CN108020392A - Exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect - Google Patents
Exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect Download PDFInfo
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- CN108020392A CN108020392A CN201711355461.0A CN201711355461A CN108020392A CN 108020392 A CN108020392 A CN 108020392A CN 201711355461 A CN201711355461 A CN 201711355461A CN 108020392 A CN108020392 A CN 108020392A
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- mems micro
- piezoelectric ceramics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/08—Shock-testing
Abstract
The invention discloses exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block and MEMS micro-structure；Support plate and the electric threaded shaft transmission mechanism being connected with lower connection block are equipped with sleeve；Upper coupling block lower end is equipped with hemispherical round end and is pressed in above lower connection block；Piezoelectric ceramics is clamped between pressure sensor and elastic supporting member for supporting optical member；Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger the inner steel ball is pushed into the sliding slot of coupling block outer rim, and the guiding axis through lower connection block is evenly equipped with sleeve.The device flexibly can apply different size of pretightning force to stacking piezoelectric ceramics, make pretightning force measured value more accurate, the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is reduced, easy to test the dynamic characteristic parameter of MEMS micro-structures.
Description
Technical field
The invention belongs to micromachine electronic system technology field, more particularly to a kind of MEMS based on inverse piezoelectric effect is micro-
The outer exciting device of structure four-axle type piece.
Background technology
Since MEMS micro elements have the advantages that cost is low, small and light-weight, make it in automobile, aerospace, letter
Breath communication, biochemistry, medical treatment, automatically control and suffer from being widely applied prospect with numerous areas such as national defence.For very much
For MEMS device, the micro-displacement of its internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as the amplitude of micro-structure, intrinsic frequency, damping ratio carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure is produced vibration, that is, need to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used among the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out substantial amounts of exploration for the vibrational excitation method of MEMS micro-structures, investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, the base to stack piezoelectric ceramics as driving source swashs
Encourage device and possess that excitation bandwidth is larger, and device is simple, easy to operate, and the advantages that strong applicability, therefore is moved in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed base, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born by stacking piezoelectric ceramics, but cannot bear pulling force, and pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of base based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, base and
The mechanism of adjusting screw composition stacks piezoelectric ceramics to compress, and can change the size of pretightning force by screwing adjusting screw,
But the device is not considered when applying pretightning force to stacking piezoelectric ceramics using said mechanism, due to stacking piezoelectric ceramics two
The parallelism error of working surface, can produce shearing force, which can be to stacking between layers stack piezoelectric ceramics
Piezoelectric ceramics produces mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of base excitation dress based on piezoelectric ceramics
Put, pretightning force is applied to stacking piezoelectric ceramics by cross-spring piece in the apparatus, and by the way that piezoelectric ceramics bottom will be stacked
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable installed in one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
The device still suffers from its own shortcomings：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error for needing compensation to stack two working surfaces of piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation that steel ball can not be smooth, or even the situation being stuck occurs；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure causes coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece causes micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
The content of the invention
The technical problems to be solved by the invention are to provide for a kind of MEMS micro-structure four-axle types based on inverse piezoelectric effect
The outer exciting device of piece, which more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, while make institute
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjusting process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, using the teaching of the invention it is possible to provide the adjusting of bigger
Space, avoids coming off for test micro element, easy to test the dynamic characteristic parameter of MEMS micro-structures.
To solve the above problems, the present invention adopts the following technical scheme that：
Exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect, including sleeve and bottom plate, are covering
Cylinder in be equipped with stack piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block, on sleeve be equipped with elastic supporting member for supporting optical member and
MEMS micro-structures, it is characterized in that：
Annular roof plate is equipped with sleeve upper end, the MEMS micro-structures are installed on annular roof plate by elastic supporting member for supporting optical member；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the company of being mutually perpendicular to successively
The first linking arm, the second linking arm, the 3rd linking arm and the 4th linking arm connect is formed and formed substrate outer edge between a L-type
Gap, for reducing the deflection of substrate；
Guiding axis is evenly distributed in outside sleeve between annular roof plate and bottom plate, in sleeve wall along the circumferential direction
Be evenly equipped with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and each is oriented to
Support arm is passed through by corresponding U-shaped gap and is sleeved on guiding axis respectively；
The upper coupling block lower end is equipped with hemispherical round end and is pressed at the upper planar central of lower connection block, makes upper and lower
Connect and form point contact between block；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics folder
Hold between pressure sensor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to circumferentially
Direction is laid in the plunger mounting base in sleeve wall, and the steel ball of bulb plunger the inner pushes into respectively to be along the circumferential direction evenly distributed with
In the sliding slot of upper coupling block outer rim, for aiding in upper connection block compensation to stack two working surface parallelism error of piezoelectric ceramics
Adjust；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically provided with support plate center,
The screw of electric threaded shaft transmission mechanism is connected with lower connection block, for driving lower connection block to move up and down.
As further preferred, screw hole is along the circumferential direction evenly equipped with sleeve wall, the plunger mounting base passes through respectively
It is threadably mounted in screw hole.
As further preferred, the U-shaped gap is suitable with screw hole quantity and along the mutual equi-spaced apart in its circumference direction
Arrangement.
As further preferred, the substrate is square, and four support arms are connected to base by the first linking arm respectively
One end of plate surrounding；Further to reduce the deflection of substrate, MEMS micro-structures are avoided to be fallen off because colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is four.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of supporting item loose contact.
As further preferred, through hole through guiding axis is respectively provided with each guiding support arm and in through hole
Axle sleeve is installed with respectively.
As further preferred, upper coupling block outer marginal circumference be uniformly connected with the one-to-one adjusting rod of U-shaped gap,
Adjusting rod outer end is stretched out by corresponding U-shaped gap respectively；The above reset of coupling block is used for realization after test.
The beneficial effects of the invention are as follows：
1st, since upper coupling block lower end is equipped with hemispherical round end and is pressed at the upper planar central of lower connection block, make upper and lower
Point contact is formed between coupling block；Movable bottom is adjusted when needing to compensate the parallelism error for stacking two working surface of piezoelectric ceramics
During seat, upper coupling block can be swung using the contact point with lower connection block as center of rotation, and adjusting process is smooth, smooth, will not
The problem of blocking, substantially reduces the shearing force stacked between each layer of piezoelectric ceramics.
2nd, due between upper coupling block and sleeve circumference uniform distribution be equipped with bulb plunger, bulb plunger outer end is connected to
Along the circumferential direction it is laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger the inner pushes into circumferentially side respectively
To being distributed in the sliding slot of upper coupling block outer rim；Adjusted when needing to compensate the parallelism error for stacking two working surface of piezoelectric ceramics
When saving mobile base, it can realize upper coupling block in different directions by the cooperation of the spring in bulb plunger and steel ball
Swing, adjustable space bigger.
3rd, it is installed in due to pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, mobile base structure is avoided to pressure
The interference of force snesor, can obtain more accurately pretension force data；When stacking piezoelectric ceramics work, the exciting force that is obtained
Measured value it is also more accurate.
4th, since elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, the 3rd linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
During work, the vibration deformation of elastic supporting member for supporting optical member is essentially from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
5th, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and being each oriented to support arm respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, and electric threaded shaft transmission mechanism, electric threaded shaft are vertically provided with support plate center
The screw of transmission mechanism is connected with lower connection block；, can be with when needing to apply different size of pretightning force to stacking piezoelectric ceramics
By controlling electric threaded shaft transmission mechanism to drive lower connection block to realize, adjusting process becomes simple, flexible.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the top view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is the B-B sectional views of Fig. 2.
Fig. 5 is that the present invention removes the top view after annular roof plate.
Fig. 6 is the top view of elastic supporting member for supporting optical member.
Fig. 7 is the dimensional structure diagram of lower connection block.
Fig. 8 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101.U type gap, 102. screw holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, 5. is micro-
Structure installing plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. the 3rd
Linking arm, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers, 10. stack piezoelectric ceramics,
11. pressure sensor, 12. adjusting rods, coupling block on 13., 1301. hemispherical round ends, 1302. sliding slots, 14. plunger mounting bases,
15. lower connection block, 1501. are oriented to support arm, 16. screws, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. axis
Set, 21. leading screws.
Embodiment
As shown in Fig. 1~Fig. 8, a kind of MEMS micro-structure triple axle excitings based on base motivational techniques of the present invention
Device, including a cannulated sleeve 1, are equipped with sleeve 1 and stack piezoelectric ceramics 10, pressure sensor 11 and by upper coupling block
13 and lower connection block 15 form mobile base, elastic supporting member for supporting optical member 6 and MEMS micro-structures 4 are equipped with sleeve 1.
On sleeve 1 and bottom surface is fixed with annular roof plate 2 and bottom plate 3 by screw respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member includes one piece of square substrate 602 and four circumference
Uniformly distributed support arm 601, each support arm 601 is by the first linking arm 6011, the second linking arm being mutually connected vertically successively
6012nd, the 3rd linking arm 6013 and the 4th linking arm 6014 form, and four support arms 601 are connected by the first linking arm 6011 respectively
One end of 602 surrounding end face of substrate is connected on, the second linking arm 6012 and the 3rd linking arm 6013 form one with 602 outer rim of substrate
L-type gap；For reducing the deflection of substrate, MEMS micro-structures 4 are avoided to be fallen off because colloid cracks.The resilient support
Four support arms 601 of part 6 are fixed on above annular roof plate 2 by Hollow Pillar 7 using screw support respectively, MEMS micro-structures
4 are cemented at the 602 upper surface center of substrate of elastic supporting member for supporting optical member 6 by micro-structure installing plate 5.
The upper coupling block 13 and lower connection block 15 are cylindrical shape and coordinate respectively with 1 inner wall wide arc gap of sleeve, institute
13 lower end of coupling block is stated equipped with hemispherical round end 1301 and is pressed at the upper planar central of 15 upper end of lower connection block, is made upper and lower
Point contact is formed between coupling block；Movable bottom is adjusted when needing to compensate the parallelism error for stacking two working surface of piezoelectric ceramics
During seat, upper coupling block 13 can be swung using the contact point with lower connection block 15 as center of rotation, and adjusting process is smooth, smooth,
Be not in the problem of blocking, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block and couples after insert with
Block 13 at grade, stacks piezoelectric ceramics 10 and is bonded in for cylinder and lower end on pressure sensor 11, stacks piezoelectricity pottery
10 both ends of porcelain are clamped between pressure sensor 11 and the substrate 602 of elastic supporting member for supporting optical member 6.Set stacking 10 upper end of piezoelectric ceramics button
And installation set 8 is bonded with, the substrate 602 of the elastic supporting member for supporting optical member 6 is pressed in installation set 8, for avoiding due to stacking piezoelectricity pottery
10 top work surface of porcelain it is rough caused by the problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
Guiding axis 19 is uniformly connected with by circumferential screw positioned at the outside of sleeve 1 between annular roof plate 2 and bottom plate 3, this
Embodiment is along the circumferential direction evenly equipped with and 19 one-to-one four U of guiding axis by taking four guiding axis 19 as an example in sleeve wall
Type gap 101.15 outer marginal circumference of lower connection block be evenly equipped with four be oriented to support arms 1501 and it is each be oriented to support arm 1501 respectively by
Corresponding U-shaped gap 101 is passed through and is sleeved on by clearance fit on guiding axis 19, is set respectively on each guiding support arm 1501
It is useful for the through hole through guiding axis and is installed with axle sleeve 20 respectively in through hole.
Circumference uniform distribution is equipped with four bulb plungers 9 between upper coupling block 13 and sleeve 1, and 9 outer end of bulb plunger leads to respectively
Cross in the plunger mounting base 14 for being threaded in and being along the circumferential direction laid in sleeve wall, it is along the circumferential direction equal in sleeve wall
Four screw holes 102 are furnished with, 14 outer rim of plunger mounting base is for ladder shaft-like and respectively by the outside of sleeve 1 by being threaded into peace
In screw hole 102.The inner steel ball of bulb plunger 9 pushes into respectively is along the circumferential direction distributed on four of coupling block outer rim
In rectangle sliding slot 1302, the sliding slot 1302 is parallel with the axis of sleeve 1, for aiding in upper connection block compensation to stack piezoelectric ceramics
The adjusting of two working surface parallelism errors.
The U-shaped gap 101 is suitable with 102 quantity of screw hole and is arranged along the mutual equi-spaced apart of 1 circumferencial direction of sleeve, each
The center line of U-shaped gap 101 is 45 degree with the central angle folded by adjacent 102 center line of screw hole.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is provided with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 21 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is installed on 17 bottom surface of support plate, 21 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connected with lower connection block 15 by the screw of circumference uniform distribution, for band
Dynamic lower connection block 15 vertically slides up and down under the guiding role of guiding axis 16 in sleeve 1.
Uniformly it is connected with and the one-to-one adjusting rod 12 of U-shaped gap 101, adjusting rod 12 in upper 13 outer marginal circumference of coupling block
Inner to be threadedly coupled with upper 13 outer rim of coupling block, 12 outer end of adjusting rod is stretched out by corresponding U-shaped gap 101 respectively；It is used for realization
The reset of upper coupling block 13 after test.
During work, linear stepping motor 18 is controlled to be pushed up by leading screw 21 and the transmission of screw 16 by lower connection block first
15 and upper coupling block 13 form mobile base to stack piezoelectric ceramics 10 apply pretightning force, while monitor by pressure sensor 11
The pretension force data measured, after the size of pretightning force reaches setting value, control linear stepping motor 18 is stopped.So
Afterwards, pulse signal or swept-frequency signal are applied between two electrodes of piezoelectric ceramics 10 are stacked using external power supply, using stacking piezoelectricity
The inverse piezoelectric effect of ceramics 10 realizes the excitation to MEMS micro-structures 4, while uses the contactless vibration detecting device of external optical
The vibratory response of MEMS micro-structures 4 is detected, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when
After completing the excitation to MEMS micro-structures 4, control linear stepping motor 18 drives lower connection block 15 to move down, then manually
Adjusting adjusting rod 12 drives upper coupling block 13 to move down, and makes to stack 10 top installation set 8 of piezoelectric ceramics and divides with elastic supporting member for supporting optical member 6
Leave, avoid stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although embodiment of the present invention is disclosed as above, it is not restricted in specification and embodiment listed
With it can be applied to various suitable the field of the invention completely, can be easily for those skilled in the art
Realize other modification, therefore under the universal limited without departing substantially from claim and equivalency range, it is of the invention and unlimited
In specific details and shown here as the legend with description.
Claims (9)
1. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect, including sleeve and bottom plate, in sleeve
It is interior be equipped with stack piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block, on sleeve be equipped with elastic supporting member for supporting optical member and
MEMS micro-structures, it is characterized in that：
Annular roof plate is equipped with sleeve upper end, the MEMS micro-structures are installed on annular roof plate by elastic supporting member for supporting optical member；It is described
Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively
First linking arm, the second linking arm, the 3rd linking arm and the 4th linking arm composition simultaneously form a L-type gap with substrate outer edge,
For reducing the deflection of substrate；
Guiding axis is evenly distributed in outside sleeve between annular roof plate and bottom plate, it is along the circumferential direction uniformly distributed in sleeve wall
Have with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and is each oriented to support arm
Passed through and be sleeved on guiding axis by corresponding U-shaped gap respectively；
The upper coupling block lower end is equipped with hemispherical round end and is pressed at the upper planar central of lower connection block, makes upper and lower coupling block
Between form point contact；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in
Between pressure sensor and elastic supporting member for supporting optical member；
Circumference uniform distribution is equipped with bulb plunger between upper coupling block and sleeve, and bulb plunger outer end is connected to along the circumferential direction
It is laid in the plunger mounting base in sleeve wall, the steel ball of bulb plunger the inner pushes into respectively to be along the circumferential direction distributed on
In the sliding slot of coupling block outer rim, for aiding in upper connection block compensation to stack the tune of two working surface parallelism error of piezoelectric ceramics
Section；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically provided with support plate center, electronic
The screw of lead-screw drive mechanism is connected with lower connection block, for driving lower connection block to move up and down.
2. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 1, its
It is characterized in：Screw hole is along the circumferential direction evenly equipped with sleeve wall, the plunger mounting base is respectively by being threadably mounted in screw hole.
3. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 2, its
It is characterized in：The U-shaped gap is suitable with screw hole quantity and is arranged along the mutual equi-spaced apart in its circumference direction.
4. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 1, its
It is characterized in：The substrate is square, and four support arms are connected to one end of substrate surrounding by the first linking arm respectively；With into
One step reduces the deflection of substrate, avoids MEMS micro-structures from being fallen off because colloid cracks.
5. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 4, its
It is characterized in：Four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on above annular roof plate by pillar respectively.
6. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 1 or 3,
It is characterized in that：The guiding axis is four.
7. exciting fills outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 1 or 3 or 4
Put, it is characterized in that：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
The problem of bad.
8. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 6, its
It is characterized in：The through hole through guiding axis is respectively provided with each guiding support arm and is installed with axle sleeve respectively in through hole.
9. exciting device outside a kind of MEMS micro-structure four-axle type pieces based on inverse piezoelectric effect according to claim 1 or 3,
It is characterized in that：Uniformly it is connected with and the one-to-one adjusting rod of U-shaped gap, adjusting rod outer end difference in upper coupling block outer marginal circumference
Stretched out by corresponding U-shaped gap；The above reset of coupling block is used for realization after test.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711355461.0A CN108020392B (en) | 2017-12-16 | 2017-12-16 | Exciting device outside a kind of MEMS micro-structure four-axle type piece based on inverse piezoelectric effect |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708666A (en) * | 2018-12-26 | 2019-05-03 | 华中科技大学 | A kind of horizontal exciting device for the test of inertial sensor cross-coupling coefficient |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414A1 (en) * | 1970-06-04 | 1971-12-16 | Braun Ag | Spherical, self-adjusting shaft bearing |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| JP2009222437A (en) * | 2008-03-13 | 2009-10-01 | Toyota Motor Corp | Vibration tester |
| CN103867060A (en) * | 2012-12-12 | 2014-06-18 | 多玛两合有限公司 | Cam motion closer |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN105318150A (en) * | 2014-07-15 | 2016-02-10 | 冠研（上海）企业管理咨询有限公司 | Vibration prevention footstand with alignment structure |
| CN105720859A (en) * | 2016-05-03 | 2016-06-29 | 吉林大学 | Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
-
2017
- 2017-12-16 CN CN201711355461.0A patent/CN108020392B/en not_active Expired - Fee Related
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2027414A1 (en) * | 1970-06-04 | 1971-12-16 | Braun Ag | Spherical, self-adjusting shaft bearing |
| SU1045041A1 (en) * | 1982-06-08 | 1983-09-30 | Фрунзенский политехнический институт | Article impact-testing device |
| JP2009222437A (en) * | 2008-03-13 | 2009-10-01 | Toyota Motor Corp | Vibration tester |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| CN103867060A (en) * | 2012-12-12 | 2014-06-18 | 多玛两合有限公司 | Cam motion closer |
| CN105318150A (en) * | 2014-07-15 | 2016-02-10 | 冠研（上海）企业管理咨询有限公司 | Vibration prevention footstand with alignment structure |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859A (en) * | 2016-05-03 | 2016-06-29 | 吉林大学 | Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
Non-Patent Citations (3)
| Title |
|---|
| 佘东生 等: "基于激波的MEMS微结构底座冲击激励方法研究", 《仪器仪表学报》 * |
| 施阳和 等: "基于压电陶瓷的MEMS测试用的多载荷加载台的研制", 《中国陶瓷》 * |
| 王晓东 等: "MEMS微构件动态特性测试的激励技术和方法", 《测试技术学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708666A (en) * | 2018-12-26 | 2019-05-03 | 华中科技大学 | A kind of horizontal exciting device for the test of inertial sensor cross-coupling coefficient |
| CN109708666B (en) * | 2018-12-26 | 2020-10-16 | 华中科技大学 | Horizontal excitation device for testing cross coupling coefficient of inertial sensor |
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