CN108163806A - A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics - Google Patents
A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics Download PDFInfo
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- CN108163806A CN108163806A CN201711355472.9A CN201711355472A CN108163806A CN 108163806 A CN108163806 A CN 108163806A CN 201711355472 A CN201711355472 A CN 201711355472A CN 108163806 A CN108163806 A CN 108163806A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/005—Test apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
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Abstract
The invention discloses a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics, including sleeve, piezoelectric ceramics, pressure sensor, upper coupling block, steel ball, lower connection block and elastic supporting member for supporting optical member and MEMS micro-structures；Lower part is equipped with electric threaded shaft transmission mechanism in sleeve, for lower connection block to be driven to move；Conical socket and spherical groove are respectively equipped on upper coupling block and the opposite face of lower connection block, piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Guiding axis is along the circumferential direction evenly equipped in sleeve；Sliding seat is respectively equipped on guiding axis, upper coupling block is connect with each sliding seat by tension spring respectively.The device can apply different size of pretightning force to stacking piezoelectric ceramics, make obtained pretightning force measured value more accurate simultaneously, the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, coming off for test micro element can be avoided, convenient for testing dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, the micro- knots of more particularly to a kind of MEMS based on piezoelectric ceramics
Structure four-axle type seat excitation apparatus.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide for a kind of MEMS micro-structure four-axle types bottom based on piezoelectric ceramics
Seat exciting bank, the device more flexible can apply different size of pretightning force, while make to be obtained to stacking piezoelectric ceramics
The pretightning force measured value obtained is more accurate, can become the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics
Must be more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, test micro element can be avoided
Come off, convenient for test MEMS micro-structures dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics, including sleeve, is equipped in sleeve
Piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block are stacked, on sleeve
Equipped with elastic supporting member for supporting optical member and MEMS micro-structures, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the company of being mutually perpendicular to successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
It is respectively equipped with conical socket and spherical groove on upper coupling block and the opposite face of lower connection block, the half of the steel ball
Diameter is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove, makes upper and lower coupling block by steel ball
Between formed one adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness during for ensureing that lower connection block moves up and down；
It is arranged with sliding seat respectively on guiding axis, the upper coupling block passes through circumference uniform distribution respectively with each sliding seat
Tension spring connects；For mobile base compensation to be assisted to stack the adjusting of two working surface parallelism error of piezoelectric ceramics.
As further preferred, corresponded in upper coupling block outer rim and connecting seat is respectively equipped at each sliding seat, the tension spring
It is connected between sliding seat and corresponding connecting seat.
As further preferred, every corresponded in sleeve wall be oriented to shaft position and be respectively equipped with slot hole, long centerline hole and
Corresponding guiding axis axis and sleeve axis in one plane, for the reset of coupling block upper after test.
As further preferred, the substrate is square, and four support arms are connected to base by the first linking arm respectively
One end of plate surrounding；Further to reduce the deflection of substrate, MEMS micro-structures is avoided to be fallen off due to colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is four and is uniformly connected between annular roof plate and support plate.
As further preferred, installation set, the substrate pressure of the elastic supporting member for supporting optical member are equipped with stacking piezoelectric ceramics upper end button
In installation set, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics
The problem of with elastic supporting member for supporting optical member loose contact.
The beneficial effects of the invention are as follows：
1st, since the radius of steel ball is less than the radius of curvature of spherical groove and is clamped between conical socket and spherical groove,
Line is then formed between steel ball and upper coupling block to contact, and point contact is formed between steel ball and lower connection block, is stacked when needing to compensate
For the parallelism error of two working surface of piezoelectric ceramics come when adjusting mobile base, upper coupling block can connecing with steel ball and lower connection block
Contact is rotated for center of rotation, and adjusting process is smooth, smooth, is not in the problem of steel ball is stuck, substantially reduces
Stack the shearing force between each layer of piezoelectric ceramics.
2nd, due to being along the circumferential direction laid with guiding axis in sleeve, it is arranged with sliding seat respectively on guiding axis, institute
Coupling block is stated to connect by the tension spring of circumference uniform distribution respectively with each sliding seat；It works when compensation is needed to stack piezoelectric ceramics two
The parallelism error on surface when adjusting mobile base, can realize the upper coupling block in not Tongfang by the deformation of different springs
Upward swing, adjustable space bigger.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, since elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
During work, the vibration deformation of elastic supporting member for supporting optical member is essentially from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
5th, due to being vertically equipped with electric threaded shaft transmission mechanism at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through electronic silk
Thick stick transmission mechanism drives mobile base movement to realize, it is simple, flexible to adjust process.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is that the present invention removes the vertical view after annular roof plate.
Fig. 5 is the structure diagram of elastic supporting member for supporting optical member.
In figure：1. sleeve, 101. slot holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, 5. micro-structure installing plates, 6.
Elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. third linking arms, 6014.
Four linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. sliding seats, 10. stack piezoelectric ceramics, 11. pressure sensors, and 12.
Connecting seat, coupling block on 13., 1301. conical sockets, 14. steel balls, 15. lower connection blocks, 1501. spherical grooves, 16. screws,
17. support plate, 18. linear stepping motors, 19. guiding axis, 20. axle sleeves, 21. tension springs, 22. leading screws.
Specific embodiment
As shown in fig. 1~fig. 5, a kind of triple axle pedestal for the test of MEMS micro-structure dynamic characteristics of the present invention
Exciting bank including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by the first line of a couplet
The mobile base that block 13, steel ball 14 and lower connection block 15 are formed is connect, elastic supporting member for supporting optical member 6 and the micro- knots of MEMS are equipped on sleeve 1
Structure 4.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member includes one piece of square substrate 602 and four circumference
Uniformly distributed support arm 601, each support arm 601 is by the first linking arm 6011, the second linking arm being mutually connected vertically successively
6012nd, 6013 and the 4th linking arm 6014 of third linking arm forms, and four support arms 601 are connected respectively by the first linking arm 6011
It is connected on one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and forms one with 602 outer rim of substrate
L-type gap；For reducing the deflection of substrate, MEMS micro-structures 4 is avoided to be fallen off due to colloid cracks.The resilient support
Four support arms 601 of part 6 are fixed on using screw support above annular roof plate 2 by pillar 7, and MEMS micro-structures 4 are by micro-
Structure installing plate 5 is cemented at the 602 upper surface center of substrate of elastic supporting member for supporting optical member 6.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 22 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 22 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, for band
Dynamic lower connection block 15 moves up and down.
On upper coupling block 13 and the opposite face of lower connection block 15 mutual corresponding conical socket is respectively equipped at center
1301 and spherical groove 1501, the radius of the steel ball 14 is less than the radius of curvature of spherical groove 1501 and is clamped in conical socket
Between 1301 and spherical groove 1501, make to be formed between upper coupling block 13 and lower connection block 15 between an adjustment by steel ball 14
Gap, the size in the adjustment gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the substrate 602 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Substrate 602 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
Four guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit and is along the circumferential direction uniformly arranged in lower link
Pilot hole on the ring flange of 15 lower end of block, levelness during for ensureing that lower connection block 15 moves up and down.In lower connection block 15
Lower end is located in pilot hole is installed with axle sleeve 20 respectively.
It is located on guiding axis 19 above lower connection block 15 and sliding seat 9, the first line of a couplet is arranged with by clearance fit respectively
Block 13 is connect to connect by the tension spring of circumference uniform distribution 21 respectively with each sliding seat 9.Four are evenly equipped in upper 13 outer marginal circumference of coupling block
A mounting plane, corresponds at each sliding seat 9 that insert is fixed with company respectively on each mounting plane of upper 13 outer rim of coupling block
Joint chair 12, the tension spring 21 are connected between sliding seat 9 and corresponding connecting seat 12；For mobile base compensation to be assisted to stack pressure
The adjusting of two working surface parallelism error of electroceramics.
Every 19 position of guiding axis is corresponded in sleeve wall and is respectively equipped with slot hole 101,101 center line of slot hole and corresponding is led
To 19 axis of axis and 1 axis of sleeve in one plane.
During work, linear stepping motor 18 is controlled to be pushed up by leading screw 22 and the transmission of screw 16 by upper coupling block first
13rd, the mobile base that steel ball 14 and lower connection block 15 are formed applies pretightning force to stacking piezoelectric ceramics 10, while monitors by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structures 4 is stacked, while contactless using external optical
The vibratory response of vibration detecting device detection MEMS micro-structures 4, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, after the excitation to MEMS micro-structures 4 is completed, control linear stepping motor 18 drives lower connection block 15 and steel ball 14 downward
It is mobile, then adjusting sliding seat 9 manually by slot hole 101 moves down upper coupling block 13, makes to stack 10 top peace of piezoelectric ceramics
Encapsulation 8 is separated with elastic supporting member for supporting optical member 6, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (7)
1. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics including sleeve, is equipped with folded in sleeve
Heap piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, set on sleeve
Flexible support element and MEMS micro-structures, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；It is described
Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition, for reducing the deflection of substrate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
Conical socket and spherical groove are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small
In spherical groove radius of curvature and be clamped between conical socket and spherical groove, made between upper and lower coupling block by steel ball
Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness during for ensureing that lower connection block moves up and down；
It is arranged with sliding seat respectively on guiding axis, the upper coupling block passes through the tension spring of circumference uniform distribution respectively with each sliding seat
Connection；For mobile base compensation to be assisted to stack the adjusting of two working surface parallelism error of piezoelectric ceramics.
2. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is：Corresponded in upper coupling block outer rim and connecting seat be respectively equipped at each sliding seat, the tension spring be connected to sliding seat with it is corresponding
Connecting seat between.
3. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is：Every corresponded in sleeve wall be oriented to shaft position and be respectively equipped with slot hole, long centerline hole and corresponding guiding axis axis with
Sleeve axis in one plane, for the reset of coupling block upper after test.
4. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics according to claim 1, special
Sign is：The substrate is square, and four support arms are connected to one end of substrate surrounding by the first linking arm respectively；With into one
Step reduces the deflection of substrate, and MEMS micro-structures is avoided to be fallen off due to colloid cracks.
5. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics according to claim 4, special
Sign is：Four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
6. a kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics according to claim 1 or 3,
It is characterized in：The guiding axis is four and is uniformly connected between annular roof plate and support plate.
7. a kind of MEMS micro-structure four-axle types pedestal excitation dress based on piezoelectric ceramics according to claim 1 or 4 or 5
It puts, it is characterized in that：Installation set is equipped with stacking piezoelectric ceramics upper end button, the substrate of the elastic supporting member for supporting optical member is pressed in installation set,
For avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and resilient support
The problem of part loose contact.
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| CN201711355472.9A CN108163806B (en) | 2017-12-16 | 2017-12-16 | A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics |
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| CN201711355472.9A CN108163806B (en) | 2017-12-16 | 2017-12-16 | A kind of MEMS micro-structure four-axle type seat excitation apparatus based on piezoelectric ceramics |
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| CN108163806B CN108163806B (en) | 2019-10-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114518286A (en) * | 2022-01-11 | 2022-05-20 | 中国人民解放军国防科技大学 | Tensile member fixing clamp for mechanical tensile test |
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