CN1975335A - Universal precision displacement measurement auxiliary device and measuring method - Google Patents
Universal precision displacement measurement auxiliary device and measuring method Download PDFInfo
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- CN1975335A CN1975335A CN 200610098323 CN200610098323A CN1975335A CN 1975335 A CN1975335 A CN 1975335A CN 200610098323 CN200610098323 CN 200610098323 CN 200610098323 A CN200610098323 A CN 200610098323A CN 1975335 A CN1975335 A CN 1975335A
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Abstract
This invention disclosed a measuring method for micro-displacement. It was suitable for displacement less than 1 micron. It adopts balance lever system to amplify the displacement so that the precision was largely improved. It adopts two-level balance regulation system to decrease distortion so that the measuring process was stable. The advantages are as follows: the structure was simple; it is easy to handle; the cost was very low.
Description
Technical field
The invention belongs to field of machining, refer in particular to a kind of device that increases exponentially the displacement measuring instrument precision that has, can be convenient to microdisplacement measurement, be specially adapted to Precision Machining, precision measurement field.
Background technology
Displacement is a kind of basic physical amount, and a large amount of research all relates to displacement measurement, and the displacement that therefore how to make things convenient for, measure accurately research object is the problem that the needs of field of machining solve always.Particularly, more and more higher to the quality requirements of product along with science and technology development, thus cause the requirement of displacement measurement precision more and more highlyer, and the measurement of micro-displacement (also claiming micrometric displacement) has become the important means that studies a question.For example, in Precision Machining, the precision measure of processing parts, the microdeformation control of machine tool component, the amount of feeding control of micro-feeding device, the error compensation amount control of Error Feedback system etc. all relates to the accurate problems of measurement of micrometric displacement.
Method commonly used has three classes in the microdisplacement measurement at present, that is: (1) mechanical measurement method; (2) measurement method of electricity; (3) optical measuring method.
In the mechanical measurement method, the most frequently used microdisplacement measurement instrument is a lever--type dial indicator, and its resolution has only 1 micron.And in the measurement method of electricity, the most normal microdisplacement measurement instrument is a capacitance micrometer, and its resolution has only 0.3 micron.The displacement measuring instrument of this two quasi-tradition all can not be directly used in the micrometric displacement amount less than 1 micron measurement.
Adopt the precision and the resolution of the displacement measuring instrument of optical measuring method can reach very high level, for example the resolution of laser interference dial gauge can reach nanoscale, and in theory, it can be used for the micrometric displacement amount less than 1 micron occasion.But this quasi-instrument costs an arm and a leg, and the service condition requirement is very high, is difficult in the in-site measurement and directly uses.
Therefore,, also do not have a kind of cost low at present, can directly apply to the precision micro-displacement measurement mechanism of production scene for the micrometric displacement of displacement less than 1 micron.
Summary of the invention
The servicing unit that the purpose of this invention is to provide a kind of microdisplacement measurement cheaply improves 1～2 order of magnitude with the measuring accuracy of existing displacement measuring instrument, enables to directly apply to displacement in the production scene less than 1 micron microdisplacement measurement.
At the measurement of micro-displacement, traditional measuring principle is to seek a kind of method, and it can change the micrometric displacement amount into the physical quantity of high other of resolution, utilizes this physical quantity to calculate original micrometric displacement amount, thereby makes the measurement of micrometric displacement become possibility.
Measuring principle of the present invention is to seek a kind of method, it can amplify tens of times with the micrometric displacement amount, makes it to become the displacement that common displacement measuring instrument can be measured, and then new displacement is directly measured, instead again extrapolate original micrometric displacement amount, thereby also can realize the measurement of micrometric displacement.
Realize that the object of the invention technical scheme is:
Utilize an accurate lever with balance adjusting device, first measuring head of lever one end slightly contacts with testee, after by accurate lever original micrometric displacement being amplified several 10 times, displacement after the second measuring head place of the lever other end goes out to amplify with common non-contact displacement measurement apparatus measures can calculate the actual micrometric displacement amount of measured point very easily.By adjusting the position of first measuring head, can obtain the different amplification of lever very easily, reach the measurement purpose of different accuracy.
Structurally, for the distortion inaccuracy that the variation that reduces lever internal force in the measuring process as far as possible causes, make things convenient for the balance adjustment, the present invention has adopted two-stage balanced adjusting gear, promptly two-stage balanced formula lever.Install one in a side of first measuring head and adjusted screw rod, a coarse adjustment counterbalance weight and a fine adjustment counterbalance, rotated this two balancing pieces respectively, promptly can easily lever have been adjusted balance.In order to improve the sensitivity of accurate lever, the lever supporting pair has adopted a pair of hardness very high supporting cutter and rest pad.Scale is carved with in the side of lever shaft, can adjust the position of first measuring head easily, obtains the different amplification of lever.
Correlation function parameter of the present invention can be selected in following scope:
The size Φ of lever shaft=8～18mm
Lever master arm length L 1=10～50mm
Lever master arm length L 2=100～500mm
The material of supporting cutter and rest pad is necessary for the very high material of hardness
Realize that the process that accurate microbit is measured is:
At first, adjust the position of two measuring heads, obtain needed enlargement factor according to the needs of the precision and the measuring accuracy of used displacement measuring instrument.Adjust the position of counterbalance weight then, make lever be in equilibrium state, so that it is stable to the influence and the assurance measuring process of measuring accuracy to reduce stressed juxtaposition metamorphose to greatest extent.Apply micrometric displacement at the first measuring head place at last, measure corresponding displacement at the second measuring head place, can obtain the original micrometric displacement at the first measuring head place very easily with common displacement measuring instrument.
The present invention compares with existing micro-displacement measuring device, has the following advantages:
(1) simple in structure, use, easy to maintenance.Do not need special training and very professional knowledge, can grasp its using method.
(2) less demanding to measurement environment can directly apply to the production scene.Existing precision micro-displacement surveying instrument requires a lot to measurement environment, be difficult to directly use in the production scene.
(3) easily manufactured, low cost of manufacture.Apparatus of the present invention do not have special requirement to material, machining precision and process unit, and common mechanical manufacturing firm can finish the manufacturing of apparatus of the present invention.And existing precision micro-displacement surveying instrument contains some accurate or special parts, and the processing request height causes costing an arm and a leg.
(4) antijamming capability is strong, and is highly sensitive.Have balance adjusting device, reduce of the influence of stressed juxtaposition metamorphose to greatest extent measuring accuracy.
(5) use capable of being combined improves the precision that has displacement measuring instrument now greatly.If measure more micro displacement, the use that can also very easily two covering devices be together in series is equivalent to the precision of common displacement measuring instrument has been improved hundreds of times like this.
Description of drawings
Fig. 1 is a fundamental diagram of the present invention
Fig. 2 is a multiple measurement fundamental diagram of the present invention
1. fine adjustment counterbalance 2. coarse adjustment counterbalance weights 3. are adjusted screw rod 4. testees 5. first measuring heads
6. support cutter 7. rest pads 8. lever shafts 9. displacement measurement instrument probes 10. second measuring heads
11. base 12. first order multiplying arrangements 13. second level multiplying arrangements 14. displacement measurement instrument probes
Embodiment
Specific embodiment is described in detail as follows:
As shown in Figure 1, the correlation function parameter of present embodiment is specific as follows:
The size Φ of lever shaft=10mm
Lever master arm length L 1=20mm
Lever master arm length L 2=200mm
The material of supporting cutter and rest pad adopts wimet, the supporting of hard knife edge type.
Its course of work as shown in Figure 1; The process of microdisplacement measurement is:
(1) according to the needs of the precision and the measuring accuracy of used displacement measuring instrument, adjust the position of first measuring head 5 and second measuring head 10, obtain needed enlargement factor.Suppose enlargement factor adjustment K=20 doubly.
(2) position of adjustment coarse adjustment counterbalance weight makes lever be in equilibrium state, so that reduce the influence of stress deformation to measuring accuracy to greatest extent, guarantees that measuring process is stable.
(3) apply micrometric displacement at the first measuring head place 5, measure corresponding displacement at second measuring head, 10 places, can calculate the original micrometric displacement S1 of first measuring head 5 very easily with common displacement measuring instrument.Suppose that the second measuring head place measures corresponding displacement S2=2 micron, so original micrometric displacement is the S1=S2/K=2/20=0.1 micron.
Corresponding littler micrometric displacement can adopt the combined method that two or more devices are together in series to measure, and its fundamental diagram as shown in Figure 2.
Suppose the enlargement factor K1 and the K2 difference 20 and 25 of first and second devices, measuring corresponding displacement S2 at the second measuring head place of second multiplying arrangement with common displacement measuring instrument is 2 microns, so original micrometric displacement S1=S2/K1/K2=2/20/25=0.004 micron.
Claims (2)
1. a universal precision displacement is measured servicing unit, it is characterized in that adopting two-stage balanced adjusting gear, it is two-stage balanced formula lever, install one successively in a side of first measuring head (5) and adjusted screw rod (3), a coarse adjustment counterbalance weight (2) and a fine adjustment counterbalance (1), the lever supporting pair is the hard knife edge type supporting that a pair of supporting cutter (6) and rest pad (7) are formed, scale is carved with in the side of lever shaft (8), the size Φ of lever shaft=8～18mm, lever master arm length L 1=10～50mm, lever master arm length L 2=100～500mm.
2. a kind of universal precision displacement according to claim 1 is measured servicing unit, it is characterized in that the assembly for a plurality of 2 grades of apparatus of the present invention.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100983234A CN100501336C (en) | 2006-12-11 | 2006-12-11 | Universal precision displacement measurement auxiliary device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100983234A CN100501336C (en) | 2006-12-11 | 2006-12-11 | Universal precision displacement measurement auxiliary device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1975335A true CN1975335A (en) | 2007-06-06 |
| CN100501336C CN100501336C (en) | 2009-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100983234A Expired - Fee Related CN100501336C (en) | 2006-12-11 | 2006-12-11 | Universal precision displacement measurement auxiliary device |
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| CN (1) | CN100501336C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101865717A (en) * | 2010-06-04 | 2010-10-20 | 浙江大学 | High-accuracy weight-type fuel consumption measuring device |
| CN102689047A (en) * | 2012-06-14 | 2012-09-26 | 鞍钢股份有限公司 | Axial side gap enlargement device for blade of disc shear |
| CN102829816A (en) * | 2012-08-22 | 2012-12-19 | 南宁市科毅光通信科技有限公司 | Lever type micrometric displacement regulating mechanism |
| CN106197500A (en) * | 2016-09-29 | 2016-12-07 | 西南交通大学 | Vibration displacement and speed amplifying device and system |
| CN106705820A (en) * | 2016-12-30 | 2017-05-24 | 广西玉柴机器股份有限公司 | Micro-deformation measurement device |
| CN108692669A (en) * | 2018-03-26 | 2018-10-23 | 林和光 | A kind of fiber-optic grating sensor for railroad track meter shaft |
| CN113029325A (en) * | 2019-12-24 | 2021-06-25 | 广东美的白色家电技术创新中心有限公司 | Mechanical amplifier and household appliance |
-
2006
- 2006-12-11 CN CNB2006100983234A patent/CN100501336C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101865717A (en) * | 2010-06-04 | 2010-10-20 | 浙江大学 | High-accuracy weight-type fuel consumption measuring device |
| CN102689047A (en) * | 2012-06-14 | 2012-09-26 | 鞍钢股份有限公司 | Axial side gap enlargement device for blade of disc shear |
| CN102829816A (en) * | 2012-08-22 | 2012-12-19 | 南宁市科毅光通信科技有限公司 | Lever type micrometric displacement regulating mechanism |
| CN106197500A (en) * | 2016-09-29 | 2016-12-07 | 西南交通大学 | Vibration displacement and speed amplifying device and system |
| CN106705820A (en) * | 2016-12-30 | 2017-05-24 | 广西玉柴机器股份有限公司 | Micro-deformation measurement device |
| CN108692669A (en) * | 2018-03-26 | 2018-10-23 | 林和光 | A kind of fiber-optic grating sensor for railroad track meter shaft |
| CN108692669B (en) * | 2018-03-26 | 2024-03-26 | 林和光 | Fiber bragg grating sensor for railway track axle |
| CN113029325A (en) * | 2019-12-24 | 2021-06-25 | 广东美的白色家电技术创新中心有限公司 | Mechanical amplifier and household appliance |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100501336C (en) | 2009-06-17 |
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| C06 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhenjiang Gangnan Electric Co., Ltd. Assignor: Jiangsu University Contract fulfillment period: 2009.4.20 to 2014.4.20 contract change Contract record no.: 2009320000679 Denomination of invention: Universal precision displacement measurement auxiliary device and measuring method License type: Exclusive license Record date: 2009.4.23 |
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| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.4.20 TO 2014.4.20; CHANGE OF CONTRACT Name of requester: ZHENJIANG CITY GANGNAN ELECTRONICS CO., LTD. Effective date: 20090423 |
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| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090617 Termination date: 20131211 |