CN108168814B - A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure - Google Patents
A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure Download PDFInfo
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- CN108168814B CN108168814B CN201711355453.6A CN201711355453A CN108168814B CN 108168814 B CN108168814 B CN 108168814B CN 201711355453 A CN201711355453 A CN 201711355453A CN 108168814 B CN108168814 B CN 108168814B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The present invention discloses a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block and steel ball, elastic supporting member for supporting optical member and MEMS micro-structure;It is equipped with annular roof plate in sleeve upper end, micro-structure is located on annular roof plate by elastic supporting member for supporting optical member;Guiding axis is evenly equipped between top, bottom plate, lower connection block is evenly equipped with guiding support arm and is passed through by sleeve wall and covered on guiding axis;It is respectively equipped with conical socket and spherical groove on upper and lower coupling block, tension spring is evenly distributed between upper and lower coupling block, is clipped in steel ball between conical socket and spherical groove;Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, in particular to one kind can carry out outside piece MEMS micro-structure
The four-axle type exciting device of excitation.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem;Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck;
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure;
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate;In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase;
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off;
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of four-axle types that piece external excitation can be carried out to MEMS micro-structure
Exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
Pretightning force measured value it is more accurate, compensation can be made, which to stack the adjustment process of two working surface parallelism error of piezoelectric ceramics, to be become
It is more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, bigger adjusting space is capable of providing,
Falling off for test micro element is avoided, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure, including sleeve and bottom plate, in sleeve
Interior be equipped with stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, is covering
Cylinder is equipped with elastic supporting member for supporting optical member and MEMS micro-structure above, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member;
The elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition being mutually connected vertically, for reducing substrate
Deflection;
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
It is evenly equipped with and is evenly equipped with guiding support arm and each guiding with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
Support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis;
It is respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, at upper coupling block bottom
Circumference uniform distribution is connected with tension spring between face and the guiding support arm of lower connection block, and the radius of the steel ball is less than the curvature of spherical groove
Radius is simultaneously clamped between conical socket and spherical groove under the action of tension spring, makes shape between upper and lower coupling block by steel ball
At an adjustment gap;To assist connection block compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics;
The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensing
Between device and elastic supporting member for supporting optical member;
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down.
As further preferred, the substrate is square, and four support arms pass through the first linking arm respectively and are connected to base
One end of plate surrounding and with substrate outer edge formed a L-type gap;To further decrease the deflection of substrate, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the guiding axis is four.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
It is along the circumferential direction uniformly distributed respectively on the guiding support arm of upper coupling block bottom surface and lower connection block as further preferred
There is one-to-one spring mounting seat up and down, the tension spring both ends are connected to about two mutual corresponding spring mounting seats
On.
The beneficial effects of the present invention are:
1, due to being respectively equipped with conical socket and spherical groove, the steel on the opposite face of upper coupling block and lower connection block
The radius of ball is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove under the action of tension spring;Then
Steel ball and upper coupling block form line contact, and steel ball and lower connection block form point contact;Two work of piezoelectric ceramics is stacked when needing to compensate
Make the parallelism error on surface come when adjusting mobile base, upper coupling block can be in rotation with the contact point of steel ball and lower connection block
The heart is rotated, and adjustment process is smooth, smooth, is not in the problem of blocking, substantially reduce stack each layer of piezoelectric ceramics it
Between shearing force.
2, due between upper coupling block bottom surface and the guiding support arm of lower connection block circumference uniform distribution be connected with tension spring, in tension spring
Under the action of steel ball is clamped between conical socket and spherical groove;Two working surface of piezoelectric ceramics is stacked when needing to compensate
Parallelism error can realize the pendulum of upper coupling block in different directions by the deformation of tension spring come when adjusting mobile base
Dynamic, adjustable space is bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data;It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base composed by upper coupling block and lower connection block mobile to realize, adjustment process is simple, clever
It is living.
5, due to the support arm that elastic supporting member for supporting optical member includes one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
When work, the vibration deformation of elastic supporting member for supporting optical member is mainly from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the top view of elastic supporting member for supporting optical member.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, the installation of 5. micro-structures
Plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. third linking arms,
6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. spring mounting seats, 10. stack piezoelectric ceramics, 11. pressure
Sensor, 12. tension springs, coupling block on 13., 1301. conical sockets, 14. axle sleeves, 15. lower connection blocks, 1501. spherical grooves,
1502. guiding support arms, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. steel balls, 21. lead screws.
Specific embodiment
As shown in Fig. 1~Fig. 6, one kind of the present invention can carry out the four-axle type exciting of piece external excitation to MEMS micro-structure
Device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13, the mobile base that steel ball 20 and lower connection block 15 are constituted, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
Pass through with bottom surface screw respectively on sleeve 1 and is fixed with the equal annular roof plate 2 and bottom plate 3 of outer diameter, it is described
MEMS micro-structure 4 is mounted on annular roof plate 2 by elastic supporting member for supporting optical member 6.The elastic supporting member for supporting optical member includes one piece of square substrate
602 and four circumference uniform distributions support arm 601, each support arm 601 is by the first linking arm being successively mutually connected vertically
6011, the second linking arm 6012, third linking arm 6013 and the 4th linking arm 6014 composition, four support arms 601 pass through respectively
First linking arm 6011 is connected to one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and base
602 outer rim of plate forms a L-type gap;For reducing the deflection of substrate, avoid MEMS micro-structure 4 due to colloid cracks
It falls off.Four 601 outer ends of support arm of the elastic supporting member for supporting optical member 6 pass through Hollow Pillar 7 respectively and are fixed on ring using screw support
Above shape top plate 2, and on the same axis with sleeve 1.MEMS micro-structure 4 cements in resilient support by micro-structure mounting plate 5
At the 602 upper surface center of substrate of part 6.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the substrate 602 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Substrate 602 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and guiding axis 19 is uniformly connected with by circumferential screw, this
Embodiment guiding axis 19 for four, be along the circumferential direction evenly equipped in sleeve wall with guiding axis one-to-one four it is U-shaped
Gap 101.The lower connection block 15 is cylinder, and in 15 outer rim lower circumferential of lower connection block, uniformly distributed there are four be oriented to support arm 1502
And each guiding support arm 1502 is passed through by corresponding U-shaped gap 101 respectively and is sleeved on guiding axis 19 by clearance fit,
The through-hole through guiding axis is respectively equipped on each guiding support arm 1502 and is installed with axle sleeve 14, the second line of a couplet respectively in through-hole
Connecing block 15 can slide up and down in sleeve 1 along the vertical direction under the guiding role of guiding axis 19.
It is respectively equipped with conical socket 1301 and spherical groove 1501 on upper coupling block 13 and the opposite face of lower connection block 15,
Circumference uniform distribution is connected with tension spring 12, the steel ball 20 between upper 13 bottom surface of coupling block and the guiding support arm 1502 of lower connection block 15
Radius be less than the radius of curvature of spherical groove 1501 and be clamped in conical socket 1301 under the action of tension spring 12 and spherical surface is recessed
Between slot 1501, make to form line contact between steel ball 20 and upper coupling block 13, forms point between steel ball 20 and lower connection block 15 and connect
Touching;Make to form an adjustment gap between upper and lower coupling block by steel ball 20;Two worksheet of piezoelectric ceramics is stacked when needing to compensate
The parallelism error in face is come when adjusting mobile base, upper coupling block 13 can be rotation with the contact point of steel ball 20 and lower connection block 15
Center is rotated, and adjustment process is smooth, smooth, is not in substantially reduce the problem of blocking and stack each layer of piezoelectric ceramics
Between shearing force.
It is equal in circumferential direction through screw respectively on the guiding support arm 1502 of upper 13 bottom surface of coupling block and lower connection block 15
It is furnished with one-to-one spring mounting seat 9 up and down, 12 both ends of tension spring are connected to about two mutual corresponding springs
In mounting base 9.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 21 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is fixed on 17 bottom surface of support plate, 21 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, and band is used for
Dynamic lower connection block 15 moves up and down.
When work, control linear stepping motor 18 is pushed up by lead screw 21 and the transmission of screw 16 by upper coupling block first
13, mobile base composed by steel ball 20 and lower connection block 15 applies pretightning force to piezoelectric ceramics 10 is stacked, while monitoring by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structure 4 is stacked, while contactless using external optical
Vibration detecting device detects the vibratory response of MEMS micro-structure 4, and the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, after completing to the excitation of MEMS micro-structure 4, control linear stepping motor 18 drive lower connection block 15, steel ball 20 and on
The mobile base that coupling block 13 forms moves down, and makes to stack 10 top installation set 8 of piezoelectric ceramics and separates with elastic supporting member for supporting optical member 6
It opens, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (7)
1. one kind can carry out the four-axle type exciting device of piece external excitation, including sleeve and bottom plate to MEMS micro-structure, in sleeve
Equipped with piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block is stacked, in sleeve
It is equipped with elastic supporting member for supporting optical member and MEMS micro-structure above, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member;It is described
Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition connected vertically, for reducing the deformation of substrate
Amount;
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have and is evenly equipped with guiding support arm and each guiding support arm with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively;
Be respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, upper coupling block bottom surface with
Circumference uniform distribution is connected with tension spring between the guiding support arm of lower connection block, and the radius of the steel ball is less than the radius of curvature of spherical groove
And be clamped between conical socket and spherical groove under the action of tension spring, make to form one between upper and lower coupling block by steel ball
A adjustment gap;To assist connection block compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics;
The pressure sensor is installed in the centre bore of coupling block top surface, stack piezoelectric ceramics be clamped in pressure sensor with
Between elastic supporting member for supporting optical member;
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down.
2. one kind according to claim 1 can carry out the four-axle type exciting device of piece external excitation to MEMS micro-structure, special
Sign is: the substrate is square, and four support arms pass through one end and and the base that the first linking arm is connected to substrate surrounding respectively
Plate outer rim forms a L-type gap;To further decrease the deflection of substrate, avoid MEMS micro-structure due to colloid cracks
It falls off.
3. one kind according to claim 2 can carry out the four-axle type exciting device of piece external excitation to MEMS micro-structure, special
Sign is: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
4. one kind according to claim 1 can carry out the four-axle type exciting device of piece external excitation to MEMS micro-structure, special
Sign is: the guiding axis is four.
5. the four-axle type exciting that one kind according to claim 1 or 2 or 3 can carry out piece external excitation to MEMS micro-structure fills
It sets, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
Bad problem.
6. one kind according to claim 1 can carry out the four-axle type exciting device of piece external excitation to MEMS micro-structure, special
Sign is: being respectively provided with the through-hole through guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
7. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure according to claim 1 or 6,
It is characterized in: is along the circumferential direction evenly equipped with respectively on the guiding support arm of upper coupling block bottom surface and lower connection block one-to-one up and down
Spring mounting seat, the tension spring both ends are connected on about two mutual corresponding spring mounting seats.
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