CN108217586B - Four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics - Google Patents
Four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics Download PDFInfo
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- CN108217586B CN108217586B CN201711355473.3A CN201711355473A CN108217586B CN 108217586 B CN108217586 B CN 108217586B CN 201711355473 A CN201711355473 A CN 201711355473A CN 108217586 B CN108217586 B CN 108217586B
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- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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- B81C99/0035—Testing
- B81C99/005—Test apparatus
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Abstract
The invention discloses a kind of four-axle type exciting devices for the test of MEMS micro-structure dynamic characteristics, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and MEMS micro-structure；Support plate and electric threaded shaft transmission mechanism are equipped in sleeve；The spherical groove and conical socket of clamping steel ball are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Mounting blocks are connected with by the connecting rod of circumference uniform distribution in upper coupling block outer rim, bulb plunger is separately installed on mounting blocks, bulb plunger outer end steel ball is pushed into respectively in the rectangular recess of sleeve outer wall.The device flexibly can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate simultaneously, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, it can be avoided falling off for test micro element, convenient for testing the dynamic characteristic parameter of MEMS micro-structure.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, in particular to a kind of to be used for MEMS micro-structure dynamic characteristics
The four-axle type exciting device of test.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics, In are described in a text
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.The Chinese invention patent of Publication No. CN101476970A discloses one kind and is based on
The seat excitation apparatus of piezoelectric ceramics applies pretightning force to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and leads to
It crosses to stack piezoelectric ceramics bottom and be mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, this
Outside, it is additionally provided with pressure sensor, in a device for detecting the pretightning force applied to piezoelectric ceramics and stacking piezoelectric ceramics
Power output at work.But there are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of four axis for the test of MEMS micro-structure dynamic characteristics
Formula exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
The pretightning force measured value obtained is more accurate, and the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, can be avoided test micro element
Fall off, convenient for test MEMS micro-structure dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics, including sleeve, are equipped in sleeve
Piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block are stacked, on sleeve
Equipped with elastic supporting member for supporting optical member and MEMS micro-structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the successively company of being mutually perpendicular to
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for driving lower connection block to move up and down；
It is respectively equipped with spherical groove and conical socket on upper coupling block and the opposite face of lower connection block, the half of the steel ball
Diameter is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket, makes upper and lower coupling block by steel ball
Between formed an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Long hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of working surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is uniformly arranged in the second line of a couplet
Connect the pilot hole on the ring flange of block lower end, levelness when for guaranteeing that lower connection block moves up and down.
As further preferred, the connecting rod is four groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with screw is adjusted, for bulb plunger to be headed into rectangular recess.
As further preferred, the substrate is square, and four support arms pass through the first linking arm respectively and are connected to base
One end of plate surrounding end face；To further decrease the deflection of substrate, MEMS micro-structure is avoided to fall off because of colloid cracking.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the upper coupling block outer rim is octagon.
As further preferred, installation set, the substrate pressure of the elastic supporting member for supporting optical member are equipped with stacking piezoelectric ceramics upper end button
In installation set, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics
The problem of with elastic supporting member for supporting optical member poor contact.
As further preferred, the guiding axis is four and is uniformly connected between annular roof plate and support plate.
As further preferred, the center line of the long hole and rectangular recess is parallel with the axis of sleeve, each rectangle
Central angle folded by the axis of the center line of groove and adjacent guiding axis axis and sleeve is 45 degree.
As further preferred, the adjustment gap is 2~5mm.
The beneficial effects of the present invention are:
1, since the radius of steel ball is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket,
Point contact is then formed between steel ball and upper coupling block, is contacted between steel ball and lower connection block for line, stacks piezoelectricity when needing to compensate
The parallelism error of ceramic two working surfaces is come when adjusting mobile base, upper coupling block can be to be in rotation with the contact point of steel ball
The heart is rotated, and adjustment process is smooth, smooth, is not in the problem of steel ball is stuck, is substantially reduced and stack piezoelectric ceramics
Shearing force between each layer.
2, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered by circumference uniform distribution respectively
Long hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl is pushed into respectively in the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, stacks the work of piezoelectric ceramics two when needing to compensate
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to the support arm that elastic supporting member for supporting optical member includes one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
When work, the vibration deformation of elastic supporting member for supporting optical member is mainly from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
5, due to being equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through electronic silk
Thick stick transmission mechanism drives mobile base mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the B-B cross-sectional view of Fig. 2.
Fig. 5 is that the present invention removes the top view after annular roof plate.
Fig. 6 is the top view of elastic supporting member for supporting optical member.
In figure: 1. sleeves, 101. rectangular recess, 102. long holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure, 5. is micro-
Structure mounting plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. thirds
Linking arm, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers, 10. stack piezoelectric ceramics,
11. pressure sensor, 12. mounting blocks, coupling block on 13., 1301. spherical grooves, 14. steel balls, 15. lower connection blocks, 1501. cones
Connected in star, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. axle sleeves, 21. connecting rods, 22. are adjusted
Screw, 23. lead screws.
Specific embodiment
As shown in Fig. 1~Fig. 6, a kind of four-axle type exciting for the test of MEMS micro-structure dynamic characteristics of the present invention
Device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13, the mobile base that steel ball 14 and lower connection block 15 are constituted, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member includes one piece of square substrate 602 and four circumference
Uniformly distributed support arm 601, each support arm 601 is by the first linking arm 6011, the second linking arm being successively mutually connected vertically
6012, third linking arm 6013 and the 4th linking arm 6014 composition, four support arms 601 are connected by the first linking arm 6011 respectively
It connects one end in 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and 602 outer rim of substrate forms one
L-type gap；For reducing the deflection of substrate, MEMS micro-structure 4 is avoided to fall off because of colloid cracking.The resilient support
Four 601 outer ends of support arm of part 6 are passed through pillar 7 respectively and are fixed on above annular roof plate 2 using screw support, MEMS micro-structure
4 are cemented at the 602 upper surface center of substrate of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The lead screw 23 and screw 16 of 18 output shafts are constituted, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 23 upper end of lead screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, the screw of 16 upper end of screw and 15 underrun circumference uniform distribution of lower connection block connects
It connects, for driving lower connection block 15 to move up and down.
It is correspondingly provided with spherical groove 1301 and cone at center respectively on upper coupling block 13 and the opposite face of lower connection block 15
The radius of connected in star 1501, the steel ball 14 is less than the radius of curvature of spherical groove 1301 and is clamped in spherical groove 1301 and cone
Between connected in star 1501, make to form an adjustment gap, the adjustment between upper coupling block 13 and lower connection block 15 by steel ball 14
The size in gap is 2~5mm.Make to form point contact between steel ball and upper coupling block by spherical groove, be made by conical socket
Line is formed between steel ball and lower connection block contact, stack the parallelism error of two working surface of piezoelectric ceramics when needing to compensate and adjust
When saving mobile base, upper coupling block can be rotated using the contact point with steel ball as center of rotation, and adjustment process is smooth, smooth,
Be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 upper and lower ends of piezoelectric ceramics and is clamped in pressure sensor 11 and bullet
Between the substrate 602 of property supporting element 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the substrate 602 is pressed
In installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by stack piezoelectricity
The problem of ceramics 10 and 6 poor contact of elastic supporting member for supporting optical member.
13 outer rim of upper coupling block is octagon, is along the circumferential direction uniformly connected with four groups in upper 13 outer rim of coupling block
Connecting rod 21, every group of connecting rod 21 is two and is threadedly attached on four end faces of 13 outer rim of coupling block respectively, is connected
Long hole 102 of 21 outer end of extension bar respectively by circumference uniform distribution in sleeve wall is pierced by and is connected with mounting blocks 12, each mounting blocks 12
It is fixed by screws in the outer end of every group of two connecting rods 21 respectively.Bulb plunger 9 is separately installed on mounting blocks 12, it is described
Bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks, and is equipped in the through-hole external port and is adjusted screw 22, and spiral shell is being adjusted
Nail 22 under the action of make the steel ball of 9 outer end of bulb plunger push into respectively be along the circumferential direction evenly arranged on 1 outer wall of sleeve rectangle it is recessed
In slot 101, for assisting mobile base compensation to stack the adjusting of two working surface parallelism error of piezoelectric ceramics, pass through mounting blocks
12 and connecting rod 21 can realize the reset of upper coupling block 13 after test.
Four guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit and is uniformly arranged in 15 lower end of lower connection block
Pilot hole on ring flange, levelness when for guaranteeing that lower connection block 15 moves up and down.It is located in 15 lower end of lower connection block and leads
It is installed with axle sleeve 20 respectively into hole.The center line of the long hole 102 and rectangular recess 101 is parallel with the axis of sleeve 1, often
Central angle folded by the axis of the center line of a rectangular recess 101 and adjacent 19 axis of guiding axis and sleeve 1 is 45 degree.
When work, starting linear stepping motor 18 is pushed up by lead screw 23 and the transmission of screw 16 by upper coupling block first
13, mobile base composed by steel ball 14 and lower connection block 15 applies pretightning force to piezoelectric ceramics 10 is stacked, while monitoring by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structure 4 is stacked, while contactless using external optical
Vibration detecting device detects the vibratory response of MEMS micro-structure 4, and the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, control linear stepping motor 18 drives lower connection block 15 and steel ball 14 downward after completing the excitation to MEMS micro-structure 4
It is mobile, then manually adjust four mounting blocks 12 and upper coupling block 13 is driven to move down, make to stack 10 top installation set 8 of piezoelectric ceramics
It is separated with elastic supporting member for supporting optical member 6, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics, including sleeve are equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, set on sleeve
Flexible supporting element and MEMS micro-structure, it is characterized in that:
Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；It is described
Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition connected vertically, for reducing the deformation of substrate
Amount；
Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down；
Spherical groove and conical socket are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small
In spherical groove radius of curvature and be clamped between spherical groove and conical socket, made between upper and lower coupling block by steel ball
Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting mobile base compensation to stack piezoelectric ceramics two
The adjusting of surface parallelism error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is uniformly arranged in lower connection block
Pilot hole on the ring flange of lower end, levelness when for guaranteeing that lower connection block moves up and down.
2. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The connecting rod is four groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in every group of two companies respectively
The outer end of extension bar.
3. the four-axle type exciting device according to claim 2 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and is equipped in through-hole external port and is adjusted screw, is used for bulb
Plunger heads into rectangular recess.
4. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The substrate is square, and four support arms pass through one end that the first linking arm is connected to substrate surrounding end face respectively；With into one
Step reduces the deflection of substrate, and MEMS micro-structure is avoided to fall off because of colloid cracking.
5. the four-axle type exciting device according to claim 1 or 4 for the test of MEMS micro-structure dynamic characteristics, feature
Be: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
6. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The upper coupling block outer rim is octagon.
7. the four-axle type exciting device according to claim 5 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
Be equipped with installation set stacking piezoelectric ceramics upper end button, the substrate of the elastic supporting member for supporting optical member is pressed in installation set, for avoid due to
Stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member poor contact
Problem.
8. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The guiding axis is four and is uniformly connected between annular roof plate and support plate.
9. the four-axle type exciting device according to claim 8 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that:
The center line of the long hole and rectangular recess is parallel with the axis of sleeve, the center line of each rectangular recess and adjacent guiding
Central angle folded by the axis of axis axis and sleeve is 45 degree.
10. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, feature
Be: the adjustment gap is 2~5mm.
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| DE102005048956A1 (en) * | 2005-10-13 | 2007-04-26 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Vibrating exciter for dynamically exciting a test sample in the excitation direction has a magnetic field extending in the excitation direction over a length which is larger than the extension of a moving coil in the excitation direction |
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| CN108217586A (en) | 2018-06-29 |
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