CN106500902A - A kind of strain-type multidimensional force sensor with from decoupling function - Google Patents

A kind of strain-type multidimensional force sensor with from decoupling function Download PDF

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Publication number
CN106500902A
CN106500902A CN201611098259.XA CN201611098259A CN106500902A CN 106500902 A CN106500902 A CN 106500902A CN 201611098259 A CN201611098259 A CN 201611098259A CN 106500902 A CN106500902 A CN 106500902A
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China
Prior art keywords
strain
force sensor
compensating plate
foil gauge
sensor
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CN201611098259.XA
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CN106500902B (en
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陈柯行
柴继新
赵印明
王玲璐
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Abstract

The present invention relates to a kind of with from the strain-type multidimensional force sensor for decoupling function, belong to load sensor field.Including being integrally machined four-column type structure, foil gauge and the compensating plate of molding;Four-column type structure is the structure for placing four cylinders in the middle of upper and lower two disk, and four cylinders are symmetrical two-by-two;Foil gauge and compensating plate are affixed on cylinder;The device that makes is sealed in sleeve, then by the air inert gas replacement in sleeve, it is ensured that glue-line will not moisture absorption make moist, it is to avoid affect the long-time stability of device.The present invention adopts four-column type symmetrical structure, match somebody with somebody charge-coupled bridge signal isolation technics, so that sensor itself have good from decoupling performance, can realize while measuring to aeroengine thrust vector i.e. three force value component and three torques, relatively reliable comprehensive technical data is provided for the experiment of vectored thrust engine test to support, make that the thrust test method of electromotor is more reliable, measurement data is more accurate.

Description

A kind of strain-type multidimensional force sensor with from decoupling function
Technical field
The present invention relates to a kind of with from the strain-type multidimensional force sensor for decoupling function, belong to load sensor field.
Background technology
Sensor be a kind of can impression regulation measured and according to certain rule be converted into available signal device and Device, is generally made up of sensing element and conversion element.Force sensor for multiple components refers to one kind can be while measure two sides To above power and the force transducer of moment components, in cartesian coordinate system, power and torque can each be decomposed into three components, Therefore, the most complete form of multi -components is six-component force sensor.Multi -components especially extensively should at present by six-component force sensor For the manufactures such as Aeronautics and Astronautics and panzer and field tests.
Six-component force sensor is broadly divided into resistance-strain type, piezoelectric type, condenser type six-component force sensor.Wherein resistance The advantage of strain-type six-component force sensor is that technology maturation, high precision, non-linear and hysteresis error are little, and creep is little, is suitable for quiet State and quasistatic measurement.The construction of resistance strain type sensor is to paste on the flexible member of definite shape or use additive method Resistance-strain sensing element is installed.When mechanical quantity is acted on flexible member, flexible member is deformed, and resistance-strain is sensitive The resistance of element is changed therewith, change in resistance is become change in voltage output by translation circuit then, according to change in voltage Amount can learn the size of mechanical quantity.
In the research of force sensor for multiple components, the structure design of flexible member is the key problem of force transducer, because The performance of the structures shape force transducer of flexible member is good and bad.At present, the force sensor for multiple components structure being most frequently with just is having eight The six-component force sensor of beam and girder construction, tubular six-component force sensor, box structure six-component force sensor and special based on this Six-component force sensor of water (STEWART) platform structure etc..Wherein, most commonly used for tubular six component sensor, should Sensor has a good linear, repeated and preferable hysteresis quality, and temperature is had compensatory, but which does not possess from decoupling Function, couples greatly between each component, and as rigidity is higher, cause which to be not suitable for the sensor for doing small-range using connection inconvenience. By being analyzed to the structure of above-mentioned several six-component force sensors, in conjunction with aero-engine actual working state, the present invention Four-column type structure of the multi-dimension force sensor of design using overall processing, handling ease simple with contour structures, rigidity is big, Linearly, repeatability and hysteresis error are little, and creep is little, be suitable for the measurement of static and quasistatic.
Content of the invention
The invention aims to solve the problems, such as prior art from decoupling poor performance and be not suitable for small-range measurement, There is provided a kind of with from the strain-type multidimensional force sensor for decoupling function.
The purpose of the present invention is achieved through the following technical solutions.
A kind of with from decouple function strain-type multidimensional force sensor, including be integrally machined molding four-column type structure, Foil gauge and compensating plate;
Compensating plate includes:Temperature-compensating plate, nonlinear compensation piece and zero compensation piece;
Four-column type structure is the structure for placing four cylinders in the middle of upper and lower two disk, and four cylinders are symmetrical two-by-two; Foil gauge and compensating plate are affixed on cylinder;
The device that makes is sealed in sleeve, then by the air inert gas replacement in sleeve, it is ensured that glue-line is not Meeting moisture absorption is made moist, it is to avoid affect the long-time stability of device;
The thickness of paster glue-line is 2~4 μm, and the thickness both can ensure that strain transfer efficiency, also can guarantee that foil gauge glues The fastness of patch;
The force sensor for multiple components is made up of column type elastomer, resistance strain gage, shielded conductor, is to ensure which has most preferably Technical performance and long-time stability, the design using overall four-column type structure, have in structure certain anti-eccentric load and The ability of lateral load;Four square columns are uniformly distributed in one plane, and machining tolerance is strictly controlled, and patch location keeps uniform Symmetrically, by group bridge signal isolation technics so that with good from decoupling ability between each component;Consider between each component The impact interfered to six-component force sensor performance indications, adopt and experimentally first sensor demarcated, so Afterwards again in actually detected middle utilization calibration result adjustment group bridge scheme, the mutual interference of sensor is eliminated, so can both be reduced Sensor manufacturing process is required, and accurate measurement result can be obtained.
Beneficial effect
As the present invention adopts four-column type symmetrical structure, with charge-coupled bridge signal isolation technics so that sensor has in itself Good from decoupling performance, it is possible to achieve while to i.e. three force value components of aeroengine thrust vector (thrust, lift and Side force) and three torques (rolling moment, pitching moment and yawing) measure, be vectored thrust engine test reality The relatively reliable comprehensive technical data of offer is provided and supports that make the thrust test method of electromotor more reliable, measurement data is more Accurately;
Simultaneously as four-column type structure of the present invention using overall processing, has certain anti-eccentric load in structure With the ability of lateral load, with excellent rigidity and linearly, large range measuring is therefore not only suitable for, when small-range is measured still There is superior performance;
Further, since apply argon arc welding sealing, the technology such as internal nitrogen charging, make sensor and outside air thoroughly every From being provided with excellent long-time stability.
To sum up, with good from decoupling performance, handling ease, rigidity is big, linear, repeated and hysteresis error for the present invention Little, creep is little, be suitable for the measurement of static and quasistatic.
Description of the drawings
Multi-dimension force sensor structural scheme of mechanism and paster sketch of the Fig. 1 for embodiment 1;
Multi-dimension force sensor mechanism perspective views of the Fig. 2 for embodiment 1.
Wherein, 1 four-column type structure, 2 foil gauges, 3 compensating plates.
Specific embodiment
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
Embodiment 1
A kind of with from decouple function strain-type multidimensional force sensor, including be integrally machined molding four-column type structure 1, 64 foil gauges 2 and compensating plate 3;
Compensating plate 3 includes:Temperature-compensating plate, nonlinear compensation piece and zero compensation piece;
Four-column type structure 1 is the structure for placing four cylinders in the middle of upper and lower two disk, and four cylinders are symmetrical two-by-two; Foil gauge 2 and compensating plate 3 are affixed on cylinder;
The device that makes is sealed in sleeve, then by the air inert gas replacement in sleeve, it is ensured that glue-line is not Meeting moisture absorption is made moist, it is to avoid affect the long-time stability of device;
The thickness of paster glue-line is 3 μm;
The course of work:A kind of strain-type multidimensional force sensor with from decoupling function is achieved, in four flexible members On be arranged symmetrically 64 foil gauges, every flexible member independently forms a sensor, constitutes 6 constant pressure bridge circuits, by electricity The resistance variations of resistance strain sensor are converted into voltage change signal, so as to draw three force value components and three torques point Measurement result is shown by amount finally by display instrument.
Elastomer structure and paster sketch in the present embodiment are fixed on as shown in figure 1, four bars are flexible members in figure On upper and lower disk.Sensor is all arranged symmetrically 16 foil gauges at the four sides of every crossbeam, has 64 foil gauges, constitutes 6 Electric bridge, has 6 tunnel output signals.
In four bar lower ends distance for the y at a paste on two sides two axially, two vertical axises to foil gauge. Foil gauge on every bar is connected into an electric bridge, and four electric bridge parallel connections, if the sensitivity coefficient of four foil gauges is all identical, can be obtained Go out output voltage and P after parallel connectionyThe relational expression of power, you can obtain PyThe concrete value of power.
Four bar lower ends distance for a place z normal direction two sides on stickup two axially, two vertical axises to strain Piece.Foil gauge on every bar is connected into an electric bridge, by four electric bridge parallel connections, can draw output voltage and P after parallel connectionzThe pass of power It is formula, you can obtain PzThe concrete value of power.
On bar and axle center radius perpendicular two sides of the four bar lower ends distance for a places stickup two axially, two The foil gauge of vertical axial.Foil gauge on every bar is connected into an electric bridge, and four electric bridge parallel connections are exported after can drawing parallel connection Voltage and MxThe relational expression of torque, you can obtain MxThe concrete value of torque.
Pasted axially along z directions two sides midline respectively in the middle of four bars, and the foil gauge of vertical axial, each Foil gauge on bar separately constitutes electric bridge, by the output voltage of each electric bridge, the active force along each bar axial direction is obtained, by four Active force on root bar is added, you can the effect of trying to achieve P on a sensorxPower.
In MyUnder moment loading, 2. bar stretching, 4. bar compression.It is to be pasted onto in bending in foil gauge 1., 3. on two bars At property layer, MyBending does not produce strain, as long as by the electric bridge of four resistance strain gages composition on 2. bar and four electricity on 4. bar Resistance foil gauge output is subtracted each other, you can the effect of trying to achieve M on a sensoryTorque.
In MzUnder moment loading, 4. bar stretching, 1. bar compression.It is to be pasted onto in bending in foil gauge 2., 4. on two bars At property layer, MzBending does not produce strain, as long as the output by the output of electric bridge on 3. bar with electric bridge on 4. bar is subtracted each other, you can ask M on a sensor must be acted onzTorque.
Standard torquer and standard lever weight using the test of 20t stacking machines and 5000Nm is to embodiment (model rule Lattice:FC-20t-5t-5t-1000Nm-1000Nm-1000Nm and FC-1t-200kg-200kg-50Nm-50Nm-50Nm) carry out Demarcate, calculate cross influence amount.Wide range test detailed data sees attached list 2.1~subordinate list 2.7, and small-range test detailed data is shown in 2.1~subordinate list of subordinate list 2.7.
As can be seen from the table, the intersection shadow amount of data is controlled within 1% substantially, individual data 1%~2% it Between, it is superior from decoupling that the data absolutely prove that the force sensor for multiple components of present invention design has.Reliability is high, accuracy Height, simplifies data processing time.
Comparative example
Calibration experiment is carried out using German GTM Serie MKA models sensor, range ability is 200kN-1t-1t- 1000Nm-1000Nm-1000Nm detailed datas see attached list 3.1~3.7, as can be known from the table data, the multi-dimensional force of present invention design The performance technologies index (especially cross influence amount) of sensor is much better than GTM sensors.
Conclusion
Correction data understands that the strain-type multidimensional force sensor designed in the present invention has good decoupling function certainly, no It is suitable only for using in large range measuring, there is superior performance also in small-range fields of measurement, effectively meet China's mechanical quantity Realized for the demand of high-end strain force sensor by force value for the fields such as value transmission, Aero-Space test, commercial production control High accuracy, high stability measurement and transmission of quantity value.
Subordinate list 1.1
Model specification:FC-20t-5t-5t-1000Nm-1000Nm-1000Nm
Subordinate list 1.2
Subordinate list 1.3
Subordinate list 1.4
Subordinate list 1.5
Subordinate list 1.6
Subordinate list 1.7
Subordinate list 2.1
Model specification:FC-1t-200kg-200kg-50Nm-50Nm-50Nm
Subordinate list 2.2
Subordinate list 2.3
Subordinate list 2.4
Subordinate list 2.5
Subordinate list 2.6
Subordinate list 2.7
Subordinate list 3.1
Model specification:GTM Serie MKA 200kN-10kN-10kN-1000Nm-1000Nm-1000Nm
Subordinate list 3.2
Subordinate list 3.3
Subordinate list 3.4
Subordinate list 3.5
Subordinate list 3.6
Subordinate list 3.7

Claims (3)

1. a kind of with from the strain-type multidimensional force sensor for decoupling function, it is characterised in that:Including being integrally machined the four of molding Pole structure (1), foil gauge (2), compensating plate (3) and sleeve;Four-column type structure (1) is to place four posts in the middle of upper and lower two disk The structure of body, and four cylinders are symmetrical two-by-two;Foil gauge (2) and compensating plate (3) are affixed on cylinder;Foil gauge will be posted (2) it is sealed in sleeve with the four-column type structure (1) of compensating plate (3), then by the air inert gas replacement in sleeve, obtains final product Arrive strain-type multidimensional force sensor.
2. a kind of with from the strain-type multidimensional force sensor for decoupling function as claimed in claim 1, it is characterised in that:Described Compensating plate (3) includes:Temperature-compensating plate, nonlinear compensation piece and zero compensation piece.
3. a kind of with from the strain-type multidimensional force sensor for decoupling function as claimed in claim 1 or 2, it is characterised in that: , on cylinder, the thickness of the paster glue-line is 2~4 μm for foil gauge (2) and compensating plate (3) sticker.
CN201611098259.XA 2016-12-03 2016-12-03 A kind of strain-type multidimensional force sensor with from decoupling function Active CN106500902B (en)

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Cited By (9)

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CN108181046A (en) * 2017-12-21 2018-06-19 大连理工大学 A kind of controllable force source generating device for thrust vector measuring system
CN109374166A (en) * 2018-12-10 2019-02-22 中国航发四川燃气涡轮研究院 A kind of distributed measurement device and method
CN109781328A (en) * 2019-01-23 2019-05-21 重庆大学 A kind of six-dimension force sensor of eight girder constructions
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism
CN111811709A (en) * 2020-07-16 2020-10-23 内蒙古第一机械集团股份有限公司 Four-column torque sensor
CN112504413A (en) * 2020-11-25 2021-03-16 西南科技大学 Full-digitalization conversion method and device for six-component balance bridge detection
WO2021051950A1 (en) * 2019-09-18 2021-03-25 马洪文 Load platform micro displacement measurement method of multi-dimensional force sensor, and measurement sensitive element mounting method
CN114136524A (en) * 2021-10-29 2022-03-04 西安交通大学 Six-dimensional force measuring platform and decoupling method thereof
CN114577434A (en) * 2022-03-04 2022-06-03 中航电测仪器(西安)有限公司 High-precision six-component balance and method

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108181046B (en) * 2017-12-21 2019-10-29 大连理工大学 A kind of controllable force source generating device for thrust vector measuring system
CN108181046A (en) * 2017-12-21 2018-06-19 大连理工大学 A kind of controllable force source generating device for thrust vector measuring system
CN109374166A (en) * 2018-12-10 2019-02-22 中国航发四川燃气涡轮研究院 A kind of distributed measurement device and method
CN109781328A (en) * 2019-01-23 2019-05-21 重庆大学 A kind of six-dimension force sensor of eight girder constructions
CN109781328B (en) * 2019-01-23 2020-05-01 重庆大学 Six-dimensional force sensor with eight-beam structure
CN109990888A (en) * 2019-03-25 2019-07-09 中国科学院长春光学精密机械与物理研究所 A kind of wide range power measuring mechanism
WO2021051950A1 (en) * 2019-09-18 2021-03-25 马洪文 Load platform micro displacement measurement method of multi-dimensional force sensor, and measurement sensitive element mounting method
CN111811709A (en) * 2020-07-16 2020-10-23 内蒙古第一机械集团股份有限公司 Four-column torque sensor
CN112504413A (en) * 2020-11-25 2021-03-16 西南科技大学 Full-digitalization conversion method and device for six-component balance bridge detection
CN112504413B (en) * 2020-11-25 2022-03-22 西南科技大学 Full-digitalization conversion method and device for six-component balance bridge detection
CN114136524A (en) * 2021-10-29 2022-03-04 西安交通大学 Six-dimensional force measuring platform and decoupling method thereof
CN114577434A (en) * 2022-03-04 2022-06-03 中航电测仪器(西安)有限公司 High-precision six-component balance and method
CN114577434B (en) * 2022-03-04 2024-04-02 中航电测仪器(西安)有限公司 High-precision six-component balance and method

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