CN108217586B - Four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics - Google Patents

Abstract

The invention discloses a four-axis excitation device for testing the dynamic characteristics of MEMS microstructures, which includes a sleeve, piezoelectric ceramics, pressure sensors, upper and lower coupling blocks, steel balls and MEMS microstructures; inside the sleeve There is a support plate and an electric screw drive mechanism; a spherical groove and a tapered groove for holding steel balls are respectively arranged on the upper and lower connecting blocks; piezoelectric ceramics are clamped between the pressure sensor and the elastic support; An installation block is connected to the outer edge of the upper connection block through connecting rods uniformly distributed on the circumference, ball plungers are respectively installed on the installation blocks, and steel balls at the outer ends of the ball plunger are pushed into rectangular grooves on the outer wall of the sleeve respectively. The device can flexibly apply different sizes of pre-tightening force to the piezoelectric ceramics, and at the same time make the measured value of the pre-tightening force more accurate, and can make the adjustment process of compensating the parallelism error of the two working surfaces of the piezoelectric ceramics smoother and smoother , can avoid the falling off of the micro-device used for testing, and is convenient for testing the dynamic characteristic parameters of the MEMS microstructure.

Description

Four-axis vibration excitation device for testing the dynamic characteristics of MEMS microstructures

technical field

The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis vibration excitation device used for testing the dynamic characteristics of MEMS microstructures.

Background technique

Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content.

In order to test the dynamic characteristic parameters of the microstructure, it is first necessary to make the microstructure vibrate, that is, to excite the microstructure. Due to the small size, light weight and high natural frequency of MEMS microstructures, the excitation methods and excitation devices in traditional mechanical mode testing cannot be applied to the vibration excitation of MEMS microstructures. In the past thirty years, researchers at home and abroad have conducted a lot of explorations on the vibration excitation methods of MEMS microstructures, and have developed some excitation methods and corresponding excitation devices that can be used for MEMS microstructures. Among them, the base excitation device using stacked piezoelectric ceramics as the excitation source has the advantages of large excitation bandwidth, simple device, easy operation, and strong applicability, so it has been widely used in the field of MEMS microstructure dynamic characteristic testing. In the article "A base excitation test facility fordynamic testing of microsystems", David et al. introduced a base excitation device based on piezoelectric ceramics. In this device, stacked piezoelectric ceramics are directly bonded on a fixed base. The stacked piezoelectric ceramics is a multi-layer bonding structure, so the stacked piezoelectric ceramics can withstand a large pressure, but it cannot bear the tensile force. The tensile force will cause the damage of the stacked piezoelectric ceramics. When the stacked piezoelectric ceramics are in When in use, applying a certain pre-tightening force is beneficial to prolong the service life of stacked piezoelectric ceramics, but this device does not consider the above problems; Wang et al. in the article "Dynamic characteristic testing forMEMS micro-devices with base excitation" This paper introduces a base excitation device based on piezoelectric ceramics. In this device, the problem of applying a certain pre-tightening force to the stacked piezoelectric ceramics is considered. Electric ceramics, and the size of the pre-tightening force can be changed by turning the adjusting screw, but this device does not take into account that when the above-mentioned mechanism is used to apply the pre-tightening force to the stacked piezoelectric ceramics, due to the two working surfaces of the stacked piezoelectric ceramics The parallelism error will generate a shear force between the layers of the stacked piezoelectric ceramics, which will cause mechanical damage to the stacked piezoelectric ceramics. In addition, the device cannot measure the applied preload. If the size is not adjusted properly, it will also cause mechanical damage to the stacked piezoelectric ceramics. The Chinese invention patent with the publication number CN101476970A discloses a base excitation device based on piezoelectric ceramics. In this device, a cross spring plate is used to apply a preload to the stacked piezoelectric ceramics, and the bottom of the stacked piezoelectric ceramics is installed On a movable base structure to reduce the shear force on the piezoelectric ceramics, in addition, a pressure sensor is also provided in the device to detect the pre-tightening force applied to the piezoelectric ceramics and stack piezoelectric ceramics output force at work. But this device still has following shortcoming:

1. The movable base structure of the device is composed of an upper connection block, a steel ball and a lower connection block. The steel ball, the upper connection block and the lower connection block are in line contact. When it is necessary to compensate the top surface of the stacked piezoelectric ceramics and the When the movable base structure is adjusted by itself due to the parallelism error of the two working surfaces on the bottom surface, the steel ball cannot rotate smoothly, and may even be stuck;

2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

4. In the device, one side of the cross spring is used to compress the stacked piezoelectric ceramics, and the other side of the cross spring is bonded to the micro device for testing. When the piezoelectric ceramics are working, the deformation of the cross spring is relatively large. Cause the colloid between the micro-device and the cross spring to crack, causing the micro-device to fall off;

5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, resulting in a complicated adjustment process and insufficient flexibility.

Contents of the invention

The technical problem to be solved by the present invention is to provide a four-axis vibration excitation device for testing the dynamic characteristics of MEMS microstructures. The obtained preload measurement value is more accurate, which can make the adjustment process of compensating the parallelism error of the two working surfaces of the stacked piezoelectric ceramics smoother and smoother, and greatly reduces the shear between the layers of the stacked piezoelectric ceramics. The shearing force can avoid the falling off of the micro-device used for testing, and it is convenient to test the dynamic characteristic parameters of the MEMS microstructure.

In order to solve the above problems, the present invention adopts the following technical solutions:

A four-axis excitation device for testing the dynamic characteristics of MEMS microstructures, including a sleeve, in which a stack of piezoelectric ceramics, a pressure sensor, and an upper coupling block, a steel ball, and a lower coupling block are arranged. The movable base is provided with elastic supports and MEMS microstructures on the sleeve, which is characterized by:

An annular top plate is arranged on the sleeve, and the MEMS microstructure is installed on the annular top plate through an elastic support; the elastic support includes a base plate and four support arms uniformly distributed around the circumference, and each support arm is connected to each other in sequence. The first connecting arm, the second connecting arm, the third connecting arm and the fourth connecting arm are vertically connected to reduce the deformation of the substrate;

A support plate is provided at the lower part of the sleeve, and an electric screw transmission mechanism is installed in the center of the support plate along the vertical direction. The screw nut of the electric screw transmission mechanism is connected with the lower connection block to drive the lower connection block to move up and down;

Spherical grooves and conical grooves are respectively provided on the opposite surfaces of the upper coupling block and the lower coupling block, and the radius of the steel ball is smaller than the radius of curvature of the spherical grooves and is clamped between the spherical grooves and the conical grooves Between the upper and lower connecting blocks, an adjustment gap is formed through steel balls; the pressure sensor is embedded in the center hole on the top surface of the upper connecting block, and the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support between;

Connecting rods are evenly distributed on the outer edge of the upper connecting block, and the outer ends of the connecting rods are pierced through the long holes uniformly distributed on the sleeve wall and connected to mounting blocks, and ball plungers are respectively installed on the mounting blocks , the steel balls at the outer end of the ball plunger are pushed into the rectangular grooves uniformly distributed on the outer wall of the sleeve along the circumferential direction, and are used to assist the movable base to compensate for the adjustment of the parallelism error of the two working surfaces of the stacked piezoelectric ceramics;

Guide shafts are evenly distributed in the sleeve along the circumferential direction, and the guide shafts pass through the guide holes uniformly arranged on the flange plate at the lower end of the lower connection block through clearance fit to ensure the levelness of the lower connection block when moving up and down.

As a further preference, the connecting rods are four groups uniformly distributed on the circumference, and each group is two, and each mounting block is respectively fixed to the outer ends of the two connecting rods by screws.

As a further preference, the ball plunger is inserted into the through hole in the middle of the mounting block, and an adjustment screw is provided in the outer port of the through hole for pushing the ball plunger into the rectangular groove.

As a further preference, the substrate is square, and the four support arms are respectively connected to one end of the peripheral end surface of the substrate through the first connecting arm; to further reduce the deformation of the substrate and prevent the MEMS microstructure from falling off due to colloidal cracking.

As a further preference, the outer ends of the four support arms of the elastic support are respectively supported and fixed on the annular top plate through pillars.

As a further preference, the outer edge of the upper coupling block is a regular octagon.

As a further preference, a mounting sleeve is buckled on the upper end of the stacked piezoelectric ceramics, and the base plate of the elastic support is pressed on the mounting sleeve to avoid stacking due to the roughness of the top working surface of the stacked piezoelectric ceramics. Poor contact between piezoelectric ceramics and elastic supports.

As a further preference, there are four guide shafts and they are evenly distributed and connected between the annular top plate and the support plate.

As a further preference, the centerlines of the long holes and the rectangular grooves are all parallel to the axis of the sleeve, and the central angle formed by the centerline of each rectangular groove and the axis of the adjacent guide shaft and the axis of the sleeve is 45°. Spend.

As a further preference, the adjustment gap is 2-5 mm.

The beneficial effects of the present invention are:

1. Since the radius of the steel ball is smaller than the radius of curvature of the spherical groove and it is clamped between the spherical groove and the tapered groove, a point contact is formed between the steel ball and the upper coupling block, and a point contact is formed between the steel ball and the lower coupling block. For line contact, when it is necessary to compensate the parallelism error of the two working surfaces of the stacked piezoelectric ceramics to adjust the movable base, the upper connecting block will rotate with the contact point with the steel ball as the center of rotation, and the adjustment process is smooth and smooth, without There will be a problem of the steel ball being stuck, which greatly reduces the shear force between the layers of the stacked piezoelectric ceramics.

2. Since the connecting rods are evenly distributed on the outer edge of the upper connecting block, the outer ends of the connecting rods are pierced through the long holes uniformly distributed on the sleeve wall and connected to the mounting blocks, and balls are respectively installed on the mounting blocks. The steel balls at the outer end of the head plunger and the ball head plunger are respectively pushed into the rectangular grooves distributed uniformly on the outer wall of the sleeve along the circumferential direction. When it is necessary to compensate the parallelism error of the two working surfaces of the stacked piezoelectric ceramics to adjust the movable base , the upper coupling block can be swung in different directions through the cooperation of the spring in the ball plunger and the steel ball, and the adjustable space is larger.

3. Since the pressure sensor is embedded in the center hole on the top surface of the upper connecting block, the stacked piezoelectric ceramics are clamped between the pressure sensor and the elastic support, so when the pre-tightening force is applied to the stacked piezoelectric ceramics , which avoids the interference of the movable base structure on the pressure sensor, and can obtain more accurate pre-tightening force data; when the stacked piezoelectric ceramics work, the measured value of the excitation force obtained is also more accurate.

4. Since the elastic support includes a base plate and four support arms uniformly distributed on the circumference, each support arm is composed of a first connecting arm, a second connecting arm, a third connecting arm and a fourth connecting arm which are vertically connected to each other in sequence , when the stacked piezoelectric ceramics work, the vibration deformation of the elastic support mainly comes from the four support arms, while the deformation of the substrate is very small, so the colloid will not crack and the micro devices will not fall off.

5. Since the electric screw drive mechanism is installed in the vertical direction in the center of the support plate, the nut of the electric screw drive mechanism is connected to the lower connecting block. When it is necessary to apply different sizes of preload to the stacked piezoelectric ceramics, It can be realized by driving the movable base to move through the electric screw transmission mechanism, and the adjustment process is simple and flexible.

Description of drawings

Fig. 1 is a schematic diagram of the three-dimensional structure of the present invention.

Figure 2 is a top view of the present invention.

Fig. 3 is a cross-sectional view along line A-A of Fig. 2 .

Fig. 4 is a B-B sectional view of Fig. 2 .

Fig. 5 is a top view of the present invention with the annular top plate removed.

Fig. 6 is a top view of the elastic support.

In the figure: 1. sleeve, 101. rectangular groove, 102. long hole, 2. annular top plate, 3. bottom plate, 4. MEMS microstructure, 5. microstructure mounting plate, 6. elastic support, 601. support Arm, 6011. First connecting arm, 6012. Second connecting arm, 6013. Third connecting arm, 6014. Fourth connecting arm, 602. Base plate, 7. Prop, 8. Mounting sleeve, 9. Ball plunger, 10. Stacked piezoelectric ceramics, 11. Pressure sensor, 12. Mounting block, 13. Upper connecting block, 1301. Spherical groove, 14. Steel ball, 15. Lower connecting block, 1501. Tapered groove, 16. Screw nut, 17. support plate, 18. linear stepper motor, 19. guide shaft, 20. axle sleeve, 21. connecting rod, 22. adjusting screw, 23. leading screw.

Detailed ways

As shown in Figures 1 to 6, the present invention relates to a four-axis excitation device for testing the dynamic characteristics of MEMS microstructures, including a hollow sleeve 1, and stacked piezoelectric ceramics are arranged in the sleeve 1. 10. The pressure sensor 11 and the movable base composed of the upper coupling block 13 , the steel ball 14 and the lower coupling block 15 , and the elastic support 6 and the MEMS microstructure 4 are arranged on the sleeve 1 .

An annular top plate 2 and a bottom plate 3 are respectively fixed on the top and bottom of the sleeve 1 by bolts, and the MEMS microstructure 4 is mounted on the annular top plate 2 through elastic supports 6 . The elastic support includes a square base plate 602 and four support arms 601 uniformly distributed around the circumference, each support arm 601 is composed of a first connecting arm 6011, a second connecting arm 6012, and a third connecting arm 6013 which are vertically connected in sequence. Composed of the fourth connecting arm 6014, the four supporting arms 601 are respectively connected to one end of the peripheral end surface of the substrate 602 through the first connecting arm 6011, and an L-shaped gap is formed between the second connecting arm 6012 and the third connecting arm 6013 and the outer edge of the substrate 602 ; It is used to reduce the deformation of the substrate and prevent the MEMS microstructure 4 from falling off due to cracking of the colloid. The outer ends of the four support arms 601 of the elastic support 6 are supported and fixed on the annular top plate 2 through the pillars 7 respectively, and the MEMS microstructure 4 is fixed on the upper surface of the substrate 602 of the elastic support 6 through the microstructure mounting plate 5 at the center.

A support plate 17 is fixed by screws at the bottom step of the sleeve 1, and an electric screw drive mechanism is installed in the center of the support plate 17 along the vertical direction. The screw 23 of the output shaft of the stepping motor 18 and the screw nut 16 constitute, wherein the linear stepping motor 18 is installed on the bottom surface of the support plate 17, the upper end of the screw 23 is inserted into the center hole of the bottom surface of the lower connecting block 15, and the upper end of the screw nut 16 and the lower The bottom surface of the coupling block 15 is connected by screws evenly distributed on the circumference, and is used to drive the lower coupling block 15 to move up and down.

The centers of the opposite surfaces of the upper coupling block 13 and the lower coupling block 15 are respectively provided with a spherical groove 1301 and a tapered groove 1501. The radius of the steel ball 14 is smaller than the radius of curvature of the spherical groove 1301 and is clamped in the Between the spherical groove 1301 and the tapered groove 1501, an adjustment gap is formed between the upper coupling block 13 and the lower coupling block 15 through the steel ball 14, and the size of the adjustment gap is 2-5 mm. The point contact between the steel ball and the upper connecting block is formed through the spherical groove, and the line contact is formed between the steel ball and the lower connecting block through the tapered groove. When it is necessary to compensate the parallelism error of the two working surfaces of the stacked piezoelectric ceramics When adjusting the movable base, the upper connecting block will rotate with the contact point with the steel ball as the center of rotation. The adjustment process is smooth and smooth, and there will be no problem of the steel ball being stuck, which greatly reduces the cost of stacking piezoelectric ceramics. Shear force between layers.

The pressure sensor 11 is embedded and bonded in the center hole on the top surface of the upper connecting block 13, the stacked piezoelectric ceramic 10 is cylindrical and the lower end is bonded on the pressure sensor 11, and the upper and lower ends of the stacked piezoelectric ceramic 10 are clamped between the pressure sensor 11 and the base plate 602 of the elastic support 6 . A mounting sleeve 8 is fastened and bonded to the upper end of the stacked piezoelectric ceramics 10, and the substrate 602 is pressed on the mounting sleeve 8 to avoid stacking caused by the roughness of the top working surface of the stacked piezoelectric ceramics 10. The problem of poor contact between the piezoelectric ceramic 10 and the elastic support member 6 .

The outer edge of the upper coupling block 13 is a regular octagon, and the outer edge of the upper coupling block 13 is uniformly connected with four groups of connecting rods 21 along the circumferential direction, and each group of connecting rods 21 is two and connected to the upper coupling block by threads respectively. On the four end faces of the outer edge of 13, the outer ends of the connecting rods 21 pass through the elongated holes 102 uniformly distributed on the sleeve wall and are connected with mounting blocks 12, and each mounting block 12 is fixed on each group of two by screws The outer end of root connecting rod 21. Ball plungers 9 are respectively installed on the mounting block 12, and the ball plungers 9 are inserted into the through hole in the middle part of the mounting block 12, and an adjusting screw 22 is arranged in the outer port of the through hole. Under the action of 22, the steel balls at the outer end of the ball plunger 9 are pushed into the rectangular grooves 101 uniformly distributed on the outer wall of the sleeve 1 along the circumferential direction, which is used to assist the movable base to compensate the parallel working surfaces of the stacked piezoelectric ceramics. The adjustment of the degree error can realize the reset of the upper coupling block 13 after the test through the installation block 12 and the connecting rod 21.

Four guide shafts 19 are evenly distributed along the circumferential direction in the sleeve 1 , and the two ends of the guide shafts 19 are respectively connected between the annular top plate 2 and the support plate 17 by bolts. The guide shaft 19 passes through the guide holes evenly distributed on the flange plate at the lower end of the lower coupling block 15 through clearance fit, so as to ensure the levelness of the lower coupling block 15 when moving up and down. Axle sleeves 20 are fitted respectively in the guide holes at the lower end of the lower coupling block 15 . The centerlines of the elongated holes 102 and the rectangular grooves 101 are all parallel to the axis of the sleeve 1, and the central angle between the centerline of each rectangular groove 101 and the axis of the adjacent guide shaft 19 and the axis of the sleeve 1 is 45 degrees.

When working, first start the linear stepper motor 18 to push up the movable base composed of the upper connecting block 13, the steel ball 14 and the lower connecting block 15 through the transmission of the lead screw 23 and the screw nut 16 to apply a pre-load to the stacked piezoelectric ceramics 10. tightening force, while monitoring the pre-tightening force data measured by the pressure sensor 11, when the size of the pre-tightening force reaches the set value, the linear stepper motor 18 is controlled to stop working. Then, an external power supply is used to apply a pulse signal or a frequency sweep signal between the two electrodes of the stacked piezoelectric ceramics 10, and the inverse piezoelectric effect of the stacked piezoelectric ceramics 10 is used to excite the MEMS microstructure 4. The contact vibration measuring device detects the vibration response of the MEMS microstructure 4 , and the pressure sensor 11 is used to detect the output force of the stacked piezoelectric ceramics 10 . Finally, after the excitation of the MEMS microstructure 4 is completed, the linear stepper motor 18 is controlled to drive the lower coupling block 15 and the steel ball 14 to move downward, and then the four mounting blocks 12 are manually adjusted to drive the upper coupling block 13 to move downward, so that The top mounting sleeve 8 of the stacked piezoelectric ceramics 10 is separated from the elastic support member 6 to prevent the stacked piezoelectric ceramics 10 from being under stress all the time.

Although the embodiment of the present invention has been disclosed as above, it is not limited to the use listed in the specification and implementation, it can be applied to various fields suitable for the present invention, and it can be easily understood by those skilled in the art Therefore, the invention is not limited to the specific details and examples shown and described herein without departing from the general concept defined by the claims and their equivalents.

Claims (10)

1. a kind of four-axle type exciting device for the test of MEMS micro-structure dynamic characteristics, including sleeve are equipped with folded in sleeve Heap piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, set on sleeve Flexible supporting element and MEMS micro-structure, it is characterized in that:

Annular roof plate is equipped on sleeve, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；It is described Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual First linking arm, the second linking arm, third linking arm and the 4th linking arm composition connected vertically, for reducing the deformation of substrate Amount；

Lower part is equipped with support plate in sleeve, is equipped with electric threaded shaft transmission mechanism along the vertical direction at support plate center, electronic The screw of lead-screw drive mechanism is connect with lower connection block, for driving lower connection block to move up and down；

Spherical groove and conical socket are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small In spherical groove radius of curvature and be clamped between spherical groove and conical socket, made between upper and lower coupling block by steel ball Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping Between pressure sensor and elastic supporting member for supporting optical member；

Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting mobile base compensation to stack piezoelectric ceramics two The adjusting of surface parallelism error；

Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is uniformly arranged in lower connection block Pilot hole on the ring flange of lower end, levelness when for guaranteeing that lower connection block moves up and down.

2. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The connecting rod is four groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in every group of two companies respectively The outer end of extension bar.

3. the four-axle type exciting device according to claim 2 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and is equipped in through-hole external port and is adjusted screw, is used for bulb Plunger heads into rectangular recess.

4. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The substrate is square, and four support arms pass through one end that the first linking arm is connected to substrate surrounding end face respectively；With into one Step reduces the deflection of substrate, and MEMS micro-structure is avoided to fall off because of colloid cracking.

5. the four-axle type exciting device according to claim 1 or 4 for the test of MEMS micro-structure dynamic characteristics, feature Be: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.

6. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The upper coupling block outer rim is octagon.

7. the four-axle type exciting device according to claim 5 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: Be equipped with installation set stacking piezoelectric ceramics upper end button, the substrate of the elastic supporting member for supporting optical member is pressed in installation set, for avoid due to Stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member poor contact Problem.

8. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The guiding axis is four and is uniformly connected between annular roof plate and support plate.

9. the four-axle type exciting device according to claim 8 for the test of MEMS micro-structure dynamic characteristics, it is characterized in that: The center line of the long hole and rectangular recess is parallel with the axis of sleeve, the center line of each rectangular recess and adjacent guiding Central angle folded by the axis of axis axis and sleeve is 45 degree.

10. the four-axle type exciting device according to claim 1 for the test of MEMS micro-structure dynamic characteristics, feature Be: the adjustment gap is 2~5mm.