CN106500902B - A kind of strain-type multidimensional force sensor with from decoupling function - Google Patents

A kind of strain-type multidimensional force sensor with from decoupling function Download PDF

Info

Publication number
CN106500902B
CN106500902B CN201611098259.XA CN201611098259A CN106500902B CN 106500902 B CN106500902 B CN 106500902B CN 201611098259 A CN201611098259 A CN 201611098259A CN 106500902 B CN106500902 B CN 106500902B
Authority
CN
China
Prior art keywords
strain
force sensor
compensating plate
sensor
foil gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201611098259.XA
Other languages
Chinese (zh)
Other versions
CN106500902A (en
Inventor
陈柯行
柴继新
赵印明
王玲璐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Changcheng Institute of Metrology and Measurement AVIC
Original Assignee
Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Changcheng Institute of Metrology and Measurement AVIC filed Critical Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority to CN201611098259.XA priority Critical patent/CN106500902B/en
Publication of CN106500902A publication Critical patent/CN106500902A/en
Application granted granted Critical
Publication of CN106500902B publication Critical patent/CN106500902B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The present invention relates to a kind of with from the strain-type multidimensional force sensor for decoupling function, belongs to load sensor field.Including being integrally machined molding four-column type structure, foil gauge and compensating plate;Four-column type structure is the structure that upper and lower two middle of the disc places four cylinders, and four cylinders are symmetrical two-by-two;Foil gauge and compensating plate are affixed on cylinder;The device made is sealed in sleeve, then by the air inert gas replacement in sleeve, guarantee glue-line will not moisture absorption dampness, avoid the long-time stability for influencing device.The present invention uses four-column type symmetrical structure, with being combined bridge signal isolation technics, so that sensor itself have it is good from decoupling performance, it may be implemented simultaneously to measure aeroengine thrust vector i.e. three force value component and three torques, relatively reliable comprehensive technical data is provided for the experiment of vectored thrust engine test to support, keep the thrust test method of engine more reliable, measurement data is more accurate.

Description

A kind of strain-type multidimensional force sensor with from decoupling function
Technical field
The present invention relates to a kind of with from the strain-type multidimensional force sensor for decoupling function, belongs to load sensor field.
Background technique
Sensor be it is a kind of can impression as defined in be measured and according to certain rule be converted into available signal device and Device is usually made of sensing element and conversion element.Force sensor for multiple components refers to that one kind can measure two sides simultaneously To the force snesor of the above power and moment components, power and torque can respectively be decomposed into three components in cartesian coordinate system, Therefore, the most complete form of multi -components is six-component force sensor.Multi -components especially six-component force sensor is answered extensively at present For the manufactures such as Aeronautics and Astronautics and panzer and testing field.
Six-component force sensor is broadly divided into resistance-strain type, piezoelectric type, condenser type six-component force sensor.Wherein resistance The advantages of strain-type six-component force sensor is technology maturation, precision is high, non-linear and hysteresis error is small, and creep is small, is suitble to quiet State and quasi-static measurement.The construction of resistance strain type sensor is that other methods are pasted or used on the elastic element of certain shapes Resistance-strain sensing element is installed.When mechanical quantity acts on elastic element, elastic element is deformed, and resistance-strain is sensitive The resistance value of element changes therewith, change in resistance is then become voltage change output by translation circuit, according to voltage change Measure the size it can be learnt that mechanical quantity.
In the research of force sensor for multiple components, the structure design of elastic element is the key problem of force snesor, because The structure of elastic element determines the performance superiority and inferiority of force snesor.Currently, commonly used force sensor for multiple components structure has eight just The six-component force sensor of beam and girder construction, tubular six-component force sensor, box structure six-component force sensor and special based on this The six-component force sensor etc. of water (STEWART) platform structure.Wherein, most commonly used for tubular six component sensor, it should Sensor has good linear, repeatability and preferable hysteresis quality, and has to temperature compensatory, but it does not have from decoupling Function, couple between each component it is big, and since rigidity is higher, uses the inconvenient sensor for causing it to be not suitable for doing small-range of connection. It is analyzed by the structure to above-mentioned several six-component force sensors, in conjunction with aero-engine actual working state, the present invention The multi-dimension force sensor of design uses the four-column type structure of overall processing, has contour structures simple, handling ease, rigidity is big, Linearly, repeatability and hysteresis error are small, and creep is small, is suitble to static and quasi-static measurement.
Summary of the invention
The problem of being measured the purpose of the present invention is to solve the prior art from decoupling performance difference and unsuitable small-range, A kind of strain-type multidimensional force sensor with from decoupling function is provided.
The purpose of the present invention is what is be achieved through the following technical solutions.
It is a kind of with from decouple function strain-type multidimensional force sensor, including be integrally machined molding four-column type structure, Foil gauge and compensating plate;
Compensating plate includes: temperature-compensating plate, nonlinear compensation piece and zero compensation piece;
Four-column type structure is the structure that upper and lower two middle of the disc places four cylinders, and four cylinders are symmetrical two-by-two; Foil gauge and compensating plate are affixed on cylinder;
The device made is sealed in sleeve, then by the air inert gas replacement in sleeve, guarantees glue-line not Meeting moisture absorption dampness, avoids the long-time stability for influencing device;
Patch glue-line with a thickness of 2~4 μm, which can both guarantee to strain transmission efficiency, also can guarantee that foil gauge is viscous The fastness of patch;
The force sensor for multiple components is made of column type elastomer, resistance strain gage, shielded wire, to guarantee that it is best that it has Technical performance and long-time stability, the design using whole four-column type structure, have in structure certain anti-eccentric load and The ability of lateral load;Four square columns are uniformly distributed in one plane, machining tolerance strict control, and patch location keeps uniform Symmetrically, by a group bridge signal isolation technics, so that having between each component good from decoupling ability;In view of between each component The influence interfered with each other to six-component force sensor performance indicator, adopt and experimentally first sensor demarcated, so The mutual interference of sensor is eliminated, so can both be reduced in actually detected middle utilization calibration result adjustment group bridge scheme again afterwards To sensor manufacturing process requirement, and accurate measurement result can be obtained.
Beneficial effect
Since the present invention uses four-column type symmetrical structure, with bridge signal isolation technics is combined, so that sensor itself has It is good from decoupling performance, may be implemented simultaneously to aeroengine thrust vector i.e. three force value component (thrust, lift and Lateral force) and three torques (rolling moment, pitching moment and yawing) measure, be that vectored thrust engine test is real It tests and relatively reliable comprehensive technical data support is provided, keep the thrust test method of engine more reliable, measurement data is more Accurately;
Simultaneously as the present invention uses the four-column type structure of overall processing, there is certain anti-eccentric load in structure With the ability of lateral load, with excellent rigidity and linearly, therefore it is not only suitable for large range measuring, when small-range measures still With superior performance;
Further, since apply argon arc welding sealing, the technologies such as internal nitrogen charging, make sensor and outside air thoroughly every From being provided with excellent long-time stability.
To sum up, the present invention has good from decoupling performance a, handling ease, and rigidity is big, linear, repeatability and hysteresis error Small, creep is small, is suitble to static and quasi-static measurement.
Detailed description of the invention
Fig. 1 is the multi-dimension force sensor structural scheme of mechanism and patch schematic diagram of embodiment 1;
Fig. 2 is the multi-dimension force sensor mechanism perspective view of embodiment 1.
Wherein, 1-four-column type structure.
Specific embodiment
The invention will be further described with embodiment with reference to the accompanying drawing.
Embodiment 1
It is a kind of with from decouple function strain-type multidimensional force sensor, including be integrally machined molding four-column type structure 1, 64 foil gauges and compensating plate;
Compensating plate includes: temperature-compensating plate, nonlinear compensation piece and zero compensation piece;
Four-column type structure 1 is the structure that upper and lower two middle of the disc places four cylinders, and four cylinders are symmetrical two-by-two; Foil gauge and compensating plate are affixed on cylinder;
The device made is sealed in sleeve, then by the air inert gas replacement in sleeve, guarantees glue-line not Meeting moisture absorption dampness, avoids the long-time stability for influencing device;
Patch glue-line with a thickness of 3 μm;
The course of work: a kind of strain-type multidimensional force sensor with from decoupling function is realized, in four elastic elements On be arranged symmetrically 64 foil gauges, every elastic element independently forms a sensor, forms 6 constant pressure bridge circuits, will be electric The resistance variations of resistance strain sensor are converted into voltage change signal, to obtain three force value components and three torques point Amount, shows measurement result finally by display instrument.
Elastomer structure and patch schematic diagram in the present embodiment are fixed on as shown in Figure 1, four bars are elastic elements in figure On upper and lower disk.Sensor is all arranged symmetrically 16 foil gauges at the four sides of every crossbeam, shares 64 foil gauges, forms 6 Electric bridge shares 6 tunnel output signals.
Four bar lower ends distance be a at y pasted on two sides two axially, two vertical axises to foil gauge. Foil gauge on every bar is connected into an electric bridge, and four electric bridge parallel connections if the sensitivity coefficient of four foil gauges is all identical, can obtain Output voltage and P after parallel connection outyThe relational expression of power, can be obtained PyThe specific magnitude of power.
Four bar lower ends distance be a place z normal direction two sides on stickup two axially, two vertical axises to strain Piece.Foil gauge on every bar is connected into an electric bridge, by four electric bridge parallel connections, can obtain output voltage and P after parallel connectionzThe pass of power It is formula, P can be obtainedzThe specific magnitude of power.
Four bar lower ends distance be a place bar and the perpendicular two sides of axle center radius on stickup two axially, two The foil gauge of vertical axial.Foil gauge on every bar is connected into an electric bridge, and four electric bridge parallel connections export after can obtaining parallel connection Voltage and MxThe relational expression of torque, can be obtained MxThe specific magnitude of torque.
The axially foil gauge with vertical axial is pasted respectively along the direction z two sides midline among four bars, each Foil gauge on bar separately constitutes electric bridge, by the output voltage of each electric bridge, the active force along each bar axial direction can be obtained, by four Active force on root bar is added, and can acquire the P of effect on a sensorxPower.
In MyUnder moment loading, 2. bar is stretched, 4. bar compresses.It in foil gauge 1., 3. on two bars is pasted onto bending At property layer, MyBending does not generate strain, as long as the electric bridge that four resistance strain gages on 2. bar are formed and four electricity on 4. bar Resistance foil gauge output is subtracted each other, and the M of effect on a sensor can be acquiredyTorque.
In MzUnder moment loading, 4. bar is stretched, 1. bar compresses.It in foil gauge 2., 4. on two bars is pasted onto bending At property layer, MzBending does not generate strain, as long as the output of electric bridge on 3. bar and the output of electric bridge on 4. bar are subtracted each other, Ji Keqiu M on a sensor must be acted onzTorque.
Using the standard torquer and standard lever weight of the test of 20t stacking machine and 5000Nm to embodiment (model rule Lattice: FC-20t-5t-5t-1000Nm-1000Nm-1000Nm and
FC-1t-200kg-200kg-50Nm-50Nm-50Nm it) is demarcated, calculates cross influence amount.Wide range test is detailed It counts accurately according to 2.1~subordinate list 2.7 is seen attached list, small-range test detailed data sees attached list 2.1~subordinate list 2.7.
As can be seen from the table, the intersection shadow amount of data controls within 1% substantially, individual data 1%~2% it Between, it is superior from decoupling which absolutely proves that the force sensor for multiple components that the present invention designs has.High reliablity, accuracy Height simplifies data processing time.
Comparative example
Calibration experiment, range ability 200kN-1t-1t- are carried out using German GTM Serie MKA model sensor 1000Nm-1000Nm-1000Nm detailed data sees attached list 3.1~3.7, it can be seen from the data in the table that, the multi-dimensional force that the present invention designs The performance technologies index (especially cross influence amount) of sensor is much better than GTM sensor.Conclusion
Correlation data is it is found that the strain-type multidimensional force sensor designed in the present invention has the function of good decoupling certainly, no It is suitable only for the use in large range measuring, also there is superior performance in small-range fields of measurement, effectively meet China's mechanical quantity Is realized for the demand of high-end strain force sensor by force value for the fields such as value transmitting, aerospace test, industrial production control High accuracy, high stability measurement and transmission of quantity value.
Subordinate list 1.2
Subordinate list 1.3
Subordinate list 1.4
Subordinate list 1.5
Subordinate list 1.6
Subordinate list 1.7
Subordinate list 2.2
Subordinate list 2.3
Subordinate list 2.4
Subordinate list 2.5
Subordinate list 2.6
Subordinate list 2.7
Subordinate list 3.2
Subordinate list 3.3
Subordinate list 3.4
Subordinate list 3.5
Subordinate list 3.6
Subordinate list 3.7

Claims (3)

1. a kind of strain-type multidimensional force sensor with from decoupling function, it is characterised in that: including being integrally machined molding four Column structure (1), foil gauge (2), compensating plate (3) and sleeve;Four-column type structure (1) is that upper and lower two middle of the disc places four columns The structure of body, and four cylinders are symmetrical two-by-two;Foil gauge (2) and compensating plate (3) are affixed on cylinder;Foil gauge will be posted (2) be sealed in sleeve with the four-column type structure (1) of compensating plate (3), then by the air inert gas replacement in sleeve to get To strain-type multidimensional force sensor;
Sensor is all arranged symmetrically 16 foil gauges at the four sides of every crossbeam, shares 64 foil gauges, every elastic element list A sensor is solely formed, 6 constant pressure bridge circuits is formed, shares 6 tunnel output signals, the foil gauge on every bar is connected into one Electric bridge, by four electric bridge parallel connections.
2. a kind of strain-type multidimensional force sensor with from decoupling function as described in claim 1, it is characterised in that: described Compensating plate (3) includes: temperature-compensating plate, nonlinear compensation piece and zero compensation piece.
3. a kind of strain-type multidimensional force sensor with from decoupling function as claimed in claim 1 or 2, it is characterised in that: Foil gauge (2) and compensating plate (3) with sticker on cylinder, the patch glue-line with a thickness of 2~4 μm.
CN201611098259.XA 2016-12-03 2016-12-03 A kind of strain-type multidimensional force sensor with from decoupling function Active CN106500902B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611098259.XA CN106500902B (en) 2016-12-03 2016-12-03 A kind of strain-type multidimensional force sensor with from decoupling function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611098259.XA CN106500902B (en) 2016-12-03 2016-12-03 A kind of strain-type multidimensional force sensor with from decoupling function

Publications (2)

Publication Number Publication Date
CN106500902A CN106500902A (en) 2017-03-15
CN106500902B true CN106500902B (en) 2019-08-02

Family

ID=58330326

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611098259.XA Active CN106500902B (en) 2016-12-03 2016-12-03 A kind of strain-type multidimensional force sensor with from decoupling function

Country Status (1)

Country Link
CN (1) CN106500902B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108181046B (en) * 2017-12-21 2019-10-29 大连理工大学 A kind of controllable force source generating device for thrust vector measuring system
CN109374166B (en) * 2018-12-10 2021-08-03 中国航发四川燃气涡轮研究院 Distributed measuring device and method
CN109781328B (en) * 2019-01-23 2020-05-01 重庆大学 Six-dimensional force sensor with eight-beam structure
CN109990888B (en) * 2019-03-25 2020-11-24 中国科学院长春光学精密机械与物理研究所 Wide-range force measuring mechanism
CN112611499B (en) * 2019-09-18 2022-01-28 马洪文 Method for measuring micro displacement of load platform of multi-dimensional force sensor and method for mounting measuring sensitive element
CN111811709A (en) * 2020-07-16 2020-10-23 内蒙古第一机械集团股份有限公司 Four-column torque sensor
CN112504413B (en) * 2020-11-25 2022-03-22 西南科技大学 Full-digitalization conversion method and device for six-component balance bridge detection
CN114136524B (en) * 2021-10-29 2022-10-25 西安交通大学 Six-dimensional force measuring platform and decoupling method thereof
CN114577434B (en) * 2022-03-04 2024-04-02 中航电测仪器(西安)有限公司 High-precision six-component balance and method
CN115326268A (en) * 2022-08-31 2022-11-11 东北电力大学 Coaxial series three-dimensional mechanical self-decoupling force sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101216359A (en) * 2008-01-09 2008-07-09 南京航空航天大学 Frame type decoupling six component sensor and use method
CN203203740U (en) * 2012-12-28 2013-09-18 中国空气动力研究与发展中心设备设计及测试技术研究所 Strain type three-dimensional force sensor
CN103471751A (en) * 2013-09-26 2013-12-25 北京空间飞行器总体设计部 High-precision strain type torque sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4764619B2 (en) * 2004-08-23 2011-09-07 株式会社エー・アンド・デイ Rotary component force measuring device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101216359A (en) * 2008-01-09 2008-07-09 南京航空航天大学 Frame type decoupling six component sensor and use method
CN203203740U (en) * 2012-12-28 2013-09-18 中国空气动力研究与发展中心设备设计及测试技术研究所 Strain type three-dimensional force sensor
CN103471751A (en) * 2013-09-26 2013-12-25 北京空间飞行器总体设计部 High-precision strain type torque sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
整体四柱式力传感器弹性体的有限元分析;易伟,陈世超等;《中国测试》;20110530;第37卷(第3期);第89-92页

Also Published As

Publication number Publication date
CN106500902A (en) 2017-03-15

Similar Documents

Publication Publication Date Title
CN106500902B (en) A kind of strain-type multidimensional force sensor with from decoupling function
Liang et al. Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams
CN106124113B (en) Novel six-dimensional force and torque sensor
CN202153166U (en) Parallel piezoelectric six-dimensional powerful force sensor
CN100480653C (en) Large value piezoelectric quartz multi-component force sensor
CN102288334B (en) Parallel piezoelectric six-dimensional large force sensor
CN103076131A (en) Six-dimensional force and torque sensor for measuring large force and small torque of large mechanical arm
CN103353374B (en) 3 take advantage of 3 formula, 3 dynamometry barycenter platform systems
KR20130126082A (en) Force-torque sensor, force-torque sensor frame and force-torque measuring method
WO2021051950A1 (en) Load platform micro displacement measurement method of multi-dimensional force sensor, and measurement sensitive element mounting method
CN110132477A (en) A kind of decoupling method and six-dimension force sensor of six-dimension force sensor
CN103551922A (en) Strain gauge integrated three-dimensional turning force sensor
CN104977104B (en) Piezoelectric small-range large-range ratio force-measuring device
CN113063538B (en) Distributed multi-dimensional force sensor
CN108981983A (en) Tire-road three-dimensional force measuring sensors
EP3368873B1 (en) A force measurement device
Fu et al. A polyetheretherketone six-axis force/torque sensor
Sun et al. Design of a novel Six-axis force/torque sensor based on strain gauges by finite element method
Sun et al. Design and optimization of a novel six-axis force/torque sensor with good isotropy and high sensitivity
Schleichert et al. Calibration of a novel six-degree-of-freedom force/torque measurement system
CN203519229U (en) Quartz piezoelectric six-dimensional force detecting device
CN215984960U (en) A fiber grating sensor sensitization device for measuring small meeting an emergency
Liu et al. Investigating the cutting force monitoring system in the boring process
Ha et al. Elastic structure for a multi-axis forcetorque sensor
CN112692830A (en) Three-dimensional angular displacement six-degree-of-freedom sensor system, measuring method and manipulator

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant