CN112857639A - Servo incremental high-precision pressure sensor and application method thereof - Google Patents
Servo incremental high-precision pressure sensor and application method thereof Download PDFInfo
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- CN112857639A CN112857639A CN202110187585.2A CN202110187585A CN112857639A CN 112857639 A CN112857639 A CN 112857639A CN 202110187585 A CN202110187585 A CN 202110187585A CN 112857639 A CN112857639 A CN 112857639A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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Abstract
The invention discloses a servo incremental high-precision pressure sensor and a using method thereof, and belongs to the technical field of pressure sensors. The servo incremental high-precision pressure sensor comprises a loading table, pressure sensors, an air bag, a micro-displacement driver, a micro-displacement sensor and a base, wherein the lower side of the air bag is installed on the upper surface of the base, the upper side of the air bag supports the loading table, the micro-displacement driver and the micro-displacement sensor are circumferentially arranged on the upper surface of the base by taking the air bag as a center, the pressure sensors are in one-to-one correspondence with the micro-displacement driver, each pressure sensor is supported by the corresponding micro-displacement driver, and the upper side of each pressure sensor supports the loading table. The invention improves the overall measurement precision and realizes the high-precision measurement of the load increment.
Description
Technical Field
The invention relates to a servo incremental high-precision pressure sensor and a using method thereof, belonging to the technical field of pressure sensors.
Background
Pressure sensors are widely used in various industries, the accuracy of the pressure sensors is closely related to the measuring range, the accuracy is usually expressed as a coefficient of a full measuring range, and the high-accuracy sensors can reach about two ten-thousandth of the full measuring range. Therefore, when the equivalent distance is increased, the accuracy is also deteriorated, and how to realize high accuracy under a large load condition becomes a bottleneck problem of the pressure sensor. On the other hand, in many applications such as a centroid test table and a satellite simulator, the magnitude of initial loading is not always concerned, but the relationship is relative to the load variation of the initial loading, namely, the pressure increment.
Disclosure of Invention
The invention aims to provide a servo incremental high-precision pressure sensor and a using method thereof, which are used for solving the problems in the prior art.
A servo incremental high-precision pressure sensor comprises a loading table, pressure sensors, an air bag, a micro-displacement driver, micro-displacement sensors and a base, wherein the lower side of the air bag is mounted on the upper surface of the base, the upper side of the air bag supports the loading table, the micro-displacement driver and the micro-displacement sensors are circumferentially arranged on the upper surface of the base by taking the air bag as a center, the pressure sensors are in one-to-one correspondence with the micro-displacement drivers, each pressure sensor is supported by the corresponding micro-displacement driver, and the upper sides of the pressure sensors support the loading table.
Further, the loading platform and the base are coaxial circular truncated cones.
Further, the air bag is arranged on the axle center of the loading platform and the base.
Further, the air bag is an air bag with adjustable inflation quantity.
Further, the micro displacement driver and the pressure sensor are coaxial.
Furthermore, the micro-displacement driver and the micro-displacement sensor are uniformly provided with N along the circumferential direction of the air bag, wherein N is more than or equal to 3.
Furthermore, the micro displacement driver and the micro displacement sensor are arranged in a staggered mode in the same circle.
Furthermore, the micro displacement driver and the micro displacement sensor are arranged in the same direction and different circles.
Further, the base is provided with a universal fixing interface.
A use method of a servo incremental high-precision pressure sensor is based on the servo incremental high-precision pressure sensor, and comprises the following steps:
first, according to the operating point load F0Adjusting the pressure of the air bag to make the reading of the pressure sensor in the measuring range middle position, and recording the reading P of the micro-displacement sensori0And the reading F of the pressure sensori0The subscript i represents the number of the pressure sensors or the micro-displacement sensors, i is 1,2, …, N, and N represents the total number of the pressure sensors or the micro-displacement sensors; subscript 0 indicates an initial value, and then, a load is applied to the loading table, at which time the index of the micro-displacement sensor is PiIf, if
And/or
Wherein oa and σ each represent a predetermined displacement precisionDegree parameter and displacement distribution parameter, muΔPAnd σΔPRespectively representing the mean and variance of the displacement variation of all the micro-displacement sensors when the load is increased,
adjusting the micro-displacement actuator (4) to muΔPAnd σΔPDecrease until muΔP< oa and sigmaΔP< σ, reading the pressure sensor reading F at this timeiThen the load F on the loading platform (1) relative to the working point0The increased load was:
recording the relative measurement accuracy of the pressure sensor as r0And the measuring range is G, and when the rigidity of the air bag at the working point is k, the relative measurement precision of the newly added load is as follows:
the rigidity k of the working point represents the change of displacement caused by small change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor,
by virtue of the fact that a smaller k and oa are chosen, k is oa, and a larger a is chosen, a 1, resulting in
I.e. a higher measurement accuracy is achieved.
The invention has the following advantages: the invention adopts the air bag as a main support to unload the load of the working point, takes the position of the working point as a balance position, monitors the displacement variation after applying the incremental load through the micro-displacement sensor, reduces the variation to a certain range through the micro-displacement driver, reduces the incremental displacement to the incremental driving force applied in the certain range through the measurement of the small-range high-precision pressure sensor connected with the micro-displacement driver in series, and gives the load increment applied on the loading platform by the resultant force of all the pressure sensors. The air bag is used as a main support to unload the load of the working point, the pressure sensor only needs to measure the incremental load, and when the incremental load is small relative to the load of the working point, the pressure sensor with a small measuring range can be selected, so that the measuring accuracy of the incremental load is improved. The error brought by the main support is determined by the rigidity of the main support, the measurement precision of the micro-displacement sensor and the driving resolution of the micro-displacement driver, and the error can be ignored in a small way by selecting the high-precision micro-displacement sensor and the high-resolution micro-displacement driver. Therefore, high-precision measurement of incremental load under large load is realized.
Drawings
FIG. 1 is a front view of a servo incremental high precision pressure sensor of the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a schematic perspective view of a servo incremental high accuracy pressure sensor of the present invention;
fig. 4 is a flow chart illustrating a method of using the servo incremental high-precision pressure sensor according to the present invention.
Wherein, 1 is a loading platform, 2 is a pressure sensor, 3 is an air bag, 4 is a micro-displacement driver, 5 is a micro-displacement sensor, and 6 is a base.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, in order to meet the requirement of high-precision measurement of incremental loads under large load in applications such as a centroid test table and a satellite simulator, the invention designs a servo incremental high-precision pressure sensor, an initial load of a working point is balanced by a central air bag 3, displacement variation caused by the incremental load is measured by a high-precision micro-displacement sensor 5, a loading table 1 is restored to the position of the working point by a high-resolution micro-displacement driver 4, a reading increment required to be applied when the loading table is restored to the working point is measured by a small-range high-precision pressure sensor 2 connected in series with the micro-displacement driver 4, and the sum of the reading increments of all the pressure sensors 2 provides a load increment relative to the load of the working point. Because the big initial load of operating point is balanced by gasbag 3, the range of pressure sensor 2 only need full increment load's measurement demand just can, can select for use the pressure sensor 2 of less range, when increment load is very little for initial load, can select for use the pressure sensor 2 of less range to show improvement measurement accuracy.
The invention relates to a servo incremental high-precision pressure sensor, which comprises: the device comprises a loading platform 1, a pressure sensor 2, an air bag 3, a micro-displacement driver 4, a micro-displacement sensor 5 and a base 6.
The loading table 1 is supported on the upper sides of the pressure sensor 2 and the air bag 3 and used for applying load, a standard interface can be designed or a special interface can be designed according to the applied load, the center of the loaded load is close to the geometric center of the loading table 1, the geometric dimension of the loading table 1 needs to consider the geometric dimension of the air bag 3 and the distribution and the dimension of the pressure sensor 2, the micro-displacement driver 4 and the micro-displacement sensor 5, generally, the projection can envelop the air bag 3, the pressure sensor 2, the micro-displacement driver 4 and the micro-displacement sensor 5, and the loading table can also be designed according to the constraint of an installation space;
the lower side of the pressure sensor 2 is arranged on a micro-displacement driver 4, the upper side supports a loading platform 1, N is distributed along the circumferential direction of an air bag 3, N is 3, 4 and … … and is used for measuring a load to be measured, N is usually 3 or 4, the circumferential direction is preferably uniform, and the measuring range of the pressure sensor 2 needs to be determined according to the size and the loading position of an incremental load to be measuredDetermined together with N, with the maximum incremental load to be measured as Δ FmaxFor example, at the same time, the load is applied through a spherical hinge when being applied, namely, the load is not allowed to be eccentric, and the measuring range of the pressure sensor 2 is satisfied
The lower side of the air bag 3 is arranged on the base 6, the upper side supports the loading platform 1, the loading platform 1 is coaxial with the base 6 and the loading platform 1 and is used for bearing a load of a working point on the loading platform 1, the air bag 3 can be inflated by an external inflation device to realize the adjustment of the rigidity of the air bag 3, the bearing capacity of the air bag 3 needs to be selected according to the load size, the air supply pressure needs to be determined according to the load size and the required rigidity of the working point, and the load F of the working point is used as the load F of the0For example, the load-bearing capacity of the airbag 3 should satisfy Fmax≥F0+ΔFmaxLet us assume that the displacement resolution of the micro-displacement actuator 4 is δ PaThe maximum allowable error value due to incomplete resetting of the airbag 3 is δ FsThe stiffness of the airbag 3 at the operating point should be such that
If the micro-displacement driver 4 adopts a piezoelectric ceramic actuator, the displacement resolution can reach nano-scale usually, and delta FsFor example, the stiffness of the airbag 3 at the operating point need only be such that it is 0.001N
Such stiffness requirements are easily met without special design.
The lower side of the micro-displacement driver 4 is installed on the base 6, the upper side supports the pressure sensors 2, and is coaxial with the pressure sensors 2, N is distributed along the circumferential direction of the air bag 3, N is 3, 4 and … … and is used for driving the loading platform 1 to recover the working point position, N is the same as the number N of the pressure sensors 2, the stroke and the driving capacity of the micro-displacement driver should meet the requirement that the deformation of the air bag 3 is recovered to the working point position after applying incremental load, the precision of the micro-displacement driver needs to be designed according to the measurement precision of the incremental load, when applying the working point load, the micro-displacement driver 4 should be in the stroke middle position and respectively located at two extreme positions of the stroke when increasing and reducing the maximum incremental load, because the bearing and displacement of the micro-displacement driver are in a unidirectional variation relation, the comprehensive design can be performed from the bearing and stroke, namely when ensuring the load increment to be minimum (the negative value is maximum), when the load capacity is maximum (positive value is maximum), the load capacity of the micro displacement driver 4 does not exceed the maximum load capacity, and therefore, the maximum load capacity of the micro displacement driver 4 should meet the requirement
With N ═ 4, Δ Fmax100N for example, LmaxMore than or equal to 50N. If the micro-displacement driver 4 employs a piezoelectric ceramic actuator, the driving capability thereof can typically reach hundreds to thousands of newtons, and therefore, such a driving capability requirement is extremely easy to realize.
The lower side of the micro-displacement sensor 5 is arranged on a base 6, N micro-displacement sensors are distributed along the circumferential direction of the air bag 3, wherein N is 3, 4 and … … and is used for measuring the displacement change of the loading platform 1, N is the same as the number N of the pressure sensors 2, the micro-displacement sensors can be distributed with the micro-displacement driver 4 and the pressure sensors 2 in a staggered mode or in the same direction but on different distribution circles during distribution, the measuring range of the micro-displacement sensors can meet the requirement of measuring deformation increment after incremental load is applied, or a protection device is designed to avoid damage caused by the deformation increment exceeding the measuring range, and the displacement resolution deltaPsThe design is required according to the measurement accuracy of the incremental load, and the displacement resolution delta P of the micro-displacement driver 4 is largeraSmall, i.e. deltaPs＜δPaIf a capacitive sensor is adopted as the micro-displacement sensor 5, the displacement resolution can usually reach sub-nanometer level;
the base 6 is provided with the air bag 3, the micro-displacement sensor 5 and the micro-displacement driver 4 are arranged along the circumferential direction of the air bag 3, and the bottom can be processed with a universal fixed interface or designed with a special connecting interface according to requirements.
When in use, the method is divided into two stages of debugging and calibration and application, as shown in FIG. 4.
Firstly, when the installation needs to ensure that the reading of the pressure sensor 2 is at the measuring range neutral position, the micro displacement driver 4 is also basically at the stroke neutral position. According to operating point load F0The pressure of the air bag 3 is adjusted to make the reading of the pressure sensor 2 be at the measuring range middle position, and the reading P of the micro-displacement sensor 5 is recordedi0And the pressure sensor 2 indicates Fi0The subscript i indicates the number of the pressure sensor 2 or the micro-displacement sensor 5, i is 1,2, …, N indicates the total number of the pressure sensors 2 or the micro-displacement sensors 5; subscript 0 represents an initial value;
then, a load is applied to the loading table 1, and the index of the micro-displacement sensor 5 is PiIf the average value of the displacement increments of the loading table 1
And/or the variance of the displacement increments of the plurality of micro-displacement sensors 5
Wherein oa and σ represent a predetermined displacement accuracy parameter and a displacement distribution parameter, μ, respectivelyΔPAnd σΔPRespectively, the mean and variance of the amount of change in displacement of all the micro-displacement sensors 5 when an increase in load occurs.
Adjusting the micro-displacement actuator 4 to μΔPAnd σΔPDecrease until muΔP< oa and sigmaΔP< sigma. Reading the reading F of the pressure sensor 2 at this timeiThen the load F on the loading table 1 relative to the working point0Increased load of
The measurement error for incremental loads contains two parts: measurement errors of the plurality of pressure sensors 2 and errors due to incomplete resetting of the air bag 3. As conservative estimation, the errors of the two parts are directly superposed (when an error propagation formula is adopted for calculation, the comprehensive error is smaller than the result of direct superposition); and the measurement errors of the plurality of pressure sensors 2 are solved using the error propagation principle. Let the relative measurement accuracy of the pressure sensor 2 be r0The measurement range is G, when the rigidity of the air bag 3 at the working point is k, the relative measurement precision of the newly added load is G
The rigidity k of the working point represents the change of displacement caused by small change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor 2
By virtue of the fact that a smaller k and oa are chosen, whereas a larger a is chosen so that a > 1, it is possible to achieve
I.e. a higher measurement accuracy is achieved. In light of the foregoing parameters, it is further assumed herein that G ═ Lmax＝100N、F02000N, a ═ 5, r ≈ 0.1r can be obtained0I.e. the accuracy is improved by 10 times.
The invention provides a servo incremental high-precision sensor aiming at the measurement requirement of high-precision load increment under the condition of large initial bearing. The sensor adopts an air bag as a main bearing, the position of an initial load is used as a balance position, after the load is changed, the micro-displacement sensor 5 is used for monitoring and driving the micro-displacement driver 4, so that the loading platform 1 is restored to the balance position, and the whole body of the small-range high-precision pressure sensor 2 is connected in parallel with the main bearing of the air bag 3 after being connected in series with the micro-displacement driver 4, so that the sum of the indication changes of the pressure sensor 2 and the micro-displacement driver gives the load increment of the loading platform. Because the air bag 3 mainly bears the offset initial load, the pressure sensor 2 can select a small-range sensor, the integral measurement precision is improved, and the high-precision measurement of the load increment is realized.
The above embodiments are only used to help understanding the method of the present invention and the core idea thereof, and a person skilled in the art can also make several modifications and decorations on the specific embodiments and application scope according to the idea of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A servo incremental high-precision pressure sensor is characterized by comprising a loading platform (1), a pressure sensor (2), an air bag (3), a micro-displacement driver (4), a micro-displacement sensor (5) and a base (6), the lower side of the air bag (3) is installed on the upper surface of the base (6), the upper side of the air bag (3) supports the loading table (1), the micro-displacement driver (4) and the micro-displacement sensor (5) are circumferentially arranged on the upper surface of the base (6) by taking the air bag (3) as a center, the pressure sensors (2) are in one-to-one correspondence with the micro displacement drivers (4), and each pressure sensor (2) is supported by the corresponding micro-displacement driver (4), the upper side of the pressure sensor (2) supports the loading table (1).
2. A servo incremental high accuracy pressure sensor according to claim 1, characterized in that the loading table (1) and the base (6) are coaxial circular truncated cones.
3. A servo incremental high precision pressure sensor according to claim 2, characterized in that the air bag (3) is arranged on the axle center of the loading table (1) and the base (6).
4. A servo incremental high accuracy pressure sensor according to claim 3, characterized in that the air bag (3) is an air bag with adjustable inflation.
5. A servo incremental high accuracy pressure sensor according to claim 4, characterized in that the micro displacement driver (4) and the pressure sensor (2) are coaxial.
6. The servo incremental high-precision pressure sensor according to claim 5, wherein N micro displacement drivers (4) and N micro displacement sensors (5) are uniformly arranged along the circumferential direction of the air bag (3), and N is more than or equal to 3.
7. A servo incremental high accuracy pressure sensor according to claim 6, characterized in that the micro displacement driver (4) and the micro displacement sensor (5) are arranged in a circle-staggered manner.
8. A servo incremental high accuracy pressure sensor according to claim 6, characterized in that the micro displacement driver (4) and the micro displacement sensor (5) are arranged in different circles in the same direction.
9. A servo incremental high accuracy pressure sensor according to claim 3, characterized in that the base (6) is provided with a universal fixing interface.
10. A method for using a servo incremental high-precision pressure sensor, which is based on any one of claims 1 to 9, and comprises the following steps:
first, according to the operating point load F0The pressure of the air bag (3) is adjusted to make the reading of the pressure sensor (2) positioned at the measuring range middle position, and the reading P of the micro-displacement sensor (5) is recordedi0And a pressure sensor (2)) Index F ofi0The subscript i represents the number of the pressure sensors or the micro-displacement sensors, i is 1,2, …, N, and N represents the total number of the pressure sensors or the micro-displacement sensors; the subscript 0 indicates an initial value of,
then, a load is applied to the loading table (1), and the index of the micro-displacement sensor (5) is PiIf, if
And/or
Wherein oa and σ represent a predetermined displacement accuracy parameter and a displacement distribution parameter, μ, respectivelyΔPAnd σΔPRespectively representing the mean and variance of the displacement variation of all the micro-displacement sensors when the load is increased,
adjusting the micro-displacement actuator (4) to muΔPAnd σΔPDecrease until muΔP< oa and sigmaΔP< sigma, reading the reading F of the pressure sensor (2) at that timeiThen the load F on the loading platform (1) relative to the working point0The increased load was:
the relative measurement precision of the pressure sensor (2) is recorded as r0And the range is G, and when the rigidity of the air bag (3) at the working point is k, the relative measurement precision of the newly added load is as follows:
the rigidity k of the working point represents the change of displacement caused by small change of the load at the working point, and the ratio of the load change amount to the displacement change amount; a represents the relative operating point of the design, i.e. the ratio of the operating point load to the total range of the pressure sensor,
by virtue of the fact that a smaller k and oa are chosen, k is oa, and a larger a is chosen, a 1, resulting in
I.e. a higher measurement accuracy is achieved.
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