CN108217584A - A kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load - Google Patents
A kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load Download PDFInfo
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- CN108217584A CN108217584A CN201711355469.7A CN201711355469A CN108217584A CN 108217584 A CN108217584 A CN 108217584A CN 201711355469 A CN201711355469 A CN 201711355469A CN 108217584 A CN108217584 A CN 108217584A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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- B81C99/0035—Testing
- B81C99/005—Test apparatus
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Abstract
The invention discloses a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load, including sleeve, piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and elastic supporting member for supporting optical member and MEMS micro-structures；Annular roof plate and bottom plate are equipped at sleeve both ends, micro-structure is located at by elastic supporting member for supporting optical member on top plate；Guiding axis is evenly equipped between top plate and bottom plate, lower connection block, which is equipped with, to be oriented to support arm and passed through by sleeve wall and be sleeved on guiding axis, and locking device is respectively equipped on support arm is oriented to；Spherical groove is respectively equipped on upper coupling block and lower connection block；Piezoelectric ceramics is clipped between pressure sensor and elastic supporting member for supporting optical member；Upper coupling block outer rim is supported on by the bulb plunger that connecting rod connects in sleeve.The device can apply different size of pretightning force to piezoelectric ceramics, make obtained pretightning force measured value more accurate, can make the adjusting process of two working surface parallelism error of compensation piezoelectric ceramics become more smooth and smooth, convenient for testing dynamic characteristic parameter.
Description
Technical field
It is more particularly to a kind of to be used for MEMS micro-structures into action the invention belongs to micromachine electronic system technology field
The triple axle exciting device of state loading.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.
The Chinese invention patent of Publication No. CN101476970A discloses a kind of pedestal excitation dress based on piezoelectric ceramics
It puts, piezoelectric ceramics bottom will be stacked to stacking piezoelectric ceramics application pretightning force, and passing through by cross-spring piece in the apparatus
Reduce the shearing force suffered by piezoelectric ceramics on the understructure movable mounted on one, in addition, being additionally provided with pressure in a device
Force snesor, for detecting the pretightning force applied to piezoelectric ceramics and stacking the power output of piezoelectric ceramics at work.But
There are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention be to provide for it is a kind of be used for MEMS micro-structures carry out dynamic load three
Shaft type exciting device, the device more flexible can apply different size of pretightning force, while make institute to stacking piezoelectric ceramics
The pretightning force measured value of acquisition is more accurate, and compensation can be made to stack the adjusting process of two working surface parallelism error of piezoelectric ceramics
Become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, convenient for testing MEMS micro-structures
Dynamic characteristic parameter.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load, including sleeve, sets in sleeve
Have and stack piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, on sleeve
Face is equipped with elastic supporting member for supporting optical member and MEMS micro-structures, it is characterized in that：
Annular roof plate and bottom plate are respectively equipped in sleeve upper and lower end, the MEMS micro-structures are installed by elastic supporting member for supporting optical member
On annular roof plate；It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, justifies in sleeve wall upper edge
Circumferential direction be evenly equipped with guiding axis U-shaped gap correspondingly, the lower connection block outer marginal circumference, which is evenly equipped with, is oriented to support arm and every
A guiding support arm is passed through by corresponding U-shaped gap and is sleeved on guiding axis respectively, is located at guiding axis on each guiding support arm
Place is respectively equipped with locking device, for lower connection block to be fixed on guiding axis；
Spherical groove is respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is less than two
The radius of curvature of spherical groove is simultaneously clamped between two spherical grooves, makes to form one between upper and lower coupling block by steel ball
Adjust gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure biography
Between sensor and elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, connecting rod outer end is respectively by circumference uniform distribution in sleeve wall
Slot hole be pierced by and be connected with mounting blocks, be separately installed with bulb plunger on mounting blocks, the steel ball difference of bulb plunger outer end
It pushes into and is along the circumferential direction distributed in the rectangular recess of sleeve outer wall, for mobile base compensation to be assisted to stack piezoelectric ceramics two
The adjusting of working surface parallelism error.
As further preferred, the U-shaped gap is suitable with rectangular recess quantity and mutually equidistant along circumference direction
Arranged for interval.
As further preferred, the elastic supporting member for supporting optical member is in tabletting outer rim by a cylindrical tabletting and circumference uniform distribution
Three support chips are formed, and the thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, the micro- knots of MEMS are avoided
Structure is fallen off due to colloid cracks.
As further preferred, the elastic supporting member for supporting optical member is supported and fixed on by three pillars above annular roof plate.
As further preferred, the guiding axis is three.
As further preferred, the locking device is is fixed by screws in lower connection block bottom surface and is sleeved on guiding axis
Axis retainer ring, be equipped in axis retainer ring side and be open and pass through lock-screw and be fixed on guiding axis.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, through-hole through guiding axis is respectively provided on each guiding support arm and in through-hole
It is installed with axle sleeve respectively.
As further preferred, the connecting rod is three groups of circumference uniform distribution and every group is two, each mounting blocks difference
It is fixed by screws in the outer end of two connecting rods.
As further preferred, the bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and in through-hole external port
Equipped with adjusting screw, for bulb plunger to be headed into rectangular recess.
The beneficial effects of the invention are as follows：
1st, due to being respectively equipped with spherical groove on the opposite face of upper coupling block and lower connection block, the radius of steel ball is less than two
The radius of curvature of a spherical groove is simultaneously clamped between two spherical grooves, then forms point contact between steel ball and upper coupling block,
Point contact is also formed between first steel ball and lower connection block；When the depth of parallelism that compensation is needed to stack two working surface of piezoelectric ceramics is missed
Difference come when adjusting mobile base, upper coupling block can be rotated using the contact point with steel ball as center of rotation, adjust process it is smooth,
Smoothly, be not in the problem of steel ball is stuck, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics.
2nd, due to being uniformly connected with connecting rod in upper coupling block outer marginal circumference, connecting rod outer end is being covered respectively by circumference uniform distribution
Slot hole on barrel is pierced by and is connected with mounting blocks, and bulb plunger, the steel of bulb plunger outer end are separately installed on mounting blocks
Pearl pushes into along the circumferential direction be distributed in the rectangular recess of sleeve outer wall respectively；It works when compensation is needed to stack piezoelectric ceramics two
The parallelism error on surface when adjusting mobile base, can be realized by the cooperation of spring and steel ball in bulb plunger
The swing of coupling block in different directions, adjustable space bigger；On being easy to implement by mounting blocks simultaneously after testing
The reset of coupling block.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, due to being evenly equipped with guiding support arm in lower connection block outer marginal circumference and being each oriented to support arm respectively by corresponding U-shaped open-minded
Mouth is passed through and is sleeved on guiding axis, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through hand
It is dynamic to adjust the upper coupling block movement of lower connection block drive to realize, it is simple, flexible to adjust process.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is that the present invention removes the vertical view after annular roof plate.
Fig. 5 is the dimensional structure diagram of lower connection block.
Fig. 6 is the dimensional structure diagram of elastic supporting member for supporting optical member.
Fig. 7 is the dimensional structure diagram of sleeve.
In figure：1. sleeve, 101. rectangular recess, 102. slot holes, 103.U type gap, 2. annular roof plates, 3. bottom plates,
4.MEMS micro-structures, 5. micro-structure installing plates, 6. elastic supporting member for supporting optical member, 601. tablettings, 602. support chips, 7. pillars, 8. installation sets,
9. piezoelectric ceramics is stacked bulb plunger, 10., 11. pressure sensors, 12. mounting blocks, coupling block on 13., 1301. spherical grooves,
14. steel ball, 15. lower connection blocks, 1501. spherical grooves, 1502. are oriented to support arm, 16. adjusting screws, 17. lock-screws, 18. axis
Retainer ring, 19. guiding axis, 20. axle sleeves, 21. connecting rods.
Specific embodiment
As shown in Fig. 1~Fig. 7, a kind of triple axle piezoelectricity for the test of MEMS micro-structure dynamic characteristics of the present invention
Ceramic exciting bank, including a cannulated sleeve 1, be equipped in sleeve 1 stack piezoelectric ceramics 10, pressure sensor 11 and by
The mobile base that upper coupling block 13, steel ball 14 and lower connection block 15 are formed is equipped with elastic supporting member for supporting optical member 6 and MEMS on sleeve 1
Micro-structure 4.
On sleeve 1 and bottom surface is fixed with annular roof plate 2 and bottom plate 3 by screw respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2.The elastic supporting member for supporting optical member 6 is by a cylindrical tabletting 601 and circumference uniform distribution
It is formed in three support chips 602 of 601 outer rim of tabletting, the thickness of the support chip 602 is less than the thickness of tabletting 601；To reduce
The deflection of cylindrical tabletting 601, avoids MEMS micro-structures 4 from being fallen off due to colloid cracks.The three of the elastic supporting member for supporting optical member 6
A support chip 602 is fixed on using screw support above annular roof plate 2 by three pillars 7, and with sleeve 1 in same axis
On.MEMS micro-structures 4 are cemented in by micro-structure installing plate 5 at the 601 upper surface center of tabletting of elastic supporting member for supporting optical member 6.
The upper coupling block 13 and lower connection block 15 are cylindrical shape, in the opposite of upper coupling block 13 and lower connection block 15
Mutual corresponding spherical groove 1301 and spherical groove 1501 are respectively equipped on face at center, the radius of the steel ball 14 is less than two
The radius of curvature of a spherical groove is simultaneously clamped between spherical groove 1501 and spherical groove 1301, makes upper connection by steel ball 14
An adjustment gap is formed between block 13 and lower connection block 15, the size in the adjustment gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 both ends of piezoelectric ceramics and is clamped in pressure sensor 11 and elasticity branch
Between the tabletting 601 of support member 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the elastic supporting member for supporting optical member 6
Tabletting 601 is pressed in installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by
The problem of stacking 6 loose contact of piezoelectric ceramics 10 and elastic supporting member for supporting optical member.
It is located at 1 outside of sleeve between annular roof plate 2 and bottom plate 3 and three guiding axis is uniformly connected with by circumferential screw
19, three U-shaped gap 103 one-to-one with guiding axis are along the circumferential direction evenly equipped in sleeve wall.Outside lower connection block 15
There are three be oriented to support arm 1502 and be each oriented to support arm 1502 to be passed through and covered by corresponding U-shaped gap 103 respectively for edge circumference uniform distribution
On guiding axis 19, it is respectively equipped with the through-hole through guiding axis 19 on each guiding support arm 1502 and is inlayed respectively in through-hole
Equipped with axle sleeve 20, axle sleeve 20 coordinates with 19 glade plane space of guiding axis.
It is located at guiding axis 19 on each guiding support arm 1502 and is respectively equipped with locking device, for lower connection block 15 to be consolidated
It is scheduled on guiding axis 19.The locking device is the axis for being fixed by screws in 15 bottom surface of lower connection block and being sleeved on guiding axis 19
Retainer ring 18 is fixed on equipped with being open and passing through lock-screw 17 on guiding axis 19 in 18 side of axis retainer ring.
Connecting rod 21 is uniformly connected in upper 13 outer marginal circumference of coupling block, 21 outer end of connecting rod is being covered respectively by circumference uniform distribution
Slot hole 102 on barrel is pierced by and is connected with mounting blocks 12, and bulb plunger 9, bulb plunger 9 are separately installed on mounting blocks 12
The steel ball of outer end is pushed into respectively in the rectangular recess 101 for being along the circumferential direction distributed on 1 outer wall of sleeve, for assisting mobile base
Compensation stacks the reset of upper coupling block 13 after the adjusting and test of two working surface parallelism error of piezoelectric ceramics.The connection
Bar 21 is three groups of circumference uniform distribution and every group is two, and each mounting blocks 12 are fixed by screws in two connecting rods 21 respectively
Outer end, 21 inner end of connecting rod are threadedly attached in respectively in the corresponding screw hole of 13 outer rim of coupling block.The bulb plunger 9 is inserted
In the through-hole at the middle part of mounting blocks 12, and adjusting screw 16 is equipped with by screw thread in the through-hole external port, for by ball
Headpin plug 9 is headed into rectangular recess 101.The width of the slot hole 102 coordinates with the diameter glade plane space of connecting rod 21, slot hole
102 and rectangular recess 101 center line it is parallel with the axis of sleeve, the U-shaped gap 103 and 101 quantity phase of rectangular recess
When and along 1 circumferencial direction of sleeve mutual equidistant interval arrangement, center line and the adjacent rectangular recess 101 of each U-shaped gap 103
Central angle folded by center line is 60 degree.
During work, the lock-screw 17 in each axis retainer ring 18 is unclamped first, and manual-up promotion lower connection block 15 is led to
It crosses the mobile base being made of upper coupling block 13, steel ball 14 and lower connection block 15 and applies pretightning force to stacking piezoelectric ceramics 10,
The preload force data measured by pressure sensor 11 is monitored simultaneously, after the size of pretightning force reaches setting value, is screwed each
Lock-screw 17 in axis retainer ring 18, lower connection block 15 is fixed on guiding axis 19.Then, it is being stacked using external power supply
Apply pulse signal or swept-frequency signal between two electrodes of piezoelectric ceramics 10, realized using the inverse piezoelectric effect for stacking piezoelectric ceramics 10
Excitation to MEMS micro-structures 4, while rung using the vibration of the contactless vibration detecting device detection MEMS micro-structures 4 of external optical
Should, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.Finally, when excitation of the completion to MEMS micro-structures 4
Afterwards, the lock-screw 17 unclamped in each axis retainer ring 18 unclamps axis retainer ring 18, adjusts lower connection block 15 manually to moving down
It is dynamic, then upper coupling block 13 is driven to move down by mounting blocks 12, make to stack 10 top installation set 8 of piezoelectric ceramics and resilient support
Part 6 separates, and avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load, including sleeve, is equipped in sleeve
Piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block are stacked, on sleeve
Equipped with elastic supporting member for supporting optical member and MEMS micro-structures, it is characterized in that：
Annular roof plate and bottom plate are respectively equipped in sleeve upper and lower end, the MEMS micro-structures are mounted on ring by elastic supporting member for supporting optical member
On shape top plate；It is located between annular roof plate and bottom plate outside sleeve and is evenly distributed in guiding axis, it is circumferentially square in sleeve wall
To being evenly equipped with, U-shaped gap, the lower connection block outer marginal circumference are evenly equipped with guiding support arm and each lead correspondingly with guiding axis
It is passed through and is sleeved on guiding axis by corresponding U-shaped gap respectively to support arm, being located at guiding axis on each guiding support arm punishes
Not She You locking device, for lower connection block to be fixed on guiding axis；
Spherical groove is respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is less than two spherical surfaces
The radius of curvature of groove is simultaneously clamped between two spherical grooves, makes to form an adjustment between upper and lower coupling block by steel ball
Gap；The pressure sensor is installed in the centre bore of coupling block top surface, is stacked piezoelectric ceramics and is clamped in pressure sensor
Between elastic supporting member for supporting optical member；
Connecting rod is uniformly connected in upper coupling block outer marginal circumference, the connecting rod outer end length by circumference uniform distribution in sleeve wall respectively
Hole is pierced by and is connected with mounting blocks, and bulb plunger is separately installed on mounting blocks, and the steel ball of bulb plunger outer end heads into respectively
To being along the circumferential direction distributed in the rectangular recess of sleeve outer wall, work for mobile base compensation to be assisted to stack piezoelectric ceramics two
The adjusting of surface parallelism error.
2. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 1,
It is characterized in：The U-shaped gap is suitable with rectangular recess quantity and is arranged along the mutual equidistant interval in circumference direction.
3. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 1,
It is characterized in：The elastic supporting member for supporting optical member is to be made of a cylindrical tabletting and circumference uniform distribution in three support chips of tabletting outer rim,
The thickness of the support chip is less than the thickness of tabletting；To reduce the deflection of tabletting, MEMS micro-structures are avoided due to colloid cracks
It falls off.
4. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 3,
It is characterized in：The elastic supporting member for supporting optical member is supported and fixed on by three pillars above annular roof plate.
5. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 1 or 2,
It is characterized in that：The guiding axis is three.
6. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 5,
It is characterized in：The locking device is the axis retainer ring for being fixed by screws in lower connection block bottom surface and being sleeved on guiding axis, in axis
Retainer ring side is equipped with to be open and pass through lock-screw and be fixed on guiding axis.
7. a kind of triple axle exciting for being used to carry out MEMS micro-structures dynamic load according to claim 1 or 3 or 4 fills
It puts, it is characterized in that：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for keeping away
Exempt from stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elastic supporting member for supporting optical member contact
The problem of bad.
8. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 6,
It is characterized in：The through-hole through guiding axis is respectively provided on each guiding support arm and is installed with axle sleeve respectively in through-hole.
9. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 5,
It is characterized in：The connecting rod is three groups of circumference uniform distribution and every group is two, and each mounting blocks are fixed by screws in two respectively
The outer end of root connecting rod.
10. a kind of triple axle exciting device for being used to carry out MEMS micro-structures dynamic load according to claim 9,
It is characterized in：The bulb plunger is inserted into the through-hole in the middle part of mounting blocks, and adjusting screw is equipped in through-hole external port, is used for
Bulb plunger is headed into rectangular recess.
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| CN201711355469.7A CN108217584B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle exciting device for MEMS micro-structure progress dynamically load |
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| CN201711355469.7A CN108217584B (en) | 2017-12-16 | 2017-12-16 | A kind of triple axle exciting device for MEMS micro-structure progress dynamically load |
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| CN105318150A (en) * | 2014-07-15 | 2016-02-10 | 冠研（上海）企业管理咨询有限公司 | Shockproof foot seat with alignment structure |
| CN204224979U (en) * | 2014-11-09 | 2015-03-25 | 衡水百金复合材料科技有限公司 | A kind of composite friction pendulum bearing |
| CN106481655A (en) * | 2015-08-25 | 2017-03-08 | 东风汽车零部件(集团)有限公司 | A kind of recirculating ball-type steering screw rod thrust bearing |
| CN205663770U (en) * | 2016-04-20 | 2016-10-26 | 哈尔滨理工大学 | Novel inner circle toper outer lane arc raceway ball bearing |
| CN105720859A (en) * | 2016-05-03 | 2016-06-29 | 吉林大学 | Bionic antenna and thermal expansion based macroscopical-microcosmic driving rotary platform |
| CN206175471U (en) * | 2016-08-24 | 2017-05-17 | 大连国威轴承股份有限公司 | Integral four point contact ball of peach shaped raceway |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
| CN106704359A (en) * | 2016-11-18 | 2017-05-24 | 江苏方天电力技术有限公司 | Automatic centering ball sealing mechanism restraining fluid exciting force |
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