CN101782449A - Calibration table of micro pressure sensor - Google Patents
Calibration table of micro pressure sensor Download PDFInfo
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- CN101782449A CN101782449A CN201010108312A CN201010108312A CN101782449A CN 101782449 A CN101782449 A CN 101782449A CN 201010108312 A CN201010108312 A CN 201010108312A CN 201010108312 A CN201010108312 A CN 201010108312A CN 101782449 A CN101782449 A CN 101782449A
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- crossbeam
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Abstract
The invention discloses a static calibration table of a micro pressure sensor, which comprises a calibration table base, a mounting bracket, a beam and a sensor contact, wherein the mounting bracket is arranged on the calibration table base, the middle part of the beam is fixed on the mounting bracket via a bearing, one end of the beam is provided with a thick leveling nut and a thin leveling nut, a scale pan is hung at the other end of the beam via a thin line, a binding clip is arranged between the thin line hanging point of the beam and the bearing, a vertical guiding shaft can be fixed on the beam via the binding clip in a vertical adjustment mode, and the lower end of the vertical guiding shaft is detachably connected with the sensor contact; the binding clip is arranged in the middle of the thin line hanging point of the beam and the bearing; and the sensor contact is in threaded connection with the lower end of the vertical guiding shaft. The calibration experiment results prove that the invention has the advantages of high precision, simple installation, convenient operation, strong generality and the like.
Description
One, technical field
The present invention relates to the pressure sensor calibrating platform, the micro pressure sensor static demarcating platform that particularly a kind of contact point is little.
Two, background technology
Sensor technology is one of important technology of modern surveying and automated system, explores secrets from the space development to the seabed, lives to modern civilization from the process control of producing, and almost each technology all be unable to do without sensor.Pressure transducer has that volume is little, in light weight, highly sensitive, reliable and stable, cost is low, be convenient to integrated advantage, can be widely used in pressure, highly, the measurement and the control of the flow of acceleration, liquid, flow velocity, liquid level, pressure.
Micro pressure sensor has the reliable power sensing capabilities of precision, and such sensor has adopted certified reliable sensing technology, promptly uses custom-designed precision voltage dependent resistor (VDR) silicon sensing element.Miniwatt, nothing is amplified, the design of uncompensated Hui Sidun bridge circuit is exported at stable millivolt step voltage in can providing in the power scope.
The piezoresistance that the micro pressure sensor basis is imbedded, when it is subjected to any external force, the principle work that its resistance can increase.Micro pressure sensor directly focuses on the power that applies on silicon-sensing element by stressed responsive contact site, and the variation of resistance value is the proportional variation with the size of the power that applies.The variation of circuitous resistance causes millivolt level output voltage also to do corresponding variation.
The measuring accuracy of sensor is one of most important performance index of evaluation sensor, and its error comprises stochastic error and systematic error.For micro pressure sensor, its stochastic error is mainly caused by factors such as internal signal treatment circuit, quantization error, external interference; Systematic error is mainly determined by the stated accuracy of calibration system.The precise structure of microsensor own, stressed contact point is less, so the design studies of sensor calibration apparatus is most important, the measuring accuracy when its stated accuracy will directly influence its use.
Three, summary of the invention
Technical matters the present invention is directed to the problem that the little micro pressure sensor of contact point is difficult to demarcate, and has designed a kind of precision height, the static demarcating platform of the micro pressure sensor of simple, easy to operate, highly versatile is installed.
The static demarcating platform of a kind of micro pressure sensor of technical scheme, comprise the calibrating table base, mounting bracket, crossbeam and sensor contact, described mounting bracket is arranged on the calibrating table base, a bearing fixing is passed through on mounting bracket in described crossbeam middle part, at described crossbeam one end a coarse adjustment Heibei provincial opera nut and a fine tuning flush nut are housed, the other end at described crossbeam hangs a scale pan by fine rule, between the thin line hanging point of crossbeam and bearing, be provided with an anchorage clip, but a vertically-guided axle by this anchorage clip up-down adjustment be fixed on the crossbeam, detachably connect described sensor contact in the lower end of vertically-guided axle.
Described anchorage clip is arranged on the middle of described crossbeam thin line hanging point and bearing.
Described sensor contact is threaded with the lower end of vertically-guided axle, and the rotation sensor contact can make it move up and down and replaceable this sensor contact.
Beneficial effect
1, adopt suspension counterweight tray type structure, the anti-bias load ability is strong
Transducer calibration platform structural design is the key factor that influences stated accuracy.If be loaded into that the gravity of the counterweight of scale pan has produced the component of other direction and the pressure that can not all be converted into the suffered vertical direction of sensor, the resultant error of demarcation is very big.The present invention adopts and hangs the counterweight tray type structure, by fine rule scale pan is suspended on the crossbeam.When loading counterweight, which position that no matter is loaded into scale pan can both guarantee that crossbeam is stressed along fine rule straight down, avoids the component of other direction, thereby guarantees to micro pressure sensor pressure along the axis of guide and adjustable sensor contact straight down.Compare with adopting other pellet type structure, the present invention can improve stated accuracy effectively.
2, the transducer calibration platform adopts thick, thin nut counterweight
Transducer calibration playscript with stage directions body weight can not be ignored in calibration process, adopt thick, thin nut configuration among the present invention, before to pressure sensor calibrating earlier to the horizontal balancing of calibrating table crossbeam, to offset the weight of caliberating device own to the stressed influence of pressure transducer.The present invention adopts a coarse adjustment flush nut and fine tuning flush nut that calibrating table is carried out horizontal balancing at the crossbeam right-hand member.Before demarcation, at first regulate the coarse adjustment flush nut and make the calibrating table crossbeam be in a basic horizontal state, and then slowly regulate the fine tuning flush nut, make crossbeam keep an equilibrium state preferably.Adopt thickness leveling nut counterweight, easy to adjust, guaranteed the transducer calibration precision simultaneously.
3, can demarcate the very little micro pressure sensor of stressed contact point.
Because the micro pressure sensor structure is meticulous, the general extraneous pressure of some way of contact acceptance that adopts, contact point area is less, thereby can not directly utilize counterweight that sensor is demarcated.The present invention adopts the stressed sensitive part of the direct contact pressure sensor of sensor contact, by the axis of guide and sensor contact pressure is passed to micro pressure sensor, solved effectively and be difficult to the problem that directly adopts counterweight that sensor is demarcated, realized the accurate demarcation of sensor.
4, can demarcate the micro pressure sensor of dissimilar contact points
Micro pressure sensor is of a great variety, and the sensor contact site of experiencing the pressure variation comes in every shape, and medium is various.Divide the employing point contact that has, the employing face that has contact and other all kinds of shapes from the shape of contact site; Divide from the medium of contact site, the employing Metal Ball that has is accepted ambient pressure, and the employing button that has is accepted ambient pressure and other various contact mediums.How the micro pressure sensor of various different contacts site shapes and different contact mediums being demarcated is a urgent problem.The disposable sensor contact structural design that the present invention adopts has solved this problem well.The adjustable sensor contact that the present invention adopts is coupled by the screw thread and the axis of guide, can adjustable sensor contact be moved up and down by rotation, this adjustable sensor contact can be changed at the contact site shape and the medium of different micro pressure sensors, at different micro pressure sensors, design corresponding right sensors contact, can guarantee effectively, make things convenient for and accurately sensor be demarcated.
Four, description of drawings
Fig. 1 is a pressure sensor calibrating platform front view (FV).
Fig. 2 is a pressure sensor calibrating platform back view.
Fig. 3 is pressure sensor calibrating platform size marking figure.
Five, specific embodiments
Fig. 1 is a pressure sensor calibrating platform front view (FV), wherein: the 1st, microsensor calibrating table base, the 2nd, calibrating table support, the 3rd, fine tuning flush nut, the 4th, the coarse adjustment flush nut, the 5th, bearing, the 6th, bearing bridge, the 7th, anchorage clip, the 8th, the axis of guide, the 9th, crossbeam, the 10th, weight tray, the 11st, adjustable sensor contact.
A kind of static demarcating platform of micro pressure sensor, comprise calibrating table base 1, on calibrating table base 1, be provided with mounting bracket 2, mounting bracket 2 links to each other with crossbeam 9 middle parts by a bearing 5, described crossbeam 9 one ends are equipped with a coarse adjustment Heibei provincial opera nut 4 and a fine tuning flush nut 3, the other end of described crossbeam 9 hangs a scale pan 10 by fine rule, a vertically-guided axle 8 is installed in the middle of the header portion between thin line hanging point and bearing 5, the described axis of guide 8 is fixed on the crossbeam 9 by an anchorage clip 7 that is installed in crossbeam 9 bottoms, by the degree of tightness of regulating anchorage clip 7 axis of guide 8 is moved up and down, adjustable sensor contact 11 is equipped with in the bottom of the described axis of guide 8, and adjustable sensor contact 11 is passed through screw thread couple together with the axis of guide 8.
With reference to the accompanying drawings, specific embodiments of the present invention is made more detailed description:
With reference to Fig. 1, Fig. 2, the present invention relates to a kind of pressure sensor calibrating platform.Comprise calibrating table base 1, be provided with vertical mounting bracket 2 in the center-right position of calibrating table base 1, described mounting bracket 2 is used to carry other spare and accessory parts of calibrating table.Described mounting bracket 2 links to each other with crossbeam 9 middle parts by a bearing 5, and described bearing 5 is connected by the bearing bridge 6 that is installed on the crossbeam 9.Described crossbeam 9 one ends are thin right cylinder, a coarse adjustment Heibei provincial opera nut 4 and a fine tuning flush nut 3 are housed on the thin right cylinder end of crossbeam 9, coarse adjustment leveling nut 4 is near mounting bracket 2 one ends, fine tuning flush nut 3 is away from mounting bracket 2 one ends, the other end of described crossbeam 9 is the flat rectangular shape, terminal by counterweight disk 10 of fine rule suspension, a vertical cylinder axis of guide 8 is installed in the middle of the header portion between thin line hanging point and bearing 5, the described axis of guide 8 is installed in crossbeam 9 following anchorage clips 7 by one and is fixed on the crossbeam 9, by the degree of tightness of regulating anchorage clip 7 axis of guide 8 is moved up and down, adjustable sensor contact 11 is equipped with in the bottom of the described axis of guide 8, described adjustable sensor contact 11 is passed through screw thread couple with the axis of guide 8, can move up and down by rotation, described adjustable sensor contact 11 can be taken off the sensor contact of being replaced by other shape simultaneously.
With reference to Fig. 3, in described pressure sensor calibrating platform, the quality of establishing coarse adjustment balance nut 4 is m
1, the quality of fine tuning balance nut 3 is m
2, be the separatrix with bearing 5 centers, establishing its right side rectangle header portion quality is m
3, cylindrical beam part quality is m
4, vertically-guided axle 8, anchorage clip 7 are m with the quality sum of adjustable sensor contact 11
5, the quality of scale pan 10 is m
6, be the separatrix with bearing 5 centers, left side header portion quality is m
7
With bearing 5 centers is fulcrum, and establishing coarse adjustment balance nut 4 centre distance pivot distances is l
1, fine tuning balance nut 3 centre distance pivot distances are l
2, fulcrum right side rectangle crossbeam length l
3, cylindrical beam part end-to-end distance fulcrum length is l
4, vertically-guided axle 8 centre distance pivot distances are l
5, scale pan 10 thin line hanging point are l apart from pivot distance
6, fulcrum left side crossbeam length overall l
7
When not placing counterweight, by moment equilibrium condition:
Wherein:
ρ is the density of balance nut material, r
1Be the radius of coarse adjustment balance nut, h
1Be its thickness.
G is an acceleration of gravity.
When scale pan placement gross mass is the counterweight of M, it is the pulling force straight down of Mg that the crossbeam right-hand member is subjected to a size, and fulcrum generation size is Mgl relatively
6Moment, direction is along counterclockwise; It is N that the stress contact of pressure transducer produces size by adjustable sensor contact 11, and direction is along the axis of guide 8 holding power straight up, and fulcrum generation size is Nl relatively
5Moment, direction is along clockwise.
At this moment, get by moment equilibrium condition:
Simultaneous (1) (2) formula can get
Nl
5＝Mgl
6 (3)
By Newton third law (acting force and reacting force), it is N that the stress contact of pressure transducer produces size by adjustable sensor contact 11, direction is along the axis of guide 8 holding power straight up, then pressure transducer will be subjected to pressure F straight down and the N equal and opposite in direction that 11 pairs of sensors of adjustable sensor contact produce, direction is opposite, each other acting force and reacting force.Promptly
F＝N (4)
Thereby
Because scale pan 10 thin line hanging point are the twices of the axis of guide 8 centers to the distance of fulcrum, i.e. l to the distance of fulcrum
6=2l
5So, the pressure that sensor is subjected to
F＝2Mg (6)
Be that the sensor pressure is the twice of Weight gravity, direction straight down.
Embodiment:
The present invention relates to a kind of calibration table of micro pressure sensor, particularly be used for the static demarcating platform of the little micro pressure sensor of contact point, concrete operation scheme is as follows:
At first, calibrating table pedestal 1 of the present invention is placed on the horizontal table top, calibrating table base 1 is carried out horizontal alignment, guarantee that the whole calibrating device is in horizontality, regulate crossbeam 9 coarse adjustment flush nuts 4 and fine tuning flush nut 3, make crossbeam 9 maintenance levels.
Secondly, the setting pressure sensor makes the stressed contact site of micro pressure sensor over against the adjustable sensor contact 11 of top.Unclamp anchorage clip 7, slowly regulate the height and position of the axis of guide 8, make adjustable sensor contact 11, tighten anchorage clip 7 then apart from about 0.5 centimetre of microsensor contact point.
Then, be communicated with sensor measuring circuit, observe the output signal numerical value of microsensor, this moment, pressure transducer contacted with adjustable sensor contact 11, the output when output valve is the sensor zero load.Slowly rotary adjustable sensor contact 11 makes it touch the contact site of micro pressure sensor just, and in case rotation again, sensor output signal numerical value stops the rotation when changing immediately, and this moment, promptly stressed was zero state in order not load the critical conditions of counterweight.Each spare and accessory parts in the testing fixture guarantee that each spare and accessory parts installation is accurate, firm, and the micro pressure sensor caliberating device is regulated and finished, and waits to be calibrated.
At last, in scale pan, load counterweight, finish demarcation as required micro pressure sensor.
Claims (4)
1. the static demarcating platform of a micro pressure sensor, it is characterized in that: comprise calibrating table base (1), mounting bracket (2), crossbeam (9) and sensor contact (11), described mounting bracket (2) is arranged on the calibrating table base (1), described crossbeam (9) middle part is fixed on the mounting bracket (2) by a bearing (5), at described crossbeam (9) one ends a coarse adjustment Heibei provincial opera nut (4) and a fine tuning flush nut (3) are housed, the other end at described crossbeam (9) hangs a scale pan (10) by fine rule, between the thin line hanging point of crossbeam (9) and bearing (5), be provided with an anchorage clip (7), one vertically-guided axle (8) by this anchorage clip (7) but up-down adjustment be fixed on the crossbeam (9), detachably connect described sensor contact (11) in the lower end of vertically-guided axle (8).
2. calibration table of micro pressure sensor according to claim 1 is characterized in that: described anchorage clip (7) is arranged on the middle of described crossbeam (9) thin line hanging point and bearing (5).
3. calibration table of micro pressure sensor according to claim 1 is characterized in that: described sensor contact (11) is threaded with the lower end of vertically-guided axle (8).
4. according to claim 1,2 or 3 described calibration table of micro pressure sensor, it is characterized in that: described sensor contact (11) is for interchangeable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010108312A CN101782449A (en) | 2010-02-08 | 2010-02-08 | Calibration table of micro pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010108312A CN101782449A (en) | 2010-02-08 | 2010-02-08 | Calibration table of micro pressure sensor |
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| CN101782449A true CN101782449A (en) | 2010-07-21 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156022A (en) * | 2011-05-23 | 2011-08-17 | 重庆大学 | Stress sensor calibration system |
| CN105300594A (en) * | 2015-11-12 | 2016-02-03 | 西安航空动力股份有限公司 | Calibration device and calibration method of tension sensor |
| CN105784266A (en) * | 2016-03-03 | 2016-07-20 | 上海精密计量测试研究所 | Docking mechanism test system six-component force on-line calibration method |
| CN107499955A (en) * | 2017-08-28 | 2017-12-22 | 昆山永新玻璃制品有限公司 | Flash accepts turning device and accepts method |
| CN109696275A (en) * | 2019-01-22 | 2019-04-30 | 北京邮电大学 | Pressure sensor calibrating experimental provision with two-stage adjustment mechanism |
| CN110836748A (en) * | 2019-11-27 | 2020-02-25 | 中国航发沈阳黎明航空发动机有限责任公司 | Engine blade static torque meter calibration system and calibration method |
| CN114252193A (en) * | 2021-12-13 | 2022-03-29 | 福州大学 | Micro-force sensor calibration method |
| CN114264406A (en) * | 2021-12-29 | 2022-04-01 | 绍兴市肯特机械电子有限公司 | Self-calibration couple type torque standard machine, self-calibration method and torque testing method thereof |
| CN114353851A (en) * | 2021-12-23 | 2022-04-15 | 青岛智腾微电子有限公司 | Turntable device for sensor calibration test |
-
2010
- 2010-02-08 CN CN201010108312A patent/CN101782449A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156022A (en) * | 2011-05-23 | 2011-08-17 | 重庆大学 | Stress sensor calibration system |
| CN102156022B (en) * | 2011-05-23 | 2013-03-27 | 重庆大学 | Stress sensor calibration system |
| CN105300594A (en) * | 2015-11-12 | 2016-02-03 | 西安航空动力股份有限公司 | Calibration device and calibration method of tension sensor |
| CN105784266A (en) * | 2016-03-03 | 2016-07-20 | 上海精密计量测试研究所 | Docking mechanism test system six-component force on-line calibration method |
| CN107499955A (en) * | 2017-08-28 | 2017-12-22 | 昆山永新玻璃制品有限公司 | Flash accepts turning device and accepts method |
| CN109696275A (en) * | 2019-01-22 | 2019-04-30 | 北京邮电大学 | Pressure sensor calibrating experimental provision with two-stage adjustment mechanism |
| CN109696275B (en) * | 2019-01-22 | 2020-06-26 | 北京邮电大学 | Pressure sensor calibration experimental device with two-stage adjusting mechanism |
| CN110836748A (en) * | 2019-11-27 | 2020-02-25 | 中国航发沈阳黎明航空发动机有限责任公司 | Engine blade static torque meter calibration system and calibration method |
| CN114252193A (en) * | 2021-12-13 | 2022-03-29 | 福州大学 | Micro-force sensor calibration method |
| CN114353851A (en) * | 2021-12-23 | 2022-04-15 | 青岛智腾微电子有限公司 | Turntable device for sensor calibration test |
| CN114264406A (en) * | 2021-12-29 | 2022-04-01 | 绍兴市肯特机械电子有限公司 | Self-calibration couple type torque standard machine, self-calibration method and torque testing method thereof |
| CN114264406B (en) * | 2021-12-29 | 2023-06-16 | 绍兴市肯特机械电子有限公司 | Self-calibration couple type torque standard machine, self-calibration method thereof and torque testing method |
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Application publication date: 20100721 |