CN108225699A - It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source - Google Patents
It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source Download PDFInfo
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- CN108225699A CN108225699A CN201711355449.XA CN201711355449A CN108225699A CN 108225699 A CN108225699 A CN 108225699A CN 201711355449 A CN201711355449 A CN 201711355449A CN 108225699 A CN108225699 A CN 108225699A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/027—Specimen mounting arrangements, e.g. table head adapters
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Abstract
The present invention discloses a kind of MEMS micro-structure triple axle exciting devices using piezoelectric ceramics as driving source, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block and elastic supporting member for supporting optical member and MEMS micro-structures；Annular roof plate and bottom plate are equipped at sleeve both ends, micro-structure is located at by elastic supporting member for supporting optical member on annular roof plate；The uniformly distributed guiding axis between annular roof plate and bottom plate, lower connection block, which is evenly equipped with, to be oriented to support arm and is passed through by sleeve wall and be sleeved on guiding axis, and locking device is respectively equipped on support arm is oriented to；The spherical groove and protrusion of mutual cooperation are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim is positioned at by bulb plunger in sleeve.The device can apply different size of pretightning force to piezoelectric ceramics, make obtained pretightning force measured value more accurate, can make the adjusting process of two working surface parallelism error of compensation piezoelectric ceramics become more smooth and smooth, convenient for testing dynamic characteristic parameter.
Description
Technical field
It is more particularly to a kind of using piezoelectric ceramics as driving source the invention belongs to micromachine electronic system technology field
MEMS micro-structure triple axle exciting devices.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide for a kind of MEMS micro-structures three using piezoelectric ceramics as driving source
Shaft type exciting device, the device more flexible can apply different size of pretightning force, while make institute to stacking piezoelectric ceramics
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjusting process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, convenient for testing MEMS micro-structures
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme that：
It is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source, including sleeve, set in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member is equipped on sleeve and MEMS is micro-
Structure, it is characterized in that：
Annular roof plate and bottom plate are respectively equipped in sleeve upper and lower end, the MEMS micro-structures are installed by elastic supporting member for supporting optical member
On annular roof plate；It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, justifies in sleeve wall upper edge
Circumferential direction be evenly equipped with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, is oriented to support arm and every
A guiding support arm is passed through by corresponding U-shaped gap and is sleeved on guiding axis respectively, is located at guiding axis on each guiding support arm
Place is respectively equipped with locking device, for lower connection block to be fastened on guiding axis；
The spherical groove and spherical surface hill of mutual cooperation, institute are respectively equipped on upper coupling block and the opposite face of lower connection block
It states in spherical surface hill insertion spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, make to join above and below
It connects and forms point contact between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics folder
It holds between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Slot hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into and is along the circumferential direction distributed in the rectangular recess of sleeve outer wall, for upper connection block compensation to be assisted to stack piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, the U-shaped gap is suitable with rectangular recess quantity and mutually equidistant along circumference direction
Arranged for interval.
As further preferred, the elastic supporting member for supporting optical member is in tabletting outer rim by a cylindrical tabletting and circumference uniform distribution
Three support chips are formed, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, three support chip outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is three.
As further preferred, the locking device is is fixed by screws in lower connection block bottom surface and is sleeved on guiding axis
Axis retainer ring, be equipped in axis retainer ring side and be open and pass through lock-screw and be fastened on guiding axis.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, through-hole across guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of every group of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with adjusting screw, for bulb plunger to be headed into rectangular recess.
The beneficial effects of the invention are as follows：
1st, due to being respectively equipped with the spherical groove and spherical surface of mutual cooperation on the opposite face of upper coupling block and lower connection block
Protrusion, the spherical surface hill is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, is made
Point contact is formed between upper and lower coupling block；It is adjusted when compensation is needed to stack the parallelism error of two working surface of piezoelectric ceramics
During mobile base, upper coupling block can be rotated using the contact point with lower connection block as center of rotation, and it is smooth, flat to adjust process
It is sliding, be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
2nd, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered respectively by circumference uniform distribution
Slot hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl pushes into along the circumferential direction be distributed in the rectangular recess of sleeve outer wall respectively；It works when compensation is needed to stack piezoelectric ceramics two
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space bigger.
3rd, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, mobile base structure is avoided to pressure
The interference of force snesor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, the exciting force that is obtained
Measured value it is also more accurate.
4th, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and being each oriented to support arm respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through hand
It is dynamic to adjust the upper coupling block movement of lower connection block drive to realize, it is simple, flexible to adjust process.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is that the present invention removes the vertical view after annular roof plate.
Fig. 5 is the dimensional structure diagram of lower connection block.
Fig. 6 is the dimensional structure diagram of elastic supporting member for supporting optical member.
Fig. 7 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101. rectangular recess, 102. slot holes, 103.U type gap, 2. annular roof plates, 3. bottom plates,
4.MEMS micro-structures, 5. micro-structure installing plates, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets,
9. piezoelectric ceramics is stacked bulb plunger, 10., 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical grooves,
14. lock-screw, 15. lower connection blocks, 1501. spherical surface hills, 1502. are oriented to support arm, and 16. guiding axis, 17. axle sleeves, 18. are adjusted
Screw, 19. axis retainer rings, 20. connecting rods.
Specific embodiment
As shown in Fig. 1~Fig. 7, a kind of MEMS micro-structure triple axles using piezoelectric ceramics as driving source of the present invention swash
Vibrating device including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper connection
The mobile base that block 13 and lower connection block 15 are formed, is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structures 4 on sleeve 1.
On sleeve 1 and bottom surface is fixed with annular roof plate 2 and bottom plate 3 by screw respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is formed in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of cylindrical tabletting 601, avoids MEMS micro-structures 4 from being fallen off due to colloid cracks.The three of the elastic supporting member for supporting optical member 6
A 602 outer end of support chip is fixed on using screw support above annular roof plate 2 respectively by Hollow Pillar 7, and with sleeve 1 same
On one axis.MEMS micro-structures 4 are cemented in by micro-structure installing plate 5 at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6.
The upper coupling block 13 and lower connection block 15 are cylindrical shape and coordinate respectively with sleeve lining wide arc gap, upper
The spherical groove 1301 of mutual cooperation and spherical surface hill 1501, institute are respectively equipped on coupling block 13 and the opposite face of lower connection block 15
It states in the insertion spherical groove 1301 of spherical surface hill 1501 and the radius of curvature of spherical surface hill 1501 is less than the song of spherical groove 1301
Rate radius makes to form point contact between coupling block 13 and lower connection block 15, and makes 13 bottom surface of coupling block and lower connection block 15
An adjustment gap is formed between top surface, which is preferably 2-5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at 1 outside of sleeve between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
16, three U-shaped gap 103 one-to-one with guiding axis are along the circumferential direction evenly equipped in sleeve wall.Outside lower connection block 15
There are three be oriented to support arm 1502 and be each oriented to support arm 1502 to be passed through and led to by corresponding U-shaped gap 103 respectively for edge circumference uniform distribution
Clearance fit is crossed to be sleeved on guiding axis 16, it is each guiding support arm 1502 on be respectively provided with through guiding axis through-hole simultaneously
It is installed with axle sleeve 17 respectively in through-hole.
It is located at guiding axis 16 on each guiding support arm 1502 and is respectively equipped with locking device, for lower connection block 15 to be consolidated
It is scheduled on guiding axis 16.The locking device is the axis for being fixed by screws in 15 bottom surface of lower connection block and being sleeved on guiding axis 16
Retainer ring 19 is fixed on equipped with being open and passing through lock-screw 14 on guiding axis 16 in 19 side of axis retainer ring.
Along the circumferential direction uniformly be connected with three groups of connecting rods 20 in upper 13 outer rim of coupling block, every group of connecting rod 20 for two simultaneously
It is threadedly attached in respectively on three end faces of 13 outer rim of coupling block, 20 outer end of connecting rod is respectively by circumference uniform distribution in sleeve
Slot hole 102 on wall is pierced by and is connected with mounting blocks 12, and each mounting blocks 12 are fixed by screws in every group of two connections respectively
The outer end of bar 20.Bulb plunger 9 is separately installed on mounting blocks 12, bulb plunger 9 is inserted into the through-hole at 12 middle part of mounting blocks
It is interior, and adjusting screw 18 is equipped in the through-hole external port, the steel ball of 9 outer end of bulb plunger is made under the action of adjusting screw 18
It pushes into respectively in the rectangular recess 101 for being along the circumferential direction distributed on 1 outer wall of sleeve, for mobile base compensation to be assisted to stack pressure
The adjusting of two working surface parallelism error of electroceramics can realize upper coupling block 13 after testing by mounting blocks 12 and connecting rod 20
Reset.
The U-shaped gap 103 is suitable with 101 quantity of rectangular recess and is arranged along the mutual equidistant interval of 1 circumferencial direction of sleeve,
The center line of each U-shaped gap 103 is 60 degree with the central angle folded by adjacent 101 center line of rectangular recess.
During work, the lock-screw 14 in each axis retainer ring 19 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base being made of upper coupling block 13 and lower connection block 15 and applies pretightning force to stacking piezoelectric ceramics 10, monitor simultaneously
The preload force data measured by pressure sensor 11 after the size of pretightning force reaches setting value, screws each axis retainer ring
Lock-screw 14 on 19, lower connection block 15 is fixed on guiding axis 16.Then, piezoelectric ceramics is being stacked using external power supply
Apply pulse signal or swept-frequency signal between 10 two electrodes, realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10 micro- to MEMS
The excitation of structure 4, while using the vibratory response of the contactless vibration detecting device detection MEMS micro-structures 4 of external optical, utilize
Pressure sensor 11 detects the power output for stacking piezoelectric ceramics 10.Finally, it after the excitation to MEMS micro-structures 4 is completed, unclamps
Lock-screw 14 in each axis retainer ring 19 unclamps axis retainer ring 19, adjusts lower connection block 15 manually and moves down, then hand
The dynamic mounting blocks 12 that adjust drive upper coupling block 13 to move down, and make to stack 10 top installation set 8 of piezoelectric ceramics and elastic supporting member for supporting optical member 6
It separates, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (10)
1. it is a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source, including sleeve, it is equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knots of MEMS are equipped on sleeve
Structure, it is characterized in that：
Annular roof plate and bottom plate are respectively equipped in sleeve upper and lower end, the MEMS micro-structures are mounted on ring by elastic supporting member for supporting optical member
On shape top plate；It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, it is circumferentially square in sleeve wall
To being evenly equipped with, U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each lead correspondingly with guiding axis
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively to support arm, being located at guiding axis on each guiding support arm punishes
Not She You locking device, for lower connection block to be fastened on guiding axis；
The spherical groove and spherical surface hill of mutual cooperation, the ball are respectively equipped on upper coupling block and the opposite face of lower connection block
Face protrusion is inserted into spherical groove and the radius of curvature of spherical surface hill is less than the radius of curvature of spherical groove, makes upper and lower coupling block
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in
Between pressure sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
To being along the circumferential direction distributed in the rectangular recess of sleeve outer wall, work for upper connection block compensation to be assisted to stack piezoelectric ceramics two
The adjusting of surface parallelism error.
2. it is according to claim 1 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The U-shaped gap is suitable with rectangular recess quantity and is arranged along the mutual equidistant interval in circumference direction.
3. it is according to claim 1 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim,
The thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structures are avoided due to colloid cracks
It falls off.
4. it is according to claim 3 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：Three support chip outer ends of the elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
5. it is according to claim 1 or 2 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in that：The guiding axis is three.
6. it is according to claim 5 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The locking device is the axis retainer ring for being fixed by screws in lower connection block bottom surface and being sleeved on guiding axis, in axis
Retainer ring side is equipped with to be open and pass through lock-screw and be fastened on guiding axis.
7. a kind of MEMS micro-structure triple axles exciting using piezoelectric ceramics as driving source according to claim 1 or 3 or 4 fills
It puts, it is characterized in that：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
The problem of bad.
8. it is according to claim 6 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The through-hole across guiding axis is respectively provided on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. it is according to claim 5 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in often respectively
The outer end of two connecting rods of group.
10. it is according to claim 9 a kind of using piezoelectric ceramics as the MEMS micro-structure triple axle exciting devices of driving source,
It is characterized in：The bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and adjusting screw is equipped in through-hole external port, is used for
Bulb plunger is headed into rectangular recess.
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