjusting screw, for bulb plunger to be headed into rectangular recess.
As further preferred, the elastic supporting member for supporting optical member is in tabletting outer rim by a cylindrical tabletting and circumference uniform distribution
Three support arms are formed, and the thickness of the support arm is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on by three Hollow Pillars above annular roof plate.
As further preferred, the upper coupling block outer rim is inequilateral hexagon, and the connecting rod passes through screw thread respectively
It is connected in the corresponding screw hole of coupling block outer rim.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, the center line of the slot hole and rectangular recess is parallel with the axis of sleeve, and each square
The center line of connected in star is 60 degree with the sleeve central angle folded by adjacent guiding axis axis.
As further preferred, the guiding axis is three and is uniformly connected between annular roof plate and support plate.
The beneficial effects of the invention are as follows：
1st, due to being respectively equipped with the spherical surface hill and spherical surface of mutual cooperation on the opposite face of upper coupling block and lower connection block
Groove, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, then
Point contact is formed between upper coupling block and lower connection block, when the parallelism error that compensation is needed to stack two working surface of piezoelectric ceramics
Come when adjusting the mobile base being made of upper coupling block and lower connection block, upper coupling block can be with spherical surface hill and spherical groove
Contact point is rotated for center of rotation, and adjusting process is smooth, smooth, is not in the problem of being stuck, substantially reduces folded
Shearing force between each layer of heap piezoelectric ceramics.
2nd, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered respectively by circumference uniform distribution
Slot hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl pushes into along the circumferential direction be distributed in the rectangular recess of sleeve outer wall respectively, works when compensation is needed to stack piezoelectric ceramics two
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space bigger.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, due to being vertically equipped with electric threaded shaft transmission mechanism at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base being made of upper coupling block and lower connection block movement to realize, it is simple, clever to adjust process
It is living.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is that the present invention removes the vertical view after annular roof plate.
Fig. 5 is the dimensional structure diagram of elastic supporting member for supporting optical member.
In figure：1. sleeve, 101. rectangular recess, 102. slot holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, 5. is micro-
Structure installing plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support arms, 7. pillars, 8. installation sets, 9. bulb plungers, 10. is folded
Heap piezoelectric ceramics, 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical surface hills, 14. adjusting screws, 15.
Lower connection block, 1501. spherical grooves, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. axle sleeves,
21. connecting rod, 22. leading screws.
Specific embodiment
As shown in fig. 1~fig. 5, a kind of triple axle exciting for the test of MEMS micro-structure dynamic characteristics of the present invention
Device including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13 and lower connection block 15 form mobile base, on sleeve 1 be equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structures 4.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is formed in three support arms 602 of 601 outer rim of tabletting, wherein the thickness of support arm 602 is less than the thickness of tabletting 601；To reduce
The deflection of tabletting 601 avoids MEMS micro-structures 4 from being fallen off due to colloid cracks.Three support arms of elastic supporting member for supporting optical member 6
602 are fixed on using screw support above annular roof plate 2, and with sleeve 1 on the same axis by three Hollow Pillars 7.
MEMS micro-structures 4 are cemented in by micro-structure installing plate 5 at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 22 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 22 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, for band
Dynamic lower connection block 15 moves up and down.
The spherical surface hill 1301 and ball of mutual cooperation are respectively equipped on upper coupling block 13 and the opposite face of lower connection block 15
Face groove 1501, the spherical surface hill 1301 is inserted into spherical groove 1501 and the radius of curvature of spherical surface hill is less than spherical groove
Radius of curvature, make to form point contact between coupling block and lower connection block, and make 13 bottom surface of coupling block and lower connection block 15
An adjustment gap is formed between top surface, which is preferably 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
13 outer rim of upper coupling block is inequilateral hexagon, and connecting rod is uniformly connected in upper 13 outer marginal circumference of coupling block
21,21 outer end of connecting rod is pierced by by slot hole 102 of the circumference uniform distribution in sleeve wall and is connected with mounting blocks 12 respectively, in mounting blocks
Bulb plunger 9 is separately installed on 12, the steel ball of 9 outer end of bulb plunger pushes into respectively to be along the circumferential direction distributed on outside sleeve 1
In the rectangular recess 101 of wall, for mobile base compensation to be assisted to stack the adjusting of two working surface parallelism error of piezoelectric ceramics
And the above reset of coupling block 13 after test.The connecting rod 21 is three groups of circumference uniform distribution and every group is two, each to install
Block 12 is fixed by screws in the outer end of every group of two connecting rods 21 respectively, and 21 inner end of connecting rod is threadedly attached in respectively
In the corresponding screw hole of 13 outer rim of coupling block.The bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks, and outside the through-hole
Adjusting screw 14 is equipped with by screw thread in port, for the steel ball of 9 outer end of bulb plunger to be headed into corresponding rectangular recess 101
It is interior.The width of the slot hole 102 and the diametric clearance of connecting rod 21 coordinate, the center line of slot hole 102 and rectangular recess 101 with
The axis of sleeve 1 is parallel, and sleeve central angle of the center line of each rectangular recess 101 folded by with adjacent 19 axis of guiding axis
It is 60 degree.
Three guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis pass through bolt respectively
It is connected between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit be uniformly arranged in lower connection block respectively
Pilot hole on 15 lower end ring flanges, levelness during for ensureing that lower connection block 15 moves up and down.In 15 lower end of lower connection block
It is installed with axle sleeve 20 respectively in pilot hole.
During work, linear stepping motor 18 is controlled to be pushed up by leading screw 22 and the transmission of screw 16 by upper coupling block first
13 and the mobile base that is formed of lower connection block 15 apply pretightning force to stacking piezoelectric ceramics 10, while monitor by pressure sensor
The 11 preload force datas measured, after the size of pretightning force reaches setting value, control linear stepping motor 18 is stopped.So
Afterwards, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, using stacking piezoelectricity
The inverse piezoelectric effect of ceramics 10 realizes the excitation to MEMS micro-structures 4, while uses the contactless vibration detecting device of external optical
The vibratory response of MEMS micro-structures 4 is detected, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when
After completing to the excitation of MEMS micro-structures 4, control linear stepping motor 18 drives lower connection block 15 to move down, then manual depression
Three mounting blocks 12 drive upper coupling blocks 13 to move down, and make to stack 10 top installation set 8 of piezoelectric ceramics and divide with elastic supporting member for supporting optical member 6
It leaves, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (9)
1. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics including sleeve, are equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are equipped with elastic supporting member for supporting optical member and the micro- knots of MEMS on sleeve
Structure, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
The spherical surface hill and spherical groove of mutual cooperation, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes coupling block under
Point contact is formed between coupling block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
To being along the circumferential direction distributed in the rectangular recess of sleeve outer wall, work for upper connection block compensation to be assisted to stack piezoelectric ceramics two
The adjusting of surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness during for ensureing that lower connection block moves up and down.
2. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 1, special
Sign is：The connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in every group respectively
The outer end of two connecting rods.
3. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 2, special
Sign is：The bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and adjusting screw is equipped in through-hole external port, for inciting somebody to action
Bulb plunger is headed into rectangular recess.
4. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 1, special
Sign is：The elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support arms of tabletting outer rim, institute
The thickness for stating support arm is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structures is avoided to be sent out due to colloid cracks
Life comes off.
5. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 4, special
Sign is：The elastic supporting member for supporting optical member is supported and fixed on by three Hollow Pillars above annular roof plate.
6. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 2, special
Sign is：The upper coupling block outer rim is inequilateral hexagon, and the connecting rod is threadedly attached in coupling block outer rim respectively
In corresponding screw hole.
7. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 1 or 5,
It is characterized in：Be equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoid due to
Stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member loose contact
Problem.
8. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 1, special
Sign is：The center line of the slot hole and rectangular recess is parallel with the axis of sleeve, and the center line and phase of each rectangular recess
Sleeve central angle folded by adjacent guiding axis axis is 60 degree.
9. a kind of MEMS micro-structure triple axle dynamic loading devices based on piezoelectric ceramics according to claim 8, special
Sign is：The guiding axis is three and is uniformly connected between annular roof plate and support plate.
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