CN107884100B - Integrated miniature six-dimensional force sensor based on capacitance sensing - Google Patents
Integrated miniature six-dimensional force sensor based on capacitance sensing Download PDFInfo
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- CN107884100B CN107884100B CN201711178735.3A CN201711178735A CN107884100B CN 107884100 B CN107884100 B CN 107884100B CN 201711178735 A CN201711178735 A CN 201711178735A CN 107884100 B CN107884100 B CN 107884100B
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- parallel plate
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- elastic body
- capacitor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The integrated capacitance micro six-dimensional force sensor comprises a force loading platform, an elastic body, a base, a protective cover, parallel plate capacitance PCBs and a corresponding capacitance value data acquisition circuit, wherein the force loading platform is fixedly connected with the elastic body, the two parallel plate capacitance PCBs are respectively fixed on the elastic body and the base, the elastic body and the base are positioned through a positioning groove, an adjusting gasket is arranged between the elastic body and the base, the protective cover is fixedly connected with the base, and the capacitance value data acquisition circuit board is fixed at the bottom of the protective cover and is connected with a capacitance polar plate corresponding to the parallel plate capacitance PCB through a data acquisition lead; the loading force acts on the elastic body through the force loading platform, the elastic body is deformed under the force to enable the two parallel plate capacitors PCB to relatively displace, the corresponding capacitance value changes, and the capacitance value data acquisition circuit acquires the capacitance value of each channel and performs decoupling to obtain the loading six-dimensional force. The invention has high sensitivity and low cost, and can realize low-power consumption measurement.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a six-dimensional force sensor.
Background
Multidimensional force and moment sensors play a very important role in the field of robots. Compared with a large-range heavy-load multidimensional force sensor, the miniature multidimensional force sensor is more widely applied to the perception aspect of a robot.
Current research on miniature multidimensional force/moment sensors is mainly focused on the aspects of design and optimization of sensitive elements (elastomers), design of strain detection circuits, calibration of the sensors and the like. Many multidimensional force and moment sensor elastomers are complex, such as a Stewart platform mechanism, have complex structures, are difficult to process and cannot be easily ensured in processing precision, so that the MEMS process is a common processing method. However, MEMS technology is expensive, greatly increasing the manufacturing cost of the sensor. The most widely used conversion element is a strain gauge, however, the miniature multidimensional force and moment sensor has small size and difficult strain gauge adhesion. The strain gage has low sensitivity, resulting in low sensitivity of the sensor. The traditional strain gauge type multidimensional force/moment sensor adopts a Huygens bridge to carry out strain measurement, the method has high power consumption, the measurement accuracy is easy to be interfered by noise, and the method is not suitable for measuring the low-power consumption miniature multidimensional force and moment sensor.
Disclosure of Invention
The invention aims to provide the integrated micro six-dimensional force sensor based on capacitive sensing, which has the advantages of simple structure, easiness in processing and high sensitivity and measurement precision. The invention mainly applies the principle of parallel plate capacitance sensing displacement to the field of miniature six-dimensional force sensors, so as to fully utilize the advantages of high resolution of capacitance sensing, strong anti-interference capability, small power consumption and the like and realize the measurement of space six-dimensional micro force.
The invention comprises a force loading platform, an elastic body, a base, a protective cover, parallel plate capacitor PCBs and a corresponding capacitance value data acquisition circuit, wherein the force loading platform is fixedly connected with the elastic body through metal glue, the two parallel plate capacitor PCBs are respectively fixed on the elastic body and the base, the elastic body and the base are positioned through a positioning groove between the elastic body and the base, the distance between the elastic body and the base is adjusted through an adjusting gasket of 0.05mm, the distance between the two parallel plate capacitor PCBs is changed, and the resolution of the sensor is adjusted; the protective cover is fixedly connected with the base, and the capacitance value data acquisition circuit board is fixed at the bottom of the protective cover and is connected with a capacitance polar plate corresponding to the parallel plate capacitance PCB through a data acquisition lead; the loading force acts on the elastic body through the force loading platform, the elastic body is deformed under the force to enable the two parallel plate capacitors PCB to relatively displace, the corresponding capacitance value changes, and the capacitance value data acquisition circuit acquires the capacitance value of each channel and performs decoupling to obtain the loading six-dimensional force.
The parallel plate capacitor PCB is distributed with 8 parallel plate capacitors, and each two parallel plate capacitors are a group of circlesUniformly distributed to form an 8-channel capacitance detection device for detecting F X 、F Y 、F Z 、M X 、M Y 、M Z The space forces in six directions are used for ensuring the relative distribution and system integration among parallel plate capacitors, and the capacitor plates are manufactured by adopting a PCB printing mode, namely copper sheets are printed and windowed on the PCB corresponding to the capacitor plates to expose the copper sheets; the parallel plate capacitor PCB is divided into an upper part and a lower part: an upper parallel plate capacitor PCB and a lower parallel plate capacitor PCB corresponding to the upper and lower electrodes of the parallel plate capacitor;
an AD7746 data acquisition chip is designed and installed on the back of the lower parallel plate capacitor PCB to reduce the influence of parasitic capacitance of an analog circuit, and the acquisition chip is a high-precision 24-bit resolution capacitor detection chip and directly outputs in digital quantity, so that the anti-interference capability is high; the capacitor electrode plate on the upper parallel capacitor PCB is connected with the AD7746 data acquisition chip through the electrode plate lead wire to form double-electrode detection, the capacitance change sensitivity is high, and the capacitance value acquisition function and the AD conversion function are realized.
Compared with the prior art, the invention has the following advantages:
the sensor has the advantages of simple structure, high sensitivity and measurement accuracy of sensing multidimensional force, low requirements on design and manufacture of the sensor elastomer, integration of the sensor body and a data acquisition system, direct digital output, high integration level and convenient use.
Drawings
FIG. 1 is a schematic diagram of the front view of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention;
FIG. 3 is a schematic diagram of the distribution of electrodes of a cross upper parallel plate capacitor PCB according to the present invention;
FIG. 4 is a schematic diagram of the distribution of electrodes of a cross lower parallel plate capacitor PCB according to the present invention;
FIG. 5 is a schematic diagram of the back of a cross lower parallel plate capacitor PCB of the present invention;
fig. 6 is a circuit configuration diagram of a multi-path capacitor acquisition system according to the present invention.
In the figure: 1: protective cover, 2: base, 3: adjusting the gasket, 4: elastomer, 5: force loading platform, 6: set screw, 7: upper parallel plate capacitance PCB, 8: electrode lead, 9: lower parallel plate capacitance PCB, 10: data acquisition line, 11: capacitance value data acquisition circuit board, 12: data acquisition lead wire, 13: upper electrode of plate capacitor, 14: plate capacitor bottom electrode, 15: AD7746 data acquisition chip.
Detailed Description
In the integrated micro six-dimensional force sensor schematic diagrams based on capacitance sensing shown in fig. 1 and 2, a force loading platform 5 and an elastic body 4 are fixedly connected through metal glue, an upper parallel plate capacitor PCB7 is fixed on the elastic body, a lower parallel plate capacitor PCB9 is fixed on a base, the elastic body and the base are positioned through a positioning groove between the elastic body and the base, the distance between the elastic body and the base is adjusted through an adjusting gasket of 0.05mm, the distance between the two parallel plate capacitor PCBs is changed, and the resolution of the sensor is adjusted; the protective cover 1 is fixedly connected with the base, the capacitance value data acquisition circuit board 11 is fixed at the bottom of the protective cover and is connected with a capacitance polar plate corresponding to the parallel plate capacitance PCB through the data acquisition lead 12, and the capacitance value data acquisition circuit board is connected with the data acquisition line 10; the loading force acts on the elastic body through the force loading platform, the elastic body is deformed under the force to enable the two parallel plate capacitors PCB to relatively displace, the corresponding capacitance value changes, and the capacitance value data acquisition circuit acquires the capacitance value of each channel and performs decoupling to obtain the loading six-dimensional force.
As shown in fig. 3, 4 and 5, the parallel plate capacitors PCB are distributed with 8 parallel plate capacitors, each two parallel plate capacitors are uniformly distributed in a group of circumferences to form an 8-channel capacitor detection device for detecting F X 、F Y 、F Z 、M X 、M Y 、M Z The space forces in six directions are used for ensuring the relative distribution and system integration among parallel plate capacitors, and the capacitor plates are manufactured by adopting a PCB printing mode, namely copper sheets are printed and windowed on the PCB corresponding to the capacitor plates to expose the copper sheets; the parallel plate capacitor PCB is divided into an upper part and a lower part: the upper parallel plate capacitor PCB corresponds to the parallel plate capacitor upper electrode 13 and the lower parallel plate capacitor PCB corresponds to the parallel plate capacitor lower electrode 14; an AD7746 data acquisition chip 15 is arranged on the back surface of the lower parallel plate capacitor PCB to reduce the influence of parasitic capacitance of an analog circuit, and the acquisition chip has high-precision 24-bit resolutionThe capacitance detection chip directly outputs the digital quantity and has strong anti-interference capability; the capacitor electrode plate on the upper parallel capacitor PCB is connected with the AD7746 data acquisition chip through the electrode plate lead 8 to form double-electrode detection, the capacitance change sensitivity is high, and the capacitance value acquisition function and the AD conversion function are realized.
The multiple capacitance acquisition units are connected with the MCU (main control unit) through the multiple switches, so that time-sharing acquisition of multiple capacitance values by a single MCU is realized, as shown in fig. 6.
Claims (2)
1. The utility model provides an integrated miniature six-dimensional force transducer based on electric capacity perception, it includes force loading platform, elastomer, base, safety cover, parallel plate electric capacity PCB and corresponding electric capacity value data acquisition circuit, wherein force loading platform and elastomer pass through the metal colloid and concretion, and two parallel plate electric capacity PCBs are fixed respectively on elastomer and base, and the safety cover links firmly with the base, and electric capacity value data acquisition circuit board is fixed in the safety cover bottom to through the electric capacity polar plate that data acquisition lead wire corresponds with parallel plate electric capacity PCB, its characterized in that: the elastic body and the base are positioned through a positioning groove between the elastic body and the base, loading force is applied to the elastic body through a force loading platform, the elastic body is stressed to deform so that the two parallel plate capacitors PCB are relatively displaced, corresponding capacitance values are changed, and a capacitance value data acquisition circuit acquires the capacitance values of all channels and decouples the capacitance values to obtain loading six-dimensional force;
the parallel plate capacitors are distributed with 8 parallel plate capacitors, every two parallel plate capacitors are uniformly distributed on a group of circumferences to form an 8-channel capacitor plate, and the capacitor plate is manufactured in a PCB printing mode, namely copper sheets are printed and windowed on the PCB corresponding to the capacitor plate positions to expose the copper sheets; the parallel plate capacitor PCB is divided into an upper part and a lower part: an upper parallel plate capacitor PCB and a lower parallel plate capacitor PCB corresponding to the upper and lower electrodes of the parallel plate capacitor;
an AD7746 data acquisition chip is designed and installed on the back of the lower parallel plate capacitor PCB, and the acquisition chip is a high-precision 24-bit resolution capacitor detection chip and directly outputs the data in digital quantity; the capacitor electrode plate on the upper parallel capacitor PCB is connected with the AD7746 data acquisition chip through the electrode plate lead wire to form double-electrode detection, so that the capacitance value acquisition function and the AD conversion function are realized.
2. The integrated capacitive sensing-based miniature six-dimensional force sensor of claim 1, wherein: the distance between the elastic body and the base is adjusted through an adjusting gasket of 0.05mm, the distance between the two parallel plate capacitors PCB is changed, and the resolution of the sensor is adjusted.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711178735.3A CN107884100B (en) | 2017-11-23 | 2017-11-23 | Integrated miniature six-dimensional force sensor based on capacitance sensing |
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| CN201711178735.3A CN107884100B (en) | 2017-11-23 | 2017-11-23 | Integrated miniature six-dimensional force sensor based on capacitance sensing |
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| CN107884100A CN107884100A (en) | 2018-04-06 |
| CN107884100B true CN107884100B (en) | 2023-09-22 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109781330B (en) * | 2019-02-25 | 2020-08-04 | 重庆大学 | Nested beam pressure-volume sensing six-dimensional force sensor based on circumferential array |
| CN110686807B (en) * | 2019-09-27 | 2021-07-06 | 天津大学 | Measuring range adjustable capacitance type micro-force measuring sensor based on micro-electronic mechanical system |
| WO2021179195A1 (en) * | 2020-03-11 | 2021-09-16 | 深圳市驰泰电子科技有限公司 | Electronic cigarette chip based on chip capacitor and electronic cigarette |
| CN113237595B (en) * | 2021-05-08 | 2022-04-08 | 杭州电子科技大学 | Two-dimensional decoupling force touch sensor and MEMS (micro-electromechanical systems) preparation method |
| CN113280967B (en) * | 2021-05-08 | 2022-04-08 | 杭州电子科技大学 | Three-dimensional decoupling force touch sensor and MEMS (micro-electromechanical systems) preparation method |
| CN113340476B (en) * | 2021-05-08 | 2023-10-27 | 昆山朗德森机电科技有限公司 | Two-dimensional decoupling moment touch sensor and MEMS preparation method |
| CN114323397A (en) * | 2021-12-30 | 2022-04-12 | 航天南洋（浙江）科技有限公司 | Capacitive two-dimensional force sensor |
| CN114659697B (en) * | 2022-03-28 | 2023-06-23 | 浙江机电职业技术学院 | Flexible six-dimensional force sensor based on capacitive sensor |
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| JP4295883B2 (en) * | 1999-12-13 | 2009-07-15 | 株式会社ワコー | Force detection device |
| JP2012145497A (en) * | 2011-01-13 | 2012-08-02 | Fanuc Ltd | Capacitance force sensor |
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| CN2383055Y (en) * | 1999-08-19 | 2000-06-14 | 陈玉鹏 | Polar distance changing differential capacitive force sensor |
| CN107063517A (en) * | 2017-03-29 | 2017-08-18 | 广西安博特智能科技有限公司 | A kind of torque sensor based on electric capacity edge effect |
| CN106918418A (en) * | 2017-04-07 | 2017-07-04 | 东南大学 | A kind of six-dimension force sensor |
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