CN108225699B - It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source - Google Patents
It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source Download PDFInfo
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- CN108225699B CN108225699B CN201711355449.XA CN201711355449A CN108225699B CN 108225699 B CN108225699 B CN 108225699B CN 201711355449 A CN201711355449 A CN 201711355449A CN 108225699 B CN108225699 B CN 108225699B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/027—Specimen mounting arrangements, e.g. table head adapters
Abstract
The present invention discloses a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block and elastic supporting member for supporting optical member and MEMS micro-structure；It is equipped with annular roof plate and bottom plate at sleeve both ends, micro-structure is located on annular roof plate by elastic supporting member for supporting optical member；The uniformly distributed guiding axis between annular roof plate and bottom plate, lower connection block are evenly equipped with guiding support arm and are passed through by sleeve wall and covered on guiding axis, are respectively equipped with locking device on guiding support arm；Mutually matched spherical groove and protrusion are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim is positioned in sleeve by bulb plunger.The device can apply different size of pretightning force to piezoelectric ceramics, keep pretightning force measured value obtained more accurate, the adjustment process for compensating two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, convenient for test dynamic characteristic parameter.
Description
Technical field
It is the invention belongs to micromachine electronic system technology field, in particular to a kind of using piezoelectric ceramics as driving source
MEMS micro-structure triple axle exciting device.
Background technique
Since MEMS micro element has many advantages, such as at low cost, small in size and light-weight, make it in automobile, aerospace, letter
The numerous areas such as breath communication, biochemistry, medical treatment, automatic control and national defence suffer from broad application prospect.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to so that micro-structure is generated vibration, that is, need to micro-
Structure is motivated.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structure.In the late three decades, domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, has investigated some can be used for
The motivational techniques of MEMS micro-structure and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore is dynamic in MEMS micro-structure
Step response testing field is widely used.David etc. is in " A base excitation test facility for
Dynamic testing of microsystems " a kind of seat excitation apparatus based on piezoelectric ceramics is described in a text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is viscous due to stacking piezoelectric ceramics
Binding structure so biggish pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force, which will lead to, stacks piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. is in " Dynamic characteristic testing for
MEMS micro-devices with base excitation " a kind of pedestal based on piezoelectric ceramics is described in a text swashs
Encourage device, consider in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism for adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But when the device is not considered to state mechanism in use to piezoelectric ceramics application pretightning force is stacked, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force stack piezoelectric ceramics between layers, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device is unable to measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to piezoelectric ceramics is stacked.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It sets, pretightning force is applied to piezoelectric ceramics is stacked by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
It is mounted on a movable understructure and reduces shearing force suffered by piezoelectric ceramics, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device:
1, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, the rotation that steel ball can not be smooth, or even will appear the situation being stuck；
2, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
It is then bonded the micro element of test, when piezoelectric ceramics work, the deformation of cross-spring piece is larger to will lead to micro element and cross
Colloid cracking between spring leaf, causes micro element to fall off；
5, change to be applied to by using the gasket of different-thickness in the device and stack the big of pretightning force on piezoelectric ceramics
It is small, cause adjustment process complicated, it is inflexible.
Summary of the invention
It is a kind of using piezoelectric ceramics as the MEMS micro-structure three of driving source the technical problem to be solved by the present invention is to provide
Shaft type exciting device, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make institute
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjustment process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, convenient for test MEMS micro-structure
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme:
It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source, including sleeve, set in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member is equipped on sleeve and MEMS is micro-
Structure, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is installed by elastic supporting member for supporting optical member
On annular roof plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, along circle in sleeve wall
Circumferential direction, which is evenly equipped with, is evenly equipped with guiding support arm and every with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference
A guiding support arm is passed through by corresponding U-shaped gap respectively and is sleeved on guiding axis, and guiding axis is located on each guiding support arm
Place is respectively equipped with locking device, for lower connection block to be fastened on guiding axis；
Mutually matched spherical groove and spherical surface hill, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make to join above and below
It connects and forms point contact between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics folder
It holds between pressure sensor and elastic supporting member for supporting optical member；
It is uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Long hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, for assisting upper connection block compensation to stack piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, the U-shaped gap is quite and mutually equidistant along circumference direction with rectangular recess quantity
Arranged for interval.
As further preferred, the elastic supporting member for supporting optical member is by a cylindrical tabletting and circumference uniform distribution in tabletting outer rim
Three support chips are constituted, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knot of MEMS is avoided
Structure is fallen off because colloid cracks.
As further preferred, three support chip outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on ring
Above shape top plate.
As further preferred, the guiding axis is three.
As further preferred, the locking device is to be fixed by screws in lower connection block bottom surface and cover on guiding axis
Axis fixed ring, axis fixed ring side be equipped be open and be fastened on guiding axis by lock-screw.
As further preferred, it is equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting element poor contact.
As further preferred, the through-hole across guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of every group of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with screw is adjusted, for bulb plunger to be headed into rectangular recess.
The beneficial effects of the present invention are:
1, due to being respectively equipped with mutually matched spherical groove and spherical surface on the opposite face of upper coupling block and lower connection block
Protrusion, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, is made
Point contact is formed between upper and lower coupling block；It stacks the parallelism error of two working surface of piezoelectric ceramics when needing to compensate and adjusts
When mobile base, upper coupling block can be rotated using the contact point with lower connection block as center of rotation, and adjustment process is smooth, flat
It is sliding, be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
2, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered by circumference uniform distribution respectively
Long hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl is pushed into respectively in the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall；The work of piezoelectric ceramics two is stacked when needing to compensate
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space are bigger.
3, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after to piezoelectric ceramics application pretightning force is stacked, mobile base structure is avoided to pressure
The interference of force snesor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, exciting force obtained
Measured value it is also more accurate.
4, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and each guiding support arm is respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to the piezoelectric ceramics different size of pretightning force of application is stacked, can pass through hand
Dynamic adjusting lower connection block drives upper coupling block mobile to realize, adjustment process is simple, flexible.
Detailed description of the invention
Fig. 1 is schematic perspective view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is the A-A cross-sectional view of Fig. 2.
Fig. 4 is that the present invention removes the top view after annular roof plate.
Fig. 5 is the schematic perspective view of lower connection block.
Fig. 6 is the schematic perspective view of elastic supporting member for supporting optical member.
Fig. 7 is the schematic perspective view of sleeve.
In figure: 1. sleeves, 101. rectangular recess, 102. long holes, 103.U type gap, 2. annular roof plates, 3. bottom plates,
4.MEMS micro-structure, 5. micro-structure mounting plates, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets,
9. piezoelectric ceramics is stacked bulb plunger, 10., 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical grooves,
14. lock-screw, 15. lower connection blocks, 1501. spherical surface hills, 1502. guiding support arms, 16. guiding axis, 17. axle sleeves, 18. are adjusted
Screw, 19. axis fixed rings, 20. connecting rods.
Specific embodiment
It is of the present invention a kind of sharp by the MEMS micro-structure triple axle of driving source of piezoelectric ceramics as shown in FIG. 1 to FIG. 7
Vibrating device, including a cannulated sleeve 1 are equipped in sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper connection
The mobile base that block 13 and lower connection block 15 are constituted, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structure 4 on sleeve 1.
Pass through screw respectively with bottom surface on sleeve 1 and be fixed with annular roof plate 2 and bottom plate 3, the MEMS micro-structure 4 is logical
Elastic supporting member for supporting optical member 6 is crossed to be mounted on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is constituted in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of cylindrical tabletting 601 avoids MEMS micro-structure 4 from falling off because of colloid cracking.The three of the elastic supporting member for supporting optical member 6
A 602 outer end of support chip is passed through Hollow Pillar 7 respectively and is fixed on above annular roof plate 2 using screw support, and with sleeve 1 same
On one axis.MEMS micro-structure 4 is cemented at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6 by micro-structure mounting plate 5.
The upper coupling block 13 and lower connection block 15 are cylindrical shape and cooperate respectively with sleeve lining wide arc gap, upper
Mutually matched spherical groove 1301 and spherical surface hill 1501, institute are respectively equipped on coupling block 13 and the opposite face of lower connection block 15
It states in the insertion spherical groove 1301 of spherical surface hill 1501 and the radius of curvature of spherical surface hill 1501 is less than the song of spherical groove 1301
Rate radius makes to form point contact between coupling block 13 and lower connection block 15, and makes 13 bottom surface of coupling block and lower connection block 15
An adjustment gap is formed between top surface, which is preferably 2-5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.Installation set 8 is set and is bonded with stacking 10 upper end of piezoelectric ceramics button, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 poor contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at outside sleeve 1 between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
16, it is along the circumferential direction evenly equipped in sleeve wall and one-to-one three U-shaped gap 103 of guiding axis.Outside lower connection block 15
Edge circumference uniform distribution is there are three guiding support arm 1502 and each guiding support arm 1502 is passed through and led to by corresponding U-shaped gap 103 respectively
Clearance fit is crossed to be sleeved on guiding axis 16, it is each guiding support arm 1502 on be respectively provided with through guiding axis through-hole simultaneously
It is installed with axle sleeve 17 respectively in through-hole.
It is located at guiding axis 16 on each guiding support arm 1502 and is respectively equipped with locking device, for consolidates lower connection block 15
It is scheduled on guiding axis 16.The locking device is to be fixed by screws in 15 bottom surface of lower connection block and cover the axis on guiding axis 16
Fixed ring 19 is equipped in 19 side of axis fixed ring and is open and is fixed on guiding axis 16 by lock-screw 14.
Along the circumferential direction uniformly be connected with three groups of connecting rods 20 in upper 13 outer rim of coupling block, every group of connecting rod 20 be two simultaneously
It is threadedly attached on three end faces of 13 outer rim of coupling block respectively, 20 outer end of connecting rod is respectively by circumference uniform distribution in sleeve
Long hole 102 on wall is pierced by and is connected with mounting blocks 12, and each mounting blocks 12 are fixed by screws in every group of two connections respectively
The outer end of bar 20.Bulb plunger 9 is separately installed on mounting blocks 12, bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks
It is interior, and be equipped in the through-hole external port and adjust screw 18, the steel ball of 9 outer end of bulb plunger is made under the action of adjusting screw 18
It is pushed into the rectangular recess 101 for being along the circumferential direction evenly arranged on 1 outer wall of sleeve respectively, for assisting mobile base compensation to stack pressure
The adjusting of two working surface parallelism error of electroceramics can realize upper coupling block 13 after testing by mounting blocks 12 and connecting rod 20
Reset.
The U-shaped gap 103 is suitable with 101 quantity of rectangular recess and arranges along the mutual equidistant interval of 1 circumferencial direction of sleeve,
Central angle folded by the center line of each U-shaped gap 103 and adjacent 101 center line of rectangular recess is 60 degree.
When work, the lock-screw 14 in each axis fixed ring 19 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base as composed by upper coupling block 13 and lower connection block 15 and applies pretightning force to piezoelectric ceramics 10 is stacked, monitor simultaneously
The preload force data measured by pressure sensor 11 screws each axis fixed ring after the size of pretightning force reaches setting value
Lock-screw 14 on 19, lower connection block 15 is fixed on guiding axis 16.Then, piezoelectric ceramics is being stacked using external power supply
Apply pulse signal or swept-frequency signal between 10 two electrodes, is realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10 micro- to MEMS
The excitation of structure 4, while using the vibratory response of the contactless vibration detecting device detection MEMS micro-structure 4 of external optical, it utilizes
Pressure sensor 11 detects the power output for stacking piezoelectric ceramics 10.Finally, being unclamped after completing the excitation to MEMS micro-structure 4
Lock-screw 14 in each axis fixed ring 19 unclamps axis fixed ring 19, manually adjusts lower connection block 15 and moves down, then hand
The dynamic mounting blocks 12 that adjust drive upper coupling block 13 to move down, and make to stack 10 top installation set 8 of piezoelectric ceramics and elastic supporting member for supporting optical member 6
It separates, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (10)
1. it is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source, including sleeve, it is equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knot of MEMS are equipped on sleeve
Structure, it is characterized in that:
It is respectively equipped with annular roof plate and bottom plate in sleeve upper and lower end, the MEMS micro-structure is mounted on ring by elastic supporting member for supporting optical member
On shape top plate；It is located at outside sleeve between annular roof plate and bottom plate and is evenly distributed in guiding axis, it is circumferentially square in sleeve wall
To being evenly equipped with, U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each lead correspondingly with guiding axis
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively to support arm, guiding axis is located on each guiding support arm and is punished
Not She You locking device, for lower connection block to be fastened on guiding axis；
Mutually matched spherical groove and spherical surface hill, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes upper and lower coupling block
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in
Between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
Into the rectangular recess for being along the circumferential direction evenly arranged on sleeve outer wall, work for assisting upper connection block compensation to stack piezoelectric ceramics two
The adjusting of surface parallelism error.
2. it is according to claim 1 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
Be characterized in: the U-shaped gap and rectangular recess quantity quite and along the mutual equidistant interval in circumference direction are arranged.
3. it is according to claim 1 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
Be characterized in: the elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim,
The thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, avoid MEMS micro-structure due to colloid cracking
It falls off.
4. it is according to claim 3 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
Be characterized in: three support chip outer ends of the elastic supporting member for supporting optical member pass through pillar respectively and are supported and fixed on above annular roof plate.
5. it is according to claim 1 or 2 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
It is characterized in that: the guiding axis is three.
6. it is according to claim 5 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
Be characterized in: the locking device is to be fixed by screws in lower connection block bottom surface and cover the axis fixed ring on guiding axis, in axis
Fixed ring side, which is equipped with, to be open and is fastened on guiding axis by lock-screw.
7. a kind of described according to claim 1 or 3 or 4 fill by the MEMS micro-structure triple axle exciting of driving source of piezoelectric ceramics
It sets, it is characterized in that: being equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
Bad problem.
8. it is according to claim 6 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
It is characterized in: is respectively provided with the through-hole across guiding axis on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. it is according to claim 5 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
Be characterized in: the connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in often respectively
The outer end of two connecting rods of group.
10. it is according to claim 9 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting device of driving source,
It is characterized in: in the through-hole that the bulb plunger is inserted into the middle part of mounting blocks, and is equipped in through-hole external port and adjusts screw, be used for
Bulb plunger is headed into rectangular recess.
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