CN108168815A - A kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic - Google Patents
A kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic Download PDFInfo
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- CN108168815A CN108168815A CN201711355464.4A CN201711355464A CN108168815A CN 108168815 A CN108168815 A CN 108168815A CN 201711355464 A CN201711355464 A CN 201711355464A CN 108168815 A CN108168815 A CN 108168815A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The invention discloses a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block and MEMS micro-structures；Annular roof plate is equipped in sleeve upper end, MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；Hemispherical round end is in lower connection block upper end and withstands on coupling block bottom surface；Piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger inner end is pushed into the sliding slot of coupling block outer rim, and guiding axis is evenly distributed between annular roof plate and bottom plate.The device flexibly can apply different size of pretightning force to stacking piezoelectric ceramics, make pretightning force measured value more accurate, the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is reduced, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
Description
Technical field
It is more particularly to a kind of micro- by the MEMS of Piezoelectric Ceramic the invention belongs to micromachine electronic system technology field
Structure triple axle exciting bank.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide for a kind of MEMS micro-structure triple axles by Piezoelectric Ceramic
Exciting bank, the device more flexible can apply different size of pretightning force, while make to be obtained to stacking piezoelectric ceramics
Pretightning force measured value it is more accurate, can become the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics
It is more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, is capable of providing the adjusting space of bigger,
Convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic, including sleeve and bottom plate, in sleeve
Equipped with piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block is stacked, elastic supporting member for supporting optical member and MEMS are equipped on sleeve
Micro-structure, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
Between annular roof plate and bottom plate be located at sleeve outside be evenly distributed in guiding axis, be along the circumferential direction evenly equipped in sleeve wall with
U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each guiding support arm difference to guiding axis correspondingly
It is passed through by corresponding U-shaped gap and is sleeved on guiding axis；It is located at guiding axis on each guiding support arm and is respectively equipped with locking
Device, for lower connection block to be fixed on guiding axis；
Hemispherical round end is in the lower connection block upper end and withstands at the baseplane center of coupling block, makes to couple above and below
Point contact is formed between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to circumferentially
Direction is laid in the plunger mounting base in sleeve wall, and the steel ball of bulb plunger inner end pushes into respectively to be along the circumferential direction evenly distributed with
In the sliding slot of upper coupling block outer rim, it is used to implement connection block compensation in the positioning and auxiliary of coupling block and stacks piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, screw hole is along the circumferential direction evenly equipped in sleeve wall, the plunger mounting base passes through respectively
It is threadably mounted in screw hole.
As further preferred, the U-shaped gap is suitable with screw hole quantity and along the mutual equidistant interval in circumference direction
Arrangement.
As further preferred, the elastic supporting member for supporting optical member is in tabletting outer rim by a cylindrical tabletting and circumference uniform distribution
Three support chips are formed, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, three support chip outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is three.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, through-hole across guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, upper coupling block outer marginal circumference be uniformly connected with the one-to-one adjusting rod of U-shaped gap,
Adjusting rod outer end is stretched out respectively by corresponding U-shaped gap；The above reset of coupling block is used to implement after test.
As further preferred, the locking device is is fixed by screws in lower connection block bottom surface and is sleeved on guiding axis
Axis retainer ring, be equipped in axis retainer ring side and be open and pass through lock-screw and be fixed on guiding axis.
The beneficial effects of the invention are as follows：
1st, since lower connection block upper end for hemispherical round end and is withstood at the baseplane center of upper coupling block, make to join above and below
It connects and forms point contact between block；Mobile base is adjusted when compensation is needed to stack the parallelism error of two working surface of piezoelectric ceramics
When, upper coupling block can be swung using the contact point with lower connection block as center of rotation, and adjusting process is smooth, smooth, will not go out
The problem of now blocking substantially reduces the shearing force stacked between each layer of piezoelectric ceramics.
2nd, since equipped with bulb plunger, bulb plunger outer end is connected to circumference uniform distribution between upper coupling block and sleeve
It is along the circumferential direction laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger inner end pushes into circumferentially side respectively
To being distributed in the sliding slot of upper coupling block outer rim；It can not only realize that center of the upper coupling block in sleeve is determined by bulb plunger
Position, and stack the parallelism error of two working surface of piezoelectric ceramics when needing to compensate and when adjusting mobile base, can pass through
The swing of upper coupling block in different directions is realized in the cooperation of spring and steel ball in bulb plunger, and adjustable space is more
Greatly.
3rd, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, mobile base structure is avoided to pressure
The interference of force snesor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, the exciting force that is obtained
Measured value it is also more accurate.
4th, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and being each oriented to support arm respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through hand
It is dynamic to adjust the upper coupling block movement of lower connection block drive to realize, it is simple, flexible to adjust process；Due to upper in each guiding support arm
Locking device is respectively equipped at guiding axis, therefore the lower connection block after adjusting can be fixed on guiding axis, it is ensured that test is accurate
Really.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is that the present invention removes the vertical view after annular roof plate.
Fig. 5 is the dimensional structure diagram of lower connection block.
Fig. 6 is the dimensional structure diagram of elastic supporting member for supporting optical member.
Fig. 7 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101.U type gap, 102. screw holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, 5. is micro-
Structure installing plate, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets, 9. bulb plungers, 10. is folded
Heap piezoelectric ceramics, 11. pressure sensors, 12. adjusting rods, coupling block on 13., 1301. sliding slots, 14. plunger mounting bases, under 15.
Coupling block, 1501. are oriented to support arm, 16. guiding axis, 17. axle sleeves, 18. lock-screws, 19. axis retainer rings.
Specific embodiment
As shown in Fig. 1~Fig. 7, a kind of MEMS micro-structures triple axle by Piezoelectric Ceramic of the present invention encourages dress
It puts, including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block 13
The mobile base formed with lower connection block 15 is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structures 4 on sleeve 1.
On sleeve 1 and bottom surface is fixed with annular roof plate 2 and bottom plate 3 by screw respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is formed in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of tabletting 601 avoids MEMS micro-structures 4 from being fallen off due to colloid cracks.Three supports of the elastic supporting member for supporting optical member 6
602 outer end of piece is fixed on using screw support above annular roof plate 2 respectively by Hollow Pillar 7, and with sleeve 1 in same axis
On.MEMS micro-structures 4 are cemented in by micro-structure installing plate 5 at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6.
The upper coupling block 13 and lower connection block 15 are cylindrical shape and coordinate respectively with 1 inner wall wide arc gap of sleeve, institute
15 upper end of lower connection block is stated hemispherical round end and to withstand at the baseplane center of coupling block 13, is made between upper and lower coupling block
Form point contact.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block and couples on after insert
13 top surface of block in the same plane, stacks piezoelectric ceramics 10 and is bonded on pressure sensor 11 for cylindrical and lower end, stack pressure
10 both ends of electroceramics are clamped between pressure sensor 11 and the tabletting 601 of elastic supporting member for supporting optical member 6.Stacking 10 upper end of piezoelectric ceramics
Button sets and is bonded with installation set 8, and the tabletting 601 of the elastic supporting member for supporting optical member 6 is pressed in installation set 8, for avoiding due to stacking pressure
10 top work surface of electroceramics it is rough caused by stack asking for piezoelectric ceramics 10 and 6 loose contact of elastic supporting member for supporting optical member
Topic.
It is located at 1 outside of sleeve between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
16, it is along the circumferential direction evenly equipped in sleeve wall and 16 one-to-one three U-shaped gap 101 of guiding axis.In lower connection block 15
Outer marginal circumference is uniformly distributed, and there are three be oriented to support arm 1501 and be each oriented to support arm 1501 to be passed through simultaneously by corresponding U-shaped gap 101 respectively
It is sleeved on guiding axis 16 by clearance fit, the through-hole through guiding axis is respectively provided on each guiding support arm 1501
And it is installed with axle sleeve 17 respectively in through-hole.The lower connection block 15 can be under the guiding role of guiding axis 16 vertically
It is slided up and down in sleeve 1.
It is located at guiding axis 16 on each guiding support arm 1501 and is respectively equipped with locking device, for lower connection block 15 to be consolidated
It is scheduled on guiding axis 16.The locking device is the axis for being fixed by screws in 15 bottom surface of lower connection block and being sleeved on guiding axis 16
Retainer ring 19 is fixed on equipped with being open and passing through lock-screw 18 on guiding axis 16 in 19 side of axis retainer ring.
Circumference uniform distribution is equipped with bulb plunger 9 between upper coupling block 13 and sleeve 1, and bulb plunger 9 is with three in the present embodiment
For a, 9 outer end of bulb plunger is threadedly attached in the plunger mounting base being along the circumferential direction laid in sleeve wall respectively
In 14, three screw holes 102 are along the circumferential direction evenly equipped in sleeve wall, 14 outer rim of plunger mounting base is ladder shaft-like and divides
It is not mounted in corresponding screw hole 102 by 1 outside of sleeve by being threaded into.The steel ball of 9 inner end of bulb plunger pushes into respectively
It is along the circumferential direction distributed in three sliding slots 1301 of coupling block outer rim, the sliding slot 1301 is parallel with the axis of sleeve 1, leads to
Centralized positioning of the coupling block in sleeve can not only be realized by crossing bulb plunger；And stack piezoelectric ceramics two when needing to compensate
The parallelism error of working surface, can be by the cooperation of spring and steel ball in bulb plunger come real come when adjusting mobile base
The now upper swing of coupling block in different directions, adjustable space bigger.
The U-shaped gap 101 is suitable with screw hole quantity and is arranged along the mutual equidistant interval of 1 circumferencial direction of sleeve, each U-shaped
The center line of gap 101 is 60 degree with the central angle folded by adjacent 102 center line of screw hole.
It is uniformly connected with and U-shaped 101 one-to-one adjusting rod 12 of gap, adjusting rod 12 in upper 13 outer marginal circumference of coupling block
Inner end is threadedly coupled with upper 13 outer rim of coupling block, and 12 outer end of adjusting rod is stretched out respectively by corresponding U-shaped gap 101；It is used to implement
The reset of upper coupling block 13 after test.
During work, the lock-screw 18 in each axis retainer ring 19 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base being made of upper coupling block 13 and lower connection block 15 and applies pretightning force to stacking piezoelectric ceramics 10, monitor simultaneously
The preload force data measured by pressure sensor 11 after the size of pretightning force reaches setting value, tightens each axis retainer ring
Lock-screw 18 on 19, lower connection block 15 is fixed on guiding axis 16.Then, piezoelectric ceramics is being stacked using external power supply
Apply pulse signal or swept-frequency signal between 10 two electrodes, realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10 micro- to MEMS
The excitation of structure 4, while using the vibratory response of the contactless vibration detecting device detection MEMS micro-structures 4 of external optical, utilize
Pressure sensor 11 detects the power output for stacking piezoelectric ceramics 10.Finally, it after the excitation to MEMS micro-structures 4 is completed, unclamps
Lock-screw 18 in each axis retainer ring 19 unclamps axis retainer ring 19, adjusts lower connection block 15 manually and moves down, then lead to
Toning pole 12 adjusts upper coupling block 13 and moves down manually, makes to stack 10 top installation set 8 of piezoelectric ceramics and elastic supporting member for supporting optical member 6
It separates, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic including sleeve and bottom plate, are set in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member is equipped on sleeve and MEMS is micro-
Structure, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；In ring
It is located between shape top plate and bottom plate outside sleeve and is evenly distributed in guiding axis, is along the circumferential direction evenly equipped with and is oriented in sleeve wall
U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and are each oriented to support arm respectively by right axis correspondingly
The U-shaped gap answered is passed through and is sleeved on guiding axis；It is located at guiding axis on each guiding support arm and is respectively equipped with locking device,
For lower connection block to be fixed on guiding axis；
The lower connection block upper end hemispherical round end and to withstand at the baseplane center of coupling block, make upper and lower coupling block it
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure
Between force snesor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to along the circumferential direction
It is laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger inner end pushes into respectively to be along the circumferential direction distributed on
In the sliding slot of coupling block outer rim, it is used to implement connection block compensation in the positioning and auxiliary of coupling block and stacks piezoelectric ceramics two and work
The adjusting of surface parallelism error.
2. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1, feature
It is：Screw hole is along the circumferential direction evenly equipped in sleeve wall, the plunger mounting base is respectively by being threadably mounted in screw hole.
3. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 2, feature
It is：The U-shaped gap is suitable with screw hole quantity and is arranged along the mutual equidistant interval in circumference direction.
4. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1, feature
It is：The elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim, described
The thickness of support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structures are avoided due to colloid cracks
It comes off.
5. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 4, feature
It is：Three support chip outer ends of the elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
6. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1 or 3, special
Sign is：The guiding axis is three.
7. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1 or 3 or 4,
It is characterized in that：Be equipped with installation set stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoid by
In stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member loose contact
The problem of.
8. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 6, feature
It is：The through-hole across guiding axis is respectively provided on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1 or 3, special
Sign is：Upper coupling block outer marginal circumference be uniformly connected with the one-to-one adjusting rod of U-shaped gap, adjusting rod outer end is respectively by right
The U-shaped gap answered stretches out；The above reset of coupling block is used to implement after test.
10. a kind of MEMS micro-structure triple axle exciting banks by Piezoelectric Ceramic according to claim 1, feature
It is：The locking device is the axis retainer ring for being fixed by screws in lower connection block bottom surface and being sleeved on guiding axis, is fixed in axis
Ring side is equipped with to be open and pass through lock-screw and be fixed on guiding axis.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114184506A (en) * | 2021-12-06 | 2022-03-15 | 安徽农业大学 | Nano indentation testing device capable of automatically adjusting sample surface levelness |
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