CN101793579A - Calibration device of miniature pressure sensor - Google Patents
Calibration device of miniature pressure sensor Download PDFInfo
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- CN101793579A CN101793579A CN201010108309A CN201010108309A CN101793579A CN 101793579 A CN101793579 A CN 101793579A CN 201010108309 A CN201010108309 A CN 201010108309A CN 201010108309 A CN201010108309 A CN 201010108309A CN 101793579 A CN101793579 A CN 101793579A
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- bearing seat
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Abstract
The invention discloses a calibration device of a miniature pressure sensor, which comprises a calibration device pedestal, a load bearing seat, a loading disc, a fixed guiding shaft, an adjusting seat and a sensor pressure head, wherein the fixed guiding shaft is arranged on the load bearing seat; the adjusting seat is arranged on the fixed guiding shaft and can move up and down along the fixed guiding shaft; the loading disc is arranged at the upper end of the load bearing seat; the lower end of the load bearing seat is provided with the sensor pressure heat; and the load bearing seat is connected with the adjusting seat through four deviation-rectifying spring steel sheets. By adopting the structure, the calibration device of the invention has self-balancing capacity and high eccentric load resistance performance. The invention provides the calibration device of the miniature pressure sensor, which has the characteristics of high accuracy, simple mounting, convenient operation and universality.
Description
One, technical field
The present invention relates to the pressure transducer field tests, the static demarcating device of particularly small-sized, micro pressure sensor.
Two, background technology
Micro pressure sensor is used for the effect force measurement on the little surface of contact.It is little to have range, but dynamometry precision height, the advantage of dependable performance.Its pressure-sensing device and signal conditioning circuit are integrated and be packaged in the plastic part, contact force is pressure-sensing device by the stainless steel contact conduction at top, resistance value proportional variation with the size that applies power, the variation of circuitous resistance causes output level also to do corresponding variation.
Utilize pressure transducer to contact force measurement, at first will demarcate, determine the relation of sensor output value and input pressure transducer.In scientific measurement, the demarcation of sensor is indispensable important step.The measuring accuracy of sensor is one of most important performance index of evaluation sensor, and its error comprises stochastic error and systematic error.For micro pressure sensor, its stochastic error is mainly caused by factors such as internal signal treatment circuit, quantization error, external interference; Systematic error is mainly determined by the stated accuracy of calibration system.Microsensor when demarcation and dynamometry, is subjected to environmental interference because volume own is little, and the spherical point contacts surface of contact is little easily.Will accurately measure, at first must guarantee timing signal, acting force can be stablized and puts on sensor, and reduces the effect that add perturbed force of environment to sensor as far as possible.Therefore the research of the design of sensor calibration apparatus and scaling method is most important, the measuring accuracy when its stated accuracy will directly influence its use.
It is to adopt the grade counterweight that loaded with standard power is provided that counterweight is demarcated, and directly uses the grade counterweight as benchmark, and power value precision is higher, uses commonplace in the demarcation of the force transducer of middle or small range.
Three, summary of the invention
The purpose of this invention is to provide a kind of scaling method simple, easy to operate, that stated accuracy is high and device of using, be applicable to the demarcation and the test of the pressure transducer of little range, be specially adapted to stressed microsensor for the some contact.
Technical scheme of the present invention is:
A kind of caliberating device of micro pressure sensor, comprise caliberating device pedestal, load bearing seat, loading disc, guide securement axle, adjust seat and sensor pressure head, described guide securement axle is arranged on the load bearing seat, described adjustment seat is arranged on the guide securement axle and can moves up and down along described stationary shaft, described loading disc is arranged on the upper end of load bearing seat, the described load bearing seat of described sensor pressure head is set in the lower end of load bearing seat adopts four correction spring steel plates to be connected with 3 of described adjustment seats.
Also be provided with one on the described adjustment seat and adjust a threaded hole and a locking screw pit, the set bolt handle is provided with a screw rod in described pit, and the upper end of screw rod is the screw rod knob; Described screw fastening tieholen is communicated with described guide securement axis hole, is provided with a set bolt handle in described locking screw pit.
Described sensor pressure head is adjustable sensor pressure head, and this adjustable pressure head is threaded with described load bearing seat.
The present invention compares with existing pressure sensor calibrating device, has useful effect and is:
1, the anti-bias load ability is strong, the precision height.
The inclination of pallet is the key factor that influences the caliberating device linearity, and the present invention in use can keep pallet all the time and be subjected to the vertical of force direction.In loading counterweight, counterweight at the central point of scale pan, then can not produce a rotating torques relatively.But this torque meeting is offset by four parallel correction spring steel plates, thereby guarantee scale pan level all the time, be carried in like this and remain making a concerted effort on the micro pressure sensor vertically, thereby no matter counterweight is placed on any position of scale pan, and sensor is not all had influence.
2, can demarcate the very little micro pressure sensor of stressed contact point.
Because the micro pressure sensor structure is meticulous, the dynamometry scope is little, and extraneous pressure is accepted in the way of contact of the stainless steel metal ball of employing, and the Metal Ball volume is less, thereby can not directly load counterweight on sensor.The present invention utilizes the direct contact pressure sensor of adjustable sensor pressure head contact, make the counterweight acting force can stabilization in pressure transducer, and adjustable sensor pressure head can change, with the needs of the transducer calibration that adapts to different sizes, surface of contact shape.
3, has autogamy Beijing South Maxpower Technology Co. Ltd power.
The present invention at first will observe the height and position that signal of sensor is regulated load bearing seat simultaneously in use, and when highly being adjusted to sensor non-zero signal is arranged, adjustable sensor pressure head contacts just with sensor metal contact.When loading counterweight on the scale pan, because of adjustable sensor pressure head contacts with the stressed hard contact of sensor, the holding power of spring of rectifying a deviation this moment still equals the gravity sum of scale pan, load bearing seat and adjustable sensor pressure head, and the sensor pressure is the weight of the counterweight of increase.The weight of scale pan is big more, and the distortion of four spring leafs is also big more, but by regulating height, the initial action power that can guarantee all the time to be carried on the sensor is zero, thereby has realized autogamy readjustment joint.
4, linearity unanimity.
When on scale pan, loading counterweight, because adjustable sensor pressure head and sensor metal contact are in contact with one another, therefore the weight that loads counterweight increases or when reducing, the deformation quantity of correction spring steel plate can not change again, and promptly the pressure that sensor carried still is the weight of counterweight.
Four, description of drawings
Fig. 1 is a front elevation of the present invention.
Fig. 2 is a side view of the present invention.
Fig. 3 is a top view of the present invention.
Five, embodiment
Fig. 1 is a perspective view of the present invention.Wherein: the 1st, microsensor calibrating table pedestal; The 2nd, the guide securement axle; The 3rd, adjust seat; The 4th, the set bolt handle; The 5th, the height control screw rod; The 6th, the screw shaft bearing; The 7th, the screw rod knob; The 8th, the correction spring steel plate; The 9th, scale pan; The 10th, load bearing seat; The 11st, adjustable sensor pressure head; The 12nd, the sensor anchor clamps; The 13rd, the pedestal setting nut.
Microsensor is fixed on the calibrating table pedestal 1 by sensor anchor clamps 12, contacts the stainless steel ball at microsensor tops by the adjustable sensor pressure head 11 of 10 installations of the load bearing seat on the left of the calibrating table pedestal; Adjustable sensor pressure head 11 can be replaced by the contact pressure head of different sizes, different contact shapes, uses for different pressure transducers.Load bearing seat 10 tops are equipped with scale pan 9, for the counterweight loading of different quality.
The height control screw rod 5 on right side is vertically fixed on the calibrating table pedestal 1 by screw shaft bearing 6, adjust seat 3 and height control screw rod 5 by being threaded, the screw rod knob 7 that can pass through rotation height control screw rod 5 tops is to regulate the height and position up and down of adjusting seat 3, and adjustment seat 3 can be locked on the guide securement axle 2 by set bolt handle 4.
The weight that loads counterweight on scale pan 9 increases or when reducing, because adjustable sensor pressure head 11 is in contact with one another with sensor metal contact, the deformation quantity of correction spring steel plate 8 can not change again, can not provide extra holding power, promptly the pressure that sensor carried still is the weight of counterweight.If load counterweight not at the central point of scale pan 9, then can produce a rotating torques relatively, this torque meeting is offset by four parallel correction spring steel plates 8, thereby guarantee scale pan 9 level all the time, be carried in like this and remain making a concerted effort on the micro pressure sensor vertically, thereby no matter counterweight is placed on any position of scale pan 9, and sensor is not all had influence.
Embodiment:
At first, calibrating table pedestal 1 of the present invention is placed on flat ground surface or the desktop, utilizes level meter to regulate pedestal setting nut 13, the surface level of calibrating table pedestal 1 is calibrated, guarantee that base 9 is in horizontality.
Then, micro pressure sensor to be calibrated is installed in sensor anchor clamps 12 places of calibrating table pedestal 1, adjusting position makes the stainless steel ball at microsensor top over against the adjustable sensor pressure head 11 of top.Unclamp set bolt handle 4, turn screw rod knob 7 to adjust the height and position of seat 3 and left side load bearing seat 10, makes adjustable sensor pressure head 11 apart from the distance of about 0.5 centimetre of microsensor contact point, and correction spring steel plate 8 is the natural torsion state.
Secondly, be communicated with sensor measuring circuit, observe the output signal numerical value of microsensor, the output when this is unloaded.Slow once more adjusting screw(rod) knob 7, slowly reduce the height of load bearing seat 10, when adjustable sensor pressure head 11 touches the microsensor metal contact just, and in case turn screw rod knob 7 again, when circuit output signal numerical value changes immediately, locking set bolt handle 4.This moment, promptly stressed was zero state in order not load the critical conditions of counterweight.Each spare and accessory parts in the testing fixture guarantee that each spare and accessory parts installation is accurate, firm, and the micro pressure sensor caliberating device is regulated and finished.
At last, add the counterweight of the same accuracy class of fixed intervals weight successively in scale pan, the record Different Weight is the signal output situation of pressure sensor circuit constantly; After reaching range, reduce counterweight more successively to zero.According to the principle of transducer calibration, repeatedly fitted calibration curve after the duplicate measurements is finished the staking-out work of this sensor.
In the processing and assembling process of micro pressure sensor caliberating device, the level that needs the calibrating table pedestal 1 of assurance sensor, the verticality of calibrating table pedestal 1 and lead fixed axle 2, the verticality of guide securement axle 2 and adjustment seat 3, also need to guarantee the length unanimity of four correction spring steel plates 8, the correction spring steel plate through Quenching Treatment need have identical hardness simultaneously.The micro pressure sensor caliberating device is by Machine Design, processing and installation accuracy, and the anti-bias load ability of correction spring steel plate 8 guarantee the position of timing signal loading force application point and direction accurately, the accurate transmission of realizable force improves stated accuracy.
Claims (4)
1. the caliberating device of a micro pressure sensor, comprise caliberating device pedestal (1), load bearing seat (10), loading disc (9), guide securement axle (2), adjust seat (3) and sensor pressure head (11), described guide securement axle (2) is arranged on the load bearing seat (10), described adjustment seat (3) is arranged on guide securement axle (2) and goes up and can move up and down along described stationary shaft (2), described loading disc (9) is arranged on the upper end of load bearing seat (10), in the lower end of load bearing seat (10) described sensor pressure head (11) is set, it is characterized in that: adopt four correction spring steel plates (8) to be connected between described load bearing seat (10) and the described adjustment seat (3).
2. the caliberating device of micro pressure sensor according to claim 1, it is characterized in that: also be provided with one on the described adjustment seat (3) and adjust a threaded hole and a locking screw pit, set bolt handle (4), be provided with a screw rod (5) in described pit, the upper end of screw rod is screw rod knob (7); Described screw fastening tieholen is communicated with described guide securement axis hole, is provided with a set bolt handle (4) in described locking screw pit.
3. the caliberating device of micro pressure sensor according to claim 1, it is characterized in that: described sensor pressure head (11) is adjustable sensor pressure head, and this adjustable pressure head is threaded with described load bearing seat (10).
4. the caliberating device of micro pressure sensor according to claim 1 is characterized in that: also be provided with sensor anchor clamps (12) on described caliberating device pedestal (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101083094A CN101793579B (en) | 2010-02-08 | 2010-02-08 | Calibration device of miniature pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101083094A CN101793579B (en) | 2010-02-08 | 2010-02-08 | Calibration device of miniature pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN101793579A true CN101793579A (en) | 2010-08-04 |
| CN101793579B CN101793579B (en) | 2012-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101083094A Expired - Fee Related CN101793579B (en) | 2010-02-08 | 2010-02-08 | Calibration device of miniature pressure sensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528754A (en) * | 2013-10-28 | 2014-01-22 | 天津工业大学 | Measurement device for thin film pressure sensor |
| CN104596631A (en) * | 2015-01-13 | 2015-05-06 | 北京林业大学 | Method for calibrating weighing precision of weighing lysimeter |
| CN106225991A (en) * | 2016-08-30 | 2016-12-14 | 第拖拉机股份有限公司 | Calibration dynamic torque assembly tool auxiliary device and using method thereof |
| CN111366183A (en) * | 2020-03-13 | 2020-07-03 | 大连理工大学 | Mobile probe of integrated piezoelectric wafer with adjustable pressing force |
| WO2022047774A1 (en) * | 2020-09-04 | 2022-03-10 | 全立传感科技(南京)有限公司 | Test indentor and sensor |
-
2010
- 2010-02-08 CN CN2010101083094A patent/CN101793579B/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528754A (en) * | 2013-10-28 | 2014-01-22 | 天津工业大学 | Measurement device for thin film pressure sensor |
| CN103528754B (en) * | 2013-10-28 | 2016-04-13 | 天津工业大学 | A kind of measurement mechanism of diaphragm pressure sensor |
| CN104596631A (en) * | 2015-01-13 | 2015-05-06 | 北京林业大学 | Method for calibrating weighing precision of weighing lysimeter |
| CN106225991A (en) * | 2016-08-30 | 2016-12-14 | 第拖拉机股份有限公司 | Calibration dynamic torque assembly tool auxiliary device and using method thereof |
| CN106225991B (en) * | 2016-08-30 | 2022-03-22 | 第一拖拉机股份有限公司 | Use method of auxiliary device for calibrating dynamic torque assembly tool |
| CN111366183A (en) * | 2020-03-13 | 2020-07-03 | 大连理工大学 | Mobile probe of integrated piezoelectric wafer with adjustable pressing force |
| WO2022047774A1 (en) * | 2020-09-04 | 2022-03-10 | 全立传感科技(南京)有限公司 | Test indentor and sensor |
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| Publication number | Publication date |
|---|---|
| CN101793579B (en) | 2012-02-01 |
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