CN108163804A - It is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank - Google Patents
It is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank Download PDFInfo
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- CN108163804A CN108163804A CN201711355447.0A CN201711355447A CN108163804A CN 108163804 A CN108163804 A CN 108163804A CN 201711355447 A CN201711355447 A CN 201711355447A CN 108163804 A CN108163804 A CN 108163804A
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Abstract
The present invention disclose it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, including sleeve and bottom plate, piezoelectric ceramics, pressure sensor, upper and lower coupling block and elastic supporting member for supporting optical member and MEMS micro-structures；Annular roof plate is equipped in sleeve upper end, micro-structure is located at by elastic supporting member for supporting optical member on annular roof plate；Guiding axis is evenly equipped between annular roof plate and bottom plate, lower connection block, which is evenly equipped with, to be oriented to support arm and passed through by sleeve wall and be sleeved on guiding axis；Spherical surface hill is equipped in upper coupling block bottom center, tension spring is evenly distributed between upper coupling block bottom surface and the guiding support arm of lower connection block, spherical surface hill is by tension spring elastic compression in lower connection block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member.The device can apply different size of pretightning force to piezoelectric ceramics, make obtained pretightning force measured value more accurate, can make the adjusting process of two working surface parallelism error of compensation piezoelectric ceramics become more smooth and smooth, convenient for testing dynamic characteristic parameter.
Description
Technical field
The invention belongs to micromachine electronic system technology field, it is more particularly to a kind of can dynamic driving MEMS micro-structures
Four-axle type exciting bank.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention be to provide it is a kind of can dynamic driving MEMS micro-structures four-axle type excitation dress
It puts, which more flexible can apply different size of pretightning force, while make obtained preload to stacking piezoelectric ceramics
Power measured value is more accurate, and the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more suitable
It is smooth and smooth, the shearing force stacked between each layer of piezoelectric ceramics is substantially reduced, the adjusting space of bigger can be capable of providing, kept away
Exempt from coming off for test micro element, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
To solve the above problems, the present invention adopts the following technical scheme that：
It is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, including sleeve and bottom plate, be equipped in sleeve
Piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are stacked, elastic supporting member for supporting optical member and the micro- knots of MEMS are equipped on sleeve
Structure, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the company of being mutually perpendicular to successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, in sleeve wall along the circumferential direction
Be evenly equipped with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and each is oriented to
Support arm is passed through by corresponding U-shaped gap and is sleeved on guiding axis respectively；
Spherical surface hill is equipped in upper coupling block bottom center, between upper coupling block bottom surface and the guiding support arm of lower connection block
Circumference uniform distribution is connected with tension spring, the spherical surface hill by tension spring elastic compression lower connection block end face center；Make to join above and below
It connects and forms point contact between block, for upper connection block compensation to be assisted to stack the tune of two working surface parallelism error of piezoelectric ceramics
Section；
The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensing
Between device and elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for lower connection block to be driven to move up and down.
As further preferred, the substrate is square, and four support arms are connected to base by the first linking arm respectively
One end of plate surrounding and with substrate outer edge formed a L-type gap；Further to reduce the deflection of substrate, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the guiding axis is four.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
It is along the circumferential direction uniformly distributed respectively on the guiding support arm of upper coupling block bottom surface and lower connection block as further preferred
There is one-to-one spring mounting seat up and down, the tension spring both ends are connected to about two mutual corresponding spring mounting seats
On.
The beneficial effects of the invention are as follows：
1st, due to being equipped with spherical surface hill, the tension spring elasticity pressure that spherical surface hill passes through circumference uniform distribution in upper coupling block bottom center
Tightly in the end face center of lower connection block, make to form point contact between upper and lower coupling block；Two work of piezoelectric ceramics is stacked when needing to compensate
Make the parallelism error on surface come when adjusting mobile base, upper coupling block can using the contact point with lower connection block as center of rotation into
Row rotation, it is smooth, smooth to adjust process, is not in substantially reduce to stack between each layer of piezoelectric ceramics the problem of blocking
Shearing force.
2nd, due between upper coupling block bottom surface and the guiding support arm of lower connection block circumference uniform distribution be connected with tension spring, it is described on
Coupling block is by tension spring elastic compression in lower connection block；When the depth of parallelism that compensation is needed to stack two working surface of piezoelectric ceramics is missed
Difference can realize the swing of upper coupling block in different directions by the deformation of tension spring, be adjusted come when adjusting mobile base
Space bigger.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, due to being vertically equipped with electric threaded shaft transmission mechanism at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through electronic silk
Thick stick transmission mechanism drives the mobile base being made of upper coupling block and lower connection block movement to realize, it is simple, clever to adjust process
It is living.
5th, since elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
During work, the vibration deformation of elastic supporting member for supporting optical member is essentially from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is the vertical view of elastic supporting member for supporting optical member.
Fig. 5 is the dimensional structure diagram of lower connection block.
Fig. 6 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101.U type gap, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, the installation of 5. micro-structures
Plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. third linking arms,
6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. spring mounting seats, 10. stack piezoelectric ceramics, 11. pressure
Sensor, 12. tension springs, coupling block on 13., 1301. spherical surface hills, 14. axle sleeves, 15. lower connection blocks, 1501. are oriented to support arms,
16. screw, 17. support plates, 18. linear stepping motors, 19. guiding axis, 20. leading screws.
Specific embodiment
As shown in Fig. 1~Fig. 6, it is of the present invention it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank,
Including a cannulated sleeve 1, it is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by upper 13 and of coupling block
The mobile base that lower connection block 15 is formed is equipped with elastic supporting member for supporting optical member 6 and MEMS micro-structures 4 on sleeve 1.
The equal annular roof plate 2 of outer diameter and bottom plate 3 are fixed with by screw respectively with bottom surface on sleeve 1, it is described
MEMS micro-structures 4 are mounted on by elastic supporting member for supporting optical member 6 on annular roof plate 2.The elastic supporting member for supporting optical member includes one piece of square substrate
602 and the support arm 601 of four circumference uniform distributions, each support arm 601 is by the first linking arm being mutually connected vertically successively
6011st, the second linking arm 6012,6013 and the 4th linking arm 6014 of third linking arm form, and four support arms 601 pass through respectively
First linking arm 6011 is connected to one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and base
602 outer rim of plate forms a L-type gap；For reducing the deflection of substrate, MEMS micro-structures 4 are avoided due to colloid cracks
It comes off.Four 601 outer ends of support arm of the elastic supporting member for supporting optical member 6 are fixed on ring by Hollow Pillar 7 using screw support respectively
Above shape top plate 2, and with sleeve 1 on the same axis.MEMS micro-structures 4 cement in resilient support by micro-structure installing plate 5
At the 602 upper surface center of substrate of part 6.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the substrate 602 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Substrate 602 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at 1 outside of sleeve between annular roof plate 2 and bottom plate 3 and four guiding axis is uniformly connected with by circumferential screw
19, four U-shaped gap 101 one-to-one with guiding axis are along the circumferential direction evenly equipped in sleeve wall.The lower connection block 15
For cylinder, it is evenly distributed with to distinguish there are four being oriented to support arm 1501 and being each oriented to support arm 1501 in 15 outer rim lower circumferential of lower connection block
It is passed through by corresponding U-shaped gap 101 and is passed through clearance fit and be sleeved on guiding axis 19, on each guiding support arm 1501 respectively
It is installed with axle sleeve 14 respectively equipped with the through-hole through guiding axis and in through-hole, the lower connection block 15 can be in guiding axis 19
It is vertically slided up and down in sleeve 1 under guiding role.
Spherical surface hill 1301 is equipped in upper 13 bottom center of coupling block, in leading for upper 13 bottom surface of coupling block and lower connection block 15
Circumference uniform distribution is connected with tension spring 12 between support arm 1501, and the spherical surface hill 1301 is by 12 elastic compression of tension spring in lower link
The end face center of block 15；Make to form point contact between upper and lower coupling block, two working surface of piezoelectric ceramics is stacked when needing to compensate
Parallelism error is come when adjusting mobile base, upper coupling block 13 can be turned using the contact point with lower connection block 15 as center of rotation
Dynamic, adjusting process is smooth, smooth, is not in the problem of blocking, substantially reduces the shearing stacked between each layer of piezoelectric ceramics
Power.
It is equal in circumferential direction through screw respectively on the guiding support arm 1501 of upper 13 bottom surface of coupling block and lower connection block 15
One-to-one spring mounting seat 9 up and down is furnished with, 12 both ends of tension spring are connected to about two mutual corresponding springs
In mounting base 9.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 20 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 20 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, screw 16 is connect with lower connection block 15 by the screw of circumference uniform distribution, for band
Dynamic lower connection block 15 moves up and down.
During work, linear stepping motor 18 is controlled to be pushed up by leading screw 20 and the transmission of screw 16 by upper coupling block first
13 and the mobile base that is formed of lower connection block 15 apply pretightning force to stacking piezoelectric ceramics 10, while monitor by pressure sensor
The 11 preload force datas measured, after the size of pretightning force reaches setting value, control linear stepping motor 18 is stopped.So
Afterwards, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, using stacking piezoelectricity
The inverse piezoelectric effect of ceramics 10 realizes the excitation to MEMS micro-structures 4, while uses the contactless vibration detecting device of external optical
The vibratory response of MEMS micro-structures 4 is detected, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when
After completing to the excitation of MEMS micro-structures 4, control linear stepping motor 18 drives what lower connection block 15 and upper coupling block 13 formed
Mobile base structure moves down, and makes to stack 10 top installation set 8 of piezoelectric ceramics and is separated with elastic supporting member for supporting optical member 6, avoids stacking
Piezoelectric ceramics 10 is constantly in the state of stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (7)
1. it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, including sleeve and bottom plate, be equipped in sleeve folded
Heap piezoelectric ceramics, pressure sensor, upper coupling block and lower connection block are equipped with elastic supporting member for supporting optical member and the micro- knots of MEMS on sleeve
Structure, it is characterized in that：
Annular roof plate is equipped in sleeve upper end, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；It is described
Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition, for reducing the deflection of substrate；
It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, it is along the circumferential direction uniformly distributed in sleeve wall
Have with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, to be oriented to support arm and is each oriented to support arm
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively；
Spherical surface hill, the circumference between upper coupling block bottom surface and the guiding support arm of lower connection block are equipped in upper coupling block bottom center
Uniformly be connected with tension spring, the spherical surface hill by tension spring elastic compression lower connection block end face center；Make upper and lower coupling block
Between form point contact, for upper connection block compensation to be assisted to stack the adjusting of two working surface parallelism error of piezoelectric ceramics；
The pressure sensor is installed in the centre bore of coupling block top surface, stack piezoelectric ceramics be clamped in pressure sensor with
Between elastic supporting member for supporting optical member；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for lower connection block to be driven to move up and down.
2. it is according to claim 1 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is characterized in that：Institute
State substrate for square, four support arms respectively by the first linking arm be connected to substrate surrounding one end and with substrate outer edge shape
Into a L-type gap；Further to reduce the deflection of substrate, MEMS micro-structures is avoided to be fallen off due to colloid cracks.
3. it is according to claim 2 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is characterized in that：Institute
Four support arm outer ends for stating elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
4. it is according to claim 1 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is characterized in that：Institute
It is four to state guiding axis.
5. according to claims 1 or 2 or 3 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is special
Sign is：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoiding due to folded
Heap piezoelectric ceramics top work surface it is rough caused by stack asking for piezoelectric ceramics and elastic supporting member for supporting optical member loose contact
Topic.
6. it is according to claim 1 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is characterized in that：
Each be oriented to is respectively provided with the through-hole through guiding axis on support arm and is installed with axle sleeve respectively in through-hole.
7. it is according to claim 1 it is a kind of can dynamic driving MEMS micro-structures four-axle type exciting bank, it is characterized in that：
One-to-one spring installation up and down is along the circumferential direction evenly equipped on the guiding support arm of upper coupling block bottom surface and lower connection block respectively
Seat, the tension spring both ends are connected on about two mutual corresponding spring mounting seats.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115342866A (en) * | 2022-10-18 | 2022-11-15 | 中国空气动力研究与发展中心高速空气动力研究所 | Piezoelectric ceramic actuator detection device and system |
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