CN108217587A - For the four-axle type seat excitation apparatus of MEMS micro-structure dynamic characteristics test - Google Patents
For the four-axle type seat excitation apparatus of MEMS micro-structure dynamic characteristics test Download PDFInfo
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- CN108217587A CN108217587A CN201711355477.1A CN201711355477A CN108217587A CN 108217587 A CN108217587 A CN 108217587A CN 201711355477 A CN201711355477 A CN 201711355477A CN 108217587 A CN108217587 A CN 108217587A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/005—Test apparatus
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Abstract
The invention discloses a kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics, including sleeve, stack piezoelectric ceramics, pressure sensor, upper and lower coupling block, steel ball and MEMS micro-structures；Support plate and electric threaded shaft transmission mechanism are equipped in sleeve；The spherical groove and conical socket of clamping steel ball are respectively equipped on upper and lower coupling block；Piezoelectric ceramics is stacked to be clamped between pressure sensor and elastic supporting member for supporting optical member；Bulb plunger is uniformly connected on upper coupling block, bulb plunger outer end is headed into the rectangular recess of sleeve lining.The device flexibly can apply different size of pretightning force to stacking piezoelectric ceramics, make obtained pretightning force measured value more accurate simultaneously, the adjusting process that compensation stacks two working surface parallelism error of piezoelectric ceramics can be made to become more smooth and smooth, substantially reduce the shearing force stacked between each layer of piezoelectric ceramics, coming off for test micro element can be avoided, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
Description
Technical field
The invention belongs to micromachine electronic system technology fields, more particularly to a kind of to be used for MEMS micro-structure dynamic characteristics
The four-axle type seat excitation apparatus of test.
Background technology
Since MEMS micro elements have many advantages, such as at low cost, small and light-weight, make it in automobile, aerospace, letter
Breath communication, medical treatment, automatically controls and suffers from being widely applied prospect with numerous areas such as national defence biochemistry.For very much
For MEMS device, the micro-displacement of internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as amplitude, intrinsic frequency, the damping ratio of micro-structure carry out accurate test and have become exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structure, it is necessary first to micro-structure be made to generate vibration, that is, needed to micro-
Structure is into row energization.Since MEMS micro-structures have the characteristics that size is small, light-weight and intrinsic frequency is high, tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination can not be used in the vibrational excitation of MEMS micro-structures.In the late three decades, it is domestic
Outer researcher has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structures, has investigated some and can be used for
The motivational techniques of MEMS micro-structures and corresponding exciting bank.Wherein, swashed using the pedestal for stacking piezoelectric ceramics as driving source
It encourages device and has the advantages that excitation bandwidth is larger, and device is simple, easy to operate and strong applicability, therefore move in MEMS micro-structures
Step response testing field is widely used.David etc. exists《A base excitation test facility for
dynamic testing of microsystems》A kind of seat excitation apparatus based on piezoelectric ceramics is described in one text,
Piezoelectric ceramics is stacked in the device to be directly bonded on a fixed pedestal, is that a kind of multilayer is glued due to stacking piezoelectric ceramics
Binding structure, so larger pressure can be born, but cannot bear pulling force by stacking piezoelectric ceramics, pulling force can cause to stack piezoelectricity pottery
The damage of porcelain, when stacking piezoelectric ceramics when in use, certain pretightning force that presses to it, which is conducive to extend, stacks piezoelectric ceramics
Service life, and the device does not consider the above problem；Wang etc. exists《Dynamic characteristic testing for
MEMS micro-devices with base excitation》A kind of pedestal based on piezoelectric ceramics is described in one text to swash
Encourage device, take into account in the apparatus to stack piezoelectric ceramics apply certain pretightning force the problem of, used pressing plate, pedestal and
The mechanism of adjusting screw composition stacks piezoelectric ceramics, and can change the size of pretightning force by screwing adjusting screw to compress,
But the device is not considered when said mechanism is used to apply pretightning force to stacking piezoelectric ceramics, due to stacking piezoelectric ceramics two
The parallelism error of working surface can generate shearing force between layers stack piezoelectric ceramics, which can be to stacking
Piezoelectric ceramics generates mechanical damage, in addition, the device can not measure the size of applied pretightning force, if adjusting is improper,
Mechanical damage can be caused to stacking piezoelectric ceramics.The Chinese invention patent of Publication No. CN101476970A discloses one kind and is based on
The seat excitation apparatus of piezoelectric ceramics applies pretightning force to stacking piezoelectric ceramics by cross-spring piece in the apparatus, and leads to
Piezoelectric ceramics bottom will be stacked on a movable understructure to reduce the shearing force suffered by piezoelectric ceramics by crossing, this
Outside, it is additionally provided with pressure sensor in a device, for detecting the pretightning force applied to piezoelectric ceramics and stacking piezoelectric ceramics
Power output at work.But there are still own shortcomings for the device：
1st, the mobile base structure of the device is made of upper coupling block, steel ball and lower connection block, steel ball and upper coupling block, under
It is line contact between coupling block, when the parallelism error that compensation is needed to stack two working surfaces in piezoelectric ceramics top and bottom
And when voluntarily adjusting mobile base structure, rotation or even will appear the situation being stuck that steel ball can not be smooth；
2nd, nothing directly couples between upper coupling block and lower connection block and sleeve, but the mode being gap-matched is successively
It is installed among sleeve, if the parallelism error for stacking two working surfaces of piezoelectric ceramics is larger, no enough spaces are gone to adjust
Save mobile base structure；
3rd, pressure sensor is installed in the bottom of lower connection block, after voluntarily being adjusted due to mobile base structure, lower link
There are certain inclination angle between the bottom of block and the working surface of piezoelectric ceramics, thus pretightning force measured by pressure sensor or
The power output of piezoelectric ceramics is inaccurate；In addition, if mobile base structure leads to coupling block or lower connection block after adjustment
It is in contact with sleeve, then the error of measurement result can further increase；
4th, piezoelectric ceramics is stacked to compress using the one side of cross-spring piece in device, on the another side of cross-spring piece
The micro element of test is then bonded, when piezoelectric ceramics works, the deformation of cross-spring piece leads to micro element and cross compared with conference
Colloid cracking between spring leaf, causes micro element to come off；
5th, the big of pretightning force on piezoelectric ceramics is stacked to change to be applied to by using the gasket of different-thickness in the device
It is small, cause adjusting process complicated, underaction.
Invention content
The technical problems to be solved by the invention are to provide for a kind of four axis for the test of MEMS micro-structure dynamic characteristics
Formula seat excitation apparatus, the device more flexible can apply different size of pretightning force to stacking piezoelectric ceramics, make simultaneously
The pretightning force measured value obtained is more accurate, and compensation can be made to stack the adjusting of two working surface parallelism error of piezoelectric ceramics
Journey becomes more smooth and smooth, substantially reduces the shearing force stacked between each layer of piezoelectric ceramics, can avoid testing with micro-
Device comes off, convenient for testing the dynamic characteristic parameter of MEMS micro-structures.
To solve the above problems, the present invention adopts the following technical scheme that：
A kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics, including sleeve, in sleeve
Equipped with piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block is stacked, in sleeve
It is equipped with elastic supporting member for supporting optical member and MEMS micro-structures above, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；
The elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm is by the company of being mutually perpendicular to successively
The first linking arm, the second linking arm, third linking arm and the 4th linking arm composition connect, for reducing the deflection of substrate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center,
The screw of electric threaded shaft transmission mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
It is respectively equipped with spherical groove and conical socket on upper coupling block and the opposite face of lower connection block, the half of the steel ball
Diameter is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket, makes upper and lower coupling block by steel ball
Between formed one adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics
It is clamped between pressure sensor and elastic supporting member for supporting optical member；
Bulb plunger is uniformly connected in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end is pushed into respectively along circle
Circumferential direction is distributed in the rectangular recess of sleeve lining, is put down for mobile base compensation to be assisted to stack two working surface of piezoelectric ceramics
The adjusting of row degree error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block
Uniformly distributed pilot hole on the ring flange of lower end, levelness during for ensureing that lower connection block moves up and down.
As further preferred, adjusting rod is uniformly connected in upper coupling block outer marginal circumference, adjusting rod is respectively by circumferentially
The slot hole that direction is distributed in sleeve wall passes through；The above reset of coupling block is used to implement after test.
As further preferred, the substrate is square, and four support arms are connected to base by the first linking arm respectively
One end of plate surrounding；Further to reduce the deflection of substrate, MEMS micro-structures is avoided to be fallen off due to colloid cracks.
As further preferred, four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on ring by pillar respectively
Above shape top plate.
As further preferred, the upper coupling block outer rim is octagon, and is respectively equipped in each Middle face of outer rim
One connecting screw hole.
As further preferred, the bulb plunger is threadedly attached in the four of coupling block outer rim for four and one end
In a connecting screw hole.
As further preferred, the adjusting rod for four and with bulb plunger arranged for interval.
As further preferred, installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation
Put on, for avoid stack piezoelectric ceramics top work surface it is rough caused by stack piezoelectric ceramics and elasticity
The problem of support element loose contact.
As further preferred, the center line of the slot hole is parallel with the axis of sleeve with the center line of rectangular recess,
And the center line of each slot hole and the central angle folded by the center line of adjacent rectangular recess are 45 degree.
As further preferred, the guiding axis is four, the center line of the slot hole and adjacent guiding axis axis with
Central angle folded by the axis of sleeve is 22.5 degree.
The beneficial effects of the invention are as follows：
1st, since the radius of steel ball is less than the radius of curvature of spherical groove and is clamped between spherical groove and conical socket,
Point contact is then formed between steel ball and upper coupling block, is contacted between steel ball and lower connection block for line, piezoelectricity is stacked when needing to compensate
The parallelism error of ceramic two working surfaces is come when adjusting mobile base, upper coupling block can be using the contact point with steel ball as in rotation
The heart is rotated, and adjusting process is smooth, smooth, is not in the problem of steel ball is stuck, substantially reduces and stack piezoelectric ceramics
Shearing force between each layer.
2nd, due to being uniformly connected with bulb plunger in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end heads into respectively
To being along the circumferential direction distributed in the rectangular recess of sleeve lining, the parallel of two working surface of piezoelectric ceramics is stacked when needing to compensate
Error is spent when adjusting mobile base, upper coupling block can be realized not by the cooperation of spring and steel ball in bulb plunger
Swing on equidirectional, adjustable space bigger.
3rd, it is installed in due to the pressure sensor in the centre bore of upper coupling block top surface, stacks piezoelectric ceramics and be clamped in pressure
Between force snesor and elastic supporting member for supporting optical member, therefore after pretightning force is applied to stacking piezoelectric ceramics, avoid mobile base structure
Interference to pressure sensor can obtain and more accurately pre-tighten force data；When stacking piezoelectric ceramics work, what is obtained swashs
The measured value for power of shaking is also more accurate.
4th, since elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, each support arm is by successively
The first linking arm for being mutually connected vertically, the second linking arm, third linking arm and the 4th linking arm composition, when stacking piezoelectric ceramics
During work, the vibration deformation of elastic supporting member for supporting optical member is essentially from four support arms, and the deflection of substrate then very little, therefore will not lead
Colloid cracking is caused, micro element will not be fallen off.
5th, due to being vertically equipped with electric threaded shaft transmission mechanism at support plate center, electric threaded shaft transmission mechanism
Screw is connect with lower connection block, when needing to apply different size of pretightning force to stacking piezoelectric ceramics, can pass through electronic silk
Thick stick transmission mechanism drives mobile base movement to realize, it is simple, flexible to adjust process.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention.
Fig. 2 is the vertical view of the present invention.
Fig. 3 is the A-A sectional views of Fig. 2.
Fig. 4 is the B-B sectional views of Fig. 2.
Fig. 5 is the C-C sectional views of Fig. 2.
Fig. 6 is that the present invention removes the vertical view after annular roof plate.
Fig. 7 is the dimensional structure diagram of bulb plunger.
Fig. 8 is the structure diagram of elastic supporting member for supporting optical member.
In figure：1. sleeve, 101. rectangular channels, 102. slot holes, 2. annular roof plates, 3. bottom plates, 4.MEMS micro-structures, 5. micro- knots
Structure installing plate, 6. elastic supporting member for supporting optical member, 601. support arms, 6011. first linking arms, 6012. second linking arms, 6013. thirds connect
Connect arm, 6014. the 4th linking arms, 602. substrates, 7. pillars, 8. installation sets, 9. bulb plungers, 901. steel balls, 902. plunger housings,
903. adjusting screws, 10. stack piezoelectric ceramics, 11. pressure sensors, 12. adjusting rods, coupling block on 13., and 1301. spherical surfaces are recessed
Slot, 14. steel balls, 15. lower connection blocks, 1501. conical sockets, 16. screws, 17. support plates, 18. linear stepping motors, 19. lead
To axis, 20. axle sleeves, 21. leading screws.
Specific embodiment
As shown in Fig. 1~Fig. 8, a kind of triple axle pedestal for the test of MEMS micro-structure dynamic characteristics of the present invention
Exciting bank including a cannulated sleeve 1, is equipped in sleeve 1 and stacks piezoelectric ceramics 10, pressure sensor 11 and by the first line of a couplet
The mobile base that block 13, steel ball 14 and lower connection block 15 are formed is connect, elastic supporting member for supporting optical member 6 and the micro- knots of MEMS are equipped on sleeve 1
Structure 4.
On sleeve 1 and bottom surface has been bolted annular roof plate 2 and bottom plate 3 respectively, and the MEMS micro-structures 4 are logical
Elastic supporting member for supporting optical member 6 is crossed on annular roof plate 2；The elastic supporting member for supporting optical member includes one piece of square substrate 602 and four circumference
Uniformly distributed support arm 601, each support arm 601 is by the first linking arm 6011, the second linking arm being mutually connected vertically successively
6012nd, 6013 and the 4th linking arm 6014 of third linking arm forms, and four support arms 601 are connected respectively by the first linking arm 6011
It is connected on one end of 602 surrounding end face of substrate, the second linking arm 6012 and third linking arm 6013 and forms one with 602 outer rim of substrate
L-type gap；For reducing the deflection of substrate, MEMS micro-structures 4 is avoided to be fallen off due to colloid cracks.The resilient support
Four support arms 601 of part 6 are fixed on using screw support above annular roof plate 2 by pillar 7, and MEMS micro-structures 4 are by micro-
Structure installing plate 5 is cemented at the 602 upper surface center of substrate of elastic supporting member for supporting optical member 6.
Support plate 17 is fixed with by screw at the ladder of lower part in sleeve 1, at 17 center of support plate along vertical side
To electric threaded shaft transmission mechanism is equipped with, the electric threaded shaft transmission mechanism is by linear stepping motor 18, connection linear stepping motor
The leading screw 21 and screw 16 of 18 output shafts are formed, and wherein linear stepping motor 18 is mounted on 17 bottom surface of support plate, 21 upper end of leading screw
It is inserted into the centre bore of 15 bottom surface of lower connection block, 16 upper end of screw and the screw of 15 underrun circumference uniform distribution of lower connection block connect
It connects, for lower connection block 15 to be driven to move up and down.
It is correspondingly provided with spherical groove 1301 and cone at center respectively on upper coupling block 13 and the opposite face of lower connection block 15
Connected in star 1501, the radius of the steel ball 14 are less than the radius of curvature of spherical groove 1301 and are clamped in spherical groove 1301 and cone
Between connected in star 1501, make to form an adjustment gap, the adjustment between upper coupling block 13 and lower connection block 15 by steel ball 14
The size in gap is 2~5mm.
11 insert of pressure sensor is simultaneously bonded in the centre bore of 13 top surface of coupling block, and stacking piezoelectric ceramics 10 is
Cylindrical and lower end is bonded on pressure sensor 11, is stacked 10 upper and lower ends of piezoelectric ceramics and is clamped in pressure sensor 11 and bullet
Between the substrate 602 of property support element 6.It sets stacking 10 upper end of piezoelectric ceramics button and is bonded with installation set 8, the substrate 602 is pressed
In installation set 8, for avoid stack 10 top work surface of piezoelectric ceramics it is rough caused by stack piezoelectricity
The problem of ceramics 10 and 6 loose contact of elastic supporting member for supporting optical member.
13 outer rim of upper coupling block is octagon, and is radially respectively equipped with a connection in each Middle face of outer rim
Screw hole.Bulb plunger 9 is along the circumferential direction uniformly connected in upper 13 outer rim of coupling block, the bulb plunger 9 is four and one end
It being threadedly attached in four connecting screw holes of coupling block outer rim, the bulb plunger 9 includes a plunger housing 902,
Steel ball 901, spring and adjusting screw 903 are sequentially installed in plunger housing 902.The steel ball of 9 outer end of bulb plunger pushes into respectively
It is along the circumferential direction distributed in four rectangular recess 101 of 1 inner wall of sleeve, for mobile base compensation to be assisted to stack piezoelectric ceramics
The adjusting of 10 liang of working surface parallelism errors.
Adjusting rod 12 is along the circumferential direction uniformly connected in upper 13 outer rim of coupling block, the adjusting rod 12 is four and difference
Radially be connected in remaining four connecting screw hole of coupling block outer rim, and with bulb plunger arranged for interval.Adjusting rod 12 divides
It is not passed through by four slot holes 102 being along the circumferential direction distributed on 1 wall of sleeve, answering for coupling block 13 is gone up after being used to implement test
Position.The center line of the slot hole 102 is parallel with the axis of sleeve 1 with the center line of rectangular recess 101, and each slot hole 102
Center line and the central angle folded by the center line of adjacent rectangular recess 101 be 45 degree.
Four guiding axis 19 are along the circumferential direction laid in sleeve 1,19 both ends of guiding axis are bolted respectively
Between annular roof plate 2 and support plate 17.Guiding axis 19 is passed through by clearance fit and is uniformly arranged in 15 lower end of lower connection block
Pilot hole on ring flange, levelness during for ensureing that lower connection block 15 moves up and down.It is located in 15 lower end of lower connection block and leads
It is installed with axle sleeve 20 respectively into hole.The axis institute of the center line of the slot hole 102 and adjacent 19 axis of guiding axis and sleeve 1
The central angle of folder is 22.5 degree.
During work, start linear stepping motor 18 first and pushed up by leading screw 21 and the transmission of screw 16 by upper coupling block
13rd, the mobile base that steel ball 14 and lower connection block 15 are formed applies pretightning force to stacking piezoelectric ceramics 10, while monitors by pressing
The preload force data that force snesor 11 measures, after the size of pretightning force reaches setting value, control linear stepping motor 18 stops
Only work.Then, apply pulse signal or swept-frequency signal between two electrodes for stacking piezoelectric ceramics 10 using external power supply, utilize
Excitation of the inverse piezoelectric effect realization of piezoelectric ceramics 10 to MEMS micro-structures 4 is stacked, while contactless using external optical
The vibratory response of vibration detecting device detection MEMS micro-structures 4, the power output for stacking piezoelectric ceramics 10 is detected using pressure sensor 11.
Finally, after the excitation to MEMS micro-structures 4 is completed, control linear stepping motor 18 drives lower connection block 15 and steel ball 14 downward
It is mobile, then adjust four adjusting rods 12 manually and upper coupling block 13 is driven to move down, make to stack 10 top installation set 8 of piezoelectric ceramics
It is separated with elastic supporting member for supporting optical member 6, avoids stacking the state that piezoelectric ceramics 10 is constantly in stress.
Although the embodiments of the present invention have been disclosed as above, but its be not restricted in specification and embodiment it is listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, it is of the invention and unlimited
In specific details and legend shown and described herein.
Claims (10)
1. a kind of four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics including sleeve, is set in sleeve
Have and stack piezoelectric ceramics, pressure sensor and the mobile base being made of upper coupling block, steel ball and lower connection block, on sleeve
Face is equipped with elastic supporting member for supporting optical member and MEMS micro-structures, it is characterized in that：
Annular roof plate is equipped on sleeve, the MEMS micro-structures are mounted on by elastic supporting member for supporting optical member on annular roof plate；It is described
Elastic supporting member for supporting optical member includes the support arm of one piece of substrate and four circumference uniform distributions, and each support arm by being mutually connected vertically successively
First linking arm, the second linking arm, third linking arm and the 4th linking arm composition, for reducing the deflection of substrate；
Lower part is equipped with support plate in sleeve, and electric threaded shaft transmission mechanism is vertically equipped at support plate center, electronic
The screw of lead-screw drive mechanism is connect with lower connection block, for lower connection block to be driven to move up and down；
Spherical groove and conical socket are respectively equipped on upper coupling block and the opposite face of lower connection block, the radius of the steel ball is small
In spherical groove radius of curvature and be clamped between spherical groove and conical socket, made between upper and lower coupling block by steel ball
Form an adjustment gap；The pressure sensor is installed in the centre bore of coupling block top surface, stacks piezoelectric ceramics clamping
Between pressure sensor and elastic supporting member for supporting optical member；
Bulb plunger is uniformly connected in upper coupling block outer marginal circumference, the steel ball of bulb plunger outer end pushes into circumferentially side respectively
To being distributed in the rectangular recess of sleeve lining, for mobile base compensation to be assisted to stack the two working surface depth of parallelism of piezoelectric ceramics
The adjusting of error；
Guiding axis is along the circumferential direction laid in sleeve, guiding axis is passed through by clearance fit and is arranged on lower connection block lower end
Ring flange on uniformly distributed pilot hole, levelness during for ensureing that lower connection block moves up and down.
2. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：Adjusting rod is uniformly connected in upper coupling block outer marginal circumference, adjusting rod is respectively by being along the circumferential direction distributed in sleeve wall
Slot hole pass through；The above reset of coupling block is used to implement after test.
3. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The substrate is square, and four support arms are connected to one end of substrate surrounding by the first linking arm respectively；With into one
Step reduces the deflection of substrate, and MEMS micro-structures is avoided to be fallen off due to colloid cracks.
4. the four-axle type seat excitation apparatus according to claim 3 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：Four support arm outer ends of the elastic supporting member for supporting optical member are supported and fixed on by pillar above annular roof plate respectively.
5. the four-axle type seat excitation apparatus according to claim 2 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The upper coupling block outer rim is octagon, and is respectively equipped with a connecting screw hole in each Middle face of outer rim.
6. the four-axle type seat excitation apparatus according to claim 5 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The bulb plunger is threadedly attached in for four and one end in four connecting screw holes of coupling block outer rim.
7. the four-axle type seat excitation apparatus according to claim 6 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The adjusting rod for four and with bulb plunger arranged for interval.
8. the four-axle type seat excitation apparatus according to claim 1 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：Installation set is equipped with stacking piezoelectric ceramics upper end button, the elastic supporting member for supporting optical member is pressed in installation set, for avoiding due to folded
Heap piezoelectric ceramics top work surface it is rough caused by stack asking for piezoelectric ceramics and elastic supporting member for supporting optical member loose contact
Topic.
9. the four-axle type seat excitation apparatus according to claim 7 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The center line of the slot hole is parallel with the axis of sleeve with the center line of rectangular recess, and the center line of each slot hole
It it is 45 degree with the central angle folded by the center line of adjacent rectangular recess.
10. the four-axle type seat excitation apparatus according to claim 9 for the test of MEMS micro-structure dynamic characteristics, special
Sign is：The guiding axis is four, the circle folded by the center line of the slot hole and the axis of adjacent guiding axis axis and sleeve
Heart angle is 22.5 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201711355477.1A CN108217587B (en) | 2017-12-16 | 2017-12-16 | Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics |
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| CN201711355477.1A CN108217587B (en) | 2017-12-16 | 2017-12-16 | Four-axle type seat excitation apparatus for the test of MEMS micro-structure dynamic characteristics |
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| CN108217587B CN108217587B (en) | 2019-11-29 |
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| CN111366183A (en) * | 2020-03-13 | 2020-07-03 | 大连理工大学 | Mobile probe of integrated piezoelectric wafer with adjustable pressing force |
| US11656148B2 (en) * | 2020-05-18 | 2023-05-23 | Hyundai Motor Company | Elastic material vibration test apparatus |
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