CN203519229U - Quartz piezoelectric six-dimensional force detecting device - Google Patents
Quartz piezoelectric six-dimensional force detecting device Download PDFInfo
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- CN203519229U CN203519229U CN201320562893.XU CN201320562893U CN203519229U CN 203519229 U CN203519229 U CN 203519229U CN 201320562893 U CN201320562893 U CN 201320562893U CN 203519229 U CN203519229 U CN 203519229U
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Abstract
The utility model relates to a quartz piezoelectric six-dimensional force detecting device including a cuboid shell and a plurality of force sensors arranged in a cuboid shell. Each force sensor includes a substrate, a fixed clamping base arranged on the top of the substrate, a force-sensitive element installed in the substrate, an electrode lead connected with the force-sensitive element and used for outputting force-sensitive element forces and torque signals and a dowel bar installed in the fixed clamping base. Four three-dimensional force sensors are installed in four bottom corners inside the cuboid shell symmetrically. The force-sensitive elements are quartz crystal wafers. And three quartz crystal wafer units are installed in each substrate successively. An upper fixing diaphragm disposed in the substrate is arranged above each quartz crystal wafer in the top layer while a lower fixing diaphragm disposed in the substrate is arranged between each quartz crystal wafer in the bottom layer. The dowel bars are connected with the upper fixing diaphragms. The quartz piezoelectric six-dimensional force detecting device provided by the utility model has advantages of being small in size, small in mass, simple in structure, reliable in working, high in inherent frequency, high in sensibility and signal to noise ratio, stable in performance, rare in hysteresis phenomenon and the like.
Description
Technical field
The utility model relates to a kind of force checking device.
Background technology
Six-dimensional force pick-up unit is a kind ofly can measure x direction, y direction, three force components in z direction and the sensor of three moment components simultaneously.It is that in multi-dimension force sensor, form is the most complete, most popular a kind of.In recent years, at undercarriage, land the applications such as impulse force test, rocket thrust test, spacecraft launching site, wind tunnel force measurement test, the large dynamometry scope of wide range high precision six-dimensional force pick-up unit becomes one of high-tech product of urgent need, its development has become current focus, and is subject to the attention of more and more Chinese scholars.
Traditional multi-dimension force sensor is main still starts with from designing patch location two aspects of different elastomer structures and change resistance strain gage, but due to the impact of the factors such as paster technique and elastic body machining precision, nearly all there is the shortcomings such as complex structure, processing and manufacturing is difficult, volume is large, dynamic response characteristic is poor in the multi-dimension force sensor that manufactures and designs out.
Summary of the invention
The purpose of this utility model is, for the deficiencies in the prior art, provides a kind of quartz piezoelectric formula six-dimensional force pick-up unit, simple in structure, and reliable operation is highly sensitive, stable performance.
The technical solution of the utility model is, a kind of quartz piezoelectric formula six-dimensional force pick-up unit, comprise a plurality of power sensors in rectangular parallelepiped shell and rectangular parallelepiped shell, described power sensor comprise pedestal, pedestal top Fixing clamp-seat, be arranged on force sensing element in pedestal, be connected with force sensing element and for the contact conductor of power output photosensitive elements power and torque signals, be arranged on the transmission rod in Fixing clamp-seat; Be provided with altogether 4 three-dimensional force sensor symmetries and be arranged on four base angles in rectangular parallelepiped shell; Described force sensing element is quartz wafer, and be provided with 3 quartz wafer groups and be arranged on from top to bottom in pedestal, the top of the quartz wafer group of the superiors is provided with the upper fixedly diaphragm being placed in pedestal, and the below of undermost quartz wafer group is provided with the lower fixedly diaphragm being placed in pedestal; Described transmission rod is connected with upper fixedly diaphragm.
Upper and lower fixedly diaphragm is set, while avoiding pretension, produces moment of torsion, and can prevent class's slippage, come off; What be connected with upper fixedly diaphragm is transmission rod, guarantees that suffered mechanical compliance profit acts on quartzy brilliant group.
Between described lower fixedly diaphragm bottom and pedestal, be provided with spring leaf.
Each quartz wafer group is composed in parallel by two homopolarity quartz wafers staggered relatively.
Described contact conductor is clipped between two quartz wafers of each quartz wafer group, for exporting x, y, the power of z and moment, make wafer in conjunction with more firmly, prevent charge loss.
Two quartz wafers of described each quartz wafer group are bonded together by adhesive.
Fixed diaphragm and lower fixedly diaphragm are mica sheet.
The thickness of fixed diaphragm and lower fixedly diaphragm is 2mm-3mm.
Described quartz wafer is circular, and the radius of circular quartz wafer is 3mm-5mm, and thickness is 1mm-2mm.
Wherein, the quartz wafer group of described three-dimensional force sensor is directly put into pedestal, by fixing diaphragm, provides preload pressure, then with electron beam soldering and sealing, clamps.For protect quartz wafer when applying pretightning force not by pressure break, at diaphragm of surface cushion of quartz wafer; Not produce moment of torsion in order making to apply pretightning force, to improve the precision of measuring, we are applied to pretightning force on quartz wafer by pretension deck; The effect of pre-load nut is to apply pretightning force, to realize sensor to drawing, press force measurement, improves the linearity of sensor.
Quartz piezoelectric formula six-dimensional force pick-up unit can be fixedly installed on intelligent robot, aircraft, realize power, the moment biparametric of different directions in the course of work, different sizes and measure.
The quartz piezoelectric formula six-dimensional force pick-up unit that the present invention proposes, described quartz wafer group consists of the circular wafer of 6 same sizes, can require design modifying wafer number and size according to actual measurement, to meet different measuring accuracy requirements, in measuring process, by signal pickup assembly, output signal is carried out to Real-time Collection, obtain quartzy brilliant group output signal (electric charge) and the relation between stressed, realize the measurement of multi-dimensional force, moment.Like this, the impacts such as quartz piezoelectric formula six-dimensional force pick-up unit of the present invention had reduced in the past the main complex structure existing, processing and manufacturing difficulty, volume is large, dynamic response characteristic is poor, have realized multi-dimensional force high precision, high sensitivity, reliable and stable real-time measurement.
Described quartz wafer group is fixedly installed on lower fixedly diaphragm, through upper fixedly diaphragm, be connected to transmission rod, when External Force Acting is on transmission rod, the brilliant group of each piezoelectric quartz produce with the proportional electric charge of stressed size, high sensitivity charge amplifier is separately converted to analog voltage signal, charge amplifier is carried out to " normalization " to be processed, make the numeral of output voltage signal identical with applied power size, high-precision data collecting card carries out A/D conversion, software by computing machine is stored the signal gathering, process, mode with numeral or waveform shows original signal in real time, and the final numerical value that shows intuitively the six-dimensional force after decoupling zero.
In the present invention, six-dimensional force pick-up unit consists of 4 three-dimensional force sensors.When having External Force Acting on force cell, according to following principle, analyze:
(l) piezoelectric quartz force checking device is considered as rigid body, and four three-dimensional force measuring units are elastic body, and rigidity is identical, sensitivity is equal, is symmetrical uniform configuration.
(2) when apply power perpendicular to three-dimensional force measuring unit layout plane (
f z) time, this power is distributed by lever balance principle between each unit.
(3) when apply with parallel plane each component of three-dimensional force measuring unit layout (
f y,
f x) time, when two relevant three-dimensional power measuring unit lines are vertical with this power, this power is distributed by lever balance principle; During two relevant three-dimensional power measuring units or coincidence parallel with this line of force, this power mean allocation.
(4) when applying the moment vertical with three-dimensional force measuring unit upper surface
m ztime, this moment is on average transformed on each three-dimensional force measuring unit, and is converted into each to component; And this moment will make y, z direction component change simultaneously.
(5) when applying the moment vertical with three-dimensional force measuring unit upper surface
m x,
m ytime, this moment will make three-dimensional force measuring unit z change to power.
(6) external force
fcan move along line of force, its value is constant, but point of force application can not arbitrarily change,
fwhile doing parallel, meet LJL normal square.External force transforms on each three-dimensional force measuring unit.
Compared with prior art, the beneficial effects of the utility model are:
1) the utility model adopts ripe technology and material, overcome the impact of the factor such as paster technique and elastic body machining precision in the past, had that volume is little, quality is light, simple in structure, reliable operation, natural frequency are high, sensitivity and signal to noise ratio (S/N ratio) is high, stable performance, have advantages such as hysteresis phenomenon hardly;
2) the utility model adopts the mode of multi sensor combination, by data fusion, realizes the high-acruracy survey of multi-dimensional force, moment;
3) the utility model adopts the micromachining technologies such as wafer process, electron beam welding technology, be conducive to improve the consistance of processing technology and the reliability level of working sensor, and can realize the batch production of quartz piezoelectric formula multi-dimension force sensor, effectively reduce manufacturing cost.
Accompanying drawing explanation
Fig. 1 is the external structure schematic diagram of pick-up unit described in the utility model;
Fig. 2 is the structural representation of sensor described in the utility model.
Embodiment
As shown in Figure 1 and Figure 2, a kind of quartz piezoelectric formula six-dimensional force pick-up unit, comprise a plurality of power sensors in rectangular parallelepiped shell 10 and rectangular parallelepiped shell 10, described power sensor comprise pedestal 9, pedestal 9 tops Fixing clamp-seat 1, the upper cover 2 in Fixing clamp-seat 1, pedestal 9 one sides draw plug 5, be arranged on force sensing element in pedestal 9, be connected with force sensing element and for the contact conductor 8 of power output photosensitive elements power and torque signals, be arranged on the transmission rod 7 in Fixing clamp-seat 1; Be provided with altogether 4 three-dimensional force sensor symmetries and be arranged on four base angles in rectangular parallelepiped shell 10; Described force sensing element is quartz wafer 3, and be provided with 3 quartz wafer groups and be arranged on from top to bottom in pedestal, the top of the quartz wafer group of the superiors is provided with the upper fixedly diaphragm 6 being placed in pedestal, and the below of undermost quartz wafer group is provided with the lower fixedly diaphragm 11 being placed in pedestal; Described transmission rod 7 is connected with upper fixedly diaphragm 6; Between lower fixedly diaphragm 11 bottoms and pedestal 9, be provided with spring leaf 4.
Each quartz wafer group is composed in parallel by two homopolarity quartz wafers 3 staggered relatively, and contact conductor 8 is clipped between two quartz wafers 3 of each quartz wafer group, and two quartz wafers 3 of each quartz wafer group are bonded together by adhesive.
Upper fixedly diaphragm 6 and lower fixedly diaphragm 11 are mica sheet, and the thickness of upper fixedly diaphragm 6 and lower fixedly diaphragm 11 is 2mm-3mm.
The material of transmission rod 7 is beryllium-bronze, length 30mm ~ 40mm.
Claims (8)
1. a quartz piezoelectric formula six-dimensional force pick-up unit, comprise a plurality of power sensors in rectangular parallelepiped shell (10) and rectangular parallelepiped shell (10), described power sensor comprise pedestal (9), pedestal 9 tops Fixing clamp-seat (1), be arranged on force sensing element in pedestal (9), be connected with force sensing element and for the contact conductor (8) of power output photosensitive elements power and torque signals, be arranged on the interior transmission rod (7) of Fixing clamp-seat (1); It is characterized in that, be provided with altogether 4 three-dimensional force sensor symmetries and be arranged on four base angles in rectangular parallelepiped shell (10); Described force sensing element is quartz wafer (3), and be provided with 3 quartz wafer groups and be arranged on from top to bottom in pedestal, the top of the quartz wafer group of the superiors is provided with the upper fixedly diaphragm (6) being placed in pedestal, and the below of undermost quartz wafer group is provided with the lower fixedly diaphragm (11) being placed in pedestal; Described transmission rod (7) is connected with upper fixedly diaphragm (6).
2. quartz piezoelectric formula six-dimensional force pick-up unit according to claim 1, is characterized in that, between described lower fixedly diaphragm (11) bottom and pedestal (9), is provided with spring leaf (4).
3. according to quartz piezoelectric formula six-dimensional force pick-up unit described in claim 1 or 2, it is characterized in that, each quartz wafer group is composed in parallel by two homopolarity quartz wafers (3) staggered relatively.
4. quartz piezoelectric formula six-dimensional force pick-up unit according to claim 3, is characterized in that, described contact conductor (8) is clipped between two quartz wafers (3) of each quartz wafer group.
5. quartz piezoelectric formula six-dimensional force pick-up unit according to claim 3, is characterized in that, two quartz wafers (3) of described each quartz wafer group are bonded together by adhesive.
6. according to quartz piezoelectric formula six-dimensional force pick-up unit described in claim 1 or 2, it is characterized in that, fixed diaphragm (6) and lower fixedly diaphragm (11) are mica sheet.
7. according to quartz piezoelectric formula six-dimensional force pick-up unit described in claim 1 or 2, it is characterized in that, the thickness of fixed diaphragm (6) and lower fixedly diaphragm (11) is 2mm-3mm.
8. quartz piezoelectric formula six-dimensional force pick-up unit according to claim 3, is characterized in that, described quartz wafer (3) is circular, and the radius of circular quartz wafer (3) is 3mm-5mm, and thickness is 1mm-2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320562893.XU CN203519229U (en) | 2013-09-11 | 2013-09-11 | Quartz piezoelectric six-dimensional force detecting device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320562893.XU CN203519229U (en) | 2013-09-11 | 2013-09-11 | Quartz piezoelectric six-dimensional force detecting device |
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| CN203519229U true CN203519229U (en) | 2014-04-02 |
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| CN201320562893.XU Expired - Lifetime CN203519229U (en) | 2013-09-11 | 2013-09-11 | Quartz piezoelectric six-dimensional force detecting device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105571766A (en) * | 2014-10-11 | 2016-05-11 | 中国航空工业集团公司西安飞机设计研究所 | Surface pressure testing device for wind tunnel model |
| CN106441665A (en) * | 2016-09-26 | 2017-02-22 | 郑州航空工业管理学院 | Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor |
| CN114199444A (en) * | 2021-11-23 | 2022-03-18 | 内蒙航天动力机械测试所 | Six-component force sensor of solid attitude and orbit control engine |
-
2013
- 2013-09-11 CN CN201320562893.XU patent/CN203519229U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105571766A (en) * | 2014-10-11 | 2016-05-11 | 中国航空工业集团公司西安飞机设计研究所 | Surface pressure testing device for wind tunnel model |
| CN106441665A (en) * | 2016-09-26 | 2017-02-22 | 郑州航空工业管理学院 | Piezoelectric-quartz-wafer's-bending-effect-based bending moment measurement method and sensor |
| CN114199444A (en) * | 2021-11-23 | 2022-03-18 | 内蒙航天动力机械测试所 | Six-component force sensor of solid attitude and orbit control engine |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140402 |