JP4376858B2 - Measuring device and measuring method for ultra-fine hardness etc. - Google Patents

Description

  In the present invention, for example, by using a Belkovic diamond indenter or the like, by continuously taking indentation indentation amount-load data, for example, by a thin film indentation test, an absolute physical value as well as a specific physical property is obtained. The present invention relates to an apparatus and method for measuring ultra-small hardness, etc. suitable for measuring hardness and the like suitable for obtaining supplemental data such as values (for example, Young's modulus).

  A conventional hardness tester using minute displacement control, for example, generates a load with a coil, transmits the force to a measurement indenter with a transmission lever, pushes the indenter into the sample, and measures the displacement at this time by a capacitance displacement meter. (For example, patent document 1).

  In addition, the conventional hardness tester with micro displacement control according to another embodiment expands and contracts by minimizing the hysteresis of the piezoelectric actuator and performs control in an open loop. A hardness value is calculated by combining with a balance (for example, Patent Document 2).

  Usually, a measurement sample to be measured by a conventional ultra-micro hardness measuring machine is fixed to a metal block using an instantaneous adhesive, and is clamped on a stage that can be moved back and forth or left and right. ing.

In addition, the capacitance type displacement meter mounted on the conventional ultra-small hardness measuring instrument does not have a wide measurable range, so it is necessary to bring the indenter close to the measurement sample, for example, about 20 μm before starting the measurement. There is. This is usually done using a microscope because alignment with the naked eye is not possible. When the sample to be measured is viewed with a microscope, for example, when focusing is performed at a magnification of 1000 times, the objective lens is close to the sample to about 20 μm. The objective lens and indenter of the 1000x microscope are pre-adjusted to be the same height, and when the measurement sample placed on the stage is moved from the objective lens toward the indenter, the distance from the indenter tip to the measurement sample However, for example, it is about 20 μm, and preparation before measurement is completed.
JP 2001-124681 A JP-A-4-110636

  However, the hardness tester disclosed in Patent Document 1 uses a capacitance displacement meter for measuring the displacement of the indenter. Capacitance displacement meters are common in that the measurement resolution is very high and nano-order measurement is possible, but they are non-contact and very weak against vibration and expensive. Further, the load generating device is also non-contact, and the force transmission lever is balanced in a very unstable state around a fulcrum at a minute load. For these reasons, it is difficult to ensure a predetermined accuracy unless a substantial cost is applied to the vibration isolation table. Therefore, the entire apparatus is very large and expensive.

  Moreover, in the hardness tester as disclosed in Patent Document 2, although a hysteresis of the piezoelectric actuator is reduced, a large hysteresis still exists. For this reason, there is a problem in applying the piezoelectric actuator by this control in a test for continuously acquiring “indentation push amount−load” data in both indentation and return. Since the control is based on the open loop, it is impossible to grasp the position of the indenter in the return direction due to hysteresis, and accurate measurement cannot be performed. In addition, the detection of the contact point between the indenter and the measurement sample is replaced by bringing it close to the surface of the measurement sample by the XZ stage, and a predetermined voltage is input to the piezoelectric element from here and the amount of displacement is used as the indentation push amount. However, when trying to measure with an indenter indentation of 1 μm or less, there is a large variation in the distance between the indenter and the measurement sample at the start of the indenter in this way of obtaining the contact point (zero point) between the indenter and the measurement sample. As a result, the indenter push amount becomes very inaccurate. Furthermore, with regard to the electronic balance, the response speed is slow, it is difficult to obtain data continuously, and the reproducibility of the balance position is not very good. Cannot be performed. Therefore, in such a hardness tester, since only the data of the highest load point can be taken in, it becomes a measuring machine that obtains only the hardness value.

  Moreover, in the conventional hardness tester, it takes much time to bond the sample to the block and to align the measurement sample of the microscope with the indenter. In particular, the objective lens of the microscope and the measurement sample are only a distance of about 20 μm, for example, and it takes a lot of time to avoid contact with each other. It took about 3 minutes to complete.

  The object of the present invention is to solve the above-mentioned problems in the prior art, in particular, by using a non-contact displacement meter such as a capacitance-type displacement meter, a non-contact load generator, and a force transmission lever as described above. Focusing on the problems, basically using a displacement output to the free end of the micro displacement generator without using a non-contact displacement meter, non-contact load generator, force transmission lever, etc., extremely high accuracy It is an object of the present invention to provide a measuring device and a measuring method such as ultra-fine hardness which can measure the load accompanying the pressing of the indenter.

  Further, an object of the present invention is to enable the time required for sample setting to be shortened by using a sample setting mechanism, for example, the above-mentioned by using a microscope and a stage that can be moved back and forth or left and right. Focusing on these problems, it is possible to place a sample quickly and accurately using a sample placement mechanism without using a microscope and a stage that can be moved back and forth or left and right. It is to provide a measuring device and a measuring method for hardness and the like.

In order to solve the above problems, an ultra micro hardness such measuring apparatus according to the present invention, (a) and the indenter is pushed into the object to be measured is brought into contact with the object to be measured, (b) displacing a free end side output A small displacement generating device, wherein the indenter is brought into contact with the same portion of the object to be measured twice by the displacement output to the free end side, and the free end after the indenter contacts the object to be measured Can be output , and the indenter pushes in the indenter to include both elastic and plastic deformation of the object to be measured in the first indentation, and only the elastic deformation of the object to be indented in the second indentation. features and minute displacement generating device to push the, to have a, a load measuring device for measuring a pressing load at the time of the first time of pushing during the second time pushing when pushed into the (c) the indenter measured object From what That. That is, the displacement output to the free end of the micro-displacement generator after the indenter contacts the object to be measured is defined as the amount of indentation into the object to be measured. -"Load" characteristics and hardness values are obtained.

  For example, as shown in the following figure, in the measurement with this ultra-small hardness measuring device, for example, a load measuring device such as a piezoelectric load cell is installed on the same axis as the output shaft of the piezoelectric actuator fixed to the base plate. Has been. Further, for example, a Belkovic diamond indenter is attached upward on the piezoelectric load cell. Furthermore, for example, a sample installation plate having a hole of about φ2 mm is installed on the top of the Belkovic diamond indenter, and the sample installation plate is moved in the vertical direction of the figure by a block gauge or the like installed on the surface smooth plate. The position has been adjusted. At this time, the hole opened in the sample setting plate and the Belkovic diamond indenter are arranged on the coaxial line so that the tip of the Berkovich diamond indenter is slightly retracted from the sample setting plate. The state before the measurement is the shortest state of the expansion / contraction stroke of this apparatus. Place the measurement sample face downward on the sample setting plate and fix it with a micrometer or the like fixed to the micrometer holder. Next, when a voltage is applied to the piezoelectric actuator and the piezoelectric actuator is extended, the tip of the Berkovich diamond indenter comes out from the hole of the sample setting plate, and the Berkovich diamond indenter is pushed into the measurement sample surface. At this time, the first contact point of the Belkovic diamond indenter to the measurement sample is set as a zero point of the indentation of the Belkovic diamond indenter, and the Belkovic diamond indenter is pushed in to a predetermined pushing amount. At this time, the first contact point between the Belkovic diamond indenter and the measurement sample is detected by a piezoelectric load cell. Further, the position control of the Belkovic diamond indenter is continuously performed so as to become a constant speed, and the time at that time or the input voltage to the piezoelectric actuator is continuously read as the position information of the Belkovic diamond indenter. Also, corresponding to the position information of the Belkovic diamond indenter, the load is continuously read by a piezoelectric load cell or the like to obtain a continuous curve in the “indenter pushing amount-load” graph.

  Regarding the position control of the indenter, the displacement amount of the piezoelectric actuator with respect to the input voltage value of the piezoelectric actuator is measured in advance by a capacitance displacement meter or the like, and this data is used to linearly proportional to time. Control to extend.

  From these facts, it is possible to extend the indenter proportionally linearly by the piezoelectric actuator, and to make the point of contact with the measurement sample as the zero point, and to extend the piezoelectric actuator from that point accurately as the indentation push amount. .

  As a fine adjustment mechanism of the height of the sample mounting plate, it can be performed as shown in FIG. For example, the sample setting plate 3 is connected to the slide guide 13 and is forced upward by the urging means 12. At this time, with respect to the positional relationship between the sample mounting plate 3 and the Belkovic diamond indenter 4 installed upward, the sample mounting plate 3 is at a position higher by about 2 mm, for example. The measurement sample 2 is placed on the sample setting plate 3 in this state with the measurement surface facing downward, and the measurement sample 2 is sandwiched between the sample setting plate 3 and the tip of the micrometer 1 by, for example, the micrometer 1 or the like. In this state, the measurement sample 2 is gradually lowered by the micrometer 1 or the like so that the tip of the Belkovic diamond indenter 4 is just below the tip. In this state, the sample installation is completed and measurement is started.

  If the slide guide 13 at this position is fixed, or if the sample setting plate 3 is fixed to the connecting plate 7 or the like with a screw or the like, the next measurement is performed by placing the sample 2 and lightly measuring the micrometer 1. It is only necessary to hold it down with etc., and the measurement sample installation is completed quickly.

  In FIG. 1, 6 is a piezoelectric load cell as a load measuring device, 7 is a connecting plate, 8 is a piezoelectric actuator as a minute displacement generator, 9 is a base plate, 10 is a micrometer holder, and 12 is an urging means. Show.

  In the conventional normal measurement method, when the indenter is returned, the indenter pushing position is continuously read by the displacement meter, and the load is also continuously read by the load generator when the indenter is returned. Thereby, a characteristic curve as shown in FIG. 2 can be obtained. There is a hysteresis between the two so that the characteristic curve passing through the indenter push-in amount and the zero point of the load shows the characteristic at the time of push-in, and the other characteristic curve shows the characteristic when the push-in amount is reduced (return direction). The characteristic at the time of indentation has hardness of both “elastic component + plastic component”, but the characteristic at the time of indentation reduction (return direction) represents the hardness of only “elastic component”. As described above, in this measuring method, since the elastic component and the plastic component can be separated, it is possible to obtain not only the hardness value but also various physical property data such as Young's modulus.

  However, in the measuring device such as hardness according to the present invention, the indenter push amount and the load are measured only at the time of pushing in, the indenter push amount and the load in the return direction are not measured, and the indenter is quickly pulled out, and then the same part Repeat the second push to the same amount as the first push, and continuously read the load at that time (do not measure the indenter push amount / load in the return direction). Thereby, the first time becomes a curve including both elastic and plastic deformation, but the second time can obtain a curve of only elastic deformation. This makes it possible to obtain a measurement curve equivalent to a normal measurement method in which both the going and returning directions are measured by pushing and returning operations. Also, by measuring the timing of the second push, it is possible to see the time function of the elastic recovery of the measurement sample. Thereby, a graph of “push amount-load” characteristic can be created, a continuous characteristic curve can be obtained, and the hardness value of each measurement point can be obtained. Since this characteristic curve varies depending on the material, it is possible to compare the hardness value and Young's modulus.

  In order to make the first and second indentations the same amount, the minute displacement generator is stretched linearly in proportion to time, and the time from the occurrence of displacement or the input voltage to the minute displacement generator is the same value. To do so. As another method, a method of pushing in the second time until it becomes the same value as the highest point of the first load may be used.

The indenter pushing device used for such measurement can be a minute displacement generator having hysteresis. For example, the piezoelectric actuator has hysteresis in the extension direction and the return direction. However, if only the extension direction is used, the piezoelectric actuator can be extended in a proportional linear manner even by control using an open loop. Therefore, by using twice the extension in the extension direction that can be precisely controlled, it becomes possible to perform a measurement equivalent to a normal measurement method.

  In this measuring device such as ultra-micro hardness, the minute displacement generator, the load measuring device, and the indenter are arranged on the coaxial line, and there is no non-contact portion. These are advantageous in terms of accuracy in terms of Abbe's principle, and also have a positive effect on vibration resistance.

  For example, it is possible to take a form as shown in FIG. In the measurement by this ultra-small hardness measuring device, for example, the piezoelectric actuator 8 is installed downward on the output shaft of the coarse adjustment actuator 14 such as an air actuator, a stepping motor, or a linear actuator supported by the support column 15. Has been. Further, for example, a Belkovic diamond indenter 4 is attached to the output shaft side of the piezoelectric actuator 8. In addition, a load measuring device, for example, a piezoelectric load cell 6 is installed upward on the same axis as the Belkovic diamond indenter 4, and a sample installation plate 3 for installing the measurement sample 2 is installed on the load measuring device. Has been. The state before the measurement is the shortest state of the expansion / contraction stroke of this apparatus. The measurement sample 2 is placed on the sample setting plate 3 and is fixed by, for example, a leaf spring. First, the indenter 4 is brought close to the measurement sample 2 to some extent by the coarse adjustment actuator 14. Next, a voltage is applied to the minute displacement generator 8 such as a piezoelectric actuator to extend it, and the indenter 4 is pushed into the measurement sample surface. The contact between the indenter 4 and the measurement sample 2 is detected by, for example, the piezoelectric load cell 6, and the position of the indenter 4 at this time is set as a zero point of indenter pressing. Further, the position control of the indenter 4 is continuously performed, for example, at a constant speed, and the load at this time is continuously read by the load meter.

  For example, it is possible to take a form as shown in FIG. In the measurement by the measuring device such as micro-hardness, for example, a micro-displacement generator 8 such as a piezoelectric actuator or a giant magnetostrictive actuator is installed downward on the output shaft of a coarse actuator 14 such as an air actuator, a stepping motor, or a linear actuator. Has been. Further, a load measuring device, for example, a piezoelectric load cell 6 is installed facing the minute displacement generating device 8 and further, for example, a Berkovich diamond indenter 4 is attached upward.

  As a fine adjustment mechanism for the height of the sample setting plate 3, for example, the sample setting plate 3 is connected to the slide guide 13 and is forced upward by the biasing means 12. At this time, with respect to the positional relationship between the sample mounting plate 3 and the Belkovic diamond indenter 4 installed upward, the sample mounting plate 3 is at a position higher by about 2 mm, for example. The measurement sample 2 is placed on the sample setting plate 3 in this state with the measurement surface facing downward, and the measurement sample 2 is sandwiched between the tip of the piezoelectric actuator 8 as a minute displacement generator and the sample setting plate 3. The state before the measurement is the shortest state of the expansion / contraction stroke of the minute displacement generator 8. First, the indenter 4 is brought close to the measurement sample 2 to some extent by the coarse adjustment actuator 14. Next, a voltage is applied to a minute displacement generator such as the piezoelectric actuator 8 to extend the piezoelectric actuator 8 and push the indenter 4 into the measurement sample surface. Contact between the indenter 4 and the measurement sample 2 is detected by the piezoelectric load cell 6, and the position of the indenter 4 at this time is set as a zero point of indenter indentation. Further, the position control of the indenter 4 is continuously performed, for example, at a constant speed, and the load at this time is continuously read by the load meter.

  As in these configuration examples, a minute displacement generator, a coarse actuator, an indenter, a load measuring device, etc. are arranged on the coaxial line, and the contact point between the measurement sample and the indenter is extended by the load measuring device by extending the minute displacement generator. The contact point is detected as the zero point of indenter indentation, and the subsequent displacement by the minute displacement generator is defined as the amount of indentation into the object to be measured, and the load corresponding to the indentation amount is accompanied by displacement using a load measuring device. As long as the measurement is continuously performed, the configuration is not necessarily limited to the above-described configuration example, and the positional relationship may be changed.

  Moreover, in such a measuring apparatus, it is desirable to combine with the load measuring apparatus which can measure a load without accompanying a displacement. For this purpose, a load measuring device such as a piezoelectric load cell is suitable.

  In this minute displacement generator and load measuring device, for example, prestress by an urging means such as a spring is applied by about 20 kgf, so the rigidity of the minute displacement generator, load measuring device, and the entire system is very high. On the other hand, since the maximum load at the time of micro-indentation (several μm or less) is very small at several tens of grams or less, the elastic deformation of the device at the time of indentation can be ignored. Therefore, it can be regarded that “the amount of displacement by this device after contacting the sample” = “the amount of pressing the indenter”.

  Further, due to this high rigidity, the entire apparatus is very excellent in terms of vibration resistance performance.

  Since this minute displacement generator can be pushed in on the nano order, it can be used together with a minute load measuring device such as a piezoelectric element to measure the hardness of a thin film having a thickness of several microns. Moreover, by obtaining a continuous curve of the “push-in amount-load” characteristic, it is possible to analyze not only the hardness but also mechanical properties such as the elastic modulus (such as Young's modulus) of the thin film.

  The micro displacement generator used for this indenter pushing unit uses, for example, expansion and contraction as a material of the piezoelectric element, and is hardly affected by vibration. Thereby, even if the vibration isolator of this measuring device for ultra-fine hardness is simple, there is no problem. Therefore, it becomes possible to provide a highly accurate device at a low cost as the whole measuring apparatus.

  The method for measuring ultra-small hardness and the like according to the present invention uses the above-described micro displacement generator, controls the amount of indenter pushed into the object to be measured by the displacement output to the free end thereof, and Push in twice, measure the load corresponding to the indentation amount at the first and second indentation of the indenter using the load measuring device, and the “indentation amount-load” characteristic and hardness value of the object to be measured It consists of the method characterized by obtaining.

According to the above-described measuring apparatus and measuring method for microhardness and the like according to the present invention, the apparatus is configured without using a non-contact displacement meter, a non-contact load generator, a force transmission lever, or the like. It is extremely resistant to vibration and can be made compact. Then, the indenter is pushed twice in the same direction, and after the plastic deformation is caused by the first measurement, the second push is performed at the same position so that only the indentation load due to the elastic deformation can be measured efficiently. Therefore, measurement values such as hardness can be acquired with extremely high accuracy.

  In particular, an expensive and large-scale non-contact displacement meter such as a capacitance sensor is not used, which is very advantageous in terms of cost.

  As a result, it can be used in a bad environment such as a factory, which has been impossible in the past, and can also be used for quality control in a production line. In particular, at a site such as a factory where a pencil hardness test is performed, by replacing the present invention, there is no variation in measurement and quantitative measurement is possible.

Preferred embodiments of the present invention will be specifically described below with reference to the drawings.
As shown in FIG. 5, in the measurement by this ultra-small hardness measurement device, the piezoelectric load cell 6 (for example, 209C12 type manufactured by PCB) is placed on the same axis as the output shaft of the piezoelectric actuator 8 fixed to the base plate 9. ) Is installed. Further, a Belkovic diamond indenter 4 is mounted upward on the piezoelectric load cell 6. Further, a sample installation plate 3 having a hole of about φ2 mm is installed on the upper part of the Belkovic diamond indenter 4, and the sample installation plate 3 is moved up and down in the figure by a block gauge 5 installed on the surface smooth plate 11. The position is adjusted in the direction. At this time, the hole opened in the sample setting plate 3 and the Belkovic diamond indenter 4 are arranged on the coaxial line so that the tip of the Belkovic diamond indenter 4 is slightly retracted from the sample setting plate 3. The state before the measurement is the shortest state of the expansion / contraction stroke of this apparatus. The measurement surface of the measurement sample 2 is placed downward on the sample setting plate 3 and fixed by the micrometer 1 fixed to the micrometer holder 10. Next, when a voltage is applied to the piezoelectric actuator 8 and the piezoelectric actuator 8 is extended, the tip of the Berkovich diamond indenter 4 comes out from the hole of the sample setting plate 3, and the Berkovich diamond indenter 4 is pushed into the surface of the measurement sample 2. At this time, the point of the first contact of the Belkovic diamond indenter 4 to the measurement sample 2 is set as the zero point of the indentation of the Belkovic diamond indenter 4, and the Belkovic diamond indenter 4 is pushed in to a predetermined pushing amount. At this time, the first contact point between the Belkovic diamond indenter 4 and the measurement sample 2 is detected by the piezoelectric load cell 6. Further, the position control of the Belkovic diamond indenter 4 is continuously performed so as to be a constant speed, and the time at that time or the input voltage to the piezoelectric actuator 8 is used as the positional information of the Belkovic diamond indenter 4 and is continuously read. . Further, the load is continuously read by the piezoelectric load cell 6 in accordance with the position information of the Belkovic diamond indenter 4.

  Regarding the position control of the indenter 4, the displacement amount of the piezoelectric actuator 8 with respect to the input voltage value of the piezoelectric actuator 8 is measured in advance by a capacitance displacement meter or the like, and this data is used to be proportional to the time. Control is performed so as to extend linearly (FIG. 6).

Further, as a fine adjustment mechanism of the height of the sample setting plate 3, it can be performed as shown in FIG. The sample setting plate 3 is connected to the slide guide 13 and is forced upward by the urging means 12. At this time, with respect to the positional relationship between the sample setting plate 3 and the Belkovic diamond indenter 4 installed upward, the sample setting plate 3 is higher by about 2 mm. The measurement sample 2 is placed with the measurement surface facing downward on the sample setting plate 3 in that state, and the sample setting plate 3 and the micrometer 1 are fixed by the micrometer 1 fixed to the micrometer holder 10 connected to the base plate 9. The measurement sample 2 is sandwiched at the tip. In this state, the micrometer 1, the measurement sample 2 will lowered gradually, to be the tip barely Bellco Bitch diamond indenter 4. In this state, the sample installation is completed and measurement is started.

  In addition, as described above, if the sample setting plate 3 at this position is positioned with respect to the slide guide 13 with a screw or the like, or the sample setting plate 3 is fixed, the next measurement is performed with the sample 2 placed lightly. It is only necessary to hold it with the micrometer 1 or the like, and the measurement sample installation is completed quickly.

  In the normal measurement method, when the indenter is returned, the indenter indentation position is continuously read by the displacement meter, and the load is continuously read by the load generator as well as the indentation. Thereby, a curve like FIG. 2 can be obtained. There is a hysteresis between the two so that the characteristic curve passing through the indenter push-in amount and the zero point of the load shows the characteristic at the time of push-in, and the other characteristic curve shows the characteristic when the push-in amount is reduced (return direction). The characteristic at the time of indentation has hardness of both “elastic component + plastic component”, but the characteristic at the time of indentation reduction (return direction) represents the hardness of only “elastic component”. As described above, since the elastic component and the plastic component can be separated, it is possible to obtain various physical property data such as Young's modulus as well as the hardness value.

  On the other hand, in the measuring device such as hardness according to the present invention, the indenter indentation amount and load are measured only at the time of pushing in, the indenter indentation amount and load in the return direction are not measured, and the indenter is quickly withdrawn, and then the same Perform the second indentation of the part to the same amount as the first indentation, and continuously read the load at that time (without measuring the indenter indentation / load in the return direction). Thereby, the first time becomes a curve including both elastic and plastic deformation, but the second time can obtain a curve of only elastic deformation. This makes it possible to obtain a measurement curve equivalent to a normal measurement method in which both the going and returning directions are measured with a single push. Also, by measuring the timing of the second push, it is possible to see the time function of the elastic recovery of the measurement sample.

  As a result, as shown in FIG. 7, a graph of the “indentation amount-load” characteristic of both the first indentation and the second indentation can be created, a continuous characteristic curve can be obtained, and the hardness of each measurement point can be obtained. The value can be obtained. Since this characteristic curve varies depending on the material, it is possible to compare the hardness value and Young's modulus.

  The indenter pushing device used for such a measuring method can be a piezoelectric actuator having hysteresis. The piezoelectric actuator has hysteresis in the extension direction and the return direction. However, if only the extension direction is used, it can be extended linearly with respect to time as shown in FIG. Therefore, by using twice the extension in the extension direction, which can be precisely controlled, it becomes possible to perform a measurement equivalent to a normal measurement method.

  In this ultra-small hardness measuring device, the piezoelectric actuator, the piezoelectric load cell, and the Belkovic diamond indenter are arranged on the coaxial line, and there is no non-contact portion. These are advantageous in terms of accuracy in terms of Abbe's principle and are preferable in terms of vibration resistance.

  Moreover, in such a measuring apparatus, it is desirable to combine with a load measuring apparatus capable of measuring a load without accompanying displacement. For this purpose, a piezoelectric load cell is suitable. Piezoelectric load cells (for example, PCB: 209C12 type) can respond to 30kHz and have high rigidity of 0.36N / nm, so the displacement of length due to compression of the piezoelectric load cell itself is limited. Nearly zero. On the other hand, with an electronic balance, the balance of the balance is observed with a sensor or the like, but there is a problem with the response speed and the reproducibility of the balance position, and it cannot cope with nano-order precision control of the indenter.

  In this piezoelectric actuator and piezoelectric load cell, pre-stress is applied by about 20 kgf by a biasing means using a leaf spring, so that the rigidity of the piezoelectric actuator, piezoelectric load cell and the entire system is very high. On the other hand, since the maximum load at the time of micro-indentation (several μm or less) is very small at several tens of grams or less, the elastic deformation of the device at the time of indentation can be ignored. Therefore, it can be regarded that “the amount of displacement by this apparatus after the indenter comes into contact with the sample” = “indentation pushing amount”.

  Further, due to this high rigidity, the entire apparatus is very excellent in terms of vibration resistance performance.

  By controlling only the extension direction of the piezoelectric actuator, it is possible to push in the nano order. Therefore, by using it together with the piezoelectric load cell, it is possible to measure the hardness of a thin film having a thickness of several microns. Moreover, by obtaining a continuous curve obtained by dividing the elastic / plastic component of the “push-in amount-load” characteristic, it is possible to analyze not only the hardness but also the mechanical properties such as the elastic modulus of the thin film.

  Since the piezoelectric actuator used in this indenter pushing unit uses expansion and contraction as a material of the piezoelectric element, it is hardly affected by vibration. Thereby, even if the vibration isolator of this micro micro hardness measuring apparatus is simple, there is no problem. Therefore, it becomes possible to provide a highly accurate device at a low cost as the whole measuring apparatus.

  The measurement of the amount of expansion / contraction (FIG. 6) was performed using a capacitance type displacement meter “Microsense 3401HR-01” manufactured by Japan AE Corporation. Conversion of the voltage value and displacement amount of the capacitance displacement meter is 1V = 2.5 μm.

  The measuring apparatus and measuring method for ultra-fine hardness, etc. according to the present invention can be used in a bad environment such as a factory where it is difficult to measure with high accuracy by a normal method, and is also applied to quality control in a production line. In particular, by replacing the pencil hardness test, it can be suitably applied to obtain supplementary data such as hardness value and Young's modulus that are quantitative without measurement variations.

It is a schematic block diagram of the ultra-micro hardness measuring apparatus which concerns on one embodiment of this invention. It is a "indenter displacement-load" characteristic view obtained in the conventional indenter reciprocation. It is a schematic block diagram of the ultra-micro hardness measuring apparatus which concerns on one embodiment of this invention. It is a schematic block diagram of the ultra-micro hardness measuring apparatus which concerns on one embodiment of this invention. It is a schematic block diagram which shows the structural example of an ultra micro hardness measuring machine. FIG. 6 is a characteristic diagram in which a piezoelectric actuator is extended in a linear proportion to time by an open loop. It is a "indenter displacement-load" characteristic view by indenting twice pushing obtained by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Micrometer 2 Measurement sample 3 Sample installation board 4 Belkovic diamond indenter 5 Block gauge 6 Piezoelectric load cell 7 Connecting plate 8 Minute displacement generator (piezoelectric actuator)
9 Base plate 10 Micrometer holder 11 Surface smooth plate 12 Biasing means 13 Slide guide 14 Coarse adjustment actuator 15 Strut

Claims (5)

(A) the indenter is pressed into the object to be measured is brought into contact with the object to be measured, the (b) a small displacement generating device displacement is outputted to the free end, the indenter by the displacement output to the free end It is possible to output the displacement of the free end side after the indenter and the object to be measured are in contact with each other and to press the same part of the object to be measured twice. A micro-displacement generator that pushes the indenter so as to include both of them, and pushes the indenter so that only the elastic deformation of the object to be measured is performed in the second pushing, and (c) when the indenter is pushed into the object to be measured An apparatus for measuring ultra-fine hardness, comprising: a load measuring device that measures an indentation load at the first indentation and at the second indentation .   The measuring device for ultra micro hardness according to claim 1, wherein the micro displacement generator, the load measuring device, and the indenter are arranged on a coaxial line without passing through a non-contact portion.   The measuring device for ultra-micro hardness according to claim 1 or 2, wherein the micro-displacement generating device comprises a piezoelectric actuator.   The ultra-small hardness measuring device according to claim 1, wherein the load measuring device is a piezoelectric load cell.   The indenter is controlled by the displacement output to the free end side of the minute displacement generator using the measuring device for ultra-fine hardness according to any one of claims 1 to 4, and the indenter The load corresponding to the indentation amount at the first and second indentation of the indenter is measured using a load measuring device, and the “indentation amount-load” characteristic and hardness of the object to be measured are measured. A method for measuring ultra-fine hardness, etc., characterized by obtaining a value.

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