CN104568740A - Micro friction measurement device - Google Patents
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- CN104568740A CN104568740A CN201410833474.4A CN201410833474A CN104568740A CN 104568740 A CN104568740 A CN 104568740A CN 201410833474 A CN201410833474 A CN 201410833474A CN 104568740 A CN104568740 A CN 104568740A
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Abstract
The invention relates to a micro friction measurement device, and belongs to the technical field of micro force measurement. By adjusting a fine tuning knob on a lifting platform, loading normal load is realized. Resistance strain gages are adhered to front and back surfaces of an elastic element, form a Wheatstone bridge through leads, so as to indirectly measure the normal load. Two fixed pole plates and a moving pole plate form a differential capacitive sensor; the two fixed pole plates are fixed on the lifting platform through supporting rods; the moving pole plate is connected with a detachable connecting block through a connecting piece; when a servo motor is operated to drive a ball screw, to enable a sample stage to perform linear motion, the connecting block suffers frictional force, a small displacement in the horizontal direction can occur, and the polar distance between the pole plates can be changed, therefore, the capacitance of the capacitive sensor is changed, and the friction measurement is realized. The micro friction measurement device has a simple structure, can realize force loading without a high-precision placement platform, improves the measurement sensitivity, greatly reduces the linear error, and has a good effect on measuring micro force, such as friction force and the like.
Description
Technical field
The present invention relates to a kind of micro tribology measurement mechanism, particularly relate to a kind of detection of micromachine surfaceness and the micro tribology measurement mechanism of assessment, belong to small power field of measuring technique.
Background technology
At present, in micro tribology research, there is no the test platform of unified standard in the world, there is the fine motion experimental facilities that many forms differ, the different thus test unit that development and application is different of the object due to research; Meanwhile, in tribological field, the experimental instruments of comparative maturity is mainly applicable to the tester of macroscopical tribology and Nanotribology.And the friction in fretting corrosion, its load contact greatly about O.01N arriving 2N, between macroscopic view friction and Micro Lub.Because the distance between the minimizing component of size usually only has micron even nanoscale in micromechanics, general Micro-friction force measuring device is then a kind of instrument of testing friction power under small area contact and small load effect, its load is milli newton level, it is certainly sizable that this and nanometer scale compare, but be again quite little relative to macroscopical load, further, its relative sliding velocity is the low speed in macroscopic view, the hypervelocity in microcosmic.Viscous resistance and surface tension etc. are more remarkable on the impact affecting the ratio inertial force relevant to volume and electromagnetic force of system, and the power simultaneously due to entrained in micromechanics is very limited, and reducing friction resistance becomes very necessary.Common type at present about fine motion Friction tester measuring principle has several as follows: force balancing method, Optical reflection method, piezoelectric method, strain gauge method.In said method, force balancing method precision is lower; Optical method has the highest precision, but the investment needed is larger; Its shortcoming of piezoelectric type mensuration is the measurement being only applicable to dynamic force.
Summary of the invention
The object of the invention is to for the problems referred to above, the friction force device during microdevice the measured work providing a kind of precision higher cost lower between surface, improve the situation of inter-surface friction wearing and tearing thus the serviceable life of raising micromechanics.
Technical solution of the present invention is: a kind of micro tribology measurement mechanism, comprises back up pad 1, pedestal 2, vernier adjustment knob 3, lifting table 4, sample stage 5, line slideway 6, ball screw 7, bearing seat 8, spring coupling 9, servomotor 10, resistance strain gage 11, flexible member 12, cylindrical piece 13, detachable contiguous block 14, support bar 15, Universal flexible hinge 16, fixed plate 17, movable plate electrode 18, web member 19, fixed head 20, friction contact 21, miniature drill chuck 22, described back up pad 1 is bolted fixes on the base 2, sample stage 5 and the nut of ball screw 7 are fixed together and move on line slideway 6, bearing seat 8 is bolted on lifting table 4, spring coupling 9 one end connects ball screw 7 other end and connects servomotor 10, line slideway 6 screw is fastened on lifting table 4, sample stage 5 drives ball screw 7 to realize its horizontal shift by servomotor 10, the loading of normal load and the displacement of vertical direction is realized by the vernier adjustment knob 3 on lifting table 4, flexible member 12 and Universal flexible hinge 16 stick with glue agent respectively and crisscross screw is fixed in back up pad 1, flexible member 12 is pasted with two panels resistance strain gage 11 respectively near the position tow sides of back up pad 1, resistance strain gage 11 is by lead-in wire composition Wheatstone bridge, Universal flexible hinge 16 other end is fixed by a side of tackifier and detachable contiguous block 14, detachable contiguous block 14 upper surface and lower surface have circular hole and are used for clamping one cylindrical piece 13 and miniature drill chuck 22, cylindrical piece 13 is as normal load force application part, act on the lower surface of flexible member 12, miniature drill chuck 22 is for grip friction contact 21, web member 19 one end is fixed by screws on detachable contiguous block 14, the other end and movable plate electrode 18 bond together, two pieces of fixed plates 17 are bonded on support bar 15, two pieces of fixed plates 17 and one piece of movable plate electrode 18 form differential capacitive sensor, support bar 15 is welded on lifting table 4, the position of movable plate electrode 18 is in the middle of two pieces of fixed plates 17, fixed head 20 is connected by screw and friction test specimen 23 is fixed on sample stage 5.
Described flexible member 12 adopts horizontal flexible member.
The course of work of the present invention is:
During friction test, regulate vernier adjustment knob 3, thus the vertical range between friction test specimen 23 and friction contact 21 changes, friction test specimen 23 upwardly rubs contact 21, the cylindrical piece 13 of detachable contiguous block 14 upper surface can be applied to the vertical direction pressure carrying out self-friction contact 21 lower surface of flexible member 12 free end, flexible member 12 can occur bending and deformation under the effect of the pressure, pastes superincumbent resistance strain gage 11 and also can be out of shape thereupon.According to resistance strain effect, the strain of normal load to flexible member 12 is converted to the change of resistance strain gage 11, finally convert the measurement of change realization to normal load of electric signal to.Start servo electricity 10 machines, sample stage 5 starts to move in the horizontal direction, friction contact 21 and friction test specimen 23 form friction pair, detachable contiguous block 14 is subject to the friction force of horizontal direction, the micro-displacement of horizontal direction can be produced, due to two pieces of fixed plates 17 and one piece of movable plate electrode 18 in the vertical direction together with move, right opposite between them is long-pending can not change, thus the pole span only changed between movable plate electrode 18 and fixed plate 17, converted to the change of electric signal by RC oscillatory circuit, thus realize the measurement to friction force.
The invention has the beneficial effects as follows: compared with more existing micro-friction measurement mechanisms, the beneficial effect of this device is this apparatus structure and principle simply, operating than being easier to, having higher measuring accuracy, cost is lower, may be used for the assessment of some micromachine surfacenesses;
The loading of this device without the need to adopting high-precision displacement platform to get final product realizable force, adopt 4 sheet resistance foil gauge test circuits relatively simple, compact conformation, the sensitivity that temperature compensation substantially increases measurement equally can be realized, adopt differential capacitive sensor, because the electrostatic attraction between its charged pole plate is very little, required input power and input minimum energy, thus can survey minimum micro-power, this has good effect for the measurement as small power such as micro-frictions.
Accompanying drawing explanation
Fig. 1 is that the axle that waits of the present invention measures intention;
Fig. 2 is schematic front view of the present invention;
Fig. 3 is that schematic diagram is looked on the right side of the present invention;
Fig. 4 is dynamometry part-structure schematic diagram of the present invention.
Each label in Fig. 1-4: 1-back up pad, 2-pedestal, 3-vernier adjustment knob, 4-lifting table, 5-sample stage, 6-line slideway, 7-precise ball screw, 8-bearing seat, 9-spring coupling, 10-servomotor, 11-resistance strain gage, 12 flexible members, 13-cylindrical piece, 14-detachable contiguous block, 15-support bar, 16-Universal flexible hinge, 17-fixed plate, 18-movable plate electrode, 19-web member, 20-fixed head, 21-rubs contact, 22-miniature drill chuck, and 23-rubs test specimen.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
Embodiment 1: a kind of micro tribology measurement mechanism, comprises back up pad 1, pedestal 2, vernier adjustment knob 3, lifting table 4, sample stage 5, line slideway 6, ball screw 7, bearing seat 8, spring coupling 9, servomotor 10, resistance strain gage 11, flexible member 12, cylindrical piece 13, detachable contiguous block 14, support bar 15, Universal flexible hinge 16, fixed plate 17, movable plate electrode 18, web member 19, fixed head 20, friction contact 21, miniature drill chuck 22, described back up pad 1 is bolted fixes on the base 2, sample stage 5 and the nut of ball screw 7 are fixed together and move on line slideway 6, line slideway 6 screw is fastened on lifting table 4, sample stage 5 drives ball screw 7 to realize its horizontal shift by servomotor 10, the loading of normal load and the displacement of vertical direction is realized by the vernier adjustment knob 3 on lifting table 4, flexible member 12 and Universal flexible hinge 16 stick with glue agent respectively and crisscross screw is fixed in back up pad 1, flexible member 12 is pasted with two panels resistance strain gage 11 respectively near the position tow sides of back up pad 1, resistance strain gage 11 is by lead-in wire composition Wheatstone bridge, Universal flexible hinge 16 other end is fixed by a side of tackifier and detachable contiguous block 14, detachable contiguous block 14 upper surface and lower surface have circular hole and are used for clamping one cylindrical piece 13 and miniature drill chuck 22, cylindrical piece 13 is as normal load force application part, act on the lower surface of flexible member 12, miniature drill chuck 22 is for grip friction contact 21, web member 19 one end is fixed by screws on detachable contiguous block 14, the other end and movable plate electrode 18 bond together, two pieces of fixed plates 17 are bonded on support bar 15, support bar 15 is welded on lifting table 4, the position of movable plate electrode 18 is in the middle of two pieces of fixed plates 17, fixed head 20 is connected by screw and friction test specimen 23 is fixed on sample stage 5.
Embodiment 2: a kind of micro tribology measurement mechanism, comprises back up pad 1, pedestal 2, vernier adjustment knob 3, lifting table 4, sample stage 5, line slideway 6, ball screw 7, bearing seat 8, spring coupling 9, servomotor 10, resistance strain gage 11, flexible member 12, cylindrical piece 13, detachable contiguous block 14, support bar 15, Universal flexible hinge 16, fixed plate 17, movable plate electrode 18, web member 19, fixed head 20, friction contact 21, miniature drill chuck 22, described back up pad 1 is bolted fixes on the base 2, sample stage 5 and the nut of ball screw 7 are fixed together and move on line slideway 6, line slideway 6 screw is fastened on lifting table 4, sample stage 5 drives ball screw 7 to realize its horizontal shift by servomotor 10, the loading of normal load and the displacement of vertical direction is realized by the vernier adjustment knob 3 on lifting table 4, flexible member 12 and Universal flexible hinge 16 stick with glue agent respectively and crisscross screw is fixed in back up pad 1, flexible member 12 is pasted with two panels resistance strain gage 11 respectively near the position tow sides of back up pad 1, resistance strain gage 11 is by lead-in wire composition Wheatstone bridge, Universal flexible hinge 16 other end is fixed by a side of tackifier and detachable contiguous block 14, detachable contiguous block 14 upper surface and lower surface have circular hole and are used for clamping one cylindrical piece 13 and miniature drill chuck 22, cylindrical piece 13 is as normal load force application part, act on the lower surface of flexible member 12, miniature drill chuck 22 is for grip friction contact 21, web member 19 one end is fixed by screws on detachable contiguous block 14, the other end and movable plate electrode 18 bond together, two pieces of fixed plates 17 are bonded on support bar 15, support bar 15 is welded on lifting table 4, the position of movable plate electrode 18 is in the middle of two pieces of fixed plates 17, fixed head 20 is connected by screw and friction test specimen 23 is fixed on sample stage 5.
Described flexible member 12 adopts horizontal flexible member.
Embodiment 3: a kind of micro tribology measurement mechanism, structural principle of the present invention as shown in Figure 1, realizes the loading of vertical direction adjustment of displacement and forward load by the vernier adjustment knob 3 on adjustment lifting table 4.Sample stage 5 is bolted with the nut of precise ball screw 7 and is fixed together, precise ball screw 7 is connected with servomotor 10 by spring coupling 9, the gyration of servomotor 10 is converted to the tangential movement of sample stage on line slideway 6, and line slideway 6 screw is fastened on lifting table 4.The sensor construction measuring normal load mainly comprises flexible member 12 and two pairs of resistance strain gages 11, and they and back up pad 1 are connected to form cantilever structure.Measure the friction force sensor structure of horizontal direction mainly to comprise and be fixed on web member 19, one piece of movable plate electrode 18 on detachable contiguous block 14 and two pieces of fixed plates 17, Universal flexible hinge 16 one end connection disassembling formula contiguous block 14 other end is fixed in back up pad 1.Friction test specimen 23 fixed head 20 is fixed by screws on sample stage.
Dynamometry part of the present invention as shown in Figure 4, detachable contiguous block 14 is made up of two parts and is bolted together, and upper surface and lower surface have and to be used for clamp cylinders block 13 and miniature drill chuck 22 with the isodiametric circular hole of overcoat of cylindrical piece 13 and miniature drill chuck 22.Be arranged on the force application part of detachable contiguous block 14 upper surface cylindrical piece 14 as flexible member 15.The miniature drill chuck 22 being arranged on detachable contiguous block 14 lower surface is coordinated by matched key and overcoat, drive overcoat rotates, overcoat drive nut rotate, drive jaw to move in drill body by the threaded engagement outside nut and jaw, reach jaw to rub contact 21 clamping and loosen.Flexible member 12 one end is bonded in back up pad 1.Respectively paste two panels resistance strain gage 19 at close back up pad 1 position tow sides and connect into wheatstone bridge circuits by lead-in wire.Universal flexible hinge 17 one end and detachable contiguous block 14 1 side bond together, and the other end is fixed by screws in back up pad 1.Web member 19 is fixed by screws on detachable contiguous block 14 and bonds together with movable plate electrode 18.Two pieces of fixed plates 17 are bonded on support bar 15, and support bar 15 is welded on accurate lifting table 4, and the position of movable plate electrode 18 is in the middle of two pieces of fixed plates 17.Three pieces of pole plates are connected into the variable capacitance part of RC oscillating circuit as circuit by lead-in wire.
Provide the principle of work of dynamometry part of the present invention below.
Sample stage 5 is placed on lifting table 4 and moves in the vertical direction together with it, by regulate vernier adjustment knob 3 make friction test specimen 23 with directly over friction contact 21 contact, continue to regulate vernier adjustment knob 3 to make friction test specimen 23 extrusion friction contact 21, cylindrical piece 13 will have a positive load upwards to flexible member 12, will elastic deformation be there is in flexible member 12, the 4 sheet resistance foil gauges 11 be pasted onto on it also can deform, thus resistance value changes, the strain that power produces is converted to electric signal, this signal is by after the process of strainmeter, collect by A/D card, then be input in computing machine and carry out processing process, the size of strain can be drawn, eventually through demarcating the value being reduced into load.Control servomotor 10, make sample stage 5 do rectilinear motion on line slideway 6.Between friction test specimen 23 and friction contact 21, the friction force that relative motion produces horizontal direction occurs, detachable contiguous block 14 is subject to the micro-displacement in reverse friction force occurred level direction.Pole span between the movable plate electrode 18 be attached thereto and fixed plate 17 changes thus causes the change of capacitance.Movable plate electrode 18 and two pieces of fixed plates 17 are as a part for RC oscillatory circuit, and the concussion frequency of such oscillating circuit will change.High-speed counter frequency, demodulation frequency signal is utilized to calculate the frequency values of signal intensity, because the time constant of frequency and RC oscillating circuit is inverse relation, such as formula shown f=
in formula, f is the signal intensity frequency values recorded; R is oscillatory circuit resistance value; C is the capacitance of pressure transducer; K is time scale coefficient.Signal frequency f can obtain, R is known conditions, and Proportional coefficient K can be determined by repeatedly testing, and this makes it possible to obtain the current capacitance of pressure transducer, just can go out the current stressed size of movable plate electrode 18 by calibrated and calculated, thus obtain the size of friction force.Due to Universal flexible hinge 16 can simultaneously in the vertical direction and horizontal direction to occur bending and deformation the coupling can eliminated like this between friction force and normal load.
By reference to the accompanying drawings specific embodiments of the invention are explained in detail above, but the present invention is not limited to above-described embodiment, in the ken that those of ordinary skill in the art possess, various change can also be made under the prerequisite not departing from present inventive concept.
Claims (2)
1. a micro tribology measurement mechanism, it is characterized in that: comprise back up pad (1), pedestal (2), vernier adjustment knob (3), lifting table (4), sample stage (5), line slideway (6), ball screw (7), bearing seat (8), spring coupling (9), servomotor (10), resistance strain gage (11), flexible member (12), cylindrical piece (13), detachable contiguous block (14), support bar (15), Universal flexible hinge (16), fixed plate (17), movable plate electrode (18), web member (19), fixed head (20), friction contact (21), miniature drill chuck (22), described back up pad (1) is bolted and is fixed on pedestal (2), the nut of sample stage (5) and ball screw (7) is fixed together and moves line slideway (6) is upper, line slideway (6) screw is fastened on lifting table (4), sample stage (5) drives ball screw (7) to realize its horizontal shift by servomotor (10), the loading of normal load and the displacement of vertical direction is realized by the vernier adjustment knob (3) on lifting table (4), flexible member (12) and Universal flexible hinge (16) stick with glue agent respectively and crisscross screw is fixed in back up pad (1), flexible member (12) is pasted with two panels resistance strain gage (11) respectively near the position tow sides of back up pad (1), resistance strain gage (11) is by lead-in wire composition Wheatstone bridge, Universal flexible hinge (16) other end is fixed by a side of tackifier and detachable contiguous block (14), detachable contiguous block (14) upper surface and lower surface have circular hole and are used for clamping one cylindrical piece (13) and miniature drill chuck (22), cylindrical piece (13) is as normal load force application part, act on the lower surface of flexible member (12), miniature drill chuck (22) is for grip friction contact (21), web member (19) one end is fixed by screws on detachable contiguous block (14), the other end and movable plate electrode (18) bond together, two pieces of fixed plates (17) are bonded on support bar (15), support bar (15) is welded on lifting table (4), the position of movable plate electrode (18) is in the middle of two pieces of fixed plates (17), fixed head (20) is connected by screw and friction test specimen (23) is fixed on sample stage (5).
2. micro tribology measurement mechanism according to claim 1, is characterized in that: described flexible member (12) adopts horizontal flexible member.
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| CN201410833474.4A CN104568740A (en) | 2014-12-29 | 2014-12-29 | Micro friction measurement device |
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| CN201410833474.4A CN104568740A (en) | 2014-12-29 | 2014-12-29 | Micro friction measurement device |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104964770A (en) * | 2015-07-28 | 2015-10-07 | 安徽工程大学 | Tiny component frictional force test device |
| CN104990867A (en) * | 2015-07-28 | 2015-10-21 | 安徽机电职业技术学院 | Test apparatus for tiny friction of micro-mechanical system component |
| CN105334157A (en) * | 2015-10-23 | 2016-02-17 | 清华大学 | Sliding friction coefficient measure apparatus and sliding friction coefficient measure method |
| CN107101902A (en) * | 2017-05-17 | 2017-08-29 | 上海交通大学 | A kind of fine motion frictional testing machine |
| CN108106993A (en) * | 2018-02-02 | 2018-06-01 | 巨心物联网实验室（深圳）有限公司 | INLAY die bonding intensity experiment machines |
| CN108469221A (en) * | 2018-05-29 | 2018-08-31 | 南京铁道职业技术学院 | High-speed railway pantograph carbon slide surface damage displacement-charge converter |
| CN108613620A (en) * | 2018-04-18 | 2018-10-02 | 西安交通大学 | A kind of tangent displacement sensor structure and preparation method thereof based on 3D printing |
| CN108759654A (en) * | 2018-06-27 | 2018-11-06 | 南京铁道职业技术学院 | A kind of single probe pantograph carbon slide surface indentation slot measurement converter |
| CN108981562A (en) * | 2018-06-29 | 2018-12-11 | 南京铁道职业技术学院 | High-speed rail train pantograph carbon slide wears accurate automatic detection device |
| CN109458926A (en) * | 2018-12-20 | 2019-03-12 | 北京时代之峰科技有限公司 | A kind of strain-type roughness sensor |
| CN110031396A (en) * | 2019-04-25 | 2019-07-19 | 河海大学常州校区 | A kind of confficient of static friction measuring device and method |
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| CN104964770A (en) * | 2015-07-28 | 2015-10-07 | 安徽工程大学 | Tiny component frictional force test device |
| CN105334157A (en) * | 2015-10-23 | 2016-02-17 | 清华大学 | Sliding friction coefficient measure apparatus and sliding friction coefficient measure method |
| CN107101902B (en) * | 2017-05-17 | 2019-04-12 | 上海交通大学 | A kind of fine motion frictional testing machine |
| CN107101902A (en) * | 2017-05-17 | 2017-08-29 | 上海交通大学 | A kind of fine motion frictional testing machine |
| CN108106993A (en) * | 2018-02-02 | 2018-06-01 | 巨心物联网实验室（深圳）有限公司 | INLAY die bonding intensity experiment machines |
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Application publication date: 20150429 |