CN108168814A - A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures - Google Patents
A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures Download PDFInfo
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- CN108168814A CN108168814A CN201711355453.6A CN201711355453A CN108168814A CN 108168814 A CN108168814 A CN 108168814A CN 201711355453 A CN201711355453 A CN 201711355453A CN 108168814 A CN108168814 A CN 108168814A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The present invention discloses a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block and steel ball, elastic supporting member for supporting optical member and MEMS micro-structures；Annular roof plate is equipped in sleeve upper end, micro-structure is located at by elastic supporting member for supporting optical member on annular roof plate；Guiding axis is evenly equipped between top, bottom plate, lower connection block, which is evenly equipped with, to be oriented to support arm and passed through by sleeve wall and be sleeved on guiding axis；Conical socket and spherical groove are respectively equipped on upper and lower coupling block, tension spring is evenly distributed between upper and lower coupling block, steel ball is made to be clipped between conical socket and spherical groove；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member.The device can apply different size of pretightning force to piezoelectric ceramics, make obtained pretightning force measured value more accurate, can make the adjusting process of two working surface parallelism error of compensation piezoelectric ceramics become more smooth and smooth, convenient for testing dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, more particularly to one kind can carry out outside piece MEMS micro-structures
The four-axle type exciting device of excitation.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide a kind of four-axle type that piece external excitation can be carried out to MEMS micro-structures
Exciting device, the device more flexible can apply different size of pretightning force, while make to be obtained to stacking piezoelectric ceramics
Pretightning force measured value it is more accurate, can become the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics
It is more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, is capable of providing the adjusting space of bigger,
Coming off for test micro element is avoided, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures, including sleeve and bottom plate, in sleeve
Interior be equipped with stacks piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, is covering
Cylinder is equipped with elastic supporting member for supporting optical member and MEMS micro-structures above, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the company of being mutually perpendicular to successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
Be evenly equipped with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and each is oriented to
Support arm is passed through by corresponding U-shaped gap and is sleeved on guiding axis respectively；
Conical socket and spherical groove are respectively equipped on upper coupling block and the opposite face of lower connection block, at upper coupling block bottom
Circumference uniform distribution is connected with tension spring between face and the guiding support arm of lower connection block, and the radius of the steel ball is less than the curvature of spherical groove
Radius is simultaneously clamped under the action of tension spring between conical socket and spherical groove, makes shape between upper and lower coupling block by steel ball
Into an adjustment gap；To couple the adjusting that block compensation stacks two working surface parallelism error of piezoelectric ceramics in auxiliary；
The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensing
Between device and elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for lower connection block to be driven to move up and down.
As further preferred, the substrate is square, and four support arms are connected to base by the first linking arm respectively
One end of plate surrounding and with substrate outer edge formed a L-type gap；Further to reduce the deflection of substrate, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is four.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
It is along the circumferential direction uniformly distributed respectively on the guiding support arm of upper coupling block bottom surface and lower connection block as further preferred
There is one-to-one spring mounting seat up and down, the tension spring both ends are connected to about two mutual corresponding spring mounting seats
On.
The beneficial effects of the invention are as follows：
1st, due to being respectively equipped with conical socket and spherical groove, the steel on the opposite face of upper coupling block and lower connection block
The radius of ball is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove under the action of tension spring；Then
Steel ball and upper coupling block form line contact, and steel ball and lower connection block form point contact；Two work of piezoelectric ceramics is stacked when needing to compensate
Make the parallelism error on surface come when adjusting mobile base, upper coupling block can be using steel ball and the contact point of lower connection block as in rotation
The heart is rotated, and it is smooth, smooth to adjust process, be not in the problem of blocking substantially reduce stack each layer of piezoelectric ceramics it
Between shearing force.
2nd, due between upper coupling block bottom surface and the guiding support arm of lower connection block circumference uniform distribution be connected with tension spring, in tension spring
Under the action of steel ball is clamped between conical socket and spherical groove；Two working surface of piezoelectric ceramics is stacked when needing to compensate
Parallelism error can realize the pendulum of upper coupling block in different directions come when adjusting mobile base by the deformation of tension spring
It is dynamic, adjustable space bigger.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, due to being vertically equipped with electric threaded shaft transmission mechanism at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base being made of upper coupling block and lower connection block movement to realize, it is simple, clever to adjust process
It is living.
5th, since elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
During work, the vibration deformation of elastic supporting member for supporting optical member is essentially from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is the vertical view of elastic supporting member for supporting optical member.
Fig. 5 is the dimensional structure diagram of lower connection block.
Fig. 6 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, the installation of 5. micro-structures
Plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. third linking arms,
6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. spring mounting seats, 10. stack piezoelectric ceramics, 11. pressure
Sensor, 12. tension springs, coupling block on 13., 1301. conical sockets, 14. axle sleeves, 15. lower connection blocks, 1501. spherical grooves,
1502. are oriented to support arm, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. steel balls, 21. leading screws.
Specific embodiment
As shown in Fig. 1~Fig. 6, it is of the present invention it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank,
Including a cannulated sleeve 1, it is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block 13, steel
The mobile base that ball 20 and lower connection block 15 are formed, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structures 4 on sleeve 1.
The equal annular roof plate 2 of outer diameter and bottom plate 3 are fixed with by screw respectively with bottom surface on sleeve 1, it is described
MEMS micro-structures 4 are mounted on by elastic supporting member for supporting optical member 6 on annular roof plate 2.The elastic supporting member for supporting optical member includes one piece of square substrate
602 and the support arm 601 of four circumference uniform distributions, each support arm 601 is by the first linking arm being mutually connected vertically successively
6011st, the second linking arm 6012,6013 and the 4th linking arm 6014 of third linking arm form, and four support arms 601 pass through respectively
First linking arm 6011 is connected to one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and base
602 outer rim of plate forms a L-type gap；For reducing the deflection of substrate, MEMS micro-structures 4 are avoided due to colloid cracks
It comes off.Four 601 outer ends of support arm of the elastic supporting member for supporting optical member 6 are fixed on ring by Hollow Pillar 7 using screw support respectively
Above shape top plate 2, and with sleeve 1 on the same axis.MEMS micro-structures 4 cement in resilient support by micro-structure installing plate 5
At the 602 upper surface center of substrate of part 6.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the substrate 602 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Substrate 602 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at 1 outside of sleeve between annular roof plate 2 and bottom plate 3 and guiding axis 19 is uniformly connected with by circumferential screw, this
Embodiment guiding axis 19 for four, be along the circumferential direction evenly equipped in sleeve wall four one-to-one with guiding axis it is U-shaped
Gap 101.The lower connection block 15 is cylinder, and in 15 outer rim lower circumferential of lower connection block, uniformly distributed there are four be oriented to support arm 1502
And each guiding support arm 1502 is passed through by corresponding U-shaped gap 101 respectively and is passed through clearance fit and is sleeved on guiding axis 19,
Each be oriented to is respectively equipped with the through-hole through guiding axis on support arm 1502 and is installed with axle sleeve 14, the second line of a couplet respectively in through-hole
Connecing block 15 can vertically slide up and down under the guiding role of guiding axis 19 in sleeve 1.
Conical socket 1301 and spherical groove 1501 are respectively equipped on upper coupling block 13 and the opposite face of lower connection block 15,
Circumference uniform distribution is connected with tension spring 12, the steel ball 20 between upper 13 bottom surface of coupling block and the guiding support arm 1502 of lower connection block 15
Radius be less than the radius of curvature of spherical groove 1501 and be clamped in conical socket 1301 under the action of tension spring 12 and spherical surface is recessed
Between slot 1501, make to form line contact between steel ball 20 and upper coupling block 13, point is formed between steel ball 20 and lower connection block 15 and is connect
It touches；Make to form an adjustment gap between upper and lower coupling block by steel ball 20；Two worksheet of piezoelectric ceramics is stacked when needing to compensate
The parallelism error in face is come when adjusting mobile base, upper coupling block 13 can be using steel ball 20 and the contact point of lower connection block 15 as rotation
Center is rotated, and adjusting process is smooth, smooth, is not in the problem of blocking, substantially reduces and stack each layer of piezoelectric ceramics
Between shearing force.
It is equal in circumferential direction through screw respectively on the guiding support arm 1502 of upper 13 bottom surface of coupling block and lower connection block 15
One-to-one spring mounting seat 9 up and down is furnished with, 12 both ends of tension spring are connected to about two mutual corresponding springs
In mounting base 9.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 21 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is fixed on 17 bottom surface of support plate, 21 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, for band
Dynamic lower connection block 15 moves up and down.
During work, linear stepping motor 18 is controlled to be pushed up by leading screw 21 and the transmission of screw 16 by upper coupling block first
13rd, the mobile base that steel ball 20 and lower connection block 15 are formed applies pretightning force to stacking piezoelectric ceramics 10, while monitors by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structures 4 is stacked, while contactless using external optical
The vibratory response of vibration detecting device detection MEMS micro-structures 4, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, after completing to the excitations of MEMS micro-structures 4, control linear stepping motor 18 drive lower connection block 15, steel ball 20 and on
The mobile base that coupling block 13 forms moves down, and makes to stack 10 top installation set 8 of piezoelectric ceramics and is detached with elastic supporting member for supporting optical member 6
It opens, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (7)
1. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures, including sleeve and bottom plate, in sleeve
Equipped with piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block is stacked, in sleeve
It is equipped with elastic supporting member for supporting optical member and MEMS micro-structures above, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；It is described
Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition, for reducing the deflection of substrate；
It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and is each oriented to support arm
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively；
Be respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, upper coupling block bottom surface with
Circumference uniform distribution is connected with tension spring between the guiding support arm of lower connection block, and the radius of the steel ball is less than the radius of curvature of spherical groove
And be clamped between conical socket and spherical groove under the action of tension spring, make to form one between upper and lower coupling block by steel ball
A adjustment gap；To couple the adjusting that block compensation stacks two working surface parallelism error of piezoelectric ceramics in auxiliary；
The pressure sensor is installed in the centre bore of coupling block top surface, stack piezoelectric ceramics be clamped in pressure sensor with
Between elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for lower connection block to be driven to move up and down.
2. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures according to claim 1, special
Sign is：The substrate is square, and four support arms are connected to one end and and the base of substrate surrounding by the first linking arm respectively
Plate outer rim forms a L-type gap；Further to reduce the deflection of substrate, MEMS micro-structures are avoided due to colloid cracks
It comes off.
3. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures according to claim 2, special
Sign is：Four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
4. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures according to claim 1, special
Sign is：The guiding axis is four.
5. a kind of four-axle type exciting that piece external excitation can be carried out to MEMS micro-structures according to claims 1 or 2 or 3 fills
It puts, it is characterized in that：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
The problem of bad.
6. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures according to claim 1, special
Sign is：The through-hole through guiding axis is respectively provided on each guiding support arm and is installed with axle sleeve respectively in through-hole.
7. a kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structures according to claim 1 or 6,
It is characterized in：It is along the circumferential direction evenly equipped with respectively on the guiding support arm of upper coupling block bottom surface and lower connection block one-to-one up and down
Spring mounting seat, the tension spring both ends are connected on about two mutual corresponding spring mounting seats.
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| CN201711355453.6A CN108168814B (en) | 2017-12-16 | 2017-12-16 | A kind of four-axle type exciting device that piece external excitation can be carried out to MEMS micro-structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112161783A (en) * | 2020-09-01 | 2021-01-01 | 大连理工大学 | Piezoelectric driving type small-sized bolt transverse load loosening testing machine |
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