CN108217582B - A kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques - Google Patents
A kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques Download PDFInfo
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- CN108217582B CN108217582B CN201711355450.2A CN201711355450A CN108217582B CN 108217582 B CN108217582 B CN 108217582B CN 201711355450 A CN201711355450 A CN 201711355450A CN 108217582 B CN108217582 B CN 108217582B
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Abstract
The present invention discloses a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block and elastic supporting member for supporting optical member and MEMS micro-structure；It is equipped with annular roof plate in sleeve upper end, micro-structure is located on annular roof plate by elastic supporting member for supporting optical member；Guiding axis is evenly equipped between annular roof plate and bottom plate, lower connection block is evenly equipped with guiding support arm and is passed through by sleeve wall and covered on guiding axis, is equipped with locking device on guiding support arm；The spherical groove and spherical surface hill of cooperation are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim pushes into sleeve lining by bulb plunger.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, in particular to a kind of MEMS based on pedestal motivational techniques
Micro-structure four-axle type exciting device.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics, In are described in a text
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of four axis of MEMS micro-structure based on pedestal motivational techniques
Formula exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make to be obtained
The pretightning force measured value obtained is more accurate, and the adjustment process that compensation can be made to stack two working surface parallelism error of piezoelectric ceramics becomes
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, can be avoided test micro element
Fall off, convenient for test MEMS micro-structure dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques, including sleeve and bottom plate, in sleeve
It is interior be equipped with stack piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block, on sleeve be equipped with elastic supporting member for supporting optical member and
MEMS micro-structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the successively company of being mutually perpendicular to
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
It is evenly equipped with and is evenly equipped with guiding support arm and each guiding with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
Support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis, is located at guiding axis on each guiding support arm and is distinguished
Equipped with locking device, for lower connection block to be fixed on guiding axis；
Mutually matched spherical groove and spherical surface hill, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make to join above and below
It connects and forms point contact between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics folder
It holds between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end is pushed into respectively along circle
Circumferential direction is evenly arranged in the rectangular recess of sleeve lining, flat for assisting upper connection block compensation to stack two working surface of piezoelectric ceramics
The adjusting of row degree error.
As further preferred, the U-shaped gap is quite and mutually equidistant along circumference direction with rectangular recess quantity
Arranged for interval.
As further preferred, the substrate is square, and four support arms pass through the first linking arm respectively and are connected to base
One end of plate surrounding and with substrate outer edge formed a L-type gap；To further decrease the deflection of substrate, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, it is uniformly connected with adjusting rod in upper coupling block outer marginal circumference, adjusting rod is respectively by corresponding U
Type gap is pierced by, so as to the reset of coupling block upper after testing.
As further preferred, the guiding axis is four.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fixed on guiding axis by lock-screw.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, the upper coupling block is that eight prismatic and with sleeve lining annular gaps are 5-10mm.
The beneficial effects of the present invention are:
1, due to being respectively equipped with mutually matched spherical groove and spherical surface on the opposite face of upper coupling block and lower connection block
Protrusion, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, is made
Point contact is formed between upper and lower coupling block；It stacks the parallelism error of two working surface of piezoelectric ceramics when needing to compensate and adjusts
When mobile base, upper coupling block can be rotated using the contact point with lower connection block as center of rotation, and adjustment process is smooth, flat
It is sliding, it is not in substantially reduce the shearing force stacked between each layer of piezoelectric ceramics the problem of blocking.
2, due to being uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve lining；The parallel of two working surface of piezoelectric ceramics is stacked when needing to compensate
Error is spent upper coupling block can be realized not by the cooperation of spring and steel ball in bulb plunger when adjusting mobile base
Swing on equidirectional, adjustable space are bigger.
3, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided
Interference to pressure sensor can obtain and more accurately pre-tighten force data；It is obtained to swash when stacking piezoelectric ceramics work
The measured value for power of shaking is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible.
5, due to the support arm that elastic supporting member for supporting optical member includes one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
When work, the vibration deformation of elastic supporting member for supporting optical member is mainly from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is the B-B cross-sectional view of Fig. 2.
Fig. 5 is that the present invention removes the top view after annular roof plate.
Fig. 6 is the top view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of lower connection block.
Fig. 8 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101. rectangular recess, 102.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structure,
5. micro-structure mounting plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013.
Third linking arm, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers, 10. stack piezoelectricity pottery
Porcelain, 11. pressure sensors, 12. adjusting rods, coupling block on 13., 1301. spherical grooves, 14. lock-screws, 15. lower connection blocks,
1501. spherical surface hills, 1502. guiding support arms, 16. guiding axis, 17. axle sleeves, 18. axis fixed rings.
Specific embodiment
As shown in FIG. 1 to FIG. 8, a kind of MEMS micro-structure four-axle type exciting based on pedestal motivational techniques of the present invention
Device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13 and lower connection block 15 constitute mobile base, on sleeve 1 be equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4.
Pass through with bottom surface screw respectively on sleeve 1 and is fixed with the equal annular roof plate 2 and bottom plate 3 of outer diameter, it is described
MEMS micro-structure 4 is mounted on annular roof plate 2 by elastic supporting member for supporting optical member 6.The elastic supporting member for supporting optical member includes one piece of square substrate
602 and four circumference uniform distributions support arm 601, each support arm 601 is by the first linking arm being successively mutually connected vertically
6011, the second linking arm 6012, third linking arm 6013 and the 4th linking arm 6014 composition, four support arms 601 pass through respectively
First linking arm 6011 is connected to one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and base
602 outer rim of plate forms a L-type gap；For reducing the deflection of substrate, avoid MEMS micro-structure 4 due to colloid cracks
It falls off.Four support arms 601 of the elastic supporting member for supporting optical member 6 are fixed on circular top using screw support by Hollow Pillar 7 respectively
Above plate 2, and on the same axis with sleeve 1.MEMS micro-structure 4 cements in elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5
At 602 upper surface center of substrate.
Mutually matched spherical groove is respectively equipped at center on upper coupling block 13 and the opposite face of lower connection block 15
1301 and spherical surface hill 1501, the spherical surface hill 1501 is inserted into spherical groove 1301 and the radius of curvature of spherical surface hill 1501
Less than the radius of curvature of spherical groove 1301, make to form point contact between coupling block 13 and lower connection block 15, and make connection
An adjustment gap is formed between 15 top surface of 13 bottom surface of block and lower connection block, which is 2-5mm.It is stacked when needing to compensate
For the parallelism error of two working surface of piezoelectric ceramics come when adjusting mobile base, upper coupling block 13 can be to connect with lower connection block 15
Contact is that center of rotation is rotated, and adjustment process is smooth, smooth, is not in substantially reduce the problem of blocking and stack pressure
Shearing force between each layer of electroceramics.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the substrate 602 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Substrate 602 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and four guiding axis is uniformly connected with by circumferential screw
16, it is along the circumferential direction evenly equipped in sleeve wall and one-to-one four U-shaped gap 102 of guiding axis.The lower connection block 15
For cylinder, it is evenly distributed in 15 outer marginal circumference of lower connection block there are four guiding support arm 1502 and each guiding support arm 1502 is respectively by right
The U-shaped gap 102 answered is passed through and is sleeved on guiding axis 16 by clearance fit, is respectively equipped on each guiding support arm 1502
Through guiding axis through-hole and be installed in through-hole axle sleeve 17 respectively.
It is located at guiding axis 16 on each guiding support arm 1502 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 16.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 16
Fixed ring 18 is equipped in 18 side of axis fixed ring and is open and is fixed on guiding axis 16 by lock-screw 14.
The upper coupling block 13 is that eight prismatic and with sleeve lining annular gaps are 5-10mm, outside upper coupling block 13
Edge is along the circumferential direction uniformly connected with bulb plunger 9, and the bulb plunger 9 is four and is threadedly attached in is distributed in respectively
In four mounting holes of upper 13 outer rim of coupling block, the steel ball of 9 outer end of bulb plunger pushes into respectively is along the circumferential direction evenly arranged on set
In four rectangular recess 101 of 1 inner wall of cylinder, for assisting mobile base compensation to stack 10 liang of working surface depth of parallelisms of piezoelectric ceramics
The adjusting of error.The U-shaped gap 102 is with 101 quantity of rectangular recess quite and along the mutual equidistant interval cloth of 1 circumferencial direction of sleeve
It sets, central angle folded by the axis of the center line of each U-shaped gap 102 and adjacent 101 center line of rectangular recess with sleeve 1 is
45 degree.
Uniformly connect in circumferential direction through screw thread that there are four adjusting rod 12, each adjusting rods 12 in upper 13 outer rim of coupling block
Outer end is pierced by by corresponding U-shaped gap 102 respectively, so as to the reset of coupling block 13 upper after testing.
When work, the lock-screw 14 in each axis fixed ring 18 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked, monitor simultaneously
The preload force data measured by pressure sensor 11 screws each axis fixed ring after the size of pretightning force reaches setting value
Lock-screw 14 on 18, lower connection block 15 is fastened on guiding axis 16.Then, piezoelectric ceramics is being stacked using external power supply
Apply pulse signal or swept-frequency signal between 10 two electrodes, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10 micro- to MEMS
The excitation of structure 4, MEMS micro-structure 4 are vibrated under the cooperation of elastic supporting member for supporting optical member 6, while contactless using external optical
Vibration detecting device detection MEMS micro-structure 4 vibratory response, detected using pressure sensor 11 and stack the output of piezoelectric ceramics 10
Power.Finally, the lock-screw 14 unclamped in each axis fixed ring 18 fixes axis after completing the excitation to MEMS micro-structure 4
Ring 18 unclamps, and manually adjusts lower connection block 15 and moves down, then manually adjusts coupling block 13 downwards by four adjusting rods 12
It is mobile, make to stack 10 top installation set 8 of piezoelectric ceramics and separated with elastic supporting member for supporting optical member 6, avoids stacking piezoelectric ceramics 10 and locate always
In the state of stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques, including sleeve and bottom plate, in sleeve
Equipped with piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block is stacked, elastic supporting member for supporting optical member and MEMS are equipped on sleeve
Micro-structure, it is characterized in that:
It is equipped with annular roof plate in sleeve upper end, the MEMS micro-structure is mounted on annular roof plate by elastic supporting member for supporting optical member；It is described
Elastic supporting member for supporting optical member includes one piece of substrate and four support arms along substrate outer edge circumference uniform distribution, and each support arm is by successively mutual
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition connected vertically, for reducing the deformation of substrate
Amount；
It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have and is evenly equipped with guiding support arm and each guiding support arm with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively, be located at guiding axis on each guiding support arm and be respectively equipped with
Locking device, for lower connection block to be fixed on guiding axis；
Mutually matched spherical groove and spherical surface hill, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes upper and lower coupling block
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in
Between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end pushes into circumferentially side respectively
Into the rectangular recess for being evenly arranged on sleeve lining, for assisting upper connection block compensation to stack the two working surface depth of parallelism of piezoelectric ceramics
The adjusting of error.
2. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: the U-shaped gap and rectangular recess quantity quite and along the mutual equidistant interval in circumference direction are arranged.
3. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: the substrate is square, and four support arms pass through one end and and the base that the first linking arm is connected to substrate surrounding respectively
Plate outer rim forms a L-type gap；To further decrease the deflection of substrate, avoid MEMS micro-structure due to colloid cracks
It falls off.
4. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 3, special
Sign is: four support arm outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
5. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: being uniformly connected with adjusting rod in upper coupling block outer marginal circumference, adjusting rod is pierced by by corresponding U-shaped gap respectively, to survey
The reset of upper coupling block after examination.
6. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: the guiding axis is four.
7. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis, solid in axis
Determine ring side to be equipped with opening and be fixed on guiding axis by lock-screw.
8. a kind of MEMS micro-structure four-axle type exciting dress based on pedestal motivational techniques described according to claim 1 or 3 or 4
It sets, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
Bad problem.
9. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1, special
Sign is: being respectively provided with the through-hole through guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
10. a kind of MEMS micro-structure four-axle type exciting device based on pedestal motivational techniques according to claim 1 or 5,
It is characterized in that: it is 5-10mm that the upper coupling block, which is eight prismatic and with sleeve lining annular gaps,.
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| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP5470724B2 (en) * | 2008-03-13 | 2014-04-16 | トヨタ自動車株式会社 | Vibration test equipment |
| CN101476970B (en) * | 2009-01-14 | 2010-09-29 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| DE102012112140A1 (en) * | 2012-12-12 | 2014-06-12 | Dorma Gmbh & Co. Kg | Cam-closer has cam mounted between followers, where each follower is mounted in piston, and one of follower has spherical upper surface with point contact with cam in partial manner |
| CN105318150B (en) * | 2014-07-15 | 2018-01-02 | 冠研（上海）专利技术有限公司 | Shockproof runners with align structures |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859B (en) * | 2016-05-03 | 2017-10-10 | 吉林大学 | Macro and micro servo rotation platform based on bionical feeler and thermal expansion |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
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